JP2002210730A5 - - Google Patents

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Publication number
JP2002210730A5
JP2002210730A5 JP2001012372A JP2001012372A JP2002210730A5 JP 2002210730 A5 JP2002210730 A5 JP 2002210730A5 JP 2001012372 A JP2001012372 A JP 2001012372A JP 2001012372 A JP2001012372 A JP 2001012372A JP 2002210730 A5 JP2002210730 A5 JP 2002210730A5
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JP
Japan
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JP2001012372A
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Japanese (ja)
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JP4880820B2 (en
JP2002210730A (en
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Priority to JP2001012372A priority Critical patent/JP4880820B2/en
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Publication of JP2002210730A5 publication Critical patent/JP2002210730A5/ja
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Publication of JP4880820B2 publication Critical patent/JP4880820B2/en
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JP2001012372A 2001-01-19 2001-01-19 Laser assisted machining method Expired - Lifetime JP4880820B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001012372A JP4880820B2 (en) 2001-01-19 2001-01-19 Laser assisted machining method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001012372A JP4880820B2 (en) 2001-01-19 2001-01-19 Laser assisted machining method

Publications (3)

Publication Number Publication Date
JP2002210730A JP2002210730A (en) 2002-07-30
JP2002210730A5 true JP2002210730A5 (en) 2008-04-10
JP4880820B2 JP4880820B2 (en) 2012-02-22

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JP2001012372A Expired - Lifetime JP4880820B2 (en) 2001-01-19 2001-01-19 Laser assisted machining method

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JP (1) JP4880820B2 (en)

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JP5653110B2 (en) 2010-07-26 2015-01-14 浜松ホトニクス株式会社 Chip manufacturing method
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US8828873B2 (en) 2010-07-26 2014-09-09 Hamamatsu Photonics K.K. Method for manufacturing semiconductor device
EP2599582B1 (en) 2010-07-26 2020-03-25 Hamamatsu Photonics K.K. Substrate processing method
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US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
US9517963B2 (en) * 2013-12-17 2016-12-13 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US9815730B2 (en) 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
US20150165560A1 (en) 2013-12-17 2015-06-18 Corning Incorporated Laser processing of slots and holes
JP2015150609A (en) 2014-02-18 2015-08-24 アイシン精機株式会社 laser processing method
WO2016007572A1 (en) 2014-07-08 2016-01-14 Corning Incorporated Methods and apparatuses for laser processing materials
CN208586209U (en) 2014-07-14 2019-03-08 康宁股份有限公司 A kind of system for forming multiple defects of restriction profile in workpiece
CN107073641B (en) 2014-07-14 2020-11-10 康宁股份有限公司 An interface block; system and method for cutting substrates transparent in the wavelength range using such an interface block
LT3169477T (en) 2014-07-14 2020-05-25 Corning Incorporated System for and method of processing transparent materials using laser beam focal lines adjustable in length and diameter
EP3169479B1 (en) 2014-07-14 2019-10-02 Corning Incorporated Method of and system for arresting incident crack propagation in a transparent material
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US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
EP3708548A1 (en) 2015-01-12 2020-09-16 Corning Incorporated Laser cutting of thermally tempered substrates using the multiphoton absorption method
WO2016154284A1 (en) 2015-03-24 2016-09-29 Corning Incorporated Laser cutting and processing of display glass compositions
WO2016160391A1 (en) 2015-03-27 2016-10-06 Corning Incorporated Gas permeable window and method of fabricating the same
US11186060B2 (en) 2015-07-10 2021-11-30 Corning Incorporated Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same
CN109311725B (en) 2016-05-06 2022-04-26 康宁股份有限公司 Laser cutting and removing profile shapes from transparent substrates
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
EP3490945B1 (en) 2016-07-29 2020-10-14 Corning Incorporated Methods for laser processing
US10522963B2 (en) 2016-08-30 2019-12-31 Corning Incorporated Laser cutting of materials with intensity mapping optical system
WO2018064409A1 (en) * 2016-09-30 2018-04-05 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
NL2017998B1 (en) * 2016-12-14 2018-06-26 Corning Inc Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
EP3311947B1 (en) * 2016-09-30 2019-11-20 Corning Incorporated Methods for laser processing transparent workpieces using non-axisymmetric beam spots
EP3848333A1 (en) 2016-10-24 2021-07-14 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
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US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
JP7230650B2 (en) 2019-04-05 2023-03-01 Tdk株式会社 Inorganic material substrate processing method, device, and device manufacturing method

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JP2000343714A (en) * 1999-04-02 2000-12-12 Seiko Epson Corp Quartz hole processing method and production of ink-jet recording head
JP2000288766A (en) * 1999-04-07 2000-10-17 Kubota Corp Laser beam machining device

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