JP2002228783A - Inclination adjusting device and flatness measuring device for plate body using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inclination adjusting device capable of easily and positively adjusting the inclination of a measuring work placed on a work base plate, and to provide a flatness measuring device for a plate body provided with the inclination adjusting device. SOLUTION: This inclination adjusting device has a base 2 having a plane part 22 and a gas supply groove 23 provided at the plane part and gradually reduced in the opening area; a porous body 3 placed on the plane part of the base 2; the work base plate 4 placed on the porous body 3; and a gas supply pipe 24 for feeding gas to the supply groove. The pressure of the gas supplied from the gas supply pipe 24 is regulated to change the floating amount of the work base plate 4 to thereby adjust the height of the work base plate 4. The flatness measuring device for the plate body is provided using the inclination adjusting device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tilt adjusting device and a flatness measuring device using the same, and more particularly, to blowing gas into a porous body from a gas supply groove whose opening area gradually decreases. The present invention relates to a tilt adjusting device for adjusting the tilt of a work and a flatness measuring device for a plate-like body using the same.

[0002]

2. Description of the Related Art In general, a stylus method is widely used as a method for measuring the flatness of the surface of a flat work piece. As shown in FIG. In the measuring device 60, a work base plate 63 made of a substrate slidable in the X direction is provided on a guide 62 bridged on the surface of a horizontal bed 61. Outside the work base plate 63,
A gate-shaped frame 64 is fixedly provided on the surface of the bed 61, and a straightness measuring device 65 slidable in the Y direction is provided on the frame 64.

A flat measuring work (measurement object) 66 is mounted on a work base plate 63, and a straightness measuring machine 65 is mounted.
A stylus 65 that comes into contact with the surface of the measurement
a is provided. When the work base plate 63 moves in the X direction, the stylus 65a moves up and down in accordance with the surface condition of the measurement work 66. Therefore, the amount of up and down movement is converted into an electric amount by the electric micrometer 67 and measured. The straightness of the work 66 is measured. Then, every time the straightness measuring device 65 is moved by a predetermined amount in the Y direction, the flatness of the measurement work 66 can be obtained by measuring the straightness of the measurement work 66.

In the conventional flatness measuring device, since the measuring range of the electric micrometer is limited, it is necessary to align the measuring work 66 and the guide 62 of the work base plate 63 in parallel (adjust the inclination) before measuring. There is. However,
At present, the measurement work 6 placed directly on the work base plate 63
8, using a micrometer or the like, with reference to the upper surface of the measurement work 73 supported at three points by the support members 72 provided on the work base plate 71, as shown in FIG. The inclination of the guide 62 or the support member 72 is adjusted at the level of 1 micron.

The guide 62 supports the longitudinal direction at both ends, and the guide 62 is bent due to its own weight.
The amount of deflection is added to the flatness of the measurement work 66 at the time of measurement, which is a cause of deterioration in measurement accuracy.

For this reason, as a method of improving the measurement accuracy, the amount of guide deflection is measured in advance and the measurement work 6 is measured.
6, the guide deflection amount is subtracted from the flatness of the measurement work 66
Is corrected.

However, when the inclination of the guide 62 is adjusted, the height of both ends of the guide 62 changes. Therefore, despite a slight change in the guide bending shape, the bending amount of the guide is regarded as a fixed value. Since the flatness measurement value is corrected, a change in the amount of deflection is a factor of deteriorating measurement accuracy, which is a problem.

Therefore, the guide 62 or the support member 72
It is desirable to adjust the inclination of the measurement work 66 with the guide 62 as a reference for parallelizing the measurement work 66 with the measurement work 66.

However, the method of directly placing the measurement work 66 is as follows.
A jig capable of adjusting the inclination of the work base plate 63 serving as a surface plate or reference surface on which the measurement work 66 is placed at a level of 1 micron is required. Further, in the three-point support method, since the support point support is used as the stylus 65a and the three points are height-adjusted at the level of 1 micron, it takes time to adjust.

[0010]

Therefore, there is a need for a tilt adjusting device that can easily and surely adjust the tilt of a measurement work placed on a work base plate. There has been a demand for a flatness measuring device for a plate-like body having an adjustable tilt adjusting device.

The present invention has been made in consideration of the above circumstances, and has as its object to provide an inclination adjusting device capable of easily and surely adjusting the inclination of a measurement work placed on a work base plate. It is an object of the present invention to provide a flatness measuring device for a plate-like body provided with a tilt adjusting device capable of easily and surely adjusting the tilt of a measurement work.

[0012]

SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, a first aspect of the present invention is to provide a gas supply groove which has a flat portion and is provided in the flat portion and whose opening area is sequentially reduced. Having a substrate, a porous body mounted on the flat portion of the substrate, a work base plate mounted on the porous body, and a gas supply pipe for sending gas to the supply groove, The gist of the present invention is to provide a tilt adjusting device characterized in that the height of the work base plate is adjusted by changing the floating amount of the work base plate by adjusting the pressure of the supply gas from the gas supply pipe. .

In the invention according to claim 2 of the present application, the supply groove is
The gist of the present invention is an inclination adjusting device according to claim 1, wherein the inclination adjusting device has an isosceles triangular shape.

In the invention according to claim 3 of the present application, the supply groove is
The gist of the present invention is a tilt adjusting device according to claim 1 or 2, wherein a plurality of the supply grooves are provided side by side in parallel on a plane so that the opening area of the supply groove decreases in the same direction. .

According to a fourth aspect of the present invention, the substrate is laminated in a pair or a plurality of pairs in which the directions of the directions in which the opening areas of the supply grooves are reduced are opposite to each other. The gist of the present invention is to provide the tilt adjusting device according to any one of 1 to 3.

In the invention of claim 5 of the present application, the gas supply pipe is provided at a midpoint of a base of a isosceles triangle forming a supply groove or at an apex angle of an isosceles triangle. The gist of the present invention is that the tilt adjusting device is any one of the above items 5.

The invention according to claim 6 of the present application is directed to claims 1 to 5
The tilt adjusting device according to any one of the above, a substrate driving mechanism that drives the tilt adjusting device to travel in the X-axis direction and the Y-axis direction, and the straightness of a measurement work placed on a work base plate of the tilt adjusting device. The gist of the present invention is to provide a flatness measuring device for a plate-like body, which is provided with an electric micrometer for measuring the degree.

[0018]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of a tilt adjusting device and a flatness measuring device using the same according to the present invention.

FIG. 1 is a sectional view of an embodiment of a tilt adjusting device according to the present invention, and FIG. 2 is an exploded view thereof.

As shown in FIGS. 1 and 2, a tilt adjusting device 1 according to the present embodiment includes a substrate 2, a porous body 3 placed on the substrate 2, and a floatable body on the porous body 3. And a work base plate 4 placed thereon.

The substrate 2 has a flat plate shape and a square shape, and has two rising sides 21 provided on two opposing sides thereof, and an opening area is gradually reduced in the plane portion 22, for example, an isosceles triangular shape. Supply groove 2 for gas supply whose opening area increases gradually from a top angle 23a formed by isosceles to a bottom side 23b.
Three. Further, one end 24a of a gas supply pipe 24 which communicates with the substrate 2 at the position of the apex angle 23a of the supply groove 23 and supplies gas, for example, air, is attached to the supply groove 23. A compressed air supply device 25 is provided at the other end 24 b of the gas supply pipe 24.
Is provided with a compressor 26 for compressing air and a pressure regulating means 27 for keeping the pressure constant. Since the supply groove 23 has an isosceles triangular shape and air is supplied from the apex angle 23a, the air is always uniformly blown out in a direction (Y-axis direction) orthogonal to the air blow-out direction, and is inclined in the Y-axis direction. Does not occur, and the inclination can be easily controlled.

The porous body 3 has a flat, square shape and is made of, for example, ceramics, has many fine air holes, and blows out high-pressure air in a planar manner.

Further, the work base plate 4 on which the work 5 is to be placed is formed of a flat plate having a square shape, is made of a dense material, and is placed on the porous body 3 so as to be levitated. 5 can be levitated.

Next, a method for using the tilt adjusting device according to the present invention will be described.

As shown in FIG. 1, a measurement work 5 is placed on a work base plate 4 of a tilt adjusting device 1 and compressed gas, for example,
The compressed air of kg / cm 2 or less is sent from the apex angle 23 a of the supply groove 23 provided in the substrate 2.

At this time, since the air blown out from the supply groove 23 is blown out through the porous body 3 and blown out, the blown-out air pressure becomes the same, but is blown out from the bottom side 23b having a large opening area. Since the amount of air is larger than the amount of air blown out from the apex angle 23a side where the opening area is small, the bottom angle 23b of the work base plate 4 placed on the porous body 3 is set to the apex angle 23a.
The work base plate 4 can float larger than the a side.
Can be inclined. This tilt adjustment can be performed with a maximum tilt (levitation difference) of 20 μm and an accuracy of 0.1 μm by adjusting the air pressure.

Since the work base plate 4 is tilted while being entirely supported by the high-pressure air blown from the porous body 3, the work base plate 4 does not bend. As described above, since it is possible to prevent the occurrence of bending at the time of adjusting the inclination of the work base plate 4, even if the work base plate 4 is made thinner and the work base plate 4 in consideration of the thickness of the porous body and the air supply groove is added. 2mm thickness of the whole device
It can be downsized as follows. Further, since the thickness of the work base plate 4 can be reduced, the weight can be reduced, the response to the increase and decrease of the pressure of the high-pressure air can be improved, and the tilt control can be performed quickly and accurately. Further, since the work base plate 4 does not bend in this way, the work can be placed without being deformed even if the work is directly placed.

Further, a first modification of the substrate will be described.

The substrate of the first modified example is different from the substrate of the above-described embodiment in that one isosceles triangular supply groove is provided in the substrate, whereas the substrate has a plurality of isosceles triangular shapes. The supply grooves are provided in parallel.

For example, as shown in FIG. 3, the substrate 31 is provided with a plurality of elongated isosceles triangular supply grooves 32 in parallel with each other. Is provided. By blowing out high-pressure air from the plurality of gas supply pipes 34, the work base plate can be more reliably and stably levitated.

Next, a second modification of the substrate will be described.

In the substrate according to the second modified example, the directions in which the opening areas of the supply grooves are reduced are opposite to each other, whereas the substrate according to the first modified example is formed by one substrate. One pair or a plurality of pairs are stacked.

For example, as shown in FIG. 4, one or more pairs of substrates 6 as shown in FIG. 3 are stacked, and the direction of the supply groove 31 is reversed between the substrate 6a and the next substrate 6b. The substrate 6c and the next substrate 6d are reversed, and two pairs and four of these substrates 6 are stacked. By controlling the high-pressure air blown out from the plurality of gas supply pipes 33, the inclination of the two axes can be freely and accurately adjusted.

Next, an embodiment of a flatness measuring device for a plate-like body according to the present invention using the above-described tilt adjusting device according to the present invention will be described.

FIG. 5 is a perspective view showing an embodiment of a flatness measuring apparatus for a plate-like body according to the present invention. Note that the same parts as those of the inclination adjusting device of FIG.

The flatness measuring device 41 includes a tilt adjusting device 1 as shown in FIG.
A substrate driving mechanism 42 for driving in the axial direction, an electric micrometer 43 for measuring the height of a measurement work placed on the work base plate of the tilt adjusting device 1, and a bed 44 on which the substrate driving mechanism 42 is placed And a gantry 45 for supporting the bed 44.

The inclination adjusting device 1 has a structure as shown in FIG. 2, and the air blown out from the supply groove 23 is blown out through the porous body 3, so that the blown air pressure is Although the same, the amount of air blown from the bottom side 23b having a large opening area is larger than the amount of air blown from the apex angle 23a side having a small opening area. The bottom 23b side of the plate 4 can be levitated larger than the apex angle 23a side, and the work base plate 4 can be inclined. This inclination adjustment can be performed with a maximum inclination (floating difference) of 20 μm and an accuracy of 0.1 μm by adjusting the air pressure by the pressure adjusting means 27 of the compressed air supply device 25.

The board drive mechanism 42 has a saddle 47 slidably mounted on two Y-axis slide rails 46 provided on the surface of the bed 44 and extending in the Y direction. A Y-axis ball screw 48 is arranged in parallel with the Y-axis slide rail 46. Both ends of the Y-axis ball screw 48 are rotatably supported by bearings 48b provided on the bed 44, and a Y-axis pulse motor 49 provided on the bed 44 is connected to an end of the Y-axis ball screw 48. ing. Further, a member (not shown) provided inside the saddle 47 is screwed to the Y-axis ball screw 48. With such a configuration, the Y-axis pulse motor 49 drives the Y-axis ball screw 48
Are rotated to form a Y-axis drive mechanism for driving the substrate (corresponding to the substrate in FIGS. 1 and 2) 2 in the Y-axis direction together with the saddle 47.

Further, two X-axis slide rails 50 are provided on the surface of the saddle 47, and the board 2 is slidably mounted on the X-axis slide rail 50. In addition, this saddle 4
The two ends of an X-axis ball screw 52 provided in parallel with the X-axis slide rail 50 are rotatably supported by two bearings 51 provided on the upper surface of 7. And saddle 4
An X-axis pulse motor 53 fixed to 7 is connected to an end of the X-axis ball screw 52, and a nut (not shown) provided inside the substrate 2 is screwed to the X-axis ball screw 52. With this configuration, the X-axis pulse motor 53 drives the X-axis ball screw 52 to rotate, thereby forming a Y-axis driving mechanism for driving the substrate 2 in the Y-axis direction.

The substrate driving mechanism is not limited to the one using a ball screw and a pulse motor, but may be an air cylinder.

The electric micrometer 43 is generally used, and includes a straightness measuring device 4b attached to a U-shaped frame 54 bridged on a bed 44, and a lower end of the straightness measuring device 4b. It has a stylus 43a provided in the section. The stylus 43a moves up and down in accordance with the surface state of the work to be measured, and the vertical movement amount is converted into an electric quantity by the electric micrometer 43 to measure the straightness of the work to be measured. The flatness of the measurement work 5 can be obtained by measuring the straightness of the measurement work 5 each time the object moves in the X and Y directions by a predetermined amount. The flatness of the measurement work 5 obtained in this way is output by output means connected to the control device 55, for example, a printer (not shown).

The control device 55 controls the pressure regulating means 27 of the compressed air supply device 25 and controls the Y
The axis pulse motor 49 and the X-axis pulse motor 53 are also controlled.

Next, a method of measuring the flatness of a plate-like body using the apparatus for measuring the flatness of a plate-like body according to the present invention will be described with reference to the measurement process diagram of FIG.

Prior to using the flatness measuring device 41 as shown in FIG. 5, the horizontality of the substrate 2 of the tilt adjusting device 1 in the X-axis direction is measured once. The reason for this measurement is that no matter how precise the adjustment is made when assembling the substrate drive mechanism 42, an angle (error) θ as shown in FIG.

Next, as shown in FIG. 6 (b), a flat work 5 is placed on the work base plate 4. At this time,
For example, since the substrate 2 has an angle θ, the porous body 3 and the work base plate 4 also have an angle θ.

Therefore, in order to absorb the angle (error) θ, the measurement result shows that the right side of the work base plate 4 in the X-axis direction slightly rises and an error θ occurs, which exceeds the measurement range of the electric micrometer. ing. For this reason, the inclination adjusting device 1 is operated to correct the upward rise of the work base plate 4 and bring the work base plate 4 closer to horizontal.

To operate the inclination adjusting device 1, the compressor 26 of the compressed air supply device 25 as shown in FIG. 1 is operated by the control device 55 shown in FIG. Air held at a constant pressure
The gas is supplied to the supply groove 23 via the gas supply pipe 2. Since the supplied air has a high pressure, it is blown out from the supply groove 23 toward the back surface of the porous body 3, passes through numerous pores of the porous body 3, and is blown out from the entire surface of the porous body 3.

Further, as shown in FIG. 2, the supply area 23 of an isosceles triangular shape gradually increases in opening area from the top angle 23a to the bottom side 23b, and the amount of air blown therefrom also increases. As shown in FIG. 6 (c), the workpiece base plate 4 is pressed by the air so as to increase linearly sequentially without bending from the apex angle 23a toward the bottom side 23b. It is levitated and becomes horizontal. Therefore, the measurement work 5 placed on the work base plate 4 is also in a horizontal state.

Thereafter, as shown in FIG. 6D, the stylus 43a of the electric micrometer 43 is moved up and down along the surface of the measurement work 5 in the horizontal state, following the surface state of the measurement work. The amount of vertical movement is measured by the electric micrometer 43.
Is converted into an electric quantity, and the straightness of the measurement work is measured. That is, the controller 55 controls the substrate driving mechanism 42
The X-axis pulse motor 53 is controlled to move the measurement work 5 placed on the work base plate 4 to measure the straightness of the measurement work in the X-axis direction, and further, the Y-axis pulse motor 49 is controlled. The measurement work 5 placed on the work base plate 4 is moved in the Y-axis direction to measure the straightness in the other X-axis directions. As a result, each time the measurement work 5 is moved in the X and Y directions by a predetermined amount, the measurement work is straightened. The degree of flatness of the measurement work is obtained by measuring the degree.

In the flatness measurement process of such a flat body, the measurement work 5 is kept horizontal despite the occurrence of the angle θ on the substrate 2, so that the measurement work 5 is within the limit of the measurement range of the electric micrometer. In addition, the flatness of the measurement work 5 can be reliably measured.

Even if the inclination of the work base plate 4 is adjusted by floating the work base plate 4, the work base plate 4 does not bend. Therefore, the work base plate 4 may be thin. Even if the thickness of the substrate 2 is added, the thickness of the entire unit is as thin as 20 mm or less, and the unit can be reduced in weight.

Further, since the work base plate 4 is kept linearly and horizontally, even if the measurement work 5 is directly placed on the work base plate 4, the measurement work 5 does not bend and is not deformed. Can be reliably measured.

In addition, a plurality of supply grooves as shown in FIG. 3 are arranged in parallel on a plane so that the direction of the opening area reduction direction of the supply grooves is the same, or FIG. As shown in the drawing, the substrate is provided with a pair of or plural pairs of tilt adjusting devices in which the direction of the opening area reduction direction of the supply groove is opposite to that of the other. The flatness measuring device of the plate-like body which can adjust the value is obtained.

[0054]

According to the tilt adjusting device according to the present invention,
It is possible to provide an inclination adjusting device capable of easily and surely adjusting the inclination of the measurement work placed on the work base plate.
Further, according to the flatness measuring device for a plate-like body according to the present invention, the flatness of the measurement work can be reliably measured.

That is, a substrate having a flat portion and a supply groove for gas supply provided in the flat portion and having an opening area sequentially reduced; a porous body placed on the flat surface of the substrate; It has a work base plate placed on a porous body and a gas supply pipe that sends gas to the supply groove, and changes the floating amount of the work base plate by adjusting the pressure of the supply gas from this gas supply pipe. Since the tilt adjusting device adjusts the height of the work base plate by adjusting the air pressure, the tilt (lift difference) can be adjusted over a wide range and with high accuracy. In addition, since the work base plate is tilted while fully supported by the high-pressure air blown out from the porous body, it is possible to prevent the occurrence of bending when adjusting the tilt of the work base plate, so that the work base plate can be made thinner and the apparatus can be thinned. The overall thickness can be reduced and the size can be reduced. Further, since the thickness of the work base plate can be reduced, the weight can be reduced, the responsiveness to the increase and decrease of the pressure of the high-pressure air is improved, and the tilt control can be performed quickly and accurately. Further, since the work base plate does not bend, even if the work is directly placed, the work can be placed without being deformed.

Since the supply groove has an isosceles triangular shape, no inclination occurs in a direction orthogonal to the air blowing direction, and the inclination can be easily adjusted.

The plurality of supply grooves are provided in parallel on a plane so that the opening area of the supply grooves decreases in the same direction, so that high-pressure air blown out from a plurality of gas supply pipes is provided. , The inclination of the two axes can be adjusted with high accuracy.

In addition, since the substrate is stacked in a pair or a plurality of pairs in which the opening directions of the supply grooves are reduced in the direction opposite to each other, the inclination of the two axes can be adjusted freely and accurately.

Since the gas supply pipe is provided at the midpoint of the base of the isosceles triangle forming the supply groove or at the apex angle of the isosceles triangle, the gas supply pipe is always uniform in the direction perpendicular to the air blowing direction. It will blow out, and no inclination will occur in this direction,
Control of the inclination becomes easy.

A tilt adjusting device according to any one of claims 1 to 5, a substrate driving mechanism for driving the tilt adjusting device to travel in the X-axis and Y-axis directions, and a work base plate of the tilt adjusting device. Since the flatness measuring device of the plate-like body is provided with an electric micrometer for measuring the straightness of the measuring work placed on the measuring work, the measuring range of the electric micrometer is always maintained because the measuring work is always kept horizontal. Within the limits of
The flatness of the measurement work can be reliably measured. Furthermore, since the work base is kept straight and horizontal, even if the measurement work is placed directly on the work base, the measurement work will bend,
Without deformation, the flatness of a thin measuring work can also be reliably measured.

[Brief description of the drawings]

FIG. 1 is a sectional view of a tilt adjusting device according to the present invention.

FIG. 2 is an exploded perspective view of the tilt adjusting device according to the present invention.

FIG. 3 is a cross-sectional view of a modified example of the substrate used in the tilt adjusting device according to the present invention.

FIG. 4 is a cross-sectional view of a modified example of the substrate used in the tilt adjusting device according to the present invention.

FIG. 5 is a perspective view of an apparatus for measuring flatness of a plate-like body according to the present invention.

FIG. 6 is a measurement process diagram of the flatness measuring device for a plate-like body according to the present invention.

FIG. 7 is a perspective view showing the concept of a conventional flatness measuring device for a plate-like body.

FIG. 8 is a plan view showing the concept of a conventional tilt adjustment device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Tilt adjusting device 2 Substrate 3 Porous body 4 Work base plate 5 Measurement work 21 Rise 22 Flat portion 23a Apex angle 23b Bottom 23 Supply groove 24 Gas supply pipe 24a One end 24b Other end 25 Compressed air supply device 26 Compressor 27 Pressure regulation Means 31 Supply groove 32 Bottom 33 Gas supply pipe 41 Flatness measuring device 42 Substrate drive mechanism 43 Electric micrometer 43a Contact probe 44 Bed 45 Mount 46 Y axis sliding rail 47 Saddle 48 Y axis ball screw 48b Bearing 49 Y axis pulse motor Reference Signs List 50 X-axis sliding rail 51 Bearing 52 X-axis ball screw 53 X-axis pulse motor 54 Frame 55 Controller

Continued on the front page F term (reference) 2F063 AA14 AA37 AA44 BA30 BC05 BD02 CB10 DA02 DA05 DB05 DD02 EA06 EB01 ZA03 ZA05 2F078 CA08 CB18 CC11

Claims (6)

[Claims] A substrate having a flat portion and a supply groove for gas supply provided in the flat portion and having an opening area sequentially reduced; a porous body mounted on the flat portion of the substrate;
The work base plate mounted on the porous body, and a gas supply pipe for sending gas to the supply groove, and the pressure of the gas supplied from the gas supply pipe is adjusted to lift the work base plate. A tilt adjusting device, wherein the height of the work base plate is adjusted by changing the amount. 2. The tilt adjusting device according to claim 1, wherein the supply groove has an isosceles triangular shape. 3. The supply groove according to claim 1, wherein a plurality of the supply grooves are provided in parallel on a plane so that the direction in which the opening area of the supply groove decreases is the same.
3. The tilt adjusting device according to 1. 4. The substrate according to claim 1, wherein one or more pairs of the substrates are stacked in such a manner that the opening directions of the supply grooves are reduced in the direction opposite to each other. Item 2. The tilt adjusting device according to Item 1. 5. The gas supply pipe according to claim 2, wherein the gas supply pipe is provided at the midpoint of the base of the isosceles triangle forming the supply groove or at the apex of the isosceles.
An inclination adjusting device according to the item. 6. A tilt adjusting device according to claim 1, a substrate drive mechanism for driving the tilt adjusting device to travel in the X-axis and Y-axis directions, and a work table of the tilt adjusting device. A flatness measuring apparatus for a plate-like body, comprising: an electric micrometer for measuring straightness of a measurement work placed on a plate.