JP2002230703A - Device for evaluating disk characteristic - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the adverse effect of vibration on a magnetic head by eliminating the backlash of a skew stage so as to improve rotational center accuracy or rigidity. SOLUTION: The disk characteristic evaluating device 1 includes a head clamp 29 freely attachably and detachably provided on a head loader 31 to position a magnetic head 27 on a magnetic disk 17. A skew shaft 57 is supported on the head loader 31 in the state of being extended up and down, and a fan- shaped skew angle swing member 63 is provided on the skew shaft 57. A skew angle driving rotor 65 is provided in a position near the fan-shaped outer peripheral surface of the skew angle driving rotor 65 so as to be rotary-driven. Ends of two tension belts are fixed to the outer peripheral surface of the skew angle driving rotor 65, the two tension belts are wound on the outer peripheral surface of the skew angle driving rotor 65 in opposing directions, passed through fan- shaped outer peripheral surface of the skew angle swing member 63, and then tensed and fixed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk, which is a key component of a hard disk drive, and a disk characteristics evaluation device for measuring electromagnetic conversion characteristics of a magnetic head, and more particularly, to a magnetic disk at a predetermined track position on a magnetic disk. The present invention relates to a disk characteristic evaluation device as a test device for positioning a head and measuring recording and reproduction characteristics.

[0002]

2. Description of the Related Art As the characteristics of hard disk drives have been improved in recent years, it is necessary to improve the performance of evaluation devices for measuring electromagnetic conversion characteristics of magnetic disks and magnetic heads, which are basic components.

In particular, as the track density increases, the core width of the magnetic head tends to become narrower. For accurate measurement, it is essential to improve the track positioning accuracy of the evaluation device itself. By combining a fine movement stage with a piezo element on a coarse movement stage driven by a pulse motor drive or ultrasonic motor, etc.
The positioning accuracy of the magnetic head is improved.

[0004] For example, as a conventional example of this type of disk characteristic evaluation apparatus, there is a conventional disk characteristic evaluation apparatus 201 as shown in FIGS. 8, 9 and 10.

In a conventional disk characteristic evaluation apparatus 201, a base 205 having a plate shape is mounted on an upper surface of a control unit 203 for controlling a drive system of the apparatus in FIGS. 8, 9 and 10. A spindle motor housing 209 having a spindle motor 207 (air spindle) therein is provided on a mounting surface on the upper surface of the base 205 as shown in FIG. Spindle motor housing 20
9 is provided with a disk clamp 211 that is driven to rotate by a spindle motor 207, and the magnetic disk 213 is clamped and unclamped on the upper end of the disk clamp 211.

On the upper surface of the base 205, the magnetic heads 215 and 217 are positioned in the X-axis direction (the horizontal direction in FIG. 8) at positions adjacent to the disk clamp 211 in FIG. Coarse movement stage 219 (X stage) is provided. This coarse movement stage 219 is an ultrasonic motor 221 for driving the X stage.
Is driven in the X-axis direction via the X-axis ball screw 223.

Further, on the upper surface of the coarse movement stage 219, there is provided a segment gear 225 which is fixed in parallel with the magnetic disk 213 and is smooth.
Numeral 25 is formed in a semicircular arc shape, and a rack 227 is provided on the outer peripheral edge.

A head loader 231 provided with a head clamp 229 provided with a pair of magnetic heads 215 and 217 composed of a down face and an up face is movably provided on the segment gear 225 in a semicircular shape. The head loader 231 is provided with a pinion 233 that meshes with the rack 227 of the segment gear 225. This pinion 233 is a head loader 231.
Is rotated and transmitted by a skew angle motor 235 provided through a speed reducer (not shown), meshes with the rack 227 of the segment gear 225, and rotates along the outer peripheral surface thereof at a rotation angle of 90 °. As a result, the head loader 231 rotates and the magnetic head 21
The positioning of 5,217 is performed. In FIG. 8, the positions of the magnetic heads 215 and 217 and the magnetic disk 213 are shown.
Are located on the same line in the X-axis direction.

As shown in FIGS. 8 and 9, a piezo actuator 237 for slightly moving the upper portion of the head loader 231 in the X-axis direction is provided on the base side of the head loader 231.

The head clamp 229 includes an upper head clamp 239 and a lower head clamp 241. The upper head clamp 239 is provided so as to be vertically movable via an upper mounting base 243.
Is vertically movable via a lower mounting base 245. Moreover, the upper head clamp 239 and the lower head clamp 241 are detachably provided to the upper mounting base 243 and the lower mounting base 245. A suspension 249 having a magnetic head 215 (down face) at the front end is clamped to a front end of the upper head clamp 239 via a clamp portion 247, and a suspension portion 249 is provided to a front end of the lower head clamp 241 via a clamp portion 251. A suspension 253 having a magnetic head 217 (up face) at the tip is clamped.

The vertical movement device of the head clamp 229 is incorporated in the head loader 231. The upper and lower head clamps 239 and 241 are vertically controlled independently, and the magnetic heads 215 and 217 are moved to the magnetic disk 21.
3 can be moved forward and backward so as to sandwich it from above and below.

In the above-described conventional disk characteristic evaluation apparatus 201, when evaluating the characteristics of the magnetic heads 215 and 217, after the magnetic disk 213 is set to a predetermined rotation speed by the spindle motor 207, the coarse movement stage 219 is sent, for example, in the X-axis direction in the track width direction, and the magnetic heads 215 and 217 are positioned at predetermined positions.

Further, as shown in FIG. 15, after the skew angle α, which is an offset angle with respect to the tangent in the track direction, is set, the magnetic head 215 at the tip of the HGA is set.
217 is adjusted so that the head loader 23
Loaded by 1. That is, the upper head clamp 23
9 and the lower head clamp 241 are adjusted vertically.

Next, in the track profile characteristic evaluation in which the characteristic evaluation is performed while finely moving the track position of the magnetic heads 215 and 217 in the track width direction and the error rate characteristic evaluation (bathtub characteristic), the magnetic head is operated by the piezoelectric actuator 237. By performing measurement while offsetting the magnetic heads 215 and 217 by a very small amount, the positioning resolution of the magnetic heads 215 and 217 is improved.

Referring to FIG. 11, an arrow X in FIG.
FIG. 1 is a rear view of a coarse movement stage 219 viewed from I, and FIG.
2 is a right side view of FIG.

The coarse movement stage 219 is a stage base 2
55 is fixed on the base 205, and a downward U-shaped stage table 257 for mounting the head loader 231 is provided on the upper surface of the stage base 255 by a cross roller 259 so as to be freely movable in the X-axis direction. ing. On the upper surface of the stage base 255, the above-described X-axis ball screw 223 is located at the center of the downward U-shape of the stage table 257 and is supported by bearings 261 provided on the left and right ends in FIG. A nut member 263 screwed into the stage table 257 is provided substantially at the center in the left-right direction in FIG. The X-axis ball screw 223 is connected to the ultrasonic motor 221 via a flexible coupling 265.

A scale 267 is attached to a side surface of the stage table 257.
A detection head 269 for detecting the scale of 67 is fixed to the side surface of the stage base 255 in a state of being extended upward.

Further, the stage table 257 shown in FIG.
, A sensor dog 271A on the lower side of the left and right ends,
271B, and the sensor dog 271A,
Limit sensors 273A and 273B for detecting 271B
Are fixed to the side surface of the stage base 255. Figure 1
In FIG. 1, the left limit sensor 273A is a sensor for the origin, and the right limit sensor 273B is a magnetic disk 2 of various devices attached to the head loader 231.
13 is a safety sensor for preventing collision with the sensor 13.

Referring to FIG. 13, as another conventional disk characteristic evaluation device 275, a disk clamp 211 on which a magnetic disk 213 can be attached and detached is mounted on a base 205 similarly to the disk characteristic evaluation device 201 described above. 207 is provided so as to be rotationally driven.

A coarse movement stage 219 is mounted on the base 205 in the same manner as the disk characteristic evaluation device 201, and a head loader 231 is provided on a stage table 257 of the coarse movement stage 219. A Z-axis stage 277 is provided on a side surface of the loader 231 so as to be vertically movable along a guide rail 281 driven by a Z-axis motor 279. Z axis stage 277
The positioner 283 has a built-in rotation actuator for rotating the head clamp 229 in a substantially horizontal direction.
Are provided in a cantilever shape. The rotational position of the rotary actuator is detected by a rotary encoder (not shown).

At the lower end of the positioner 283, a head clamp 229 which clamps a suspension 249 having a magnetic head 215 at the tip is detachably attached. Note that the head clamp 229 can be replaced vertically with a head clamp 229 having a down-face magnetic head 215 and a head clamp 229 having an up-face magnetic head 217.

[0022]

In the conventional disk characteristic evaluation apparatus 201, the head loader 23
1 is placed on a segment gear 225 formed in a semicircular arc shape, and a rack 227 on the outer peripheral edge of the segment gear 225 is placed.
And the rack 227 is moved by the pinion 233 meshing with the rack 227. Therefore, when this movement is stopped, backlash occurs, and the variation in the rotational center accuracy of the turning movement with respect to the center position of the semicircular arc of the segment gear 225 increases. There was a point. The variation in the accuracy of the rotation center affects the positioning of the magnetic heads 215 and 217, and appears as a change in the skew angle.

Further, since the head clamp 229 is attached to the head loader 231 in a cantilever shape, since the head clamp 229 is overhanged from the coarse movement stage 219, there is a problem that the center of gravity is high and the influence of vibration is large. . When the influence of the vibration on the head clamp 229 becomes large, the evaluation of the disk characteristics is inevitably adversely affected.

Also, even if the head clamp 229 comes into contact with anything while the stage table 257 of the coarse movement stage 219 is moving in the X-axis direction, the limit sensor 273 can be used.
A, 273B continues to move unless the sensor dogs 271A, 271B are detected, so that there is a problem that reliable collision detection is not achieved.

Also, the spindle motor housing 209
Is provided on the upper surface of the base 205, so that the magnetic disk 213 attached to the disk clamp 211 at the upper end of the spindle motor housing 209 is
There is a problem that the vibration is easily transmitted because the position is higher than the upper surface of the substrate 05.

A conventional disk characteristic evaluation device 275
In order to facilitate replacement of the head clamp 229 when the magnetic head 215 is replaced,
After moving the head clamp 229 up, the coarse movement stage 219 is moved to the right in FIG. 13 so that the head clamp 22 does not interfere with the magnetic disk 213.
9 had been replaced. Therefore, the movement of the Z-axis stage 277 and the movement of the coarse movement stage 219 (X stage) take time, and the stroke of the Z-axis stage 277 increases to make space between the head clamp 229 and the magnetic disk. Z-axis stage 2
There is a problem that 77 becomes large.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to eliminate the backlash of a skew stage, improve the accuracy of rotation center and rigidity, and reduce the adverse effect of vibration on a magnetic head. It is an object of the present invention to provide a disk characteristic evaluation apparatus capable of improving the performance of disk characteristic evaluation, efficiently exchanging head clamps, minimizing collision of head clamps and preventing breakage of various devices.

[0028]

According to a first aspect of the present invention, there is provided a disk characteristic evaluation apparatus according to the present invention.
While rotating a magnetic disk having a plurality of concentric tracks, a head clamp that positions the magnetic head at a predetermined track position to evaluate the electromagnetic conversion characteristics of at least one of the magnetic disk and the magnetic head is detachably attached to the head loader. In the disk characteristics evaluation device provided with the head loader as a base provided in the head loader, a skew axis is vertically extended and supported on the head loader,
A skew angle swinging member having a fan shape is provided on the skew shaft, and a skew angle driving rotating body is rotatably provided at a position close to the fan-shaped outer peripheral surface of the skew angle swinging member. One end of each of the two tension bands is fixed to the outer peripheral surface of the rotating body, and the two tension bands are wound around the outer peripheral surface of the skew angle driving rotary member in opposite directions. The other ends of the two tension bands are fixedly provided at both ends of the outer peripheral surface of the skew angle swinging member in a state where the outer peripheral surfaces of the fan-shaped members are tensioned so as to extend in mutually opposite directions, and the skew shaft is provided. And a head clamp mounting member for mounting the head clamp on a tip portion.

Accordingly, when the skew angle driving rotating body is rotated in one direction, the skew angle swinging member is swung in a direction pulled by one tension band-shaped body, so that the skew shaft is rotated and the head is rotated. The clamp mounting member is also swung in the same direction as the skew angle swinging member, and the skew angle of the magnetic head of the head clamp is changed. On the other hand, when the skew angle driving rotating body is rotated in the other direction, the skew angle swinging member swings in the direction pulled by the other tension band, so that the skew shaft is rotated and the head clamp mounting member is rotated. Is also swung in the same direction as the skew angle swinging member, and the skew angle of the magnetic head of the head clamp is changed. At this time, there is no backlash when the rotation of the skew angle driving rotator stops. Further, since the skew shaft is supported by the head loader, the overall rigidity is improved, and the accuracy of the rotation center of the magnetic head is improved.

According to a second aspect of the present invention, there is provided a disk characteristic evaluation apparatus for evaluating a magnetic conversion characteristic of at least one of a magnetic disk and a magnetic head while rotating a magnetic disk having a plurality of concentric tracks. A head clamp for positioning a magnetic head at a track position is detachably provided on a head loader and a disk characteristic evaluation apparatus provided with the head loader as a base, wherein a guide member extending substantially parallel to both sides with respect to the magnetic disk is provided. The head loader is provided on a base, and the head loader is formed in a portal shape including a support frame and an upper frame straddling the guide members on both sides, and is provided so as to reciprocate along the guide member. It is characterized by providing a clamp.

Accordingly, since the head clamp is mounted on the upper frame of the head loader having a gate shape, the center of gravity of the upper frame is set low overall and is stable. As a result, the influence of the vibration due to the drive system is reduced, and the performance of evaluating the disk characteristics of the magnetic head and the magnetic disk is improved.

According to a third aspect of the present invention, in the disk characteristics evaluation apparatus according to the first or second aspect, the disk characteristics evaluation apparatus is located at an edge of the base below a head clamp provided on the head loader. The head clamp is provided with a notch portion which can be replaced.

Therefore, since the notch is located at a position slightly deviated from the rotational position of the magnetic disk, the head loader need only be moved slightly when replacing the head clamp, which is efficient. Since it is provided, the vertical stroke of the head clamp may be small, and since the notch is provided at the edge of the base, the head clamp can be easily replaced at the notch.

According to a fourth aspect of the present invention, there is provided the disk characteristics evaluation apparatus according to any one of the first to third aspects, wherein the head clamp is movable in the left-right direction by a microactuator. A micro-actuator stage, a magnetic head is provided on the micro-actuator stage, and a displacement detector for detecting an abnormal displacement of the micro-actuator stage is provided on the head clamp.

Therefore, an abnormal displacement when the head clamp comes into contact with any obstacle such as a spindle is detected by the displacement amount detecting device, so that the collision of the head clamp is minimized to prevent various devices from being damaged. Become.

According to a fifth aspect of the present invention, there is provided the disk characteristics evaluation apparatus according to any one of the first to fourth aspects, wherein the base is provided with a vertically penetrating hole. A lower portion of the spindle is attached to a lower portion of the hole portion via a spindle housing so that a spindle provided with a disk clamp capable of detaching the magnetic disk is inserted into the hole portion and protrudes above the base. It is assumed that.

Therefore, since the spindle is mounted on the back surface of the base via the spindle housing, the overall center of gravity of the disk clamp and the spindle is lowered, and the magnetic disk mounted on the disk clamp is positioned lower than the upper surface of the base. become. as a result,
Since the influence of the vibration on the disk clamp and the spindle is reduced, the performance of the disk characteristic evaluation for the magnetic head and the magnetic disk is improved.

[0038]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of a disk characteristic evaluation apparatus according to the present invention;

Referring to FIGS. 1 and 2, the disk characteristic evaluation apparatus 1 according to the present embodiment is provided with a box-shaped electrical component case 3 having a built-in control device for controlling a drive system of the device. A base 5 in the form of a platen is placed on the upper surface of the electrical component case 3. As shown in FIG. 5, a hole 11 for mounting a spindle motor housing 9 having a spindle motor 7 (air spindle) is provided on the lower surface of the base 5.

The spindle motor 7 is inserted through the hole 11, and a disk clamp 13 rotationally driven by the spindle motor 7 is provided at the upper end of the spindle motor 7. The upper end of the disk clamp 13 is 5 protrudes upward from the upper surface. The upper end of the spindle motor 7 is supported by the base 5 via a bracket 15 near the upper surface of the base 5. The magnetic disk 17 is configured to be clamped and unclamped at the upper end of the disk clamp 13.

With the above configuration, the overall center of gravity of the spindle motor housing 9 and the spindle motor 7 is lowered, and the magnetic disk 17 mounted on the disk clamp 13 is at a lower position from the upper surface of the base 5.
The effect of vibration can be reduced.

Referring again to FIGS. 1 and 2, on the upper surface of the base 5, a left stage base 19 is fixed to the disk clamp 13 on the left side in FIGS. For example, two left slide rails 21 as guide members are provided on the left stage base 19 in a state of being extended in the X-axis direction, and the right stage base 23 is fixed to the right side with respect to the disc clamp 13, On this right stage base 23, for example, one right slide rail 25 as a guide member is provided in a state extended in the X-axis direction.

For example, a portal stage 31 as a head loader provided with a head clamp 29 for positioning the magnetic head 27 so as to be attachable and detachable includes a left stage table 33 and a right stage table 35 as support frames, and an upper frame 37. It has a gate-shaped configuration,
The portal stage 31 is provided on the three left and right slide rails 21 and 25 via a linear guide 39 so as to be able to reciprocate in the X-axis direction. That is, the portal stage 31 is provided so as to pass and run while straddling above the disk clamp 13.

An X-stage driving ultrasonic motor 41 is provided on the upper side of the left stage base 19 in FIG. 1, and an X-axis ball screw 43 is provided between the two left slide rails 21 in the vertical direction in FIG. The nut member 47 is provided in the lower part of the left stage table 33 in the vertical direction in FIG. It is provided almost in the center. X axis ball screw 4
3 is connected to the ultrasonic motor 41 via a flexible coupling 49.

With the above arrangement, the portal stage 31 is driven by the ultrasonic motor 41 for driving the X stage in the X-axis direction via the X-axis ball screw 43, and the magnetic head 27 is driven in the X-direction.
Positioned in the axial direction.

Further, sensor dogs 51A and 51B are provided at the upper and lower ends of the left side table 33 of the left stage table 33 of the portal stage 31 in FIG.
Limit sensors 53A and 53B for detecting 1A and 51B
Are fixed to the side surface of the left stage base 19. Figure 1
, The upper limit sensor 53A is the origin sensor, and the lower limit sensor 53B is the portal stage 31.
This is a collision prevention sensor for preventing various devices such as a head clamp 29 attached to the magnetic disk 17 and the disk clamp 13 from colliding.

Referring to FIGS. 3A, 3B and 4 together, a skew stage 55 is provided on the upper frame 37 of the portal stage 31. The skew stage 55 is rotatably provided via a bearing 61 on a head base 59 provided on the upper frame 37 in a state where the skew shaft 57 extends in the vertical direction.
A skew angle swinging member 63 having a fan shape is integrally provided at the upper end of 7. For example, a drive roller 65 as a skew angle driving rotating body for rotating the skew angle swing member 63 is driven by a skew angle motor 67 provided on the head base 59 via a speed reducer (not shown). It is attached to a drive shaft 69 that is driven to rotate in the forward and reverse directions. The drive roller 65 is provided at a position close to the fan-shaped outer peripheral surface 71 of the skew angle swinging member 63 via a small gap.

Further, for example, a steel belt 73 as a tension band-shaped member fixed to one end of the fan-shaped outer peripheral surface 71 of the skew angle oscillating member 63 is used to cover the fan-shaped outer peripheral surface 71 of the skew angle oscillating member 63. The skew angle swing member 63 is fixed to the other end of the fan shape of the skew angle swinging member 63 by applying a tension after being wound around the drive roller 65 one round. In addition, steel belt 7
A substantially central point in the length direction 3 is fixed to the drive roller 65 by, for example, a stopper plate 75 as a stopper member.

More specifically, the steel belt 73 is fixed to a lower end of the fan-shaped outer peripheral surface 71 of the skew angle swinging member 63 in FIG. 4 with a bolt 77, and is tensioned from this position under tension. The upper half of FIG. 4 is wound around the upper surface of the drive roller 65 only along the upper surface of the fan-shaped outer surface 71 of the skew angle rocking member 63. (For explanation, this one end is referred to as a “steel belt 73A”).

The steel belt 73 is also fixed to the lower portion of the outer peripheral surface of the drive roller 65 by the stop plate 75 and the bolt 79. The other end side of the fixed steel belt 73 is wound around the lower half of the outer peripheral surface of the drive roller 65 by a half of the lower side in FIG. Along the lower part of the outer peripheral surface 71 of the shape, it is fixed to the other upper end in FIG. 4 by a bolt 83 via a stopper member 81 (this other end is referred to as a “steel belt 73B”).

Therefore, the overall length of the steel belt 73 is determined by the fan-shaped outer peripheral surface 7 of the skew angle swinging member 63.
1 and a length L2 for one rotation of the drive roller 65.

With the above configuration, the skew angle motor 67
When the drive roller 65 is rotated in the counterclockwise direction in FIG.
Is turned clockwise to be pulled by the lower steel belt 73A in FIG. On the other hand, when the drive roller 65 is rotated clockwise in FIG. 4, the skew angle swing member 63 is turned counterclockwise because it is pulled by the upper steel belt 73B in FIG. Then, when the rotation of the skew angle motor 67 stops, the inertia of rotation is suppressed by the steel belt 73A or 73B on the follower side regardless of the rotation, so that backlash can be eliminated.

Referring again to FIGS. 1 and 2, a head clamp mounting member 85 is provided at the lower end of the skew shaft 57 so as to pivot substantially in the horizontal direction. A face or up-face head clamp 29 is mounted so as to be vertically movable and detachable through a dovetail groove 87 (see FIG. 6). The front end of each head clamp 29 is provided with a magnetic head 27.
Is mounted, and is positioned such that the position of the magnetic head 27 coincides with the center of the skew shaft 57. In FIG. 1, the position of the magnetic head 27 and the position of the rotation center of the magnetic disk 17 are on the same line in the X-axis direction.

With the above configuration, the skew angle motor 67
Rotates the skew shaft 57 via the drive roller 65, the steel belt 73, and the skew angle swinging member 63, and the magnetic head 27 is positioned. At this time,
The head clamp 29 is mounted on a skew shaft 57 via a head clamp mounting member 85. Since the skew shaft 57 is supported by the bearing 61 on the upper frame 37 of the portal stage 31, the skew stage 55
Of the magnetic head 27 is improved, and the accuracy of the rotation center of the magnetic head 27 is improved.

Further, as described above, since the skew stage 55 is attached to the upper frame 37 of the portal stage 31, the center of gravity of the upper frame 37 is set low overall and is stable. As a result, the influence of the vibration by the drive system such as the spindle motor 7, the skew angle motor 67, and the ultrasonic motor 41 is reduced, and the performance of the disk characteristic evaluation is improved.

In the lower edge of the base 5 in FIG. 1, a semicircular cutout 9 is located below the head clamp 29 of the upper frame 37 of the portal stage 31.
1 is provided. The notch 91 is the magnetic disk 1
7, the portal stage 31 only needs to be moved slightly when exchanging the head clamp 29, and the vertical stroke of the head clamp 29 can be small. Since the portion 91 is provided at the edge of the base 5, the replacement of the head clamp 29 is efficiently and easily performed at the above-described cutout portion 91.

Referring to FIG. 6, the down-face and up-face head clamps 29 have a substantially symmetrical structure and are similar in structure, so only the down-face head clamp 29 will be described in detail.

FIG. 6 is a perspective view in which the head clamp 29 mounted in FIG. 2 is turned upside down. At the front end of the head clamp 29, for example, a base 95 of a piezo stage 93 as a microactuator stage is provided. The head mounting member 9 is attached to a stage portion 97 on the front end side of the piezo stage 93 by bolts BT.
9 are provided. A suspension 89 is attached to the head mounting member 99 by a screw 101 using a leaf spring (not shown).
The magnetic head 27 (down face) is provided at the tip of the suspension 89.

Referring to FIG. 7, the piezo stage 93 has a parallel leaf spring shape in which a base 95 and a stage 97 are integrally connected by two elastic pieces 103 and 105 having elasticity. The two elastic pieces 103 and 105
Each has a constricted portion 10 for generating elasticity.
7, 109 are formed on the base side and the stage side.

Further, a support portion 111 projecting forward from the base 95 is provided on the right side of the space between the two elastic pieces 103 and 105 in FIG. 7, while the left elastic piece 103 in FIG. Is provided with a piezo element receiving portion 113 as a microactuator receiving portion so as to face the support portion 111. A constriction 115 for providing flexibility to the piezo element receiving portion 113 is formed between the piezo element receiving portion 113 and the elastic piece 103. The support part 111 and the piezo element receiving part 113
A piezo actuator 117 as a microactuator is provided between.

The piezo stage 93 is made of a conductive ceramic, metal, or the like as a material, and is manufactured by precision machining of this material by wire electric discharge machining or the like. Among the above conductive ceramics, Sialon is
It has excellent properties such as high-temperature strength properties, molten metal corrosion resistance, and wear resistance. Moreover, since Sialon is a difficult-to-machine material, near net forming and sintering techniques are indispensable, but precision machining is possible by wire electric discharge machining.

With the above configuration, the disk characteristic evaluation device 1
In the case of evaluating the characteristics of the magnetic head 27, after the magnetic disk 17 is set to a predetermined number of revolutions by the spindle motor 7, the portal stage 31 is fed, for example, in the X-axis direction in the track direction. 27 is positioned at a predetermined position.

Further, the skew shaft 57 is rotated by the rotation of the skew angle motor 67, and the skew angle α (conventional FIG.
Is set), the vertical movement of the magnetic head 27 provided on the head clamp 29 is adjusted so that the magnetic head 27 has a predetermined flying height with respect to the magnetic disk 17.

Next, in the track profile characteristic evaluation in which the characteristic evaluation is performed while finely moving the track position of the magnetic head 27 in the track width direction and the error rate characteristic evaluation (bathtub characteristic), each piezoelectric element provided in the head clamp 29 is provided. By performing measurement while offsetting the magnetic head 27 by a very small amount by the stage 93, the positioning resolution of the magnetic head 27 is improved.

More specifically, in the piezo stage 93, when the piezo actuator 117 is energized, the piezo actuator 117 expands and contracts in proportion to the input voltage, so that the piezo element receiving portion 113 is pushed by the piezo actuator 117. It is loosened. Since the piezo stage 93 has the shape of a parallel leaf spring, the two elastic pieces 103 and 105 are deformed, and the constriction 107 and
The stage unit 97 located forward from 109 moves in the X-axis direction as indicated by the arrow in FIG.

Therefore, for example, the upper head clamp 29
The magnetic head 27 (down face) at the tip of the suspension 89 attached via the head attaching member 99 to the stage portion 97 of the piezo stage 93 is finely moved in the X-axis direction.

The above-described piezo actuator 117
Has a structure that is strong against the force in the compression direction and weak against the force in the tension direction. Therefore, when a force in the tension direction acts on the piezo actuator 117 when the stage 97 collides with another device or the like, the piezo actuator 117 It may be damaged. Therefore, when the collision occurs, the shape of the portion that is likely to collide, that is, the portion on the side of the magnetic disk 17
The force applied to the piezo actuator 117 is released in a direction acting in the compression direction. For example, in this embodiment, a chamfer 11 as shown in FIG.
Since the nine notches are provided, it is possible to prevent the piezo actuator 117 from being damaged when the piezo stage 93 collides with another device or the like.

In addition to the above-described measures for preventing damage, as shown in FIG. 7, a distortion sensor 121 as a displacement detecting device for detecting the displacement of the piezo stage 93 is provided on the piezo stage 97. The displacement of the piezo stage 93 by the distortion sensor 121 detects an abnormal displacement when the head clamp 29 comes into contact with any obstacle such as a spindle. Therefore, the collision of the head clamp 29 is minimized, and various devices are prevented from being damaged, thereby providing a double safety device. A gap sensor may be provided instead of the distortion sensor 121.

The present invention is not limited to the above-described embodiment, but can be embodied in other modes by making appropriate changes. Although the embodiment has been described using the piezo actuator 117 as the microactuator, a micromotor, a rotary microactor, or the like may be used.

Further, in this embodiment, an example has been described in which the center of the magnetic head 27 is centered on the center of the skew shaft 57 of the skew stage 55.
As in the case of the actual HDD, the magnetic head 27 can be swung to position the same center of rotation as the actual HDD at the center of the skew shaft 57. That is, this is made possible because the device shown in FIG. 4 is smaller than the conventional device.

[0071]

As will be understood from the above description of the embodiment of the invention, according to the first aspect of the invention, when the skew angle driving rotating body is rotated in one direction, the skew angle swing member Is swung in the direction in which it is pulled by one tension band, the skew shaft rotates, and the head clamp mounting member also swings in the same direction as the skew angle swing member. Further, when the skew angle driving rotating body is rotated in the above-described opposite direction, the skew angle swinging member is swung in a direction to be pulled by another tension band-like body, and the skew shaft is rotated, and the head clamp mounting member is rotated. Also swings in the same direction as the skew angle swing member, so that the skew angle of the magnetic head of the head clamp can be changed. In addition, backlash when rotation of the skew angle driving rotating body is stopped can be eliminated. Further, since the skew shaft is supported by the head loader, the overall rigidity can be improved, and the rotation center accuracy of the magnetic head can be improved.

According to the second aspect of the invention, since the center of gravity of the upper frame of the head loader having the gate shape is set to be low as a whole and is stable, the head clamp is mounted on the upper frame. The influence of the vibration by the drive system can be reduced. Therefore, the performance of evaluating the disk characteristics of the magnetic head and the magnetic disk can be improved.

According to the third aspect of the present invention, the notch is provided at a position slightly deviated from the rotational position of the magnetic disk. Therefore, when replacing the head clamp, it is only necessary to move the head loader slightly, It is efficient because the vertical stroke of the clamp can be small. Since the notch is provided at the edge of the base, the head clamp can be easily replaced with the notch.

According to the fourth aspect of the present invention, an abnormal displacement when the head clamp comes into contact with any obstacle such as the spindle can be detected by the displacement detecting device, so that the collision of the head clamp can be minimized. Various devices can be prevented from being damaged.

According to the fifth aspect of the present invention, since the spindle is mounted on the back surface of the base via the spindle housing, the overall center of gravity of the disk clamp and the spindle is lowered, and the magnetic disk mounted on the disk clamp is mounted on the base. Lower from the upper surface of the Therefore, the influence of vibration on the disk clamp and the spindle can be reduced, so that the performance of evaluating the disk characteristics of the magnetic head and the magnetic disk can be improved.

[Brief description of the drawings]

FIG. 1 is a plan view of a disk characteristic evaluation device according to an embodiment of the present invention.

FIG. 2 is a front view of the disk characteristic evaluation device according to the embodiment of the present invention.

FIG. 3A is a partial perspective view of a skew stage according to the embodiment of the present invention, and FIG. 3B is a perspective view showing a state in which a steel belt is attached.

FIG. 4 is a plan view of FIG. 3;

FIG. 5 is a sectional view illustrating a disk clamp according to the embodiment of the present invention.

FIG. 6 is a perspective view of the head clamp according to the embodiment of the present invention, as viewed from upside down.

FIG. 7 is a detailed perspective view of the piezo stage of FIG. 6;

FIG. 8 is a plan view of a conventional disk characteristic evaluation device.

FIG. 9 is a plan view of a conventional disk characteristic evaluation device.

FIG. 10 is a side view of a conventional disk characteristic evaluation device.

FIG. 11 is a side view of the coarse movement stage taken along the arrow XI in FIG. 10;

FIG. 12 is a right side view of FIG.

FIG. 13 is a side view of another conventional disk characteristic evaluation device.

FIG. 14 is a cross-sectional view illustrating a conventional disk clamp.

FIG. 15 is a schematic explanatory diagram of a skew angle with respect to a track of a conventional magnetic disk.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Disk characteristic evaluation apparatus 5 Base 7 Spindle motor 9 Spindle motor housing 11 Hole 13 Disk clamp 17 Magnetic disk 21 Left slide rail (guide member) 25 Right slide rail (guide member) 27 Magnetic head 29 Head clamp 31 Portal stage ( Head loader) 37 Upper frame 57 Skew shaft 63 Skew angle swinging member 65 Drive roller (Skew angle rotating body) 73 Steel belt (Tension band) 85 Head clamp mounting member 93 Piezo stage (Micro actuator stage) 97 Stage section 117 Piezo actuator (microactuator) 121 Strain sensor (displacement detector)

Claims (5)

[Claims] 1. A head clamp for positioning a magnetic head at a predetermined track position to evaluate an electromagnetic conversion characteristic of at least one of a magnetic disk and a magnetic head while rotating a magnetic disk having a plurality of concentric tracks. In a disk characteristic evaluation apparatus provided detachably on a head loader and provided on the base of the head loader, a skew axis is supported on the head loader in a state of being vertically extended, and the skew axis has a fan-shaped skew angle swing. A skew angle driving rotator is provided at a position close to a fan-shaped outer peripheral surface of the skew angle oscillating member so as to be rotatable. One end of the band is fixed, and the two tension bands are wound around the outer peripheral surface of the skew angle driving rotating body in opposite directions. With the fan-shaped outer peripheral surfaces of the skew angle oscillating member tensioned so as to extend in opposite directions, the other ends of the two tension bands are fixed to both ends of the outer peripheral surface of the skew angle oscillating member. And a head clamp attaching member for attaching the head clamp to a tip portion of the skew shaft. 2. A head clamp for positioning a magnetic head at a predetermined track position for evaluating electromagnetic conversion characteristics of at least one of a magnetic disk and a magnetic head while rotating a magnetic disk having a plurality of concentric tracks. In a disk characteristic evaluation device provided detachably on a head loader and provided with the head loader on a base, a guide member extending substantially parallel to both sides with respect to the magnetic disk is provided on the base, and the head loader is mounted on the both sides. A disk comprising a support frame and an upper frame straddling the guide member, and provided so as to be able to reciprocate along the guide member, and the head clamp being provided on the upper frame. Characteristic evaluation device. 3. A notch portion provided at an edge of said base, which is located below a head clamp provided on said head loader and is replaceable with said head clamp. Disk characteristics evaluation device. 4. The head clamp is provided with a microactuator stage movable by a microactuator in the left-right direction, a magnetic head is provided on the microactuator stage, and the head clamp detects an abnormal displacement amount of the microactuator stage. The amount detection device is provided, The claim 1 characterized by the above-mentioned.
3. The disk characteristic evaluation device according to any one of 3. 5. A lower portion of the spindle for providing a hole vertically penetrating through the base, and inserting a spindle provided with a disk clamp to which the magnetic disk can be attached and detached into the hole so as to protrude above the base. The disk characteristic evaluation device according to any one of claims 1 to 4, wherein a disk is attached to a lower portion of the hole through a spindle housing.