JP2002228447A - Bearing sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a bearing sensor smaller in shape and inexpensive. SOLUTION: The first conductor 14 for generating a bias magnetic field, the second conductor 16 for generating a bias magnetic field, a magnetic resistance element 18 comprising a magnetic resistance pattern, the third conductor 20 for generating a bias magnetic field connected to the first conductor 14, and the fourth conductor 22 for generating a bias magnetic field connected to the second conductor 16, are laminated sequentially on one side of an insulation substrate 11 through second, third, fourth and fifth insulation layers 15, 17, 19 and 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an azimuth sensor for applying an appropriate bias magnetic field to a magnetoresistive element and detecting the terrestrial magnetism to determine the azimuth.

[0002]

2. Description of the Related Art A conventional direction sensor of this type is shown in FIG.
(A), (b) and FIGS. 15 (a), (b).

That is, FIGS. 14A and 14B and FIG.
As shown in FIGS. 5 (a) and (b), when an electric current is applied to the insulating substrate having four orthogonal sides in the longitudinal direction of the pattern, the electric resistance changes according to the strength of the magnetic field orthogonal to the pattern.
The plurality of magnetoresistive elements 1 are arranged so that the longitudinal directions of the patterns are orthogonal to each other and oriented at 45 ° to each side of the insulating substrate, are connected in series with each other, and have predetermined input terminals and output terminals. An element holder 3 having a magnetoresistive element 2 provided and provided; an installation base 3a for disposing the magnetoresistive element 2 such that the surface on which the magnetoresistive element 1 is formed is located at the center;
And two bias magnetic field generating coils 4a and 4b each formed of an insulated wire such as a copper wire wound in a predetermined number of turns. A first coil groove 3b for winding a first bias magnetic field generating coil 4a for applying a bias magnetic field to the magnetoresistive element at a predetermined distance, and a first bias magnetic field generating coil 4
and a second coil groove 3c for forming a second bias magnetic field generating coil 4b orthogonal to a at a predetermined position so as not to touch the first bias magnetic field generating coil 4a. It was a structure provided.

[0004]

However, in the above-described conventional direction sensor, two bias magnetic field generating coils 4a and 4b formed of an insulated wire such as a copper wire are used.
Is wound around the element holder 3 on which the magnetoresistive element 2 is installed with a predetermined number of turns, so that the shape of the azimuth sensor itself becomes large, and the four magnetoresistive elements 1 are Magnetoresistive element 2 and two coils 4 for generating a bias magnetic field
The positional relationship between the magneto-resistive element 2 and the two biases is determined by the position of the magneto-resistive element mounting base 3a formed in the element holder 3 and the first and second coil grooves 3b and 3c. There is a problem that the formation of the positional relationship between the magnetic field generating coils 4a and 4b becomes complicated.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide an azimuth sensor which is small in size and inexpensive.

[0006]

In order to achieve the above object, an azimuth sensor according to the present invention comprises a first conductor for generating a bias magnetic field, provided on one side of an insulating substrate, and a part of the first conductor. A second insulating layer provided over the second insulating layer, a second conductor for generating a bias magnetic field provided on the second insulating layer in a direction orthogonal to the first conductor, A third insulating layer provided so as to cover a part of the second conductor, a magnetoresistive element including a magnetoresistive pattern provided on the third insulating layer, and provided so as to cover the magnetoresistive element; A fourth insulating layer, a third conductor provided on the fourth insulating layer and connected to the first conductor for generating a bias magnetic field, and provided to cover the third conductor; A fifth insulating layer provided on the fifth insulating layer and connected to the second conductor. Which was a fourth conductor for astigmatism magnetic field generation, according to this configuration, in geometrically small also,
In addition, an inexpensive direction sensor can be obtained.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention is directed to an insulating substrate, a first conductor for generating a bias magnetic field provided on one side of the insulating substrate, and one of the first conductors. A second insulating layer provided so as to cover the portion, a second conductor for generating a bias magnetic field provided on the second insulating layer and provided in a direction orthogonal to the first conductor, A third insulating layer provided so as to cover a part of the second conductor, a magnetoresistive element formed of a magnetoresistive pattern provided on the third insulating layer, and provided to cover the magnetoresistive element; A fourth insulating layer provided on the fourth insulating layer, and a third conductor for generating a bias magnetic field connected to the first conductor;
A fifth insulating layer provided to cover the third conductor, and a fourth conductor for generating a bias magnetic field provided on the fifth insulating layer and connected to the second conductor. According to this configuration, a first conductor for generating a bias magnetic field, a second conductor for generating a bias magnetic field, and a magnetoresistive element including a magnetoresistive pattern are provided on one side of the insulating substrate. A third conductor for generating a bias magnetic field connected to the first conductor and a fourth conductor for generating a bias magnetic field connected to the second conductor are defined as second, third, fourth, and fourth conductors. 5, the number of components is small, and it is not necessary to wind a coil for generating a bias magnetic field with a predetermined number of turns as in the related art. To provide an inexpensive azimuth sensor that is compact in shape. And it has a.

According to a second aspect of the present invention, there is provided an insulating substrate, and a first magnetic field generating means provided on one side of the insulating substrate for generating a bias magnetic field.
And a second insulating layer provided so as to cover a part of the first conductor, and a bias provided on the second insulating layer and provided in a direction orthogonal to the first conductor. A second conductor for generating a magnetic field, a third insulating layer provided so as to cover a part of the second conductor, and a magnetoresistive element including a magnetoresistive pattern provided on the third insulating layer A fourth insulating layer provided to cover the magnetoresistive element, and a fourth conductor for generating a bias magnetic field provided on the fourth insulating layer and connected to the second conductor. A fifth insulating layer provided so as to cover the fourth conductor; and a third insulating layer provided on the fifth insulating layer and connected to the first conductor for generating a bias magnetic field. According to this configuration, the first conductor for generating the bias magnetic field and the bias conductor are provided on one side of the insulating substrate. A second conductor for generating a magnetic field, a magnetoresistive element formed of a magnetoresistive pattern, a fourth conductor for generating a bias magnetic field connected to the second conductor, and connected to the first conductor. Since the third conductor for generating the bias magnetic field is provided in such a manner that the third conductor is sequentially laminated via the second, third, fourth and fifth insulating layers, the number of parts can be reduced and the bias as in the prior art can be reduced. Since the operation of winding the coil for generating the magnetic field with a predetermined number of turns is not necessary, the present invention has an effect of providing an inexpensive azimuth sensor that is small in shape.

According to a third aspect of the present invention, there is provided a first conductor for generating a bias magnetic field, a second insulating layer provided so as to cover a part of the first conductor, and a second insulating layer. A first magnetoresistive element composed of a magnetoresistive pattern provided on the first magnetoresistive element, a third insulating layer provided to cover the first magnetoresistive element, and provided on the third insulating layer; A sensor section A including a second conductor for generating a bias magnetic field connected to the first conductor; and a third section for generating a bias magnetic field provided in a direction orthogonal to the first conductor in the sensor section A. And a fifth conductor provided so as to cover a part of the third conductor.
An insulating layer, a second magnetoresistive element comprising a magnetoresistive pattern provided on the fifth insulating layer, a sixth insulating layer provided to cover the second magnetoresistive element, Sixth
And a fourth conductor for generating a bias magnetic field, which is provided on the insulating layer of the second conductor in a direction orthogonal to the second conductor and is connected to the third conductor. The sensor section A and the sensor section B are independently provided on one side of the same insulating substrate. According to this configuration, the first conductor for generating the bias magnetic field and the second A sensor section A including a first magneto-resistive element and a second conductor for generating a bias magnetic field connected to the first conductor; and a bias provided in a direction orthogonal to the first conductor in the sensor section A. A third conductor for generating a magnetic field, a second magnetoresistive element formed of a magnetoresistive pattern, and a bias magnetic field provided in a direction orthogonal to the second conductor and connected to the third conductor. And a sensor portion B made of a fourth conductor Since the sensor unit A and the sensor unit B are independently provided on one surface side of the same insulating substrate, it is not necessary to wind a coil for generating a bias magnetic field with a predetermined number of turns as in the related art, and The shape is divided into the sensor part A and the sensor part B, so that the height is low,
That is, it has an effect that a thin azimuth sensor can be provided.

According to a fourth aspect of the present invention, the first, second, third, and fourth conductors for generating a bias magnetic field are formed of a conductor pattern. According to this, since the first conductor, the second conductor, the third conductor, and the fourth conductor for generating the bias magnetic field are formed by the conductor pattern, the overall thickness of the azimuth sensor itself is also reduced,
This has the effect that the shape of the azimuth sensor itself can be reduced in size.

[0011] The invention according to claim 5 is connected to the external electrode connected to the magnetoresistive element and the first and third conductors for generating the bias magnetic field, at least on the back surface of the insulating substrate. An external electrode and a second electrode for generating a bias magnetic field.
According to this configuration, the external electrode connected to the magnetoresistive element and the first electrode for generating the bias magnetic field are provided on at least the back surface of the insulating substrate. An external electrode connected to the third conductor and the third conductor, and a second conductor and a fourth
Since the external electrodes connected to the conductors are provided, by soldering these external electrodes to a printed circuit board of an electronic device, the azimuth sensor can be easily surface-mounted.

According to a sixth aspect of the present invention, an external electrode connected to the first magnetoresistive element, an external electrode connected to the second magnetoresistive element, and a bias are provided on at least the back surface of the insulating substrate. An external electrode connected to the first and second conductors for generating a magnetic field and an external electrode connected to the third and fourth conductors for generating a bias magnetic field are provided. According to this, an external electrode connected to the first magnetoresistive element and a second
Connected to the first and second conductors for generating the bias magnetic field, and connected to the third and fourth conductors for generating the bias magnetic field. Since these external electrodes are provided, by soldering these external electrodes to a printed circuit board of an electronic device, the surface mounting of the azimuth sensor can be easily performed.

According to the present invention, the plurality of external electrodes are formed of through-hole electrodes. According to this configuration, the plurality of external electrodes are formed of through-hole electrodes. When forming external electrodes, external electrodes can be simultaneously formed in a large number of through holes provided in a sheet-shaped insulating substrate, and by dividing the central portion of this through hole vertically and horizontally into individual pieces, This has an effect that an orientation sensor having at least one external electrode formed of a through-hole electrode can be easily obtained.

[0014] The invention according to claim 8 is particularly advantageous in that a part of the external electrodes connected to the first magnetoresistive element and a part of the external electrodes connected to the second magnetoresistive element. According to this configuration, some of the external electrodes connected to the first magnetoresistive element and some of the external electrodes are connected to the second magnetoresistive element. Because some of the external electrodes are shared,
This has the function of simplifying the arrangement pattern of the printed circuit board to which the external electrodes are connected.

According to a ninth aspect of the present invention, in particular, some of the external electrodes connected to the first conductor and the second conductor for generating the bias magnetic field and the second electrode for generating the bias magnetic field are provided. Some of the external electrodes connected to the third conductor and the fourth conductor share some of the external electrodes. According to this configuration, the first and second conductors for generating the bias magnetic field and the second
Some of the external electrodes connected to the third conductor and some of the external electrodes connected to the third and fourth conductors for generating the bias magnetic field are shared. Therefore, the arrangement of the printed circuit board to which the external electrodes are connected can be simplified.

(Embodiment 1) Hereinafter, an orientation sensor according to Embodiment 1 of the present invention will be described with reference to the drawings.

FIG. 1A is a top view of the azimuth sensor according to the first embodiment of the present invention, and FIG.
FIG. 3 is a sectional view taken along line A ′.

In FIGS. 1A and 1B, reference numeral 11 denotes aluminum.
A square insulating substrate made of a
Reference numeral 1 denotes four corners and a substantially central part of four sides as shown in FIG.
Consists of an arc-shaped or semi-circular through-hole electrode
External electrodes 12a, 12b, 12c, 12d, 12e, 1
2f, 12g and 12h are formed. 13 is the insulation
A first glass glaze formed on the upper surface of the substrate 11;
The first insulating layer 13 is made of an alumina substrate.
Formed to keep the surface smoothness of the insulating substrate 11
Things. 14 is provided on the first insulating layer 13
A first conductor for generating a bias magnetic field, 15 is the first conductor.
SiO provided so as to cover a part of the body 14 _TwoThin film
The second insulating layer 16 is located on the second insulating layer 15.
And placed in a direction orthogonal to the first conductor 14.
A second conductor for generating a bias magnetic field, 17 is the second conductor.
SiO provided so as to cover a part of the body 16_TwoThin film
A third insulating layer 18 is provided on the third insulating layer 17.
A magnetoresistive element consisting of a giant magnetoresistive pattern,
SiO provided so as to cover the magnetoresistive element 18_TwoThin film, etc.
And a fourth insulating layer 20 of the fourth insulating layer 19.
A bus provided on the top and connected to the first conductor 14
A third conductor for generating an ias magnetic field; 21 is the third conductor;
SiO provided so as to cover part of 20_TwoConsists of a thin film, etc.
A fifth insulating layer 22 is provided on the fifth insulating layer 21
And a bias magnet connected to the second conductor 16
A fourth conductor 23 for generating a field is formed on the insulating substrate 11.
External electrodes 12a and 12 made of through-hole electrodes
b, 12c, 12d, 12e, 12f, 12g, 12h
This is a protective film that covers the exterior surface with part of the
The protective film 23 is made of phenolic resin or
It is made of epoxy resin. The through-hole
External electrodes 12a, 12b, 12c, 1
2d, 12e, 12f, 12g, and 12h are shown in FIG.
As shown, the upper surface of the insulating substrate 11 is
It is formed so as to reach the surface.

2 (a) (b), 3 (a) (b), 4 (a) (b), 5 (a) (b), 6 (a) (b)
7 (a) and 7 (b) show a manufacturing process diagram of the azimuth sensor according to the first embodiment of the present invention. Based on this manufacturing process diagram, manufacture of the azimuth sensor according to the first embodiment of the present invention. The method will be described.

In this azimuth sensor, a large number of azimuth sensors are manufactured using a sheet-like insulating substrate made of an alumina substrate having a large number of circular through holes, and finally, a central portion of the circular through hole is formed. Dividing vertically and horizontally by dicing provides an individualized direction sensor.

FIGS. 2A and 2B and FIG. 3A
(B), FIG. 4 (a) (b), FIG. 5 (a) (b), FIG.
FIGS. 7A and 7B and FIGS. 7A and 7B show the azimuth sensor in a state of being separated into individual pieces. First, FIG.
As shown in FIG.
External electrodes 12a, 12b, 12 each formed of an arc-shaped or semi-circular through-hole electrode substantially at the corners and substantially at the center of the four sides.
c, 12d, 12e, 12f, 12g, and 12h are formed. The external electrode 12 composed of this through-hole electrode
a, 12b, 12c, 12d, 12e, 12f, 12
g and 12h are made of silver-palladium and formed so as to extend from the upper surface of the insulating substrate 11 to the back surface of the insulating substrate 11 via the inner side surface of the through hole.

Next, as shown in FIG. 2B, the external electrodes 12a, 12b, 12c, 12d, 12e, 12f, 1
A first insulating layer 13 made of glass glaze is formed on the upper surface of the insulating substrate 11 so as to be located inside 2 g and 12 h.

Next, as shown in FIG.
A first conductor 14 for generating a bias magnetic field composed of a plurality of conductor patterns is formed on the insulating layer 13. The first conductor 14 has one end connected to the external electrode 12a and the other end connected to the external electrode 12b. And this first conductor 14
Is for generating a bias magnetic field in the X-axis direction in FIG.

Next, as shown in FIG. 3 (b), a first conductor 1 for generating a bias magnetic field composed of a plurality of conductor patterns is provided.
4 is covered, that is, the second insulating layer 15 made of a SiO ₂ thin film or the like is covered so as to cover the first conductor 14 with the plurality of connection portions 14a of the first conductor 14 exposed. Form.

Next, as shown in FIG.
A second conductor 16 for generating a bias magnetic field, comprising a plurality of conductor patterns, is formed on the insulating layer 15 in a direction orthogonal to the first conductor 14. The second conductor 16 has one end connected to the external electrode 12c and the other end connected to the external electrode 12d. The second conductor 16 generates a bias magnetic field in the Y-axis direction in FIG.

Next, as shown in FIG. 4 (b), a second conductor 1 for generating a bias magnetic field composed of a plurality of conductor patterns is formed.
6 is covered with the third insulating layer 17 made of a SiO ₂ thin film or the like so as to cover the second conductor 16 with the plurality of connection portions 16a of the second conductor 16 exposed. Form.

Next, as shown in FIG.
A magnetoresistive element 18 composed of four magnetoresistive patterns is formed on the insulating layer 17. And this magnetoresistive element 1
Reference numeral 8 denotes a bridge circuit formed by four magnetoresistive patterns, and the four magnetoresistive patterns are connected to the external electrodes 12e and 1e.
Connect to 2f, 12g, 12h.

Next, as shown in FIG. 5B, a fourth SiO ₂ thin film or the like
Is formed.

Next, as shown in FIG.
A third conductor 20 for generating a bias magnetic field composed of a plurality of conductor patterns is formed on the insulating layer 19, and a plurality of connection portions 20a of the third conductor 20 are connected to a plurality of connection portions 20a of the first conductor 14. Connect to the connection part 14a.

Next, as shown in FIG. 6 (b), a third conductor 2 for generating a bias magnetic field composed of a plurality of conductor patterns is formed.
0, that is, the fifth insulating layer 21 made of a SiO ₂ thin film or the like is covered so as to cover the third conductor 20 with the plurality of connection portions 20a of the third conductor 20 exposed. Form.

Next, as shown in FIG.
A fourth conductor 22 for generating a bias magnetic field composed of a plurality of conductor patterns is formed on the insulating layer 21 of the second conductor 16, and a plurality of connecting portions 22 a of the fourth conductor 22 are Connect to the connection part 16a.

Next, as shown in FIG. 7B, an external electrode 12 comprising a through-hole electrode formed on the insulating substrate 11 is formed.
a, 12b, 12c, 12d, 12e, 12f, 12
A protective film 23 made of a phenolic resin or an epoxy resin is formed so as to cover the exterior surface with part of g and 12h exposed.

As described above, Embodiment 1 of the present invention
Is manufactured.

In the direction sensor according to the above-described embodiment of the present invention, the first conductor 14 for generating a bias magnetic field, the second conductor 16 for generating a bias magnetic field, A magneto-resistive element 18 composed of a resistance pattern, a third conductor 20 for generating a bias magnetic field connected to the first conductor 14, and a fourth conductor for generating a bias magnetic field connected to the second conductor 16; The conductor 22 is divided into first, second, third, fourth, and fifth insulating layers 13, 15, 1
Since it is formed in such a manner that the components are sequentially laminated via the layers 7, 19 and 21, the number of components is reduced, and the work of winding the coil for generating the bias magnetic field with a predetermined number of turns as in the prior art is unnecessary. Therefore, an orientation sensor that is small in size and inexpensive can be obtained.

In the first embodiment of the present invention, the first conductor 14, the second conductor 16,
Since the third conductor 20 and the fourth conductor 22 are formed by the conductor pattern, the thickness of the azimuth sensor itself is also reduced, so that the shape of the azimuth sensor itself can be reduced in size.

In the first embodiment of the present invention, the external electrodes connected to the magnetoresistive element 18 extend from the upper surface of the insulating substrate 11 to the rear surface of the insulating substrate 11 via the inner surface of the through hole. 12e, 12f, 12g,
12h and external electrodes 12a and 12b connected to the first conductor 14 and the third conductor 20 for generating a bias magnetic field.
And the external electrodes 12c, 12d connected to the second conductor 16 and the fourth conductor 22 for generating the bias magnetic field, so that these external electrodes 12a, 12b, 12
By soldering c, 12d, 12e, 12f, 12g, and 12h to a printed circuit board of an electronic device, surface mounting of the direction sensor can be easily performed.

Further, in Embodiment 1 of the present invention,
The external electrodes 12a, 12b, 12c, 12d, 12
Since e, 12f, 12g, and 12h are constituted by through-hole electrodes, the external electrodes 12a, 12b, 12c,
When forming 12d, 12e, 12f, 12g, and 12h, external electrodes 12a, 12b, 12c, 12d, and 1 are formed in a large number of circular through holes provided in a sheet-like insulating substrate.
2e, 12f, 12g, and 12h can be formed at the same time, and the central portion of the through-hole is divided vertically and horizontally into individual pieces to form an external electrode 12a composed of an arc-shaped or semi-circular through-hole electrode. , 12b, 1
An orientation sensor having 2c, 12d, 12e, 12f, 12g, and 12h can be easily obtained.

(Embodiment 2) FIG. 8 is a cross-sectional view of an azimuth sensor according to Embodiment 2 of the present invention. The difference from the azimuth sensor according to Embodiment 1 of the present invention is that FIG. As is clear from the comparison with the cross-sectional view of the azimuth sensor according to the first embodiment of the present invention shown in (b), the fourth insulating layer 19 made of a SiO ₂ thin film or the like provided so as to cover the magnetoresistive element 18. on the, the fourth conductor 22 for bias magnetic field generating connected to the second conductor 16 is provided, and insulating the fifth made of SiO ₂ thin film or the like so as to cover a part of the fourth conductor 22 A layer 21 is provided and then the fifth
A third conductor 20 for generating a bias magnetic field connected to the first conductor 14 is provided on the insulating layer 21 of FIG. Even in such a configuration, the same operation and effect as those of the first embodiment of the present invention described above can be obtained.

The first embodiment for generating a bias magnetic field composed of a plurality of conductor patterns according to the first embodiment of the present invention.
The conductor 14, the second conductor 16, the third conductor 20, and the fourth conductor 22 are formed by printing silver, copper, or an alloy thereof by a printing method or a vapor deposition thin film.

In the first embodiment of the present invention, the external electrodes 12a, 12b, 12c, 12d, 12
e, 12f, 12g, and 12h have been described as being formed from the upper surface of the insulating substrate 11 to the rear surface of the insulating substrate 11 via the inner side surface of the through hole, but the external electrodes 12a, 12b, 12c, 12d, 12e, 1
2f, 12g, and 12h are formed on at least the back surface of the insulating substrate 11, and the external electrodes 12 formed on the back surface are formed.
a, 12b, 12c, 12d, 12e, 12f, 12
g, 12h do not pass through the inner side surface of the through hole or the upper surface of the insulating substrate 11, and the first conductor 14, the second conductor 16, the third conductor 20, the fourth conductor 22, If it is connected to the magnetoresistive element 18, the orientation sensor can be surface-mounted on a printed circuit board of an electronic device.

(Embodiment 3) FIG. 9A is a top view of an azimuth sensor according to Embodiment 3 of the present invention, and FIG. 9B is a sectional view taken along line BB 'of FIG. 9A. .

In FIGS. 9A and 9B, reference numeral 31 denotes a rectangular insulating substrate made of an alumina substrate.
Reference numeral 1 denotes external electrodes 32a, 32b, 32c, and arc-shaped through-hole electrodes at four corners, as shown in FIG.
32d, external electrodes 32e and 32f formed of semicircular through-hole electrodes at substantially the center of the short sides, and external electrodes 32g and 32 formed of semicircular through-hole electrodes at the long sides.
h, 32i, 32j, 32k, and 32l, and an external electrode 32m formed of a circular through-hole electrode at the center. Reference numeral 33 denotes a first insulating layer made of glass glaze formed on the upper surface of the insulating substrate 31.
The insulating layer 33 is formed to maintain the surface smoothness of the insulating substrate 31 made of an alumina substrate. 34 is a first conductor for generating a bias magnetic field provided on the first insulating layer 33, and 35 is a second conductor made of a SiO ₂ thin film or the like provided so as to cover a part of the first conductor. Insulating layer, 36
Is a first magnetoresistive element made of a magnetoresistive pattern provided on the second insulating layer 35, and 37 is a third magnetoresistive element made of a SiO ₂ thin film provided so as to cover the first magnetoresistive element 36. An insulating layer 38 is provided on the third insulating layer 37 and is a second conductor for generating a bias magnetic field connected to the first conductor 34. 1st insulating layer 33, 1st conductor 34, 2nd insulating layer 3
5, the first magnetic resistance element 36 and the third insulating layer 37 constitute a sensor section A39.

Reference numeral 40 denotes a fourth insulating layer made of glass glaze formed on the upper surface of the insulating substrate 31. The fourth insulating layer 40 is formed to maintain the surface smoothness of the insulating substrate 31 made of an alumina substrate. Things. Reference numeral 41 denotes a third magnetic field generated on the fourth insulating layer 40 for generating a bias magnetic field.
The third conductor 41 is provided in a direction orthogonal to the first conductor 34 in the sensor portion A39. Reference numeral 42 denotes a fifth insulating layer made of a SiO ₂ thin film or the like provided so as to cover a part of the third conductor 41, and 43 denotes a second insulating layer made of a magnetoresistive pattern provided on the fifth insulating layer 42. The reference numeral 44 denotes the second magnetoresistive element 4.
A sixth insulating layer 45 made of a SiO ₂ thin film or the like provided so as to cover 3 is provided on the sixth insulating layer 44 in a direction orthogonal to the second conductor 38 in the sensor portion A39. And a fourth conductor 45 for generating a bias magnetic field connected to the third conductor 41.
And the fourth insulating layer 40, the third conductor 41, the fifth insulating layer 42, the second magnetoresistive element 43, and the sixth insulating layer 44.
These form the sensor section B46.

Numeral 47 designates external electrodes 32a, 32b, 32c formed of through-hole electrodes formed on the insulating substrate 31.
32d, 32e, 32f, 32g, 32h, 32i, 3
2j, 32k, 32l, 32m is a protective film that covers the exterior surface with a part thereof exposed. The protective film 47 is made of a phenolic resin or an epoxy resin for the purpose of preventing moisture. The external electrodes 32a, 32b, 32c, 32d, 32e, 32f,
32g, 32h, 32i, 32j, 32k, 32l, 3
As shown in FIG. 9B, 2m is formed so as to extend from the upper surface of the insulating substrate 31 to the rear surface via the side surface.

FIGS. 10 (a) and (b), FIG. 11 (a)
(B), FIGS. 12 (a) (b) and 13 (a) (b)
FIG. 9 shows a manufacturing process diagram of the azimuth sensor according to the third embodiment of the present invention. Based on this manufacturing process diagram, a method of manufacturing the azimuth sensor according to the third embodiment of the present invention will be described.

In this azimuth sensor, a large number of azimuth sensors are manufactured using a sheet-like insulating substrate made of an alumina substrate having a large number of circular through holes, and finally, a central portion of the circular through hole is formed. Dividing vertically and horizontally by dicing provides an individualized direction sensor.

FIGS. 10A and 10B and FIG. 11A
(B), FIGS. 12 (a) (b) and 13 (a) (b)
Indicates the azimuth sensor in an individualized state,
First, as shown in FIG. 10A, arc-shaped, semi-circular, and circular through-holes are formed at four corners of the insulating substrate 31 made of an alumina substrate and at substantially the center, the long side, and the center of the short side. External electrodes 32a, 32b, 32c, 32 composed of hole electrodes
d, 32e, 32f, 32g, 32h, 32i, 32
j, 32k, 32l, 32m are formed. In addition, the external electrodes 32a, 32b, 32
c, 32d, 32e, 32f, 32g, 32h, 32
i, 32j, 32k, 32l, and 32m are made of silver-palladium and formed so as to extend from the upper surface of the insulating substrate 31 to the back surface of the insulating substrate 31 via the inner surface of the through hole.

Next, as shown in FIG. 10B, the external electrodes 32a, 32b, 32c, 32d, 32e, 32f,
32g, 32h, 32i, 32j, 32k, 32l, 3
A first insulating layer 33 and a fourth insulating layer 40 made of glass glaze are formed on the upper surface of the insulating substrate 31 at a position 2 m inside.

Next, as shown in FIG. 11A, a first conductor 34 for generating a bias magnetic field composed of a plurality of conductor patterns is formed on the first insulating layer 33,
A third conductor 41 for generating a bias magnetic field, comprising a plurality of conductor patterns, is formed on the fourth insulating layer 40. In this case, the third conductor 41 is formed in a direction orthogonal to the first conductor 34. The first conductor 34 has one end connected to the external electrode 32a and the other end connected to the external electrode 32k. One end of the third conductor 41 is connected to the external electrode 32d.
And the other end is connected to the external electrode 32k. Further, the first conductor 34 generates a bias magnetic field in the X-axis direction in FIG. 11A, while the third conductor 41 generates a bias magnetic field in the Y-axis direction in FIG. 11A. Things.

Next, as shown in FIG. 11B, a plurality of first conductors 34 for generating a bias magnetic field, which are composed of a plurality of conductor patterns, are covered, A second insulating layer 35 made of a SiO ₂ thin film or the like is formed so as to cover the first conductor 34 in a state where the connection portion 34a is exposed, and a third conductor for generating a bias magnetic field formed of a plurality of conductor patterns is formed. The fifth insulating layer 42 made of a SiO ₂ thin film or the like is formed so as to cover a part of the third conductor 41, that is, to cover the third conductor 41 with the plurality of connection portions 41 a of the third conductor 41 exposed. Form.

Next, as shown in FIG. 12A, a first magnetoresistive element 36 composed of four magnetoresistive patterns is formed on the second insulating layer 35 and the fifth
A second magnetoresistive element 43 composed of four magnetoresistive patterns is formed on the insulating layer. The first magnetoresistive element 36 forms a bridge circuit with four magnetoresistive patterns, and connects the four magnetoresistive patterns to the external electrodes 32e, 32g, 32j, and 32m. The second magnetoresistive element 43 also forms a bridge circuit with four magnetoresistive patterns, and connects the four magnetoresistive patterns to the external electrodes 32f, 32i, 32l, and 32m.

Next, as shown in FIG. 12 (b), a third insulating layer 37 made of a SiO ₂ thin film or the like is formed so as to cover the first and second magnetoresistive elements 36 and 43. 6
Is formed.

Next, as shown in FIG. 13A, a second conductor 38 for generating a bias magnetic field composed of a plurality of conductor patterns is formed on the third insulating layer 37.
On the sixth insulating layer 44, a fourth conductor 45 for generating a bias magnetic field composed of a plurality of conductor patterns is formed. In this case, the plurality of connection portions 38 in the second conductor 38
“a” is connected to a plurality of connecting portions 34 a of the first conductor 34. The plurality of connection portions 45a of the fourth conductor 45 are connected to the plurality of connection portions 4a of the third conductor 41.
1a.

Next, as shown in FIG. 13B, an external electrode 3 formed of a through-hole electrode formed on the insulating substrate 31 is formed.
2a, 32b, 32c, 32d, 32e, 32f, 32
g, 32h, 32i, 32j, 32k, 32l, 32m
A protective film 47 made of a phenol-based resin or an epoxy-based resin is formed so as to cover the exterior surface in a state where a part of is exposed.

As described above, the third embodiment of the present invention
Is manufactured.

In the manufacturing process of the direction sensor according to the third embodiment of the present invention, the first insulating layer 33 and the fourth insulating layer 40, and the second insulating layer 35 and the fifth insulating layer 4
2, the first magnetoresistive element 36 and the second magnetoresistive element 4
Third, the third insulating layer 37 and the sixth insulating layer 44 may be formed separately or integrally. For example, when the third insulating layer 37 and the sixth insulating layer 44 are integrally formed using a mask, the manufacturing process time can be reduced. .

In the third embodiment of the present invention, the first conductor 34 for generating a bias magnetic field, the first magnetoresistive element 36 composed of a magnetoresistive pattern, and the first conductor 34 are connected. Second conductor 38 for generating a bias magnetic field
, A third conductor 41 for generating a bias magnetic field provided in a direction orthogonal to the first conductor 34 in the sensor section A39, and a second magnetoresistive element 43 composed of a magnetoresistive pattern. And a fourth conductor 45 for generating a bias magnetic field, which is provided in a direction orthogonal to the second conductor 38 and is connected to the third conductor 41. Since the A39 and the sensor unit B46 are independently provided on one side of the same insulating substrate 31, it is not necessary to wind a coil for generating a bias magnetic field with a predetermined number of turns as in the related art. Is divided into a sensor unit A39 and a sensor unit B46, so that a low-direction, that is, a thin direction sensor can be obtained.

In the third embodiment of the present invention, the first conductor 34 for generating a bias magnetic field, the second conductor 38,
Since the third conductor 41 and the fourth conductor 45 are formed by the conductor pattern, the thickness of the azimuth sensor itself is also reduced, so that the shape of the azimuth sensor itself can be reduced in size.

Further, in the third embodiment of the present invention, the first magnetoresistive element 36 is connected from the upper surface of the insulating substrate 31 to the rear surface of the insulating substrate 31 via the inner surface of the through hole. External electrodes 32e, 32g, 3
2j, 32m, external electrodes 32f, 32i, 32l, 32m connected to the second magnetoresistive element 43, and external electrodes 32a connected to the first conductor 34 and the second conductor 38 for generating a bias magnetic field. , 32k and the external electrodes 32d, 32k connected to the third conductor 41 and the fourth conductor 45 for generating the bias magnetic field, so that these external electrodes 32a, 32d, 32e, 32f, 32g, 3
By soldering 2i, 32j, 32k, 32l, and 32m to a printed circuit board of an electronic device, surface mounting of the direction sensor can be easily performed.

Further, in Embodiment 3 of the present invention,
The external electrodes 32a, 32b, 32c, 32d, 32
e, 32f, 32g, 32h, 32i, 32j, 32
Since k, 32l, and 32m are constituted by through-hole electrodes, these external electrodes 32a, 32b, 32c, 32
d, 32e, 32f, 32g, 32h, 32i, 32
When forming j, 32k, 32l, and 32m, external electrodes 32a, 32b, 32c, 32d, 32e, and 32 are formed in a large number of circular through holes provided in a sheet-shaped insulating substrate.
f, 32g, 32h, 32i, 32j, 32k, 32
1 and 32m can be formed at the same time, and the central portion of the through-hole is divided vertically and horizontally into individual pieces, thereby forming external electrodes 32a, 32b and 32c formed of arc-shaped or semi-circular through-hole electrodes. , 32d, 32
e, 32f, 32g, 32h, 32i, 32j, 32
An orientation sensor having k and 32l can be easily obtained.

Furthermore, in the third embodiment of the present invention, the external electrode 32 connected to the first magnetoresistive element 36
e, 32g, 32j, and some external electrodes 3 of 32m
2m and some of the external electrodes 32f, 32i, 32l, and 32m connected to the second magnetoresistive element 43 are shared, so that the arrangement of the printed circuit board to which the external electrodes are connected is shared. Thus, the installation pattern can be simplified.

In the third embodiment of the present invention, the first conductor 34 and the second conductor 3 for generating a bias magnetic field are used.
Of the external electrodes 32a and 32k connected to the third conductor 8 and the third conductor 4 for generating a bias magnetic field.
External electrodes 32d connected to the first and fourth conductors 45,
Since some of the external electrodes 32k of the 32k are shared, the arrangement pattern of the printed circuit board to which the external electrodes are connected can be simplified.

[0063]

As described above, according to the present invention, on one side of the insulating substrate, a magnetic field comprising a first conductor for generating a bias magnetic field, a second conductor for generating a bias magnetic field, and a magnetoresistive pattern is provided. A resistance element, a third conductor for generating a bias magnetic field connected to the first conductor, and a fourth conductor for generating a bias magnetic field connected to the second conductor are defined as second, third, and third conductors.
Since it is provided in the form of being sequentially laminated with the fourth and fifth insulating layers interposed therebetween, the number of components can be reduced, and the work of winding the coil for generating the bias magnetic field with a predetermined number of turns as in the related art can also be performed. Since it becomes unnecessary, there is an effect that an azimuth sensor which is small in shape and inexpensive can be provided.

[Brief description of the drawings]

1A is a top view of an orientation sensor according to Embodiment 1 of the present invention. FIG. 1B is a cross-sectional view taken along line AA ′ of FIG.

FIGS. 2A and 2B are manufacturing process diagrams of the same direction sensor.

FIGS. 3A and 3B are manufacturing process diagrams of the same direction sensor.

FIGS. 4A and 4B are manufacturing process diagrams of the same direction sensor.

FIGS. 5A and 5B are manufacturing process diagrams of the same direction sensor.

FIGS. 6A and 6B are manufacturing process diagrams of the same-direction sensor.

FIGS. 7A and 7B are manufacturing process diagrams of the same direction sensor.

FIG. 8 is a cross-sectional view of a direction sensor according to Embodiment 2 of the present invention.

9A is a top view of an orientation sensor according to Embodiment 3 of the present invention. FIG.

FIGS. 10A and 10B are manufacturing process diagrams of the same direction sensor.

11A and 11B are manufacturing process diagrams of the same azimuth sensor.

12A and 12B are manufacturing process diagrams of the same azimuth sensor.

13A and 13B are manufacturing process diagrams of the same azimuth sensor.

14A is a perspective view of a conventional direction sensor. FIG. 14B is a top view of the direction sensor.

FIG. 15A is a cross-sectional view of the same direction sensor in which the upper surface is cut away. FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Insulating substrate 12a-12h External electrode 13 1st insulating layer 14 1st conductor 15 2nd insulating layer 16 2nd conductor 17 3rd insulating layer 18 Magnetoresistance element 19 4th insulating layer 20 3rd Conductor 21 Fifth insulating layer 22 Fourth conductor 31 Insulating substrate 32a to 32m External electrode 34 First conductor 35 Second insulating layer 36 First magnetoresistive element 37 Third insulating layer 38 Second conductor 39 Sensor part A 41 Third conductor 42 Fifth insulating layer 43 Second magnetoresistive element 44 Sixth insulating layer 45 Fourth conductor 46 Sensor part B

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masao Shinkoshi 1006 Kazuma Kadoma, Osaka Pref. Matsushita Electric Industrial Co., Ltd. (72) Inventor Masanori Samejima 1006 Kadoma, Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. F term (reference) 2G017 AA16 AC09 AD55 AD65 BA09

Claims (9)

[Claims] An insulating substrate; a first conductor for generating a bias magnetic field provided on one side of the insulating substrate; a second insulating layer provided so as to cover a part of the first conductor; This second
A second conductor for generating a bias magnetic field, which is provided on the insulating layer and is provided in a direction orthogonal to the first conductor;
A third insulating layer provided so as to cover a part of the conductor, a magnetoresistive element including a magnetoresistive pattern provided on the third insulating layer, and a third insulating layer provided so as to cover the magnetoresistive element. And a third insulating layer provided on the fourth insulating layer and connected to the first conductor, for generating a bias magnetic field.
And a fifth insulating layer provided to cover the third conductor, and a fifth insulating layer provided on the fifth insulating layer and connected to the second conductor for generating a bias magnetic field. An orientation sensor comprising: a conductor; 2. An insulating substrate, a first conductor for generating a bias magnetic field provided on one side of the insulating substrate, and a second insulating layer provided so as to cover a part of the first conductor. This second
A second conductor for generating a bias magnetic field, which is provided on the insulating layer and is provided in a direction orthogonal to the first conductor;
A third insulating layer provided so as to cover a part of the conductor, a magnetoresistive element including a magnetoresistive pattern provided on the third insulating layer, and a third insulating layer provided so as to cover the magnetoresistive element. And a fourth insulating layer provided on the fourth insulating layer and connected to the second conductor for generating a bias magnetic field.
And a fifth insulating layer provided so as to cover the fourth conductor, and a fifth insulating layer provided on the fifth insulating layer and connected to the first conductor for generating a bias magnetic field. An orientation sensor comprising three conductors. 3. A first conductor for generating a bias magnetic field, a second insulating layer provided so as to cover a part of the first conductor, and a magnetoresistance provided on the second insulating layer. A first magnetoresistive element composed of a pattern, a third insulating layer provided so as to cover the first magnetoresistive element, and a first conductor provided on the third insulating layer and provided on the first conductor. A sensor unit A including a connected second conductor for generating a bias magnetic field;
A third conductor for generating a bias magnetic field provided in a direction orthogonal to the first conductor in the sensor section A, a fifth insulating layer provided to cover a part of the third conductor, 5
A second magnetoresistive element composed of a magnetoresistive pattern provided on the insulating layer, a sixth insulating layer provided to cover the second magnetoresistive element, and a second magnetoresistive element provided on the sixth insulating layer. And a fourth conductor for generating a bias magnetic field connected to the third conductor and provided in a direction orthogonal to the second conductor. And a sensor unit B independently provided on one side of the same insulating substrate. 4. A first conductor for generating a bias magnetic field,
The direction sensor according to any one of claims 1 to 3, wherein the third conductor, the third conductor, and the fourth conductor are formed by a conductor pattern. 5. An external electrode connected to the magnetoresistive element, an external electrode connected to the first and third conductors for generating a bias magnetic field, and an external electrode connected to the first and third conductors for generating a bias magnetic field, at least on a back surface of the insulating substrate. 3. The azimuth sensor according to claim 1, further comprising an external electrode connected to the second conductor and the fourth conductor. 6. An external electrode connected to a first magnetoresistive element, an external electrode connected to a second magnetoresistive element, and a first magnetic field for generating a bias magnetic field, at least on a back surface of the insulating substrate.
4. The azimuth sensor according to claim 3, further comprising an external electrode connected to the third conductor and the second conductor, and an external electrode connected to the third and fourth conductors for generating a bias magnetic field. 7. The azimuth sensor according to claim 5, wherein the plurality of external electrodes are constituted by through-hole electrodes. 8. A part of the external electrodes connected to the first magnetoresistive element and some of the external electrodes connected to the second magnetoresistive element are shared. The azimuth sensor according to claim 6. 9. A part of the external electrodes connected to the first and second conductors for generating a bias magnetic field and the third and fourth conductors for generating a bias magnetic field. 7. The direction sensor according to claim 6, wherein some of the external electrodes to be connected are shared.