JP2002214615A - Liquid crystal display element and method of manufacturing liquid crystal display element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the display grade by preventing generation of an internal offset voltage in driving and the occurrence of a display defect by turning and a display failure by varying of electrical characteristics between a vertical alignment layer and a tilt alignment layer of a liquid crystal display element of a hybrid aligned nematic type display mode. SOLUTION: Polyimide of the same kind which indicates a horizontal alignment characteristic is deposited as the raw material films of the vertical alignment layer 20 and tilt alignment layer 24 of the liquid crystal display element 10 and thereafter, the vertical alignment layer 20 is irradiated with UV rays 26 in the perpendicular direction in such a manner that the total integrated quantity of energy attains 3J. The tilt alignment layer 24 is irradiated with UV rays 27 from a diagonal direction in such a manner that the total integrated quantity of energy attains 3J which is the same as that of the UV rays 26. As a result, the vertical alignment layer 20 and the tile alignment layer are made nearly the same in their dielectric constant and specific resistance.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device and a method of manufacturing a liquid crystal display device, and more particularly to a liquid crystal display device and a liquid crystal display which can obtain high display quality in a liquid crystal display device of a hybrid aligned nematic type display mode. The present invention relates to a device manufacturing method.

[0002]

2. Description of the Related Art In recent years, liquid crystal display elements used for image display and optical switches have been widely used in portable devices because of their features of being thin and lightweight. As a liquid crystal display element used in this portable device, a liquid crystal display element of a twisted nematic type (hereinafter abbreviated as TN type) display mode has been frequently used. When a liquid crystal display element of this TN type display mode is used, for example, a portable device with a backlight and a size of 10 inches generally requires about 2.5 W of power consumption.

On the other hand, the power consumption of portable devices has been reduced, and the power consumption of liquid crystal display devices has also been strongly demanded. As one of the techniques for reducing the power consumption of this liquid crystal display element, as shown in FIG. 7, a vertical alignment film 2 is formed on one electrode substrate 1 while a tilt alignment film 4 is formed on an opposite electrode substrate 3. A hybrid aligned nematic type (hereinafter abbreviated as HAN type) display mode in which a film is formed and an image is displayed using a molecular arrangement in which the pretilt angle of the liquid crystal molecules 7 in the liquid crystal layer 6 is gradually changed. The practical use of the liquid crystal display element 8 is being promoted. The HAN type display mode has a characteristic that it is effective for driving a liquid crystal at a low voltage because there is no threshold in the voltage application characteristic as in the TN type display mode.

In such a HAN type display mode liquid crystal display element 8, conventionally, as the vertical alignment film 2, an alignment film having a vertical alignment function only by coating without a rubbing treatment is required. Was formed using the above-mentioned raw material film. On the other hand, as the tilt alignment film 4, a raw material film of an alignment film which originally has a horizontal alignment function and which easily has a tilt alignment function by performing a rubbing treatment after coating has been used.

[0005]

SUMMARY OF THE INVENTION
HAN type display mode liquid crystal display element
Vertical alignment film using raw material film of alignment film with different characteristics
The vertical alignment film and the tilt
The electrical characteristics of the alignment film are completely different. For example, vertical alignment film
Has a dielectric constant of 3.3 to 4.0 at 1 kHz and a specific resistance.
5 × 10^FifteenΩcm, 1 kHz for tilt alignment film
Dielectric constant of 3.0 to 3.2, specific resistance of 1 × 10 ¹⁶Ωcm,
Was different.

For this reason, the conventional HAN type liquid crystal display device generates an internal offset voltage due to the difference between the storage capacitance of the vertical alignment film and the storage capacitance of the tilt alignment film when an AC voltage is applied to the liquid crystal layer. The DC component due to the internal offset voltage is superimposed on the liquid crystal layer, and there is a problem in that display defects such as burn-in due to excessive potential or display failure due to insufficient potential are caused.

Therefore, the present invention has been made to solve the above problems, and has been developed to realize a HAN which realizes low power consumption of a liquid crystal display device.
In the liquid crystal display device of the type display mode, an internal offset voltage superimposed on the liquid crystal layer is not generated, and a display quality is obtained without a display defect caused by image sticking or display failure, and high reliability is obtained. It is an object of the present invention to provide a liquid crystal display device having the above and a method for manufacturing the liquid crystal display device.

[0008]

According to the present invention, there is provided a pair of substrates which have electrodes on at least one of them and which are disposed opposite to each other, and which have a substantially vertical alignment function formed on one of the pair of substrates. And a vertical alignment film having a tilt alignment function and being formed on the other substrate opposite to the one substrate on which the vertical alignment film is formed, and having substantially the same electrical characteristics as those of the vertical alignment film. A tilt alignment film exhibiting characteristics, and a liquid crystal composition sealed in a gap between the pair of substrates, which are arranged so that the vertical alignment film and the tilt alignment film face each other, are provided.

Further, according to the present invention, a vertical alignment film having a substantially vertical alignment function is formed on the first substrate of the first and second substrates having electrodes on at least one of the first and second substrates. After forming a tilt alignment film having a tilt alignment function and exhibiting substantially the same electrical characteristics as the electrical characteristics of the vertical alignment film, the vertical alignment film and the tilt alignment film are disposed so as to face each other. In a method for manufacturing a liquid crystal display element in which a liquid crystal composition is sealed in a gap between the first substrate and the second substrate, a raw material film of an alignment film of the same type is formed on the first substrate and the second substrate Forming a film, and irradiating the raw material film formed on the first substrate with a vertical alignment energy in a substantially vertical direction to impart a substantially vertical alignment function; Of the raw material film formed on the second substrate Te in an oblique direction, is irradiated with a tilted alignment energy of total energy approximately equal to the total energy of the vertical alignment energy, it is to implement a tilted alignment process step of imparting a tilt alignment function, a.

According to the present invention, the present invention provides a liquid crystal display device in a HAN type display mode, in which the vertical alignment film and the tilt alignment film have substantially the same electrical characteristics, and the storage capacity of the vertical alignment film and the storage of the tilt alignment film. By eliminating the difference in capacitance, it is possible to obtain a highly reliable liquid crystal display device with good display quality without causing display defects such as burn-in due to superposition of an internal offset voltage on the liquid crystal layer.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to a first embodiment shown in FIGS. In the present embodiment, in the liquid crystal display element of the HAN type display mode, in order to equalize the electrical characteristics of the vertical alignment film and the tilt alignment film that are opposed to each other when the substrate is opposed, an alignment film material that originally has a horizontal alignment function is used. Used as a raw material film for both the vertical alignment film and the tilt alignment film. In the vertical alignment film, only the polymer in the vertical direction is left in the raw material film of the alignment film, and the polymer in the other direction is decomposed. Thereby, vertical alignment characteristics are obtained. In addition, in the tilt alignment film, in the raw material film of the alignment film, only the polymer in the oblique direction that causes the pretilt angle is left, and the polymer in the other direction is decomposed to take the alignment characteristics. Is what you get.

FIG. 1 shows a TFT substrate 11 and a counter substrate 12.
Are opposed to each other with a spacer 15 interposed therebetween, a liquid crystal composition 14 composed of liquid crystal molecules 14 a is sealed in a gap formed by bonding the periphery with a sealant 13, and a polarizing plate 11 a
And a polarizing plate 12 a with a retardation plate
FIG. 1 is a schematic cross-sectional view showing a liquid crystal display element 10 in a HAN type display mode, in which is attached.

The TFT substrate 11 is composed of a thin film transistor (hereinafter abbreviated as TFT) element 17 for driving liquid crystal and an indium tin oxide (hereinafter abbreviated as ITO) pattern formed on a glass substrate 16 in a matrix. A pixel electrode 18 and a polyimide: AL-3 manufactured by JSR Corporation on the TFT element 17 and the pixel electrode 18.
046 as a raw material film.
The opposing substrate 12 has R (red), G
(Green) and B (blue) color filter layers 22 and a common electrode 23 made of ITO.
SR: polyimide: AL-3046 as a raw material film, a pretilt angle of 7.5 °, a vertical alignment film 20,
It has a tilt alignment film 24 having substantially the same dielectric constant and specific resistance. Reference numeral 25 denotes a frame light-shielding layer that covers the periphery of the display area of the liquid crystal display element 10.

Next, a method for manufacturing the liquid crystal display element 10 will be described. The TFT substrate 11 having the vertical alignment film 20 is formed by repeating the usual photolithography process.
On TFT 6, a TFT element 17 and a pixel electrode 18 are formed. On the TFT element 17 and the pixel electrode 18, a polyimide: AL-3046 manufactured by JSR Co., Ltd., which is a raw material for an alignment film and exhibits a horizontal alignment function, is dropped at the time of coating, and the raw material film 30 is formed by spin coating.

As shown in FIG. 2, in order to make the raw material film 30 have a vertical alignment function, as shown in FIG.
30 nm, for example, 30 nm so that the integrated amount becomes 3 J.
Irradiate at 0 mW for 10 sec. Since the non-polarized ultraviolet rays 26 in the direction of the arrow s have an electric field vector t perpendicular to the traveling direction, the raw material film 30 causes the polyimide molecules 30a parallel to the electric field vector t to undergo a polymer decomposition reaction. , A polyimide molecule 30 perpendicular to the electric field vector t
b is left without polymer decomposition.

That is, an alignment process for imparting a vertical alignment function to the raw material film 30 is performed by irradiating ultraviolet rays 26 from the vertical direction, and a vertical alignment film 20 is formed on the TFT substrate 11. When the electrical characteristics of the vertical alignment film 30 were measured, the dielectric constant at 1 kHz was 3.5 and the specific resistance was 4.5 × 1.
0 ¹⁵ Ωcm.

On the other hand, the opposing substrate 12 having the tilt alignment film 24 is formed on the glass substrate 21 by repeating the photolithography process to form the R (red), G (green), and B (blue) color filter layers 22 and the common electrode 23. To form On the common electrode 23, JSR Corporation polyimide: AL-3046, which is of the same type as the raw material film of the vertical alignment film 20 and has a horizontal alignment function at the time of coating, is dropped as a raw material film of the alignment film, and the raw material is formed by spin coating. The film 31 is formed.

Further, in order to make the raw material film 31 have a tilt alignment function, as shown in FIG. 3, the incident angle .theta. UV light 27 is applied. The ultraviolet rays 27 are applied to the raw material film 31 by oblique irradiation at the incident angle θ.
In consideration of the fact that the UV illuminance for the vertical alignment film 20 is smaller than that during the vertical alignment film 20, the total integrated amount is 3J, for example, 300 J
Irradiate 10 / cos θsec at mW.

Since the unpolarized ultraviolet ray 27 having an incident angle of 80 ° has an electric field vector w (vector w to w · cos θ on a plane) perpendicular to the incident direction which is the direction of arrow v. , The raw material film 31 has an electric field vector w
Is caused by a polymer decomposition reaction, and the polyimide molecules 31b perpendicular to the electric field vector w
Are left undegraded.

That is, by irradiating the raw material film 31 with a tilt alignment function having a pretilt angle of 7.5 ° by irradiation with ultraviolet rays 27 having an incident angle of 80 °, an alignment process is performed.
A tilt alignment film 24 is formed thereon. This tilt alignment film 2
When the electrical characteristics of No. 4 were measured, the dielectric constant at 1 kHz was 3.5 and the specific resistance was 4.8 × 10 ¹⁵ Ωcm, which were almost the same as the dielectric constant and specific resistance of the vertical alignment film 20.

After the tilt alignment film 24 is aligned, a sealant 13 and a transfer agent (not shown) are formed on the counter substrate 12.
While applying spacers 15 on the TFT substrate 11, the TFT substrate 11 and the counter substrate 12 are bonded together such that the vertical alignment film 20 and the tilt alignment film 24 face each other.
The sealant 13 is cured by heating to form a liquid crystal cell. Further, after the liquid crystal composition 14 is sealed in the gap between the liquid crystal cells, the polarizing plate 11a is attached to the TFT substrate 11, and the polarizing plate 12a with a retardation plate is attached to the counter substrate 12, thereby completing the liquid crystal display device.

When a black and white checker image of 10 mm square is lit for 12 hours on the liquid crystal display element 10 in the HAN type display mode, and a halftone image is displayed to evaluate the display quality. No display failure due to burn-in or display failure due to offset voltage
Good display images were obtained.

Further, the liquid crystal display element 10 is set to a temperature of 50
After conducting an electric current test for 1000 hours under conditions of 80 ° C. and 80% humidity, a similar burn-in test using the above-described black and white checker image of 10 mm square was also performed. The display image was obtained.

According to this structure, in the liquid crystal display element 10 in the HAN type display mode, the vertically aligned films 2 opposed to each other are arranged.
0 and the values of the dielectric constant and the specific resistance of the tilt alignment film 24 are substantially the same, so that the vertical alignment film 20 and the tilt alignment film 24
No internal offset voltage is generated due to the difference in the storage capacitance of the liquid crystal composition 14, and the liquid crystal composition 14 can obtain a stable applied voltage.
Therefore, the liquid crystal display element 10 can obtain high display quality without causing display failure due to image sticking or display failure.

Next, the present invention will be described with reference to a second embodiment shown in FIG. This second embodiment is the same as the first embodiment except that the raw material film of the alignment film used for the vertical alignment film 20 and the tilt alignment film 24 in the first embodiment is different. Therefore, the same reference numerals are given to the same parts, and the description thereof will be omitted.

In the liquid crystal display element 40 of the HAN type display mode according to the present embodiment, the JSR exhibiting a horizontal alignment function at the time of application as a raw material film of an alignment film on the TFT element 17 and the pixel electrode 18 on the glass substrate 16. Polyimide manufactured by: A
After forming L-1051, a vertical alignment film 33 is formed by irradiating ultraviolet rays 26 which are unpolarized from the vertical direction and have a peak wavelength of 365 nm to an integrated amount of 3 J, for example, at 300 mW for 10 seconds to impart a vertical alignment function. Film, TFT substrate 34
Is formed on the common electrode 23 on the glass substrate 21 with the same polyimide (AL-1051 manufactured by JSR Corporation) as the raw material film of the vertical alignment film 33. Ultraviolet light 27 having a peak wavelength of 365 nm is irradiated so that the total integrated amount of energy becomes 3 J, which is the same as that in the vertical alignment film 33 alignment treatment, to impart a tilt alignment function to the tilt alignment film 36 having a pretilt angle of 7.5 °. To form a film,
The counter substrate 37 is formed. When the electrical characteristics of the vertical alignment film 33 and the tilt alignment film 36 at this time were measured, the dielectric constant at 1 kHz was 3.8 and the specific resistance was 5.2 × 10
It was the same as ¹⁵ Ωcm.

After that, the TFT substrate 34 and the counter substrate 37 are bonded with the sealant 13, and after the liquid crystal composition 14 is sealed, the polarizing plate 34 a and the polarizing plate 37 a with a retardation plate are bonded.
The liquid crystal display element 40 of the HAN type display mode is completed.

As in the first embodiment, the liquid crystal display element 40 of the HAN type display mode, which is manufactured by arranging the vertical alignment film 33 and the tilt alignment film 36 to face each other, at the initial time and at 1000 When the image quality was evaluated by performing a burn-in test after energizing for a period of time, there was no display failure due to burn-in or display failure due to the internal offset voltage at both the initial stage and after 1000 hours of energizing. Obtained.

According to this structure, the values of the dielectric constant and the specific resistance of the vertical alignment film 33 and the tilt alignment film 36 that are opposed to each other in the liquid crystal display element 40 in the HAN type display mode as in the first embodiment. And the internal offset voltage is not generated, and the liquid crystal display element 40 can obtain high display quality without causing display failure due to burn-in or display failure.

Next, the present invention will be described with reference to a third embodiment shown in FIG. In the third embodiment, a rubbing process is further performed at the time of aligning the tilt alignment film 24 with the irradiation of the ultraviolet light 27 in the first embodiment.
Other parts are the same as those of the first embodiment, and therefore the same parts are denoted by the same reference numerals and description thereof will be omitted.

In the liquid crystal display element 50 in the HAN type display mode of the present embodiment, the same TFT element 17 and the pixel electrode 18 on the glass substrate 16 as those of the first embodiment are provided.
The dielectric constant at 1 kHz is 3.5 and the specific resistance is 4.5 × 10
A vertical alignment film 20 of ¹⁵ Ωcm is formed and the TFT substrate 11
Get.

On the other hand, the opposite substrate 51 is first
1, a color filter layer 22 and a common electrode 23 are sequentially formed, and then a pre-tilt angle of 7.5 ° is formed thereon.
The dielectric constant at 1 kHz is 3.5, which is the same as that of the embodiment of FIG.
A tilt alignment film 52 having a specific resistance of 4.8 × 10 ¹⁵ Ωcm is formed. Next, a rubbing treatment is performed on the tilt alignment film 52 to forcibly orient the remaining polyimide molecules 31b that have not been completely decomposed by the electric field vector w when irradiating the ultraviolet rays 27, so that the tilt alignment film 52 has a pre-tilt angle of 7.5 °. The counter substrate 51 is obtained by enhancing the tilt alignment function of the above.

After that, the TFT substrate 11 and the counter substrate 30 are bonded together with the sealant 13, and after the liquid crystal composition 14 is sealed, the polarizing plate 11a and the polarizing plate 51a with a retardation plate are bonded.
The liquid crystal display element 50 of the HAN type display mode is completed.

As described in the first embodiment, the liquid crystal display element 50 of the HAN type display mode, which is manufactured by arranging the vertical alignment film 20 and the tilt alignment film 52 to face each other, at the initial time and at 1000 When the image quality was evaluated by performing a burn-in test after energizing for a period of time, there was no display failure due to burn-in or display failure due to the internal offset voltage at both the initial stage and after 1000 hours of energizing. Obtained.

According to this structure, the values of the dielectric constant and the specific resistance of the vertical alignment film 20 and the tilt alignment film 52 which are opposed to each other in the liquid crystal display element 50 in the HAN type display mode as in the first embodiment. Since no internal offset voltage is generated and the rubbing treatment of the tilt alignment film 52 stabilizes the alignment function in the pre-tilt angle direction, the liquid crystal display element 14 can be more reliably aligned. The element 50 can obtain high display quality without causing display failure due to burn-in or display failure.

On the other hand, referring to FIG.
A liquid crystal display element 60 of a HAN type display mode is formed by using different kinds of raw material films as a raw material film of a vertical alignment film on a substrate and a raw material film of a tilt alignment film on a counter substrate (Comparative Example).

This (Comparative Example) shows that the T
The same as in the first embodiment on the FT element 17 and the pixel electrode 18
First, the dielectric constant at 1 kHz is 3.5 and the specific resistance is 4.5 ×
10 ^FifteenThe vertical alignment film 20 of Ωcm is formed and the TFT substrate
Get 11. On the other hand, the tilt alignment film 62 on the opposite substrate 61
Is changed to the tilt alignment film 24 of the first embodiment,
As a raw material film for the alignment film on the
Using Nissan Chemical Industry Co., Ltd. SE-1211
To form a film. The tilt alignment film 62 has a pre-tilt angle
7.5 °, dielectric constant at 1 kHz is 3.1, specific resistance
Is 1.1 × 10^{1 6}It has electrical characteristics of Ωcm.

The liquid crystal display element 60 in the HAN type display mode (comparative example) obtained in the same manner as in the first embodiment except that the tilt alignment film 62 is changed is the same as the vertical alignment film 20 which is opposed to each other. Due to the difference in the electrical characteristics of the tilt alignment film 62, an internal offset voltage was generated between the vertical alignment film 20 and the tilt alignment film 62, causing burn-in due to excess potential, and the display quality was significantly reduced.

The present invention is not limited to the above-described embodiment, but can be modified without departing from the spirit thereof. For example, the electrical characteristics of the vertical alignment film and the tilt alignment film are substantially the same. If so, the raw material is not limited. In addition, the closer the values of the dielectric constant and the specific resistance indicating the electrical characteristics are, the more the occurrence of the internal offset voltage can be reduced.
If it is 10%, a good image display can be obtained without any problem. Further, the pretilt angle of the tilt alignment film is also arbitrary.

Further, the kind of energy to be applied when the applied raw material film of the alignment film is subjected to the alignment treatment is not limited to ultraviolet light, but may be fine particles, excimer laser, electron beam, or ion beam, or a combination thereof. There may be. Further, the structure of the substrate may be such that a color filter layer is provided on the TFT substrate side.

[0041]

As described above, according to the present invention, in the liquid crystal display device of the HAN type display mode for realizing low power consumption, the vertical alignment film and the tilt alignment film have almost the same electrical characteristics. By forming to be the same,
It is possible to obtain a liquid crystal display element having good display quality with low power consumption without generating an internal offset voltage at the time of voltage application, without causing display failure due to burn-in or display failure.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing a liquid crystal display device according to a first embodiment of the present invention.

FIG. 2 is a schematic explanatory view illustrating an alignment method of a vertical alignment film according to the first embodiment of the present invention.

FIG. 3 is a schematic explanatory view showing an alignment method of a tilt alignment film according to the first embodiment of the present invention.

FIG. 4 is a schematic sectional view showing a liquid crystal display device according to a second embodiment of the present invention.

FIG. 5 is a schematic sectional view showing a liquid crystal display device according to a third embodiment of the present invention.

FIG. 6 is a schematic sectional view showing a liquid crystal display device of a comparative example.

FIG. 7 is a schematic cross-sectional view showing a conventional HAN type display mode liquid crystal display element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Liquid crystal display element 11 ... TFT substrate 11a ... Polarizing plate 12 ... Counter substrate 12a ... Polarizing plate with a retardation plate 13 ... Sealing agent 14 ... Liquid crystal composition 14a ... Liquid crystal molecules 15 ... Spacer 16 ... Glass substrate 17 ... TFT element 18 ... pixel electrode 20 ... vertical alignment film 21 ... glass substrate 22 ... color filter layer 23 ... common electrode 24 ... tilt alignment film 26,27 ... ultraviolet light 30, 31 ... raw material film 30a, 30b, 31a, 31b ... polyimide molecule

Claims (10)

[Claims] 1. A pair of substrates which have electrodes on at least one of them and are arranged to face each other; a vertical alignment film formed on one of the pair of substrates and having a substantially vertical alignment function; A vertical alignment film is formed on the other substrate opposite to the one substrate on which the vertical alignment film is formed, and has a tilt alignment function, and a tilt alignment film having almost the same electrical characteristics as the electrical characteristics of the vertical alignment film; A liquid crystal composition sealed in a gap between the pair of substrates, wherein the liquid crystal composition is disposed so that the vertical alignment film and the tilt alignment film face each other. 2. The liquid crystal display device according to claim 1, wherein a difference between a dielectric constant and a difference between specific resistances of the vertical alignment film and the tilt alignment film is in a range of ± 10%. 3. The liquid crystal display device according to claim 1, wherein raw material films of the vertical alignment film and the tilt alignment film are of the same type. 4. The liquid crystal display device according to claim 1, wherein the raw material films of the vertical alignment film and the tilt alignment film are made of the same type of horizontal alignment film material. 5. The pre-tilt angle of the tilt alignment film is 0 to 5.
2. The liquid crystal display device according to claim 1, wherein the angle is 10 [deg.]. 6. A vertical alignment film having a substantially vertical alignment function is formed on the first substrate of at least one of the first and second substrates having an electrode, and a tilt alignment is formed on the second substrate. After forming a tilt alignment film having a function and exhibiting substantially the same electrical characteristics as the electrical characteristics of the vertical alignment film, the first alignment film is disposed so that the vertical alignment film and the tilt alignment film face each other. In a method for manufacturing a liquid crystal display element, wherein a liquid crystal composition is sealed in a gap between the first substrate and the second substrate, a raw material film of the same type of alignment film is formed on the first substrate and the second substrate. A vertical alignment treatment step of irradiating the raw material film formed on the first substrate with a vertical alignment energy in a substantially vertical direction to impart a substantially vertical alignment function; and the second substrate. Oblique to the raw material film In the other direction, a tilt alignment processing step of irradiating a tilt alignment energy of a total energy amount substantially equal to the total energy amount of the vertical alignment energy, and imparting a tilt alignment function,
A method for manufacturing a liquid crystal display device, comprising: 7. The irradiation of the vertical alignment energy and the irradiation of the tilt alignment energy are performed by irradiating the raw material film of the alignment film with fine particles, ultraviolet light, excimer laser, electron beam, ion beam, or a combination thereof. The method for manufacturing a liquid crystal display element according to claim 6. 8. The tilt alignment processing step includes a step of rubbing the raw material film after irradiating the raw material film formed on the second substrate with tilt alignment energy. A method for manufacturing a liquid crystal display device according to claim 6. 9. The liquid crystal according to claim 6, wherein a raw material film of an alignment film formed on the first substrate and the second substrate is a raw material film of a horizontal alignment film of the same type. A method for manufacturing a display element. 10. The pre-tilt angle of the tilt alignment film is set to 0.
The method for manufacturing a liquid crystal display element according to claim 6, wherein the angle is set to 10 to 10.