JP2002217274A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002217274A5 JP2002217274A5 JP2001010850A JP2001010850A JP2002217274A5 JP 2002217274 A5 JP2002217274 A5 JP 2002217274A5 JP 2001010850 A JP2001010850 A JP 2001010850A JP 2001010850 A JP2001010850 A JP 2001010850A JP 2002217274 A5 JP2002217274 A5 JP 2002217274A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001010850A JP2002217274A (en) | 2001-01-18 | 2001-01-18 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001010850A JP2002217274A (en) | 2001-01-18 | 2001-01-18 | Method for manufacturing semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002217274A JP2002217274A (en) | 2002-08-02 |
| JP2002217274A5 true JP2002217274A5 (en) | 2008-02-28 |
Family
ID=18878086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001010850A Withdrawn JP2002217274A (en) | 2001-01-18 | 2001-01-18 | Method for manufacturing semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002217274A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003242481A1 (en) * | 2003-06-19 | 2005-01-04 | Rorze Corporation | Thin plate-supporting body |
| JP4554378B2 (en) | 2005-01-21 | 2010-09-29 | 富士通セミコンダクター株式会社 | Nitride film forming method, semiconductor device manufacturing method, and capacitor manufacturing method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63308928A (en) * | 1987-06-11 | 1988-12-16 | Fuji Electric Co Ltd | Wafer conveying equipment |
| JPH07130692A (en) * | 1993-10-29 | 1995-05-19 | Disco Abrasive Syst Ltd | Surface grinder |
| JP3711189B2 (en) * | 1997-05-23 | 2005-10-26 | 大日本スクリーン製造株式会社 | Substrate transfer device |
| JP2000142876A (en) * | 1999-01-01 | 2000-05-23 | Sharp Corp | Base storage cassette |
| JP4531194B2 (en) * | 1999-04-15 | 2010-08-25 | 株式会社半導体エネルギー研究所 | Electro-optical device and electronic apparatus |
-
2001
- 2001-01-18 JP JP2001010850A patent/JP2002217274A/en not_active Withdrawn