JP2002208357A - Beam emitting unit, fine processing method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To continuously emit molecular beam that makes fine processing of the processed object by generating from the liquid molecular species by tunnel effect. SOLUTION: Liquid molecular species 103 is supplied to the top end on the top side of a needle member 211 that is provided vertically and, by giving potential difference on this, molecular beam is generated by tunnel effect. As the needle member 211 and liquid molecular species 103 are heated and increased in temperature by the heater member 208, the liquid molecular species 103 moves smoothly from the top end at the bottom to the top end at the top side of the needle member 211, and the molecular beam can be emitted continuously.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a beam emitting unit for emitting a molecular beam, and a fine processing method and apparatus for finely processing a through-hole or the like in a processing target such as a multilayer substrate using the molecular beam.

[0002]

2. Description of the Related Art At present, various types of fine processing are performed in accordance with the physical properties of a processing object. For example, through holes may be formed in a multilayer substrate. Since the inner surface of such a through-hole is plated and used for an electric circuit, the inner surface must be formed smoothly.

However, since a multi-layer substrate is formed by laminating a plurality of members having different physical properties, such as metal, resin, and glass, it is not easy to form fine through holes having smooth inner surfaces therein. For this reason, when forming a through hole in a multilayer substrate, a special drill device for fine processing is currently used.

[0004]

However, a drill can inevitably form only one hole at a time, but at present, there are often thousands of through holes formed in a single multilayer substrate. Moreover, since the drill needs to be replaced after being used several hundred times, it may take several hours to process one multi-layer substrate.

Further, at present, the diameter of a multilayer substrate is "φ0.
It is required to form a through hole with a depth of “1 (mm)” and a depth of “4.0 (mm)”, but it is difficult to achieve this with a drill. Only a round hole of a specific size can be formed, and it is difficult to form a fine rectangular hole.

At present, as a method capable of processing finer than a drill, a focused ion beam (FIB: Forcus Ion-Bea) is used.
m) There is a law. In the focused ion beam method, ions are generated from metal atoms such as gallium by a high electric field, and the ions are converged electron-optically and scanned to collide with the object to be processed. Fine processing can be performed at the nm level.

However, a microfabrication apparatus for realizing the focused ion beam method has a complicated and huge structure of an optical system and a scanning system, and can realize only a structure in which one hole is formed. Also,
The diameter is “φ0.1 (m
m) ”requires a great deal of time to form a through hole. Further, in the focused ion beam method, only the collision energy of ions is used for processing, so that energy efficiency is not good and rapid processing is difficult. is there.

For example, as a processing method utilizing a chemical reaction of ions, reactive ion etching (RIE: React
ive Ion Etching) method. In this reactive ion etching method, molecules of a simple structure such as CF ₄ that chemically react with a processing target are ionized by a high-frequency electric field of about 36 (MHz),
The ions collide with the object to be processed by the electrostatic field, and the processing is performed by physical energy and chemical reaction. However, this reactive ion etching method can only etch a surface of a processing target in a wide range, and cannot form a fine hole in the processing target.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and has been made in consideration of the above-described problems. It is an object of the present invention to provide at least one of a fine processing method and an apparatus capable of rapidly executing a large number of fine processings on a processing target.

[0010]

The beam emitting unit according to the present invention includes a main body housing, a needle-like member, an extraction electrode, an acceleration electrode, and a heater member. The main body housing is insulative, and holds the needle member, the extraction electrode, the acceleration electrode, and the heater member at predetermined positions. The needle-shaped member is formed so as to be conductive and sharp, and is supported so that the axial direction is substantially parallel to the up-down direction, and the liquid molecular species is supplied from the lower end portion to the upper end portion. . The extraction electrode
It surrounds the tip portion of the needle-like member, and generates a molecular beam by a tunnel effect from molecular species at an applied negative voltage. The acceleration electrode is located closer to the tip of the needle member than the extraction electrode, and accelerates the molecular beam with the applied negative electrode voltage. The heater member raises the temperature of at least the molecular species located at the terminal portion of the needle-like member, and moves the molecular species from the terminal portion to the distal end portion of the needle-like member by this temperature rise.

Therefore, the beam emitting unit according to the present invention comprises:
Since the molecular beam generated from the molecular species is emitted upward, fine processing is performed when a processing location to be processed is positioned here. At this time, since the heater member raises the temperature of the molecular species located at least in the end portion of the needle-shaped member, the molecular species of the liquid moves from the lower end portion of the needle-shaped member to the upper end portion, A molecular beam is continuously emitted from the tip of the needle-shaped member.

In another aspect of the present invention, the heater member raises the temperature of the needle-shaped member, so that the molecular species of the liquid located at the end of the needle-shaped member is raised to a predetermined temperature by the heater member. The temperature is maintained at a predetermined value even in the process of moving from the distal end portion to the distal end portion of the needle-shaped member.

Further, a concave groove communicating from the distal end portion to the distal end portion is formed on the surface of the needle-like member, and the heater member is formed of a flat resistor having a through-hole formed therein. Since the needle-shaped member is mounted in the through hole of this heater member,
A gap is formed between the inner surface of the concave groove of the needle-like member and the inner surface of the through hole of the heater member.

In this case, the molecular species of the liquid moves inside the concave groove of the needle-shaped member by capillary action, and at the position of the heater member in the middle, moves through the gap between the inner surface of the through hole and the inner surface of the concave groove. Therefore, the molecular species of the liquid is supplied from the lower end portion to the upper end portion of the needle-shaped member.

Further, a concave groove communicating from the distal end portion to the distal end portion is formed on the surface of the needle-like member, and a terminal electrode which is maintained at the ground potential is formed by a plate-like conductor having a through hole formed therein. Have been. Since the needle-like member is mounted in the through-hole of the terminal electrode, a gap is formed between the inner surface of the concave groove of the needle-like member and the inner surface of the through-hole of the terminal electrode.

In this case, a predetermined potential difference is generated between the extraction electrode and the needle-like member maintained at the ground potential together with the terminal electrode. The molecular species of the liquid moves inside the concave groove of the needle-like member by capillary action, and at the position of the terminal electrode on the way, it moves in the gap between the inner surface of the through hole and the inner surface of the concave groove, so that the needle-like member Liquid molecular species are supplied from the lower end portion to the upper end portion.

Further, since the surface of the needle-shaped member is coated with an alkali metal, the work function of the surface of the needle-shaped member is very small, so that the affinity between the surface of the needle-shaped member and the molecular species of the liquid is high.

A lower electrode located above the accelerating electrode is maintained at the ground potential, a negative electrode voltage is applied to a central electrode located above this lower electrode, and an upper electrode located above this central electrode is The molecular beam is maintained at the ground potential, and is shaped into a predetermined beam shape through the through hole of the upper electrode.

In this case, since the lower electrode, the center electrode, and the upper electrode generate an electro-optical effect, the diffused and emitted molecular beam is converged into a parallel beam. Further, since a molecular beam shaped into a predetermined beam shape is emitted from the through hole of the upper electrode, a processing target portion to be processed is irradiated with a molecular beam formed of a parallel beam having a predetermined beam shape.

Further, at least the extraction electrode is made of a plate-like conductor having a through hole surrounding the tip of the needle-like member, and at least the acceleration electrode is a net-like member having a conductive thin wire stretched over a frame. Consists of In this case, the mesh member of the accelerating electrode causes a potential difference as a whole to act on the molecular beam that tends to diffuse immediately after being emitted from the needle member, and the accelerating electrode formed of the mesh member minimizes collision with the molecular beam. .

The microfabrication apparatus of the present invention comprises a number of beam emitting units of the present invention, member arrangement means, object holding means, molecule supply means, evacuation means, voltage application means, and power supply means.

The member arranging means arranges a large number of beam emitting units in front, rear, left and right corresponding to a processing portion to be processed in a state where the end portion of the needle-shaped member is located on the lower side and the tip end portion is located on the upper side. The object holding means holds the object to be processed at a position facing the tip portions of a number of the arranged beam emitting units. The molecule supply means immerses the end portions of the needle-shaped members of each of the plurality of beam emission units in the molecular species of the liquid, and the evacuation means evacuates at least the positions of the beam emission unit and the object to be processed. The voltage applying means applies a negative electrode voltage higher than the needle-shaped member to each extraction electrode of a number of beam emission units and a negative electrode voltage higher than the extraction electrode to the accelerating electrode. A molecular beam is emitted upward from each of the tip portions of the multiple beam emitting units, and the multiple molecular beams individually collide with multiple processing locations to be processed. Since the power supply means supplies power to each heater member of the multiple beam output units, the molecular species of the liquid are sequentially supplied from the distal end portion to the distal end portion of the needle-like member in each of the multiple beam output units. In other words, molecular beams are continuously emitted from a number of beam emission units.

In another aspect of the microfabrication apparatus of the present invention, the voltage applying means causes the needle-like member to be grounded, and generates a potential difference between the needle-like member and the extraction electrode to cause a tunnel effect on molecular species. The potential difference that accelerates the molecular beam generated by the tunnel effect of the molecular species is generated between the extraction electrode and the accelerating electrode, and the power supply means raises the molecular species to a temperature at which it moves from the distal end to the distal end of the needle-shaped member. Is supplied to the heater member.

In this case, the molecular species is supplied from the distal end to the distal end of the needle-like member by a predetermined electric power, and the molecular species at the distal end of the needle-like member generates a molecular beam by a predetermined potential difference from the extraction electrode. This molecular beam is accelerated by a predetermined potential difference from the acceleration electrode.

In addition, since the molecular species generated by the molecular beam is made of a substance that reacts with the object to be processed, the molecular beam generated from the molecular species reacts with the object to be processed. Drilling is done both by chemical action and by chemical action.

The molecular species is composed of an insulating and inert fluorocarbon liquid containing 15 carbon atoms and a predetermined number of fluorine in the molecule. Since this fluorocarbon liquid is insulative, it is used as a needle-like member. It does not short-circuit with the extraction electrode, is inactive in the liquid state, does not corrode the needle-shaped member, etc., and has a low surface tension and high permeability, so it moves well from the end to the tip of the needle-shaped member. ,
Since the vapor pressure is low, the liquid state is stably maintained even in a vacuum.

The various means referred to in the present invention are only required to be formed so as to realize their functions. For example, dedicated hardware for performing predetermined functions, a computer provided with predetermined functions by a program, etc. , Predetermined functions realized inside the computer by the program, combinations thereof, and the like.

The alkali metal is preferably a monovalent or divalent “+” element of group 1A or 2A, for example, potassium, calcium, sodium, magnesium, and the like. Examples of the insulating and inert fluorocarbon liquid containing 15 carbon atoms and a predetermined number of fluorine in the molecule include "F" manufactured by Sumitomo 3M.
C-70 "Florinert.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. Fine processing apparatus 1 of the present embodiment
00, as shown in FIG. 6, has a main body housing 101 composed of a vacuum vessel as a molecule supply means, and a single plate-shaped energizing unit 102 as a member arrangement means is fixed below the main body housing 101. Have been.

The main body housing 101 is a liquid molecular species 1
03 is formed in a shape for storing the same, and a plurality of beam emitting units 104 and a number of dummy units 105 are interchangeably mounted on one energizing unit 102. Beam emitting unit 104 and dummy unit 105
Is arranged two-dimensionally in the energizing unit 102, and the lower end portion is immersed in the molecular species 103 stored in the main body housing 101.

More specifically, as shown in FIG. 5, the energizing unit 102 includes a fine ceramic insulating body 110 having a dielectric strength of about 25 (kV / mm).
In the insulating body 110, a plurality of gaps 1 each having an open upper surface are provided.
11 are formed. These voids 111 are formed as concave portions communicating with each other one-dimensionally in the left-right direction, and a plurality of these are arranged in the front-rear direction. Further, in the bottom plate of the insulating main body 110, slit-shaped through holes 117 are individually formed for each of the plurality of gaps 111.
17 is the molecular species 103 stored in the main body housing 101
It is located below.

In the energizing unit 102, metal wires having a shape continuous in the horizontal direction are built in the insulating body 110, and the first to seventh current-carrying electrodes 121 exposed on the front and rear surfaces of the gap 111 by these metal wires. To 127 are formed. The first energizing electrode 121 is located below the gap 111, and the seventh energizing electrode 127 is located above the gap 111.

As shown in FIG. 5, the beam emitting unit 104 and the dummy unit 105 are formed in a rectangular parallelepiped shape having the same outer shape and slidable in the vertical direction. It is mounted interchangeably in the direction.

As described above, the plurality of cavities 111 of the power supply unit 102 are formed in slits communicating in the left-right direction, and are arranged in the front-rear direction. The dummy units 105 are arranged in front, rear, left and right.

As shown in FIGS. 1 and 2, the beam emitting unit 104 has a main frame 200 made of fine ceramics.
For example, it is formed in a rectangular parallelepiped shape having a total length of about 25 (mm) in the vertical direction and a width of about 2.0 (mm) in front, rear, left and right.

A lower electrode 205, a center electrode 206, an upper electrode 207, and a heater member 208 of a terminal electrode 201, an extraction electrode 202, an acceleration electrode 203, and a focusing electrode 204 are mounted on a main body frame 200 of the beam emission unit 104. These have front and rear end surfaces exposed on both front and rear surfaces of the main body frame 200.

The heater member 208 is formed of carbon graphite into a flat plate having a thickness of about “1.0 (mm)”, and is formed at the center with a perfect circular through hole 209 communicating vertically. The terminal electrode 201 is formed of a metal such as brass in the same shape as the heater member 208, and is integrally mounted on the upper surface of the heater member 208. Thus, the through hole 20 between the heater member 208 and the terminal electrode 201 is formed.
Since 9 communicates, a metal needle 211 which is a conductive sharp needle-like member is mounted here.

The metal needle 211 is made of, for example, tungsten, and its surface is coated with an alkali metal. The metal needle 211 is formed to have a total length of about 7.5 (mm) in which a specific liquid moves from a lower end portion to an upper end portion in opposition to gravity due to physical properties, as shown in FIG. The cross-sectional shape is basically a perfect circle, but a fine concave groove 212 communicating from the distal end portion to the distal end portion is formed on the surface.

On the other hand, since the through hole 209 between the heater member 208 on which the metal needle 211 is mounted and the terminal electrode 201 is a perfect circle, the inner surface of the through hole 209 and the inner surface of the concave groove 212 of the metal needle 211 are separated from each other. Here, a minute gap communicating from the lower surface of the heater member 208 to the upper surface of the terminal electrode 201 is formed.

The main body frame 200 has a cylindrical space 213 having a diameter of about “φ1.6 (mm)” formed from the lower surface to the upper surface, and the lower surface and the front and rear surfaces are open to communicate with the space 213. A concave portion 214 is formed at a lower end portion with a depth of about “4.0 (mm)”. By mounting the heater member 208 and the terminal electrode 201 on the upper side of the concave portion 214 with the front and rear surfaces exposed, the metal needle 211 is erected inside the gap 213.

Further, in the main body frame 200, four flat rectangular through-holes 215 having a vertical width of about “1.0 (mm)” opening in the front-rear direction and communicating with the gap 213 have a size of “4.0 (m).
m) ", and a concave portion 216 having an upper surface and front and rear surfaces opened at an upper end portion is formed at a depth of approximately" 1.0 (mm) ".

Since the electrodes 202 to 203 and 205 to 207 are individually mounted in the through hole 215 and the recess 216, the terminal electrode 201, the extraction electrode 202,
The accelerating electrode 203, the lower electrode 205, the center electrode 206, and the upper electrode 207 are arranged at a pitch of about "4.0 (mm)" from below to above.

The extraction electrode 202, the lower electrode 205, and the center electrode 206 are formed of a metal such as brass into a plate shape having a thickness of about "1.0 (mm)". (mm) "is formed in the center of a through hole 217 having a large diameter and a perfect circle. The upper electrode 207 is also formed in a similar shape, but the through hole 218 is formed with a small diameter of about “φ10 (μm)”.

As shown in FIG. 4, the acceleration electrode 203 is made of a metal such as brass and has a thickness of about 1.0 (mm).
9 are formed, and “φ10 (μm)”
The net-shaped member 221 is formed by stretching the Au or Pt thin metal wire 220.

The dummy unit 105 has the same outer shape as that of the beam emitting unit 104 having the above-described structure and is formed of fine ceramic, but does not include electrodes or the like. The beam emitting unit 104 and the dummy unit 105 having such a structure are connected to the gap 11 of the energizing unit 102.
1, the through-hole 117 at the bottom of the energizing unit 102 is
4, the molecular species 103 of the liquid stored in the main body housing 101 flows into the bottom of the beam emitting unit 104, and the end of the metal needle 211 is immersed.

When the beam emitting unit 104 is mounted in the gap 111 of the energizing unit 102, the heater member 208 of the beam emitting unit 104 is turned on.
Is connected to the first energizing electrode 121, the terminal electrode 201 is connected to the second energizing electrode 122, the extraction electrode 202 is connected to the third energizing electrode 123, the acceleration electrode 203 is connected to the fourth energizing electrode 124, The electrode 205 is the fifth conducting electrode 1
25, and the center electrode 206 is connected to the sixth conducting electrode 126.
, And the upper electrode 207 is connected to the seventh conducting electrode 127.

However, the main body frame 200 of the beam emitting unit 104 and the insulating main body 110 of the energizing unit 102
And the electrodes 121 of the energizing unit 102
To 127 are maintained in a mutually insulated state, and the respective electrodes 201 to 207 of the beam emitting unit 104 are also maintained in a mutually insulated state.

In the fine processing apparatus 100 of the present embodiment,
As shown in FIG. 6, a high-voltage power supply system 130 as a voltage application unit is installed outside the main body housing 101,
The high-voltage power supply system 130 is wired to each of the current-carrying electrodes 121 to 127 of the current-carrying unit 102.

The high-voltage power supply system 130 applies a predetermined voltage from the first energizing electrode 121 to the heater members 208 of the plurality of beam emitting units 104, grounds the second energizing electrode 122 of the energizing unit 102, and connects the terminal electrode 201 And metal needle 2
11 is maintained at the ground potential of “± 0 (V)”.

Further, the extraction electrode 2
A negative voltage of about −5 (kV) is applied to the negative electrode 02, and a negative voltage of about −30 (kV) is applied from the fourth conducting electrode 124 to the accelerating electrode 203. Further, the fifth and seventh conducting electrodes 12
5, 127 to the lower / upper electrode 20 of the focusing electrode 204
5,207 is maintained at the ground potential of "± 0 (V)", and a negative high voltage of "-30 (kV)" is applied from the sixth conducting electrode 126 to the center electrode 206 of the focusing electrode 204.

When a predetermined power is supplied to each of the electrodes 201 to 207 in the state where the molecular species 103 is supplied to the distal end surface of the metal needle 211 as described above, A neutral molecular beam is generated from the seed 103 and emitted upward from the gap 213.

In the present embodiment, the molecular species 103 is made of an insulating and inert fluorocarbon liquid, which contains 15 carbon atoms and a predetermined number of fluorine in the molecule. It is made of 3M Florinert "FC-70". Molecular species 103 having such a molecular structure
Has an extremely low vapor pressure of “0.1 (toll)” or less, so it maintains a stable liquid state even in a vacuum environment at room temperature, and is heated to a predetermined temperature of “80 (° C)” As a result, the metal needle 211 is diffused from the lower end portion to the upper end portion in opposition to gravity, and generates a molecular ion of a halogen element that reacts with the multilayer substrate 135 by a tunnel effect.

In the fine processing apparatus 100 of the present embodiment,
As shown in FIG. 6, a pair of substrate moving mechanisms 132 as relative moving means are disposed on the left and right sides of the energizing unit 102. The mechanisms 133 are supported one by one.

The pair of substrate holding mechanisms 133 interchangeably hold a single multi-layer substrate 135 to be processed from both sides. Thus, the pair of substrate holding mechanisms 133 is provided above a large number of beam emitting units 104 arranged in the energizing unit 102. One multilayer substrate 135 is to be arranged.

The board movable mechanism 132 includes a controller unit 136 disposed outside the main body housing 101.
Are sequentially moved down while repeatedly displacing the substrate holding mechanism 133 back and forth and left and right, so that the multilayer substrate 135 is relatively moved with respect to the beam emitting unit 104 fixed by this.

More specifically, since the ion beam emitted upward from the beam emitting unit 104 collides with the lower surface of the multilayer substrate 135 as described above, the multilayer substrate 135 is excavated by the collision of the ion beam. However, since the beam diameter of the ion beam colliding with the multilayer substrate 135 is extremely small, the substrate moving mechanism 132 moves the substrate holding mechanism 133 back and forth, right and left so that the multilayer substrate 135 is excavated into a predetermined shape with an extremely fine ion beam. Is repeatedly displaced into a predetermined shape.

The multilayer substrate 135 using an ion beam
As the excavation progresses, this excavation position is displaced upward inside the multilayer substrate 135.
2 sequentially displaces the substrate holding mechanism 133 downward according to the depth of excavation of the multilayer substrate 135 by the ion beam.

Further, the fine processing apparatus 10 of the present embodiment
0, an exhaust pump 137 serving as a vacuum exhaust means is also provided in the main body housing 101.
7 exhausts the inside of the main body housing 101 to “1.0 (P
a) Make a vacuum state with a pressure of about "".

The exhaust pump 137, the controller unit 136, and the high-voltage power supply system 130 are wired to one personal computer 140. The personal computer 140 is connected to the high-voltage power supply system 130, the controller unit 136, and the exhaust pump 137. Integrated control.

The top plate of the main body housing 101 includes:
An opening 141 larger than the multilayer substrate 135 is formed, and an opening / closing hatch 143 is attached to the opening 141 via a packing 142 so as to be openable and closable. Further, in the micromachining apparatus 100 of the present embodiment, a separate adhesive polymer sheet 14 is used as a sheet member as a means for preventing falling off.
4 is also prepared, and the polymer sheet 144 is attached to the upper surface of the multilayer substrate 135 to be excavated.

In the configuration described above, in the micromachining method using the micromachining device 100 of the present embodiment, microholes can be formed in a large number of machining locations on the multilayer substrate 135 to be machined at one time. The fine processing method using the fine processing apparatus 100 will be described below in order.

First, the molecular species 103 is not initially stored in the main body housing 101, and the beam is emitted to the gap 111 of the energizing unit 102 fixed to the bottom of the main body housing 101 as shown in FIG. Unit 1
Neither 04 nor the dummy unit 105 is mounted.

Therefore, the opening / closing hatch 143 of the main body housing 101 is opened, and the beam emitting units 104 are arranged in the gaps 111 of the energizing unit 102 corresponding to the processing locations of the multilayer substrate 135 to be processed. The dummy units 105 are arranged at the positions of the gaps 111 where the beam emitting units 104 are not arranged because they do not correspond to the above.

As described above, the gap 11 of the energizing unit 102
When the beam emitting unit 104 is mounted on the first unit 1, the electrodes 201 to 207 and the heater members 208 of the many beam emitting units 104 are connected to the high-voltage power supply system 130 via the power supply unit 102.

In this state, the liquid molecular species 103 is injected into the main body housing 101, and the molecular species 103 flows from the through hole 117 of the current supply unit 102 into the concave portion 214 of the beam emission unit 104 as shown in FIG. Then, the terminal portion of the metal needle 211 is immersed.

On the other hand, an adhesive polymer sheet 144 is stuck on the upper surface of the multilayer substrate 135,
5 are inserted into the main body housing 101 and held by the board holding mechanism 133, so that a large number of processed portions of the multilayer board 135 and a large number of beam emitting units 104 are individually opposed to each other.

Next, the opening / closing hatch 143 is closed to seal the main body housing 101, and the personal computer 1
The integrated control of each unit by 40 is started. First, the personal computer 140 controls the operation of the exhaust pump 137, and the interior of the main body housing 101 is evacuated to a pressure of about “1.0 (Pa)” by the exhaust pump 137.

When the evacuation is completed, the personal computer 140 controls the operation of the high-voltage power supply system 130 and the control circuit 136 to start energization from the high-voltage power supply system 130 to the beam emitting unit 104, and the control circuit 136 Moving mechanism 132
Is started.

At this time, the high-voltage power supply system 130 has a large number of beam emitting units 1 arranged in the energizing unit 102.
Since the temperature of each of the heater members 208 is increased to about “80 (° C.)”, the molecular species 103 located at the end of the metal needle 211 is also heated to about “80 (° C.)”.

The molecular species 103 thus heated is diffused into the concave groove 212 on the surface of the metal needle 211 due to physical properties such as surface tension, viscosity and lyophilicity.
1 from the lower end to the upper end
3 will be supplied contrary to gravity.

Further, the high-voltage power supply system 130 includes a large number of beam emitting units 10 arranged in the energizing unit 102.
The negative electrode voltage of about “−5 (kV)” is applied to the extraction electrode 202 while maintaining the potential of each of the metal needles 211 of “4” at “± 0 (V)”. A local electric field of "several tens (V / nm)" is generated at the tip of.

Since the liquid molecular species 103 adheres to the tip surface of the metal needle 211 as described above, a tunnel effect acts on the molecular species 103 and the metal needle 211 by a local electric field. A molecular beam is generated from the molecular species 103. As described above, since the molecular species 103 is composed of molecules having a complicated structure including fluorine and carbon, "CF ⁺ " molecular ions are generated in the form of a beam due to the tunnel effect and the breaking of atomic bonds. .

At the same time, “-30 (kV)” is applied to the accelerating electrode 203.
Since a high voltage of the negative electrode is applied, the ion beam generated from the molecular species 103 is drawn upward from the tip surface of the metal needle 211 and accelerated by the voltage of the negative electrode of the acceleration electrode 203.

Further, while the lower / upper electrodes 205 and 207 of the converging electrode 204 are maintained at a potential of “± 0 (V)”, a high negative voltage of about “−30 (kV)” is applied to the center electrode 206. Therefore, the diffusion beam of molecular ions is converted into a parallel beam by these electron-optical actions. Since this molecular beam is emitted from the small-diameter through hole 218 of the upper electrode 207, the outer peripheral portion of the molecular beam is shielded by the upper electrode 207, and the molecular beam is shaped into a small-diameter beam and emitted.

Since this molecular beam is emitted upward from each of the large number of beam emitting units 104, these multiple molecular beams individually strike a large number of processing locations on the surface of one multilayer substrate 135 located above. That is, a large number of processing portions of the multilayer substrate 135 are individually excavated by the colliding molecular beam.

At this time, since the substrate moving mechanism 132 repeatedly displaces the multilayer substrate 135 in a predetermined shape in the forward, backward, left, and right directions, for example, the surface of the multilayer substrate 135 is irradiated with “φ100 (μm)” with a small-diameter molecular beam of “φ100 (μm)”. μm) ”. When a large-diameter hole is formed in the multilayer substrate 135 with a small-diameter beam as described above, an intercept is generated at the center. However, in the microfabrication apparatus 100 of the present embodiment, the adhesive polymer Since the sheet 144 is attached, the section does not fall.

Further, since the substrate moving mechanism 132 sequentially lowers the multilayer substrate 135 in accordance with the depth of excavation by the molecular beam, the distance between the excavation position of the multilayer substrate 135 and the beam emitting unit 104 is kept constant. . For this reason, the molecular beam emitted from the beam emitting unit 104 is not a perfect parallel beam, but the beam diameter of the molecular beam excavating the multilayer substrate 135 is always kept constant.

Then, the multilayer substrate 135 is irradiated with the molecular beam.
When a through-hole of a predetermined shape is formed in the personal computer 140, the integrated control of the personal computer 140 terminates the energization of the high-voltage power supply system 130, the control circuit 136 moves the substrate movable mechanism 132 to the initial position, and the exhaust pump 137 The interior of the main body housing 101 is returned to normal pressure.

After the inside of the main body housing 101 returns to normal pressure, the open / close hatch 143 is opened, the holding by the board holding mechanism 133 is released, and the multilayer board 135 is released.
Is taken out. At this time, a large-diameter hole is formed by a small-diameter molecular beam in each of a large number of processing portions of the multilayer substrate 135, and a slice exists inside the large-diameter hole. It is adhered by the polymer sheet 144 attached to the upper surface.

Therefore, when the polymer sheet 144 is removed from the upper surface of the multilayer substrate 135, the pieces adhered to the polymer sheet 144 are removed from the multilayer substrate 135, and the multilayer substrate 135 is attached to a large number of processing locations. Are in a state in which clean large-diameter holes are formed.

In the fine processing apparatus 100 of the present embodiment,
Since the multi-layer substrate 135 is finely processed by the molecular beam as described above, it is possible to form fine holes in the multi-layer substrate 135 made of a plurality of materials having different physical properties, which are difficult with a conventional drill device. In addition, since a complex molecule is used as the molecular species 103 to generate molecular beams of a plurality of types of halogen elements, the multilayer substrate 135 can be highly efficiently used by both physical action due to collision of molecular beams and chemical action due to reaction. Can be finely processed.

In particular, the fine processing apparatus 100 of the present embodiment
In this embodiment, a large number of beam emitting units 104 are arranged corresponding to a large number of processing locations on the multilayer substrate 135, and a large number of small holes are simultaneously formed in the multilayer substrate 135 by the large number of beam emitting units 104. Can be completed in an extremely short time.

Further, the fine processing apparatus 10 of the present embodiment
At 0, since the beam emitting unit 104 and the multilayer substrate 135 are relatively moved back and forth and left and right, the multilayer substrate 135 can be excavated into a desired shape with a small-diameter molecular beam. In particular, since the multilayer substrate 135 is moved while the beam emission unit 104 is fixed, the liquid molecular species 103 does not needlessly vibrate.

Further, the beam emitting unit 104 of the present embodiment converts the molecular beam into a parallel beam by the electron optical action of the focusing electrode 204, and converts the molecular beam into the upper electrode 2
Since the through-hole 218 is formed into a predetermined beam shape, the multilayer substrate 135 can be excavated into a desired and accurate shape.

Further, since the distance between the excavation position of the multilayer substrate 135 and the beam emitting unit 104 is kept constant by the substrate moving mechanism 132, even if the molecular beam emitted from the beam emitting unit 104 is not a perfect parallel beam, The multilayer substrate 135 can be excavated into an extremely accurate shape while keeping the beam diameter of the irradiated molecular beam constant.

When a large-diameter through-hole is formed in the multilayer substrate 135 with a small-diameter molecular beam, cutting occurs, but the falling off is caused by the polymer sheet 14 adhered to the upper surface of the multilayer substrate 135.
4, the inside of the micromachining apparatus 100 is not contaminated with fine pieces. Moreover, when the polymer sheet 144 is removed from the processed multi-layer substrate 135, the slice is removed from the fine through-hole, so that a fine and clean through-hole can be formed in the multi-layer substrate 135.

Further, since the fine beam emitting unit 104 and the dummy unit 105 are arranged in the energizing unit 102, the molecular beam is not emitted to a position other than the processing location of the multilayer substrate 135, and the beam emitting unit has a simple structure. 104 can be held in the proper position and orientation.

Further, the gap 111 of the power supply unit 102
Of the beam emitting unit 104 and the dummy unit 1
Since the space is filled with H.05, for example, the vacuum region where the multilayer substrate 135 is located and the region where the molecular species 103 are located can be separated, and unnecessary evaporation of the molecular species 103 can be reduced.

Further, since a voltage is applied to a large number of beam emitting units 104 by one energizing unit 102, a complicated operation of connecting wiring to the large number of beam emitting units 104 is unnecessary. Moreover, the power supply unit 102
Accordingly, an electric path from the high-voltage power supply system 130 to many beam emitting units 104 can be formed, and many beam emitting units 104 can be arranged at appropriate positions.

In particular, since the beam emitting unit 104 and the dummy unit 105 are formed in a rectangular parallelepiped shape slidable in the vertical direction, the gap 11 between the beam emitting unit 104, the dummy unit 105, and the energizing unit 102 is formed.
1 can be easily attached to and detached from above.

Further, a plurality of slit-shaped gaps 1 each communicating one-dimensionally in the left-right direction are provided in the energizing unit 102.
Since 11 are arranged in the front-rear direction, a large number of beam emitting units 104 and a large number of dummy units 105 can be arranged in a two-dimensional pattern developed in the front-rear and left-right directions.

Further, the electrodes 201 to 207 are located on the front and rear surfaces of the beam emitting unit 104, and the electrodes 121 to 12 are located on the inner surfaces before and after the gap 111.
7, the electric circuit can be formed only by attaching the beam emitting unit 104 to the energizing unit 102.

In particular, in the beam emitting unit 104 of the present embodiment, each of the electrodes 201 to 207 has
And the energizing unit 102 is connected to each electrode 12
1 to 127 are insulated by the insulating body 110. When the beam emitting unit 104 is mounted on the energizing unit 102, each of the electrodes 121 to 1
27 and each electrode 201 to 20 of the beam emitting unit 104
7 are electrically connected to each other, but the insulating main body 110 of the energizing unit 102 and the main body frame 2 of the beam emitting unit 104 are connected.
00 also adheres.

Therefore, even if the high-voltage power supply system 130 applies different voltages to the electrodes 201 to 207 of the beam emitting unit 104 mounted on the energizing unit 102, no short circuit or discharge occurs, A molecular beam can be satisfactorily generated by setting the metal needle 211, the extraction electrode 202, the focusing electrode 204, and the accelerating electrode 203 at an appropriate potential.

Further, since the metal needle 211 is grounded and the potential is set to “0”, a high voltage does not act directly on the molecular species 103 of the liquid supplied to the surface of the metal needle 211. Therefore, the molecular species 103 of the liquid does not generate a discharge and ignite, and the molecular species 103 can safely generate a molecular beam.

The acceleration electrode 20 for accelerating the molecular beam
3 is made of the mesh member 221, the molecular beam that tends to diffuse immediately after being emitted from the metal needle 211 can be accelerated as a whole, and collision with the molecular beam of the accelerating electrode 203 is minimized to reduce wear. can do.

Further, in the beam emitting unit 104 of this embodiment, since the electrodes 201 to 207 have the same shape and are arranged at a constant pitch on the main body frame 200, the structure is simple and the productivity is good. is there. Also, an appropriate voltage is individually applied to each of the large number of electrodes 201 to 207, but the terminal electrode 201, the lower electrode 205, and the upper electrode 207 are maintained at the ground potential of “0” together with the molecular species 103, and the acceleration is accelerated. "-30" is applied to the electrode 203 and the center electrode 206.
Since a negative high voltage of about (kV) "is applied, the types of generated voltages are small and the structure of the high-voltage power supply system 130 and the wiring are simple.

Further, in this embodiment, since the liquid molecular species 103 is insulative and inert, the metal needle 211 and the terminal electrode 201 are not corroded, and no unnecessary short circuit occurs. In addition, since the molecular species 103 is extremely low in physical properties such as a vapor pressure of “0.1 (toll) or less”, the liquid state can be stably maintained at room temperature even in a vacuum environment.

Then, the fine processing apparatus 10 of the present embodiment
0, the molecular species 10 located at the end of the metal needle 211
Since the temperature of 3 is raised by the heater member 208, the liquid molecular species 103 can be favorably moved from the lower end portion of the metal needle 211 to the upper end portion. For this reason, the beam emitting unit 104 can continuously emit the molecular beam, and the multilayer substrate 135 can be finely processed quickly.

In particular, since the heater member 208 raises the temperature of the metal needle 211, the liquid molecular species 1
03 can be easily and reliably raised to a predetermined temperature, and the molecular species 103 of the liquid can be maintained at a predetermined temperature and moved satisfactorily even in the process of moving from the end to the end of the metal needle 211.

Further, since the surface of the metal needle 211 is coated with an alkali metal, the work function of the surface is very small, the affinity with the liquid molecular species 103 is high, and the metal needle 211 is formed from the end to the tip of the metal needle 211. Liquid molecular species 103
Can be satisfactorily supplied.

Furthermore, since the metal needle 211 has a concave groove 212 formed on the surface thereof communicating from the distal end to the distal end, the liquid molecular species 103 moves inside the concave groove 212 by capillary action. The liquid molecular species 103 can be satisfactorily supplied from the distal end to the distal end of the metal needle 211.

In particular, the metal needle 211 has the heater member 208 and the terminal electrode 201 mounted near the center thereof.
Since the liquid molecular species 103 moves in the gap between the inner surface of the through hole 209 between the heater member 208 and the terminal electrode 201 and the inner surface of the concave groove 212 of the metal needle 211, this movement is inhibited by the heater member 208 and the terminal electrode 201. It will not be done.

The present invention is not limited to the above embodiment, but allows various modifications without departing from the gist of the present invention. For example, in the above-described embodiment, the energizing unit 102 is fixed to the bottom of the main body housing 101. However, such an energizing unit 102 may be detachable from the main body housing 101.

Further, in the above embodiment, in order to improve the affinity with the molecular species 103, the metal needle 2 made of tungsten is used.
Although an example of coating the metal needle 11 with an alkali metal has been described, for example, such a metal needle 211 can be made of an alloy of gold and palladium, and the metal needle 211 is manufactured by growing a conductive diamond crystal. It is not impossible to do that.

In the above-described embodiment, the structure in which only the accelerating electrode 203 is formed of the mesh member 221 is exemplified. However, other electrodes 205 to 207 can be formed by such a mesh member 221. Similarly to the above, the acceleration electrode 203 can be formed of a metal plate having a through hole.

Further, in the above embodiment, the beam emitting unit 104 converts the molecular beam into a parallel beam by the converging electrode 204, and the fine processing apparatus 100 causes the substrate moving mechanism 132 to keep the distance between the beam emitting unit 104 and the processing location of the multilayer substrate 135 constant. , But it is also possible to omit one of these functions.

In the above embodiment, the liquid molecular species 103
Consisted of Fluorinert “FC-70” manufactured by Sumitomo 3M, which contains 15 carbon atoms and a predetermined number of fluorine in the molecule. It is only necessary to use a fluorocarbon liquid that generates a reactive molecular beam and has a low vapor pressure. For example, “I ₄ F ₆ C ₄ ” or “I ₂ F ₆ C ₃ ” can be used.

In the above embodiment, the beam emitting unit 1
04 has been described as emitting a positive molecular beam generated by the tunnel effect from the molecular species 103, for example,
It is also possible to add a neutralizing electrode (not shown) above the focusing electrode 204 and neutralize the positive molecular beam to neutral by the electrons generated by the neutralizing electrode.

In this case, fine processing can be performed by using the neutrally neutralized molecular beam without charging the processing portion to be processed. For example, the processing portion is positively charged and the positive molecular beam is repelled. Can be prevented, and the processing portion to be processed can be finely processed accurately and quickly.

Further, in the above embodiment, the heating of the metal needles 211 by the heater member 208 indirectly raises the temperature of the liquid molecular species 103. However, for example, the bottom of the main body frame of the beam emitting unit or the current It is also possible to provide a heater member at the bottom of the unit to indirectly heat the molecular species 103.

In the above embodiment, the molecular species 103 of the liquid is raised to a constant temperature by the heater member 208 so that the metal needle 2
Although it has been exemplified that the movement from the end portion to the tip portion of 11 is good, for example, by changing the heating temperature of the heater member 208, the movement amount of the molecular species 103 and the emission amount of the molecular beam are changed. It is also possible to apply this to make the emission amounts of the molecular beams of many beam emission units 104 uniform.

Further, in the above embodiment, it is assumed that the concave groove 212 is positively formed on the surface of the metal needle 211. For example, it is assumed that the metal needle 211 is manufactured by drawing with a die (not shown). A groove is inevitably formed on the surface thereof, and it is also possible to use the groove formed by this drawing process.

[0114]

The beam emitting unit according to the present invention emits a molecular beam generated from a molecular species upward, so that a processing portion to be processed can be quickly finely processed, and the overall structure is simple and minute. Therefore, for example, it can be used for arranging at a processing target to be processed and performing a large number of micro-processing at the same time. Since the temperature is raised, the molecular species of the liquid can be moved from the lower end portion of the needle-shaped member to the upper end portion, and the molecular beam can be continuously emitted. Good fine processing can be performed.

In another aspect of the present invention, the heater member raises the temperature of the needle-like member, so that the molecular species of the liquid located at the end of the needle-like member can be easily and reliably brought to a predetermined temperature by the heater member. The molecular species of the liquid can be maintained at a predetermined temperature in the process of moving from the distal end portion to the distal end portion of the needle-shaped member, and can be favorably moved.

Further, a needle-like member having a groove formed on its surface to communicate from the distal end portion to the distal end portion is mounted in the through-hole of the heater member, and the inner surface of the through-hole of the heater member and the needle-like member have the same shape. The liquid molecular species moves in the gap between the inner surface of the groove and the liquid molecular species from the lower end portion to the upper end portion of the needle-like member attached to the heater member so as to supply the molecular species well. Can be.

Further, a needle-like member having a concave groove formed on the surface thereof communicating from the distal end portion to the distal end portion is mounted in the through-hole of the terminal electrode, and the inner surface of the through-hole of the terminal electrode and the needle-like member are provided. By moving the liquid molecular species in the gap with the inner surface of the concave groove, the liquid molecular species can be satisfactorily supplied from the lower end to the upper end of the needle-shaped member connected to the terminal electrode. Can be.

Since the surface of the needle-shaped member is coated with an alkali metal, the work function of the surface of the needle-shaped member is very small, and the affinity between the surface of the needle-shaped member and the liquid molecular species is high. Therefore, the molecular species of the liquid can be favorably moved from the lower end portion to the upper end portion of the needle-shaped member.

Further, the lower electrode of the focusing electrode is maintained at the ground potential, a negative voltage is applied to the central electrode located above the lower electrode, and the upper electrode located above the central electrode is maintained at the ground potential. The molecular beam is shaped into a predetermined beam shape in the through hole of the upper electrode,
The molecular beam diffused and emitted by the electro-optical effect of the lower electrode, the center electrode, and the upper electrode can be converted into a converged parallel beam, and the molecular beam can be shaped and emitted. Therefore, it is possible to finely and precisely excavate a processing portion to be processed.

Further, since the accelerating electrode for accelerating the molecular beam is formed of a mesh member, the molecular beam which tends to diffuse immediately after being emitted from the needle-shaped member can be entirely accelerated. Collision of the electrode with the molecular beam can be minimized to reduce wear.

In the fine processing method using the fine processing apparatus of the present invention, a large number of needle-shaped members are arranged in front, rear, left and right corresponding to a processing portion to be processed, and liquid is supplied from the tip of each of the large number of needle-shaped members. Since the molecular species are emitted upward as a molecular beam, a large number of processing portions to be processed can be simultaneously finely processed with the large number of molecular beams, and the molecular species of the liquid heated by the heater member is needle-shaped. Since the molecular beam is continuously emitted from the distal end portions of a large number of needle-like members by being sequentially supplied from the distal end portion to the distal end portion of the member, it is possible to continuously finely process a large number of processing locations to be processed. Can be.

In another aspect of the microfabrication apparatus of the present invention, molecular species are supplied from a distal end to a distal end of the needle-like member by a predetermined electric power, and the molecular species at the distal end of the needle-like member is extracted. A molecular beam is generated by a predetermined potential difference with the electrode, and the molecular beam is accelerated by the predetermined potential difference with the accelerating electrode, so that the molecular beam can be continuously emitted from the tip portions of a number of needle-like members. it can.

In addition, since the molecular beam generated from the molecular species reacts with the object to be processed, the object to be processed can be excavated by both the physical action of collision of the molecular beam and the chemical action of the reaction. The object can be quickly micromachined with good efficiency.

Further, the molecular species is composed of an insulating and inert fluorocarbon liquid containing 15 carbon atoms and a predetermined number of fluorine in the molecule, so that a short-circuit between the needle-like member and the extraction electrode or the needle can be prevented. Corrosion of the needle-shaped member can be prevented, and the molecular species of the liquid can be satisfactorily moved from the end to the end of the needle-shaped member even in a vacuum.

[Brief description of the drawings]

FIG. 1 is a vertical sectional front view showing the internal structure of a beam emitting unit.

FIG. 2 is an exploded perspective view showing an assembling structure of a beam emitting unit.

FIG. 3 is an exploded perspective view showing a relationship among a metal needle as a needle-like member, a heater member, and a terminal electrode.

FIG. 4 is an exploded perspective view showing an assembly structure of an acceleration electrode.

FIG. 5 is an exploded perspective view showing a relationship among a power supply unit, a beam emission unit, and a dummy unit, which are member arrangement means.

FIG. 6 is a schematic vertical sectional front view showing the entire structure of the microfabrication device of the present embodiment.

[Explanation of symbols]

 REFERENCE SIGNS LIST 100 Micro-processing device 101 Main body housing 102 Current-carrying unit 103 Molecular species 104 Beam emission unit 105 Dummy unit 130 High-voltage power supply system 132 serving as voltage applying means 132 Substrate moving mechanism 133 serving as relative moving means 133 Substrate holding mechanism serving as target holding means 135 Processing Multilayer substrate 201 as a target 201 End electrode 202 Extraction electrode 203 Acceleration electrode 204 Focusing electrode 205 Lower electrode 206 Center electrode 207 Upper electrode 208 Heater member 209 Through hole 211 Metal needle as needle member 212 Depressed groove 219 Frame 220 Fine wire 221 Reticulated Element

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H05K 3/00 H05K 3/00 K 3/46 3/46 Y F term (Reference) 4E066 AA02 BA13 CB18 5C030 DF01 DF05 DF07 DG07 5C034 BB02 BB05 BB09 5E346 AA43 BB01 FF01 GG15 HH26

Claims (12)

[Claims] An insulative main body housing, and a liquid molecular species is supplied from the lower end to the upper end by being supported by the main body housing so that the axial direction thereof is substantially parallel to the vertical direction. A conductive sharpened needle-shaped member, an extraction electrode surrounding a tip portion of the needle-shaped member, and a negative electrode voltage for generating a molecular beam from the molecular species by a tunnel effect from the molecular species. An accelerating electrode to which a negative electrode voltage for accelerating the molecular beam is applied, which is located in a tip direction of the needle-like member, and a heater member which raises the temperature of the molecular species located at least at a terminal portion of the needle-like member, Beam output unit provided. 2. The beam emitting unit according to claim 1, wherein said heater member heats said needle-shaped member. 3. A concave groove communicating from a distal end portion to a distal end portion is formed on a surface of the needle-like member, and the heater member is formed of a flat resistor having a through hole formed therein. The beam emitting unit according to claim 2, wherein the needle-shaped member is mounted in the through-hole, and an inner surface of the concave groove of the needle-shaped member is separated from an inner surface of the through-hole of the heater member. 4. A concave groove which is formed on the surface of the needle-like member and communicates from a distal end portion to a distal end portion, and a terminal electrode which is maintained at a ground potential by a flat conductor having a through hole formed therein. The needle-shaped member is mounted in the through-hole of the terminal electrode, and the inner surface of the concave groove of the needle-like member and the inner surface of the through-hole of the terminal electrode are separated from each other. The beam emitting unit according to any one of claims 3 to 3. 5. The beam emitting unit according to claim 1, wherein a surface of the needle-shaped member is coated with an alkali metal. 6. A lower electrode positioned above the accelerating electrode and maintained at a ground potential, a center electrode positioned above the lower electrode and applied with a negative voltage, and a lower electrode positioned above the center electrode. An upper electrode which is located and maintained at a ground potential, wherein the upper electrode is formed of a plate-shaped conductor having a through-hole for forming the molecular beam into a predetermined beam shape. The beam emitting unit according to any one of claims 1 to 5. 7. At least the extraction electrode is made of a flat conductor having a through-hole surrounding the distal end of the needle-like member, and at least the acceleration electrode is a frame in which a conductive thin wire is stretched. The beam emitting unit according to any one of claims 1 to 6, wherein the beam emitting unit is made of a mesh member. 8. An electroconductive needle-shaped member is disposed for each processing portion to be processed such that a distal end portion is located on a lower side and a distal end portion is located on an upper side, and the processing is performed on a distal end portion of the needle-shaped member. An object is opposed from the upper side, and a distal end portion of the needle-shaped member whose front end portion is opposed to the object to be processed is immersed in a molecular species of liquid, and at least a position between the needle-shaped member and the object to be processed is in a vacuum state, The molecular species is heated and moved from the distal end to the distal end of the needle-like member, and a voltage of a negative electrode is applied to the molecular species moved to the distal end of the needle-like member to generate a molecular beam by a tunnel effect. A fine processing method comprising: accelerating the molecular beam by an electric field of a negative electrode; and causing the accelerated molecular beam to collide with the object to be processed. 9. A plurality of beam emitting units according to claim 1, wherein the plurality of beam emitting units are arranged such that a distal end portion of the needle-shaped member is located on a lower side and a distal end portion is located on an upper side. A member arrangement means for arranging and holding it in front, rear, left and right corresponding to a processing part to be processed in a state where the object is to be processed; Object holding means for holding an object; molecular supply means for immersing a terminal portion of the needle-shaped member of each of the plurality of beam emitting units in a liquid molecular species; at least positions of the beam emitting unit and the object to be processed Vacuum evacuation means for applying a negative voltage higher than the needle-like member to each of the extraction electrodes of each of the plurality of beam emission units, Said voltage applying means for applying a negative voltage of the high voltage from the extraction electrode, a number of the beams are microfabricated device comprising a, a power supply means for supplying power to the heater member of each of the emission unit. 10. The voltage applying means grounds the needle-like member, generates a potential difference between the needle-like member and the extraction electrode to cause a tunnel effect on the molecular species, and generates a potential difference by the tunnel effect of the molecular species. A potential difference for accelerating the generated molecular beam is generated between the extraction electrode and the accelerating electrode, and the power supply unit increases the temperature of the molecular species to a temperature at which the needle-shaped member moves from a distal end to a distal end. The microfabrication apparatus according to claim 9, wherein the heater is supplied to the heater member. 11. The microfabrication apparatus according to claim 9, wherein the molecular species is formed of a substance in which the generated molecular beam reacts with the object to be processed. 12. The method according to claim 9, wherein the molecular species is composed of an insulating and inert fluorocarbon liquid containing 15 carbon atoms and a predetermined number of fluorine in the molecule. Micro processing equipment.