JP3433110B2 - Three-dimensional diffractive optical element and method of manufacturing the same - Google Patents
Three-dimensional diffractive optical element and method of manufacturing the sameInfo
- Publication number
- JP3433110B2 JP3433110B2 JP21893498A JP21893498A JP3433110B2 JP 3433110 B2 JP3433110 B2 JP 3433110B2 JP 21893498 A JP21893498 A JP 21893498A JP 21893498 A JP21893498 A JP 21893498A JP 3433110 B2 JP3433110 B2 JP 3433110B2
- Authority
- JP
- Japan
- Prior art keywords
- dimensional
- optical element
- diffractive optical
- glass
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 239000005304 optical glass Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 7
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000004075 alteration Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- -1 acryl Chemical group 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000009022 nonlinear effect Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003763 resistance to breakage Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/04—Processes or apparatus for producing holograms
- G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
- G03H1/0891—Processes or apparatus adapted to convert digital holographic data into a hologram
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Lasers (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、３次元的回折光学
素子及びその製造方法に係り、特に超短パルスレーザー
光加工によるガラス中の３次元的回折光学素子及びその
製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional diffractive optical element and a method for manufacturing the same, and more particularly to a three-dimensional diffractive optical element in glass by ultrashort pulse laser beam processing and a method for manufacturing the same.
【０００２】[0002]
【従来の技術】現在、計算機でもって、２次元平面上に
振幅または位相物パターンを描くことにより、回折場に
任意の振幅または強度分布を得ることができる回折光学
素子の利用が進んでいる。2. Description of the Related Art At present, use of a diffractive optical element capable of obtaining an arbitrary amplitude or intensity distribution in a diffracted field by drawing an amplitude or phase object pattern on a two-dimensional plane with a computer is in progress.
【０００３】この回折光学素子は、今までの光学素子に
ない多様性を有しており、ＣＤのピックアップ光学系な
ど様々な方面に応用されている。This diffractive optical element has versatility not found in conventional optical elements, and is applied to various fields such as a pickup optical system for CDs.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、そのよ
うな従来の回折光学素子は、全てが２次元平面または曲
面上に展開されているため、その自由度が低い。また、
色収差の補正ができない。さらに、回折効率が低い。ま
た、特定の点と点をつなぐ信号経路を構成することがで
きないなどといった問題があった。However, since all such conventional diffractive optical elements are developed on a two-dimensional plane or curved surface, the degree of freedom thereof is low. Also,
Cannot correct chromatic aberration. Furthermore, the diffraction efficiency is low. In addition, there is a problem that a signal path connecting specific points cannot be configured.
【０００５】そして、これら回折光学素子の加工は、平
面または曲線上に限られているために、自ずとその性能
に限界がある。少なくとも、一つの平面上に書かれた回
折光学素子の波長依存性を取り除くことは不可能であ
る。この点、３次元的構造を持つ回折光学素子の場合
は、回折効率１００％を達成することは容易である。Since the processing of these diffractive optical elements is limited to a plane or a curve, the performance is naturally limited. At least, it is impossible to remove the wavelength dependence of the diffractive optical element written on one plane. In this respect, it is easy to achieve a diffraction efficiency of 100% in the case of a diffractive optical element having a three-dimensional structure.
【０００６】更に、３次元の自由度を利用して、色収差
を含む様々な収差の少ない光学素子を作製することがで
きる。Further, by utilizing the three-dimensional degree of freedom, it is possible to manufacture various optical elements having a small amount of aberration including chromatic aberration.
【０００７】電磁エネルギーの空間的な集中は、光加工
の基本であるが、光源に超短パルスレーザー光などを用
い、パワー密度の時間的空間的な集中によって、非線形
効果の利用が可能となる。Spatial concentration of electromagnetic energy is the basis of optical processing, but by using ultrashort pulsed laser light as the light source, the nonlinear effect can be utilized by temporal and spatial concentration of power density. .
【０００８】また、光学ガラス中への超短レーザーパル
ス光の照射による永続的屈折率変化を利用して、光メモ
リのビットの書き込みや直線導波路の書き込みの例がす
でに報告されている（レーザー研究、第２６巻第２号、
Ｐ．１５０〜１５４『超短パルスレーザーによるガラス
内部の光誘起屈折率変化』、１９９８年２月）。Further, examples of writing bits in an optical memory and writing in a linear waveguide have been already reported by utilizing a permanent change in refractive index due to irradiation of ultrashort laser pulse light into an optical glass (laser research. , Vol. 26, No. 2,
P. 150-154, "Photo-induced refractive index change inside glass by ultrashort pulse laser", February 1998).
【０００９】本発明は、このような先行技術を発展さ
せ、永続的屈折率変化を３次元的に分布させ、高性能を
有する回折光学素子を光学ガラス中に作製することがで
きる３次元的回折光学素子及びその製造方法を提供する
ことを目的とする。The present invention develops such a prior art and three-dimensionally diffractive optical element capable of producing a diffractive optical element having a high performance by three-dimensionally distributing a permanent refractive index change in an optical glass. An object is to provide an optical element and a method for manufacturing the same.
【００１０】[0010]
【課題を解決するための手段】本発明は、上記目的を達
成するために、
〔１〕３次元的回折光学素子において、集光レンズを介
した光学ガラスへの１ナノ秒から１フェムト秒のパルス
幅を持つ、波長２００ｎｍから２０００ｎｍの超短パル
スレーザー光の多光子吸収による永続的屈折率変化また
は光学損傷を利用して、前記光学ガラス中に書き込まれ
る、３次元的な屈折率分布を有するようにしたものであ
る。In order to achieve the above-mentioned object, the present invention [1] In a three-dimensional diffractive optical element, a condensing lens is used.
In the optical glass, the permanent refractive index change or optical damage due to the multiphoton absorption of the ultrashort pulsed laser light with a wavelength of 200 nm to 2000 nm having a pulse width of 1 nanosecond to 1 femtosecond is applied to the optical glass. It has a three-dimensional refractive index distribution.
【００１１】〔２〕上記〔１〕記載の３次元的回折光学
素子において、前記光学ガラスは、シリカガラスであ
る。[2] In the three-dimensional diffractive optical element described in [1] above, the optical glass is silica glass.
【００１２】〔３〕上記〔１〕記載の３次元的回折光学
素子において、前記光学ガラスは、耐破損性のソーダガ
ラスである。[ 3 ] In the three-dimensional diffractive optical element described in [1], the optical glass is soda glass having breakage resistance.
【００１３】〔４〕上記〔１〕記載の３次元的回折光学
素子において、前記光学ガラスは、光学プラスチックス
である。[ 4 ] In the three-dimensional diffractive optical element according to the above [1], the optical glass is an optical plastic.
【００１４】〔５〕上記〔４〕記載の３次元的回折光学
素子において、前記光学プラスチックスはアクリルであ
る。[ 5 ] In the three-dimensional diffractive optical element according to the above [ 4 ], the optical plastic is acrylic.
【００１５】〔６〕３次元的回折光学素子の製造方法に
おいて、集光レンズを介した光学ガラスに、１ナノ秒か
ら１フェムト秒のパルス幅を持つ、波長２００ｎｍから
２０００ｎｍの超短パルスレーザー光を照射し、前記光
学ガラスに前記超短パルスレーザー光の多光子吸収によ
る永続的屈折率変化または光学損傷を生じさせ、前記光
学ガラス中に書き込まれる、３次元的な屈折率分布を生
成させるようにしたものである。[ 6 ] In the method for manufacturing a three-dimensional diffractive optical element, an ultrashort pulse laser beam having a pulse width of 1 nanosecond to 1 femtosecond and a wavelength of 200 nm to 2000 nm is applied to an optical glass via a condenser lens. To cause a permanent refractive index change or optical damage to the optical glass due to multiphoton absorption of the ultrashort pulsed laser light, and to generate a three-dimensional refractive index distribution written in the optical glass. It is the one.
【００１６】〔７〕上記〔６〕記載の３次元的回折光学
素子の製造方法において、前記超短パルスレーザー光の
走査により、前記光学ガラス中に書き込まれる、３次元
的な屈折率分布を生成させるようにしたものである。[0016] [7] In the method for manufacturing a three-dimensional diffractive optical element described in [6], wherein the <br/> scanning the ultrashort pulse laser beam, the written in the optical glass, three-dimensional refractive A rate distribution is generated.
【００１７】〔８〕上記〔６〕記載の３次元的回折光学
素子の製造方法において、前記３次元的な屈折率分布
が、ブラッグ回折格子である。[ 8 ] In the method for manufacturing a three-dimensional diffractive optical element according to the above [ 6 ], the three-dimensional refractive index distribution is a Bragg diffraction grating.
【００１８】[0018]
【発明の実施の形態】以下、本発明の実施の形態につい
て説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.
【００１９】本発明は、１ナノ乃至１フェムト秒のパル
ス幅を有し、波長２００ｎｍ乃至２０００ｎｍの超短パ
ルスレーザー光を、シリカガラス、ソーダガラス、アク
リルなどの光学プラスチックスなど、透明な光学ガラス
中に集光し、多光子吸収により永続的屈折率の変化また
は光学損傷を発生させることにより、光学ガラス内にブ
ラッグ回折格子などのような３次元的に屈折率が分布し
ている回折光学素子を作製するものである。The present invention provides a transparent optical glass such as silica glass, soda glass, or optical plastics such as acryl having an ultrashort pulsed laser light having a pulse width of 1 nanometer to 1 femtosecond and a wavelength of 200 nm to 2000 nm. A diffractive optical element in which the refractive index is three-dimensionally distributed in the optical glass, such as a Bragg diffraction grating, by condensing the light inside and causing a permanent change in the refractive index or optical damage due to multiphoton absorption. Is to be manufactured.
【００２０】図１は本発明にかかる３次元的回折光学素
子の製造方法を示す模式図である。FIG. 1 is a schematic view showing a method of manufacturing a three-dimensional diffractive optical element according to the present invention.
【００２１】この図において、１はバルクとしての光学
ガラス、２はその光学ガラス１中に書き込まれる、３次
元的な屈折率分布としての３次元回折格子である。In this figure, 1 is an optical glass as a bulk, and 2 is a three-dimensional diffraction grating as a three-dimensional refractive index distribution written in the optical glass 1 .
【００２２】ここでは、１ナノ乃至１フェムト秒のパル
ス幅を有し、波長２００ｎｍ乃至２０００ｎｍの超短パ
ルスレーザー光１１を集光レンズ１２を介して光学ガラ
ス１に照射し、この超短パルスレーザー光１１の多光子
吸収による永続的屈折率変化または光学損傷を利用し
て、光学ガラス１中に書き込まれる、３次元的な屈折率
分布１３を生成させる。なお、図１において、１４はビ
ーム（レンズ）のラスタ走査を示している。Here, an ultrashort pulse laser beam 11 having a pulse width of 1 nanometer to 1 femtosecond and a wavelength of 200 nm to 2000 nm is irradiated onto the optical glass 1 through a condenser lens 12, and this ultrashort pulse laser is emitted. A permanent refractive index change or optical damage due to multiphoton absorption of the light 11 is utilized to generate a three-dimensional refractive index distribution 13 written in the optical glass 1. In FIG. 1, reference numeral 14 denotes a beam (lens) raster scan.
【００２３】〔実施例１〕
シリカガラス中に波長８００ｎｍ、０．１ピコ秒、１ミ
リジュールの増幅されたチタンサファイヤレーザーパル
スを集光し、集光点を走査することにより、縦横１ｍ
ｍ、３ミクロン周期、奥行き約３０ミクロンの規則的な
ブラッグ回折格子を作製した。Example 1 An amplified titanium sapphire laser pulse having a wavelength of 800 nm, 0.1 picoseconds, and 1 millijoule was condensed in silica glass, and the converging point was scanned to measure 1 m in length and width.
A regular Bragg grating having a 3 m period and a depth of about 30 m was prepared.
【００２４】この実施例では、奥行き方向の走査は行わ
なかったが、奥行き方向に走査すれば、より厚みのある
３次元回折格子の製作が可能になる。In this embodiment, scanning in the depth direction was not performed, but scanning in the depth direction makes it possible to fabricate a three-dimensional diffraction grating having a greater thickness.
【００２５】また、曲線的な走査を行えば、レンズの機
能を付加することも可能である。If curved scanning is performed, it is possible to add the function of a lens.
【００２６】このようにして、作製された３次元的回折
光学素子の３次的回折格子２を、図２に示すように、Ｈ
ｅ−Ｎｅレーザー光２１で照射すると、体積型回折格子
の特徴である非対称な回折現象を確認することができ
た。なお、図２において、２２は回折光、２３は非回折
光である。The third-order diffraction grating 2 of the three-dimensional diffractive optical element produced in this manner is H
When irradiated with the e-Ne laser beam 21, it was possible to confirm the asymmetrical diffraction phenomenon that is characteristic of the volume type diffraction grating. In FIG. 2, 22 is diffracted light and 23 is non-diffracted light.
【００２７】まだ、回折効率は低く、現在のところは数
％であるが、レーザー光強度、書き込み条件、走査方法
の最適化により、１００％の回折効率を達成することが
原理的に可能である。[0027] Still diffraction efficiency is low, although at present a few percent, the laser beam intensity, the write condition, run by optimizing 査方 method, to achieve a diffraction efficiency of 100% theoretically possible Is.
【００２８】このように、この実施例によれば、体積型
回折格子の特徴である非対称な回折現象と高い回折効率
を得ることができる。[0028] Thus, according to this embodiment, it is possible to obtain an asymmetrical diffraction phenomena and a high diffraction efficiency is a characteristic of the volume type diffraction grating.
【００２９】現在のところは、回折効率は数％である
が、既に述べているように、多少の工夫によって、１０
０％の回折効率を達成することが、可能である。At present, the diffraction efficiency is only a few percent, but as already mentioned, it can be reduced to 10 by some measures.
It is possible to achieve a diffraction efficiency of 0%.
【００３０】なお、シリカガラス中に水素ガスを含有さ
せることにより、超短パルスレーザー光の書き込み感度
の向上を図ることができる。By containing hydrogen gas in the silica glass, the writing sensitivity of ultrashort pulse laser light can be improved.
【００３１】〔実施例２〕
光学ガラスとして、耐破損性のソーダガラスの場合は、
学術雑誌報告等においても、数ミクロン径のスポットを
多数書き込む例が示されており、それへの適用も考えら
れる。[0031] EXAMPLE 2 optical glass, in the case of resistance to breakage of the soda glass,
Also in journals reporting, etc., it has been shown example of writing a number of spots of a few microns diameter, also conceivable application to it.
【００３２】〔実施例３〕
光学ガラスとして、アクリルなどの光学プラスチックス
の場合は、１９７０年代の学会報告においても、導波路
と体積型回折格子の書き込みの例が示されており、それ
への適用も考えられる。[Example 3] In the case of an optical plastic such as acrylic as the optical glass, an example of writing a waveguide and a volume type diffraction grating is shown in the academic conference report of the 1970's, and Application is also considered.
【００３３】上記したように、この３次元的回折光学素
子の製造方法によれば、３次元的な屈折率分布を創り出
すことができ、この自由度により、例えば、計算機で設
計された任意形状の３次元ブラッグ回折格子の作製が可
能である。換言すれば、３次元の空間を用いる本発明の
回折素子では、この自由度は、３次元空間そのものの自
由度を持つ。その点、レンズの自由度は、表面の曲面、
つまり、球面に限られる。As described above, according to the method for manufacturing a three-dimensional diffractive optical element, a three-dimensional refractive index distribution can be created, and this degree of freedom allows, for example, an arbitrary shape designed by a computer to be obtained. It is possible to manufacture a three-dimensional Bragg diffraction grating. In other words, in the diffraction element of the present invention that uses a three-dimensional space, this degree of freedom has the degree of freedom of the three-dimensional space itself. In that respect, the degree of freedom of the lens is
In other words, it is limited to the spherical surface.
【００３４】本発明の３次元的回折光学素子は、光学機
器分野においては、一般的光学機器や結像装置（カメ
ラ）、光通信分野においては、光伝送交換装置や波長多
重光通信装置、光計測分野においては、光学干渉計や生
体光計測装置などの広い範囲の適用が可能である。[0034] 3-dimensional diffractive optical element of the present invention is an optical device field is generally light science instruments and imaging devices (turtle <br/> la), in the field of optical communication, optical transmission switching device or a wavelength multiplexing optical communication system, the optical measurement field is applicable in a wide range such as an optical interferometer or raw <br/> body light measuring device.
【００３５】また、本発明の３次元的回折光学素子とレ
ンズとの組み合わせも考えられ、多くの用途が考えられ
る。例えば、従来のレンズの中に３次元回折格子を書き
込むことも可能であり、写真レンズの合焦検出や測光に
利用可能である。更に、２重焦点にすることもできる。A combination of the three-dimensional diffractive optical element of the present invention and a lens is also conceivable, and many applications are possible. For example, it is also possible to write the three-dimensional diffraction grating in the conventional lens, it is available for focus detection and photometry photograph lens. Further, it is possible to have a double focus.
【００３６】また、その利用法として、セキュリティ
ー、暗号への応用が考えられる。例えば、小さなガラス
の部分などに、３次元ホログラムで、ＩＤ（個人識別番
号）などを書き込んでおくことが可能である。情報容量
は大容量になるので、様々な応用が可能である。Further, as its usage, application to security and encryption can be considered. For example, it is possible to write an ID (personal identification number) or the like on a small glass portion or the like with a three-dimensional hologram. Since the information capacity is large, various applications are possible.
【００３７】なお、本発明は上記実施例に限定されるも
のではなく、本発明の趣旨に基づいて種々の変形が可能
であり、これらを本発明の範囲から排除するものではな
い。The present invention is not limited to the above embodiments, and various modifications can be made based on the spirit of the present invention, and these modifications are not excluded from the scope of the present invention.
【００３８】[0038]
【発明の効果】以上、詳細に説明したように、本発明に
よれば、次のような効果を奏することができる。As described in detail above, according to the present invention, the following effects can be obtained.
【００３９】（Ａ）永続的屈折率変化を３次元的に分布
させ、高性能を有する回折光学素子を光学ガラス中に作
製することができる。(A) A diffractive optical element having high performance can be produced in an optical glass by three-dimensionally distributing permanent refractive index changes.
【００４０】（Ｂ）３次元的な屈折率分布を創り出すこ
とができ、この自由度により、例えば、計算機で設計さ
れた任意形状の３次元ブラッグ回折格子の作製が可能で
ある。(B) A three-dimensional refractive index distribution can be created, and with this degree of freedom, for example, a three-dimensional Bragg diffraction grating of arbitrary shape designed by a computer can be manufactured.
【００４１】（Ｃ）堆積型回折格子の特徴である非対称
な回折現象と高い回折効率を得ることができる。[0041] can be obtained (C) which is characteristic of the deposition type diffraction grating asymmetrical diffraction phenomena and high diffraction efficiency.
【図１】本発明にかかる３次元的回折光学素子の製造方
法を示す模式図である。FIG. 1 is a schematic view showing a method for manufacturing a three-dimensional diffractive optical element according to the present invention.
【図２】本発明の実施例を示す３次元的回折光学素子の
作用を示す模式図である。FIG. 2 is a schematic diagram showing an operation of a three-dimensional diffractive optical element showing an embodiment of the present invention.
１ バルクとしての光学ガラス ２ ３次元的な屈折率分布としての３次元回折格子 １１ 超短パルスレーザー光 １２ 集光レンズ １３ ３次元回折格子（３次元的な屈折率分布） ２１ Ｈｅ−Ｎｅレーザー光 ２２ 回折光 ２３ 非回折光 1 Optical glass as bulk 2 Three-dimensional diffraction grating as three-dimensional refractive index distribution 11 Ultra short pulse laser light 12 Condensing lens 13 Three-dimensional diffraction grating (three-dimensional refractive index distribution) 21 He-Ne laser light 22 Diffracted light 23 Non-diffracted light
Claims (8)
ノ秒から１フェムト秒のパルス幅を持つ、波長２００ｎ
ｍから２０００ｎｍの超短パルスレーザー光の多光子吸
収による永続的屈折率変化または光学損傷を利用して、
前記光学ガラス中に書き込まれる、３次元的な屈折率分
布を有することを特徴とする３次元的回折光学素子。1. A wavelength of 200n having a pulse width of 1 nanosecond to 1 femtosecond to an optical glass through a condenser lens.
Utilizing permanent refractive index change or optical damage due to multiphoton absorption of ultrashort pulsed laser light from m to 2000 nm,
A three-dimensional diffractive optical element having a three-dimensional refractive index distribution written in the optical glass.
おいて、前記光学ガラスは、シリカガラスであることを
特徴とする３次元的回折光学素子。2. The three-dimensional diffractive optical element according to claim 1, wherein the optical glass is silica glass.
おいて、前記光学ガラスは、耐破損性のソーダガラスで
あることを特徴とする３次元的回折光学素子。3. The three-dimensional diffractive optical element according to claim 1, wherein the optical glass is a damage-resistant soda glass.
おいて、前記光学ガラスは、光学プラスチックスである
ことを特徴とする３次元的回折光学素子。4. The three-dimensional diffractive optical element according to claim 1, wherein the optical glass is an optical plastic.
おいて、前記光学プラスチックスはアクリルであること
を特徴とする３次元的回折光学素子。5. The three-dimensional diffractive optical element according to claim 4, wherein the optical plastic scan the three-dimensional diffractive optical element which is a acrylic.
１ナノ秒から１フェムト秒のパルス幅を持つ、波長２０
０ｎｍから２０００ｎｍの超短パルスレーザー光を照射
し、 （ｂ）前記光学ガラスに前記超短パルスレーザー光の多
光子吸収による永続的屈折率変化または光学損傷を生じ
させ、 （ｃ）前記光学ガラス中に書き込まれる、３次元的な屈
折率分布を生成させることを特徴とする３次元的回折光
学素子の製造方法。6. (a) On an optical glass via a condenser lens ,
Wavelength 20 with pulse width of 1 nanosecond to 1 femtosecond
Irradiating ultrashort pulsed laser light of 0 nm to 2000 nm, (b) causing permanent refractive index change or optical damage due to multiphoton absorption of the ultrashort pulsed laser light in the optical glass, (c) in the optical glass A method for manufacturing a three-dimensional diffractive optical element, which is characterized in that a three-dimensional refractive index distribution written in is generated.
製造方法において、前記超短パルスレーザー光の走査に
より、前記光学ガラス中に書き込まれる、３次元的な屈
折率分布を生成させることを特徴とする３次元的回折光
学素子の製造方法。7. A method for producing a three-dimensional diffractive optical element according to claim 6, wherein the scanning of the ultrashort pulse laser beam, the written in the optical glass, thereby generating a three-dimensional refractive index distribution And a method for manufacturing a three-dimensional diffractive optical element.
製造方法において、前記３次元的な屈折率分布が、ブラ
ッグ回折格子であることを特徴とする３次元的回折光学
素子の製造方法。8. The method for manufacturing a three-dimensional diffractive optical element according to claim 6 , wherein the three-dimensional refractive index distribution is a Bragg diffraction grating. .
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| US6347171B1 (en) * | 1999-03-31 | 2002-02-12 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for forming a diffraction grating |
| JP4124396B2 (en) * | 1999-12-17 | 2008-07-23 | 独立行政法人科学技術振興機構 | Hologram manufacturing method and apparatus |
| AU2001282474A1 (en) * | 2000-08-24 | 2002-03-04 | U.C. Laser Ltd. | Intravolume diffractive optical elements |
| FR2815425B1 (en) * | 2000-10-12 | 2003-10-31 | Holophane | PIECE OF TRANSPARENT MATERIAL AND LENS OF HEADLIGHTS OF VEHICLES |
| US6929886B2 (en) * | 2001-01-02 | 2005-08-16 | U-C-Laser Ltd. | Method and apparatus for the manufacturing of reticles |
| JP4880820B2 (en) * | 2001-01-19 | 2012-02-22 | 株式会社レーザーシステム | Laser assisted machining method |
| JP4565754B2 (en) * | 2001-02-26 | 2010-10-20 | 日東電工株式会社 | Plastic structure |
| JP2003014915A (en) * | 2001-07-03 | 2003-01-15 | Japan Science & Technology Corp | Optical element with dammann grating |
| JP2007531249A (en) * | 2003-07-18 | 2007-11-01 | ユーシーエルティ リミテッド | Method for correcting critical dimension variations in photomasks |
| JP4645076B2 (en) * | 2004-06-28 | 2011-03-09 | 凸版印刷株式会社 | Phase shift mask, manufacturing method thereof, and pattern transfer method |
| US7405883B2 (en) | 2004-12-03 | 2008-07-29 | Ohara Inc. | Optical component and method of manufacture of optical component |
| JP5109076B2 (en) * | 2005-07-15 | 2012-12-26 | 並木精密宝石株式会社 | Refractive index control type diffractive optical element and manufacturing method thereof |
| JP5320779B2 (en) * | 2007-03-09 | 2013-10-23 | 東洋製罐株式会社 | Structure, structure forming method, structure forming apparatus, structure color and / or diffracted light reading method, and authenticity determining method |
| JP6410030B2 (en) * | 2014-09-24 | 2018-10-24 | 日本電気硝子株式会社 | Optical imaging member and method of manufacturing optical imaging member |
| JP2023069750A (en) * | 2021-11-08 | 2023-05-18 | 大学共同利用機関法人自然科学研究機構 | Optical element, optical device, and manufacturing method for optical element |
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