JP2002208134A - Rotation gripper for disk substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotation gripper for gripping and rotating a disk substrate at a high speed, having a compact shape and small rotational inertia, and no changes made in the gripping position of the disk substrate, in the fabrication device of the disk substrate to be used for a computer hard disk device. SOLUTION: A disk substrate is rotated by spreading a gripping claw 11 inserted into the center hole of the disk substrate, and gripping the inner periphery of the disk substrate. The gripping claw 11 is opened/closed by the linear motion of the gripped disk substrate 20 in a diameter direction. The opening/ closing by the linear motion is realized by using a toggle link 23. The rotational inertia of the gripper is reduced, the starting/stopping time of the rotation is shortened, and vibration or noise by unbalance is reduced. Also, a gripping height is maintained constant even when a dimensional error is present in the disk substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk substrate processing apparatus or processing line used for a hard disk drive of a computer, and more particularly to a device for gripping and rotating a disk substrate at a high speed. The present invention relates to a device characterized by the structure of

[0002]

2. Description of the Related Art Generally, a glass substrate is used as a disk substrate of a hard disk device of a computer. This glass substrate is manufactured by making a hole having a diameter of 20 to 25 mm at the center of a glass disk having a thickness of about 1 mm and polishing the inner and outer circumferences. Since drilling and polishing are performed using a diamond grindstone while applying an aqueous cutting fluid, the cutting fluid adheres to the processed glass substrate as water droplets. Therefore, it is necessary to remove the cutting fluid attached to the glass substrate before moving the glass substrate to the next processing step. This removal of the cutting fluid can be performed at a high speed (3000 to 4000).
(rpm), and the cutting fluid is blown off by centrifugal force.

[0003] Drilling of a glass substrate is performed by fixing the glass substrate on a table, and polishing of the inner and outer peripheries is performed while holding the upper and lower surfaces of the glass. It is difficult to rotate at high speed. Therefore, a method is employed in which the processed glass substrate is transported to a dedicated device (hereinafter referred to as a draining device), and the glass substrate is gripped by a chuck of the draining device and rotated at high speed.

The drainer has a chuck for gripping the glass substrate. The conventional chuck has a structure in which the outer periphery of the glass substrate is gripped by gripping claws provided at the tip of a swing arm. The chuck is mounted on the upper end of a hollow spindle arranged in the vertical direction, and has a structure in which the swing arm is swung by an opening / closing rod that moves up and down in the hollow hole of the spindle. An example of this type of chuck is disclosed in JP-A-6-25136.
No. 7 discloses this.

In a chuck having a structure for gripping the outer periphery of a glass substrate, when the glass substrate is rotated at a high speed, a centrifugal force acts in a direction in which the chuck is opened. The chuck opens,
The gripping force is prevented from lowering. When using the centrifugal force of the balance weight, it is necessary to attach the gripping claw and the balance weight to both ends of the arm that swings back and forth like a seesaw, and the opening and closing of the chuck is also performed by the swing operation of the swing arm. Will be

FIG. 3 is a view showing an example of a conventional chuck having the above-described structure. The vertical spindle 1
The frame 2 is supported by bearings 3 and 4, and an upper cup-shaped arm holder 5 is fixed to the upper end of the spindle 1. A claw opening / closing sleeve 6 is fitted at the center of the arm holder 5 so as to be vertically movable. The arm holder 5 is provided with a fulcrum pin 7 in a circumferential direction at a position where the circumference is divided into three equal parts.
The swing arm 8 pivotally supported by the fulcrum pin extends outside the arm holder 5. An upward arm 9 and a downward arm 1 are provided at the tip side of the swing arm 8.
0 is fixed, the gripping claw 11 is fixed to the tip of the upward arm 9, and the balance weight 12 is fixed to the tip of the downward arm 10. The base end of the swing arm 8 extends inside the arm holder 5, and a circumferential drive pin 14 provided on the claw opening / closing sleeve 6 is loosely fitted into a long groove 13 provided at the base end.

The pawl opening / closing sleeve 6 is urged downward by a coil spring 15. On the other hand, a claw opening / closing cylinder 16 is provided below the spindle 1, and a tip of a rod 17 of the cylinder is opened / closed through a hollow hole 18 of the spindle and an upper end thereof faces the bottom of the claw opening / closing sleeve 6. It faces the lower end of the rod 19.

[0008] The chuck having the above-described structure moves the pawl opening / closing rod 19 by moving the rod 17 of the pawl opening / closing cylinder upward.
Pushes up the claw opening / closing sleeve 6 and pushes up the base end of the swing arm 8 to swing the tip end side of the swing arm downward to open the gripping claw 11. When the cylinder rod 17 descends, the pawl opening / closing rod also descends by its own weight, the pawl opening / closing sleeve 6 is pushed downward by the force of the coil spring 15, the base end of the swing arm 8 moves down, and the tip end side of the swing arm moves. Move up to grip claw 1
1 grips the outer periphery of the glass substrate 20.

When the spindle 1 rotates, a centrifugal force acts on the gripping claw 11 and the upward arm 9 which rotate together with the spindle 1 to try to swing the swing arm 8 in the opening direction of the gripping claw 11. The centrifugal force acting on the balance weight 12 and the downward arm 10 acts to swing the swing arm 8 in the opposite direction, thereby preventing the gripping claws 11 from opening and the gripping force from decreasing.

[0010]

However, in the chuck having the above structure, the outer diameter of the chuck is large, and it is necessary to provide a gripping claw and a balance weight on the outer diameter side. There is a problem that it takes time to start and stop. In particular, in a glass substrate drainer, the rotation speed is high and the rotation duration is 5 hours.
Since it is as short as 〜１０10 seconds, if a long time is required to start and stop the rotation, the productivity is greatly reduced. Furthermore, in the above structure, the chuck is opened and closed by the swing of the gripping claw,
For example, when there is an error in the outer diameter of the glass substrate, an error occurs in the height of the glass substrate 20 gripped by the gripping claws 11, which hinders the transfer of the glass substrate to and from the chuck of the transfer device. There was a problem. Further, since the chuck becomes large, there is a disadvantage that the weight of the apparatus is increased, a rotational imbalance is easily generated, and vibration and noise are easily generated.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the conventional device. First, it is possible to obtain a compact disk rotating and holding device for a disk substrate having a short rise and stop time of rotation. A second object is to obtain the above-described device in which the holding position of the disk substrate does not change.

[0012]

The present invention solves the above first problem by expanding the gripping claws 11 inserted into the center hole of the disk substrate, gripping the inner periphery of the disk substrate, and rotating the disk. It is. Further, the present invention solves the second problem by opening and closing the gripping claws 11 by linear movement of the disk substrate 20 to be gripped in the radial direction.

That is, the disk substrate rotating and gripping apparatus of the present invention comprises a hollow spindle 1 which is supported vertically.
And a claw opening / closing rod 19 inserted into the hollow hole of the spindle, and the gripper claw 1 in conjunction with the vertical movement of the claw opening / closing rod.
A rotating gripping device for a disk substrate provided with a radial nail holding arm 21 that opens and closes a plurality of gripping claws 11.
Is the disk substrate 20 around the axis of the spindle 1.
Characterized in that they are arranged in a positional relationship to be inserted into the center hole of the disk substrate, and these gripping claws are spread in synchronization with each other, whereby the gripping claws are pressed against the inner peripheral edge of the disk substrate to grip the disk substrate. It is.

According to a second aspect of the present invention, which solves the first and second problems, a rotary guide for a disk substrate having the above-mentioned structure is provided with a linear guide 22 for guiding a claw holding arm 21 in a radial direction. The gripping claws 11 are opened and closed by linear reciprocating movement of the claw holding arms 21 in the radial direction.

The invention according to claim 3 is characterized in that the pawl opening / closing sleeve 6 which can freely move up and down and is urged downward by a spring 15 at the upper end position of the spindle 1 and the pawl which is inserted into the hollow hole of the spindle 1 and moves upward. 3. The rotary gripping device according to claim 2, further comprising: a pawl opening / closing rod which is separated from the pawl opening / closing cylinder when the opening / closing sleeve is moved downward. A toggle link 23 pivotally attached to the base end of the claw holding arm 21 at a position below and radially outward from the end is provided.

In the rotary gripper of the present invention, the gripper 11 grips the inner periphery of the disk substrate 20, so that the entire structure can be made compact. In particular, the outer diameter can be reduced and the rotational inertia of the chuck is reduced. Thus, the time for starting and stopping the rotation can be reduced, and vibration and noise due to imbalance can be reduced. Further, according to the invention of claim 2, the gripping claws 11 are linearly arranged in the radial direction,
Is opened and closed in a plane perpendicular to the axis of the disk, so that the gripping claws do not move up and down during opening and closing, and even if there is an error in the size of the disk substrate to be gripped, the disk gripping height is constant, and It does not hinder delivery of the disk substrate to a chuck or the like. In addition, since the centrifugal force acting on the gripping claws and the claw opening / closing arms when rotating rotates in the direction of increasing the gripping force, the rotating gripping device of the present invention does not require a balance weight, and in this respect, the chuck can be used. The size can be reduced, and the rotational inertia can be reduced.

Further, in the rotary gripping device according to the third aspect, the vertical movement of the claw opening / closing rod 19 can be converted into a linear movement in the radial direction of the gripping claw with a simple structure, and the force is weakened by the boosting action of the toggle link. A strong gripping force can be exhibited by the spring, and the driving force of the claw opening / closing rod 19 may be small.

[0018]

Embodiments of the present invention will be described below with reference to an embodiment of the present invention shown in FIG. A spindle 1 composed of a hollow shaft is rotatably supported in a frame 2 by bearings 3 and 4 so as to be freely rotatable in a vertical direction. A pulley 24 is fixed to a lower end thereof, and an upward cup-shaped arm holder 5 is provided at an upper end thereof. Fixed. The frame 2 is fixed to the support plate 25, and the spindle 1 is rotationally driven by driving a belt 27 of a spindle motor 26 mounted on the support plate 25 adjacent to the frame 2. A claw opening / closing cylinder 16 is disposed below the spindle 1, and a claw opening / closing rod 19 is inserted from an upper end of the cylinder rod 17 into a hollow hole 18 of the spindle and extends upward.

A radial guide hole 22 penetrates through the thick peripheral wall of the arm holder 5 at a position dividing its circumference into three equal parts. The claw holding arm 21 is provided with the guide portion 2 in the radial direction.
8, the upward arm 29, and the inward arm 30 are formed in a U-shape, and the groove-shaped gripping claw 11 is fixed to the upper surface of the front end (inner end) of the inward arm 30. I have. The guide portion 28 is inserted into the guide hole 22 of the arm holder so as to be movable in the axial direction. A cup-shaped sealing material 31 is fixed around the guide portion 28 to prevent cutting fluid and dust from entering the guide hole 22.

At the center of the arm holder 5, a claw opening / closing sleeve 6 is fitted so that it can move up and down and its lower end is defined by a step 32 of a center hole. On the upper surface of the arm holder 5,
A cover plate 33 is fixed, and a coil spring 15 is mounted between the cover plate and the bottom plate of the claw opening / closing sleeve 6 to urge the claw opening / closing sleeve 6 downward. A bracket 34 projects from the upper end of the claw opening / closing sleeve 6 in a direction that divides the circumference into three equal parts, and the bracket 34 and the base end of the guide portion 28 of the claw holding arm are connected by a toggle link 23.

The toggle link 23 has a pin 3 in the circumferential direction.
5, 36, the bracket 34 and the base end of the guide portion are pivotally connected. The arm-side pin 36 is located below the sleeve-side pin 35 and radially outward. The rotation of the claw holding arm 21 around the radial axis is prevented by the toggle link 23. Cylinder rod 1
The upper end of 7 is located slightly below the lower end of the pawl opening / closing rod 19 which has been moved down by the urging force of the spring 15 or its own weight during its downward movement. Therefore, when the claw opening / closing sleeve 6 is moved down, the claw opening / closing rod 19 is not in contact with the cylinder rod 17.

The opening and closing operation of the gripping claws 11 is performed when the spindle 1 is stopped. When the rod 17 of the pawl opening / closing cylinder moves upward in the stopped state of the spindle, the pawl opening / closing sleeve 6 is pushed up via the pawl opening / closing rod 19, the inclination angle of the toggle link 23 increases, and the guide portion 28 of the pawl holding arm is moved. To the inside. Thereby, the claw holding arm 2
1, so that the gripping claws 11 move inward in the radial direction. In this state, the chuck of the transfer device (not shown) is
0 is conveyed to the gripping position of the gripping claws 11. When the glass substrate 20 is positioned at a predetermined gripping position, the rod 17 of the gripping cylinder is moved down, and the pawl opening / closing sleeve 6 is moved down by the urging force of the coil spring 15. Then, the inner end of the toggle link 23 moves down, and the guide portion 2 of the claw holding arm is moved.
8 is pushed outward in the radial direction, and the gripping claws 11 are pressed against the inner peripheral edge of the glass substrate 20 to grip the glass substrate 20. In this state, as described above, the lower end of the claw opening / closing rod 19 and the upper end of the cylinder rod 17 are separated. When the glass substrate 20 is gripped in this way, the spindle motor 26 rotates the spindle 1 to rotate the glass substrate 20 at high speed. After the rotation is completed and the spindle is stopped, the gripping claws 11 are moved inward by moving the rod 17 of the pawl opening / closing cylinder upward, and the gripping of the glass substrate 20 is released.

[Brief description of the drawings]

FIG. 1 is a sectional view of an embodiment of the present invention.

FIG. 2 is an operation explanatory view of a main part showing an opening / closing operation of a nail by a toggle link.

FIG. 3 is a sectional view showing a main part of a conventional device.

[Explanation of symbols]

 1 Spindle 6 Claw opening / closing sleeve 11 Gripping claw 15 Coil spring 19 Claw opening / closing rod 20 Glass substrate 21 Claw holding arm 23 Toggle link

Claims (3)

[Claims] 1. A hollow spindle supported vertically.
(1), a claw opening / closing rod (19) inserted into the hollow hole of this spindle, and a radial claw holding arm (21) that opens and closes the gripping claw (11) in conjunction with the vertical movement of the claw opening / closing rod. And a plurality of gripping claws.
(11) are arranged around the axis of the spindle (1) so as to be inserted into the center hole of the disk substrate (20). A rotary holding device for a disk substrate, wherein the disk substrate is gripped by pressing against an inner peripheral edge of the substrate. 2. A linear guide (22) for guiding a claw holding arm (21) in a radial direction, wherein the gripping claw (11) is opened and closed by a linear reciprocating movement of the claw holding arm (21) in a radial direction. 2. The apparatus for rotating and holding a disk substrate according to claim 1, wherein: 3. A pawl opening / closing sleeve (6) vertically movable at the upper end position of the spindle (1) and urged downward by a spring (15).
And a claw opening / closing rod (19) that is inserted into the hollow hole of the spindle (1) and pushes up the claw opening / closing sleeve (6) when moving upward, the base end of the claw opening / closing sleeve (6 ) And a toggle link (23) pivotally attached to the base end of the claw holding arm (21) at a position below the base end and radially outside the base end. 3. The rotary holding device for a disk substrate according to 2.