JP2002227919A - Vibration eliminator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the vibration eliminator capable of eliminating the vibra tion toward gravity certainly without influence by a slope of a setting place of the unit. SOLUTION: It is vibration eliminator 1000 that the object for eliminating vibration is installed directly or indirectly on the vibration eliminator base 4, and the vibration from outside is not transmitted to the above object. It provides the slope detection method to detect the slope of the above vibration eliminator base and the posture control method 300 to control the posture of the above vibration eliminator base on the basis of slope detected by the above slope detection method.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of an anti-vibration apparatus for shutting off vibration from the outside. For example, when performing a gravity measurement using an interferometer, the installation conditions of the apparatus used for the measurement are preferably adjusted. The present invention relates to a vibration isolator.

[0002]

2. Description of the Related Art Conventionally, when fixing a device or a component that extremely dislikes vibration, a vibration isolator is used to prevent the vibration from adversely affecting such a device or component.

[0003] The vibration damping device includes a passive vibration damping device that absorbs small vibrations through elastic supporting means such as an air spring, and an active vibration damping device that forcibly suppresses vibrations by using a hydraulic actuator or the like. It can be broadly divided into devices. In some cases, the passive type anti-vibration apparatus does not have sufficient anti-vibration ability for large vibrations. Recently, active type anti-vibration apparatuses having more excellent anti-vibration ability are often used.

[0004]

However, even when a conventional active vibration isolator is used, it is desirable that the place where the vibration isolator is installed be horizontal. Can be performed reliably. If the installation location is inclined, the anti-vibration device itself will also incline, and the anti-vibration direction and the direction of gravity will not be the same direction, and the anti-vibration device will not be able to maximize the anti-vibration effect There was a problem. In particular, in the case of gravity measurement using an interferometer, accurate measurement cannot be performed unless the falling direction is aligned with the direction of gravity, so that there is a problem that the installation place is necessarily limited. The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a vibration isolation device that can reliably perform a vibration isolation operation in the direction of gravity without being affected by the inclination of the installation location of the device. .

[0005]

In order to solve the above-mentioned problems, the invention according to claim 1 is, for example, as shown in FIGS. An anti-vibration apparatus 1000 that is attached to an external device and that performs vibration isolation so as to prevent external vibrations from being transmitted to the vibration isolation target, wherein the tilt detection unit (tilt detector 200) detects the tilt of the vibration isolation table; Attitude control means (attitude control device 30) for controlling the attitude of the vibration isolation table based on the inclination detected by the detection means.
0).

According to the first aspect of the present invention, even when the place where the vibration isolation device is installed is inclined, the inclination of the vibration isolation table is detected by the inclination detection means, and the inclination control means detects the inclination of the vibration isolation table. The posture of the anti-vibration table is controlled based on the detected inclination, and is made horizontal, so that the anti-vibration device can accurately perform the anti-vibration operation in the direction of gravity.
Therefore, the anti-vibration device can exhibit the maximum anti-vibration effect without being affected by the inclination of the installation location.

According to a second aspect of the present invention, in the vibration damping device according to the first aspect, an actuator 5 for driving the vibration isolation table, and a vibration detecting means (acceleration sensor 12) for detecting vibration of the vibration isolation table. Control means (control device 13) for performing feedback control of the output of the vibration detection means to suppress vibration of the vibration isolation table with respect to the actuator;
The actuator is configured to generate an electromagnetic force by supplying a current to a coil portion (coil 52) housed in a gap in which a magnetic field is formed, thereby driving the coil portion in a vertical direction, It is characterized in that it is configured to drive the anti-vibration table connected to the unit.

According to the second aspect of the invention, it is needless to say that the same effect as that of the first aspect of the invention can be obtained. When the anti-vibration device having the anti-vibration table is minutely displaced by external vibration, the vibration detecting means installed on the anti-vibration table detects the vibration of the anti-vibration table,
In response, the control means controls the actuator to suppress the vibration of the vibration isolation table. More specifically, since a magnetic field is formed in the gap of the actuator, when a predetermined current is supplied from the control means to the coil portion housed in the gap, an electromagnetic force is generated in the gap and the coil is The unit is driven up and down. By controlling this driving force to be approximately the same as the external vibration and in the opposite direction, the actuator drives the anti-vibration table in the direction opposite to the direction of the vibration.
As a result, the displacement of the vibration isolation table can be suppressed, and the position of the vibration isolation table can be kept constant.

Therefore, since the actuator is operated by current control, a pump and a valve are not required unlike a hydraulic actuator, so that the vibration isolator can be more easily miniaturized and more excellent in responsiveness. . Here, as the vibration detecting means, for example, an accelerometer, a speedometer, a displacement meter, or the like is used. As a means for forming a magnetic field, for example, a permanent magnet or an electromagnet is used.

[0010]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the present embodiment, in addition to the vibration isolation device 1000 according to the present invention, the interferometer 40
An embodiment of the vibration isolator 1000 for performing gravity measurement using an absolute gravity measuring device (not shown) and an absolute gravity measuring device according to the present invention will be described. Since this is merely an example using the vibration damping device 1000, only an outline is shown.

FIG. 1 is a front view of a vibration isolator 1000 according to the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a rear view thereof. FIG. 4 shows a vibration isolator main body 10 constituting a part of the vibration isolator 1000.
5, FIG. 5 is a plan view of the same, FIG. 6 is a sectional view taken along the line AA of FIG. 5, and FIG. 7 is a block diagram showing the configuration of the vibration isolator main body 100. FIG. 8 shows a vibration isolator 10.
FIG. 3 is a diagram illustrating a schematic configuration and a principle of an interferometer 400 when performing gravity measurement using 00.

The structure of the vibration isolator 1000 will be described. The vibration isolation device 1000 mainly includes the vibration isolation device main body 100,
Tilt detector 200, attitude control device 300, case 101
Etc. The anti-vibration apparatus main body 100 is mounted on a mounting table 301 constituting a base, and an interferometer mounting base 406 is installed so as to cover the anti-vibration apparatus main body 100.
Prisms 401 and 403, which are parts of the interferometer 400, are mounted on the upper part of the interferometer mounting base 406. The case 101 is installed on the mounting table 301 so as to cover the tilt detector 200 installed on the mounting table 301.

At the lower part of the mounting table 301, front legs 301a,
And two rear legs 301b, 301b, which support the anti-vibration device 1000 on the base. The mounting table 301 has respective rear legs 301b, 301b.
A posture control device 300 is installed so as to be connected to an upper portion of the case 101, and a cover 102 that covers the posture control device 300 is attached to the rear of the case 101. The size of the vibration isolator 1000 having the above configuration is, for example, 450 depth.
mm, width 300 mm and height 210 mm.

Next, the main configuration of the vibration isolator 1000 will be described in detail. First, the structure of the vibration isolation device main body 100 will be described. The anti-vibration apparatus main body 100 mainly includes an anti-vibration target mounting stage 1, a bridge 2 for mounting the anti-vibration target mounting stage 1, a detector mounting base 3, an anti-vibration base 4, an actuator 5, and a base 6. , Stopper 7, acceleration sensor 1
2. It is composed of a control device 13, an amplifier 14, and the like, and is fixed to the upper surface of the mounting table 301. The size and the depth of the vibration isolator main body 100 are, for example, about 95 mm, and the height is, for example, about 70 mm.

An object-to-be-vibrated mounting stage 1 for mounting a vibration-removal object is mounted on a bridge 2 which is a gate type, and is fixed to the bridge 2 with a nut 11. The bridge 2 is fixed to the upper surface of the detector mounting base 3, both ends before and after the drawing in FIG. 4, and the detector mounting base 3 is, for example, a plate-like body having a substantially square shape in plan view. The four sides are fixed to the upper surface with nuts 31. An acceleration sensor 12 for detecting vibration is mounted on the detector mounting base 3. The vibration isolation table 4
For example, it is a plate-like body having a substantially square shape in a plan view, and is connected to the actuator 5 via drive shafts 53 provided on all sides.
A terminal block 41 is disposed at the center of both ends before and after the anti-vibration table 4 in FIG. Stand 4
Fixed to A plurality of pins 41a... Are horizontally arranged on both sides of the upper portion of the terminal block 41.
Is connected to the acceleration sensor 12.

The lower part of the actuator 5 is embedded in the base 6 and fixed by a nut 56.
The vibration isolation table 4 is elastically supported above the base 6 via an upper leaf spring 91 and a lower leaf spring 92. Base 6 is
For example, it is a plate-like body having a substantially square shape in a plan view.
And the stopper 7 extends to a height of about half of the bridge 2.

A U-shaped terminal block 62 is disposed on the upper surface of the base 6, that is, in the center of the front and rear ends in FIG. 4, and is fixed to the base 6 with a nut 63. The terminal block 62 has substantially the same height as the vibration isolation table 4, and a plurality of protruding pins are juxtaposed on the upper horizontal surface in the vertical direction.

The stopper 7 is provided for restricting the upward displacement of the vibration isolator 4 elastically supported by the upper leaf spring 91 and the lower leaf spring 92, and controls a certain amount of vibration transmitted from the outside. If it exceeds, the upper leaf spring fixing member 8
1 (described later) comes into contact with the stopper 7.

Next, the support structure of the vibration isolation table 4 by the base 6 will be described in detail. FIG. 4 shows the base 6 and the vibration isolation table 4.
An upper leaf spring fixing member 81 and a lower leaf spring fixing member 82 are installed at both left and right ends of the drawing in FIG. The upper leaf spring fixing member 81 and the lower leaf spring fixing member 82 are long plate-like bodies having a length slightly shorter than one side of the base 6, and extend along the side edges of the base 6 and the vibration isolation table 4. Are located. Two upper and lower upper leaf springs 91 and lower leaf springs 9 are provided at both ends of the upper leaf spring fixing member 81 and the lower leaf spring fixing member 82 in parallel.
2 has one end fixed. The other ends of the upper leaf spring 91 and the lower leaf spring 92 project outward of the base 6 and are fixed to a leaf spring fixing plate 83.

The leaf spring fixing plate 83 includes an upper leaf spring fixing member 8.
1 and a long plate-like body having the same width as the lower leaf spring fixing member 82, and the height is slightly lower than the stopper 7. The leaf spring fixing plate 83 has four vertically parallel leaf springs (two upper leaf springs 9) at both ends in the longitudinal direction.
It is configured to fix one and two lower leaf springs 92).

As described above, the upper leaf spring 91 fixed to the vibration isolation table 4 by the upper leaf spring fixing member 81 and the lower leaf spring 92 fixed to the base 6 by the lower leaf spring fixing member 82.
Are fixed to the leaf spring fixing plate 83, respectively, and bend up and down according to the vertical vibration of the base 6. Therefore, when the external vibration is transmitted from the mounting table 301 to the base 6, the upper plate spring 91 and the lower plate spring 92 bend, so that the vibration damping table 4 is elastically supported above the base 6.

The actuator 5 is a motor that performs a linear motion such as a voice coil motor, and includes a magnet 51, a coil bobbin (not shown), a coil 52, a drive shaft 53, a leaf spring 54, a terminal block 55, and the like. .

The magnet 51 is a substantially cubic permanent magnet fixed to the base 6 by a nut 56 and provided with cylindrical grooves on all sides, and a magnetic field is formed in the cylindrical groove. The coil 52 which is a wire wound around the coil bobbin is housed one by one in the upper part in the cylindrical groove. The upper part of the coil bobbin is connected to the lower part of the drive shaft 53, and the lower part of the coil 52 is supported by a leaf spring 54. Further, both ends of the coil 52 are connected to pins provided on the terminal block 55. Actuator 5 having the above configuration
When a predetermined current is supplied to the coil 52, an electromagnetic force is generated by a magnetic field in the cylindrical groove, and urges the drive shaft 53 in the vertical direction.

The control device 13 receives the vibration signal detected by the acceleration sensor 12 through the terminal block 41, and controls the driving force of the coil 52 so that a force acts on the signal in the opposite direction. The amplifier 14 receives an instruction from the control device 13, and receives a terminal block 62 to which the amplifier 14 is connected, and a coil 52.
A predetermined current is supplied to the coil 52 via the terminal block 55 to which the. As a result, a vibration in a direction opposite to the vibration detected by the acceleration sensor 12 is generated in the coil 52, and the vibration isolator 4 is driven via the drive shaft 53. The object to be shaken can always be kept at a fixed position.

Next, the structures of the tilt detector 200 and the attitude control device 300 will be described. First, the tilt detector 200 will be described. Although not shown, the tilt detector 200
Is mainly composed of a pendulum, a motor provided on the pendulum, a displacement detection capacitor, a control unit, a detection unit, and the like, and detects inclination by the displacement of the pendulum.

A pendulum whose upper end is rotatably supported is disposed inside the main body of the tilt detector 200, and the pendulums are arranged in directions perpendicular to each other (for example, north-south direction and east-west direction) according to the tilt. Rotate the pendulum. Opposing magnetic poles each including a pole piece are mounted on both sides of the pendulum, and coils are provided so as to surround the pole piece of the opposing magnetic pole and cross the magnetic flux between the magnetic poles. The coil and the opposing magnetic poles constitute a motor corresponding to the swing of the pendulum in each direction.

At the lower part of the pendulum, a displacement detecting capacitor is constituted by a pair of east-west electrodes and a pair of north-south electrodes arranged opposite to each other. And the displacement due to the north-south swing is detected. The control unit sends a current that cancels the displacement of the pendulum detected by the displacement detection capacitor to the coil of the motor, and further, the detection unit detects the inclination angle based on the intensity of the current that is sent to the coil. .

Next, the attitude control device 300 will be described. The attitude control device 300 mainly includes a mounting table 301, an attitude control circuit (not shown), an attitude correction mechanism 302, a drive motor 303, and the like.

The mounting table 301 has three legs at the bottom,
Of these legs, the front leg 301a is provided at the front center of the mounting table 301, and the remaining two rear legs 301b are provided at both rear ends of the mounting table 301, and the rear legs 301b are respectively connected to the posture correcting mechanism 302. .

The attitude control circuit outputs an attitude control signal for returning the mounting table 301 to a horizontal position based on the tilt angle detected by the tilt detector 200. The drive motor 303 receives the attitude control signal. Posture correcting mechanism 30
Stretch 2 The posture correcting mechanism 302 includes, for example, a screw shaft connected to the drive motor 303, and the two rear legs 301b provided at both rear ends of the mounting table 301 expand and contract by rotation of the drive motor 303. The inclination of the mounting table 301 can be adjusted.

Next, an outline of the structures of the interferometer 400 and the absolute gravity measuring device used together with the vibration isolator 1000 according to the present invention will be described. The interferometer 400 mainly includes a beam splitter 401 and two corner cube prisms 40.
2, 404 and two right-angle prisms 403 and 405, and the schematic configuration and principle are as shown in FIG.

The beam splitter 401 and the right-angle prism 403 are juxtaposed on the interferometer mounting base 406.
On the object mounting stage 1 of the vibration isolator main body 100,
The corner cube prism 404 is different from the right angle prism 40.
It is mounted so that it is directly under 3. Above the beam splitter 401, a cylindrical vacuum chamber (not shown) which is a part of an absolute gravity measuring device (not shown) is attached.
The corner cube prism 402 falls freely inside the vacuum chamber. The corner cube prism 402 is located directly above the beam splitter 401, and the beam splitter 4
A right angle prism 405 is disposed directly below 01.

When a laser beam is irradiated in such an interferometer 400 and an absolute gravity measuring device, the laser beam split and combined by the beam splitter 401 can be observed as interference fringes. By measuring, the distance at which the corner cube prism 402 falls freely is obtained, and further, the absolute gravity can be obtained using this.

Next, the operation of the anti-vibration apparatus 1000 of the present embodiment configured as described above will be described in the following order. First, the tilt detector 200 and the attitude control device 300
The operation for leveling the anti-vibration apparatus main body 100 due to the above will be described, and then the anti-vibration operation by the anti-vibration apparatus main body 100 will be described. The observation of interference fringes by the interferometer 400, which is the object of vibration isolation of the vibration isolation device main body 100, and the gravity measurement operation by the absolute gravity measurement device in this state will be described.

First, the vibration isolator 1000 is installed on a base (not shown) connected to the ground. If the base is inclined,
The anti-vibration device 1000 is also tilted in the same manner, and the pendulum disposed inside the main body of the tilt detector 200 moves. By this swing, the electric capacity of the displacement detection capacitor provided at the lower part of the pendulum is moved. Changes. The control unit receives the displacement of the pendulum detected by the displacement detection capacitor, sends a current that cancels the current to the coil provided in the motor, and the detection unit detects the inclination angle based on the intensity of the current. .

Next, when the inclination angle is transmitted from the inclination detector 200 to the attitude control device 300 as a detection signal,
The attitude control circuit that receives the signal outputs an attitude control signal to the drive motor 303 so as to adjust the inclination of the mounting table 301 and level the attitude of the vibration isolation device 1000. The drive motor 303 is, for example, a servomotor or the like. When a posture control signal is input, the drive motor 303 is driven in accordance with the posture control signal, and causes the posture correction mechanism 302 to expand and contract. The posture correcting mechanism 302 moves the screw shaft up and down according to the number of rotations of the drive motor 303, and expands and contracts the two rear legs 301b provided at both rear ends of the mounting table 301.
Thus, the inclination of the mounting table 301 can be adjusted, and the vibration isolation table 4 of the vibration isolation device main body 100 can be accurately leveled.

Next, an operation of removing the corner cube prism 404, which is a part of the interferometer 400, installed on the vibration-removing object mounting stage 1 of the vibration removing device main body 100 will be described. First, the vibration isolator main body 100 is mounted on the mounting table 3.
Although the base 6 is fixed to 01, it is conceivable that lateral and vertical vibrations from the outside are transmitted to the vibration-removing object that dislikes the vibration through the mounting table 301.

In the vibration isolator main body 100, the horizontal vibration transmitted from the mounting table 301 is suppressed by the upper leaf spring 91 and the lower leaf spring 92. Acts as a spring system, so that the vibration isolation table 4 is affected only by vertical vibrations. Therefore, only the vertical vibration needs to be controlled.

More specifically, when the mounting table 301 is slightly displaced upward by vibration, the anti-vibration table 4 also attempts to be displaced upward, but the anti-vibration table 4 starts to be displaced upward. Then, the acceleration is detected by the acceleration sensor 12, and the acceleration signal is transmitted to the control device 13. The control device 13 generates a control signal that acts in the opposite direction to the detected acceleration signal so that the acceleration becomes zero, and transmits the control signal to the amplifier 14. Amplifier 14
Amplifies the received control signal and supplies a current to the coil 52. Then, a force is generated in the coil 52 housed in the cylindrical groove provided in the magnet 51, and the drive shaft 53 is urged downward. That is, the vibration isolation table 4 is
As a result, the anti-vibration table 4
Can be suppressed, and the vibration isolation table 4 can be kept at a predetermined position.

Also, even when the mounting table 301 is slightly displaced downward, the anti-vibration table 4 is similarly subjected to a reverse force. Vibration is removed by the action of the actuator 5, and the vibration-removal target installed on the vibration-removal target mounting stage 1 can always maintain a fixed position.

Next, the operation of performing gravity measurement by the interferometer 400 and the absolute gravity measurement device using the corner cube prism 404 whose vibration is removed by the vibration removal device main body 100 will be described. First, the beam splitter 401 is irradiated with laser light. The beam splitter 401 divides the incident light of the laser light into two orthogonal optical paths of transmitted light and reflected light. First, the right-angle prism 403 provided on one optical path bends the transmitted light at right angles, so that the transmitted light reaches the corner cube prism 404 on the vibration-removal target mounting stage 1. The light is reflected by the corner cube prism 404 and returns to the right-angle prism 403 again.
It returns to 01 as reflected light. The other optical path is directed toward the inside of the vacuum chamber, which is a part of the absolute gravity measuring device. The light is reflected by the corner cube prism 402 provided inside the vacuum chamber, and returns to the beam splitter 401 again. The beam splitter 401 combines these reflected lights and sends the reflected lights again as reflected light to the right-angle prism 405 located immediately below the beam splitter 401.
The reflected light is finally extracted by 5.

When irradiating the laser beam as described above,
When the corner cube prism 402 is freely dropped in the vacuum chamber, there is a difference in the optical path length of the reflected light returning from the corner cube prism 402 and the right-angle prism 403 to the beam splitter 401, and interferes with the reflected light extracted from the right-angle prism 405. A change in the intensity of the stripes can be seen. Using the change in the intensity of the interference fringes, the distance at which the corner cube prism 402 falls freely is obtained by the absolute gravity measuring device, and the absolute gravity at the measurement location can be obtained based on the distance.

As described above, the anti-vibration device 100 of this embodiment
0, the tilt detector 200 and the attitude control device 30
0 adjusts the mounting table 301 of the anti-vibration apparatus 1000 to make the anti-vibration apparatus 1000 horizontal.
The anti-vibration table 4 is also horizontal, and the anti-vibration device main body 100
Can match the direction of vibration isolation with the direction of gravity, so that the vibration isolation operation can be reliably performed without being affected by the inclination of the installation location. In addition, since the vibration isolation device 1000 is configured to be easily miniaturized, even when the vibration isolation target is a small device such as a prism or a component, it is possible to save space as a small vibration isolation device suitable for this. it can.

Further, when gravity is measured by an interferometer using the vibration isolator 1000, the vibration can be accurately eliminated by mounting the prism on the vibration isolator main body 100. Can be used accurately. Also, when gravity measurement is performed by dropping a prism or the like, since the vibration isolation device 1000 adjusts the mounting table 301 horizontally, the falling direction can be adjusted to the direction of gravity, and accurate gravity measurement can be performed. it can.

In the above embodiment, one embodiment of the vibration isolator according to the present invention has been described. However, the present invention is not limited to the above embodiment, and various modifications are possible. Needless to say. For example, in the tilt detector 200 of the above embodiment, the tilt angle is detected by the coil current when the position of the pendulum is restored, but the tilt angle of the pendulum is directly detected by an optical device. The method of detecting the inclination angle may be any method. Further, although the attitude control device 300 is a screw type driven by a motor, the height may be adjusted by an air spring, for example, and any type of height adjustment method may be used.

Further, in the vibration isolator main body 100, the number of the cylindrical grooves provided in the magnet 51 and the number of the coils 52 accommodated in the cylindrical grooves are four, but any number is possible. Further, the upper leaf spring 91 and the lower leaf spring 92 are provided in the upper and lower two stages, but may be any number.

[0047]

According to the first aspect of the present invention, even when the place where the vibration isolation device is installed is inclined, the inclination of the vibration isolation table is detected by the inclination detection means, and the inclination is detected by the attitude control means. Based on the inclination detected by the means,
Since the posture of the vibration isolation table is controlled and made horizontal, the vibration isolation device can accurately perform the vibration isolation operation in the direction of gravity, and therefore, the vibration isolation device is not affected by the inclination of the installation location. , Can exhibit the maximum anti-vibration effect.

According to the second aspect of the invention, it is needless to say that the same effect as the first aspect of the invention can be obtained. When the anti-vibration device having the anti-vibration table is minutely displaced by external vibration, the vibration detecting means installed on the anti-vibration table detects the vibration of the anti-vibration table,
In response, the control means controls the actuator to suppress the vibration of the vibration isolation table. More specifically, since a magnetic field is formed in the gap of the actuator, when a predetermined current is supplied from the control means to the coil portion housed in the gap, an electromagnetic force is generated in the gap and the coil is The unit is driven up and down. By controlling this driving force to be approximately the same as the external vibration and in the opposite direction, the actuator drives the anti-vibration table in the direction opposite to the direction of the vibration.
As a result, the displacement of the vibration isolation table can be suppressed, and the position of the vibration isolation table can be kept constant.

Therefore, since the actuator is operated by current control, a pump and a valve are not required unlike a hydraulic actuator, so that the vibration isolator can be more easily miniaturized and more excellent in responsiveness. .

[Brief description of the drawings]

FIG. 1 is a front view of a vibration isolator according to the present invention.

FIG. 2 is a plan view of the vibration damping device according to the present invention.

FIG. 3 is a rear view of the vibration damping device according to the present invention.

FIG. 4 is a front view of an anti-vibration device main body which constitutes a part of the anti-vibration device according to the present invention.

FIG. 5 is a plan view of the main body of the vibration isolation device.

FIG. 6 is a cross-sectional view taken along line AA of FIG.

FIG. 7 is a block diagram illustrating a configuration of a vibration isolation device main body.

FIG. 8 is a diagram showing a schematic configuration and principle of an interferometer when gravity measurement is performed using the vibration damping device according to the present invention.

[Explanation of symbols]

 1000 Anti-vibration device 4 Anti-vibration table 5 Actuator 52 Coil (coil part) 12 Acceleration sensor (vibration detecting means) 13 Control device (control means) 200 Tilt detector (tilt detecting means) 300 Posture control device (posture control means)

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3J048 AB07 AD01 BE09 EA13 5D107 AA16 BB09 CC08 CC09 CC10 DD12 5H633 BB09 GG03 GG05 GG15 GG22 HH02 JA03

Claims (2)

[Claims] 1. An anti-vibration apparatus for directly or indirectly mounting a vibration-removal target on a vibration-isolation table, and for removing vibrations from the outside so as not to be transmitted to the vibration-elimination target. Inclination detection means for detecting the inclination of, based on the inclination detected by the inclination detection means,
And a posture control means for controlling a posture of the vibration isolation table. 2. The vibration isolation device according to claim 1, wherein an actuator for driving the vibration isolation table, vibration detection means for detecting vibration of the vibration isolation table, and feedback of an output of the vibration detection means, Control means for performing control to suppress vibration of the vibration isolation table with respect to an actuator, wherein the actuator supplies an electromagnetic force by supplying a current to a coil portion housed in a gap in which a magnetic field is formed. The vibration isolator is configured to generate and drive the coil unit in a vertical direction to drive the vibration isolation table connected to the coil unit.