JP2002205265A5 - - Google Patents
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- Publication number
- JP2002205265A5 JP2002205265A5 JP2001346177A JP2001346177A JP2002205265A5 JP 2002205265 A5 JP2002205265 A5 JP 2002205265A5 JP 2001346177 A JP2001346177 A JP 2001346177A JP 2001346177 A JP2001346177 A JP 2001346177A JP 2002205265 A5 JP2002205265 A5 JP 2002205265A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001346177A JP4620919B2 (ja) | 2000-11-09 | 2001-11-12 | 研磨定盤の洗浄方法及びその洗浄装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000341885 | 2000-11-09 | ||
| JP2000-341885 | 2000-11-09 | ||
| JP2001346177A JP4620919B2 (ja) | 2000-11-09 | 2001-11-12 | 研磨定盤の洗浄方法及びその洗浄装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001117793A Division JP3333778B2 (ja) | 2000-11-09 | 2001-04-17 | 研磨定盤の洗浄方法及びその洗浄装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002205265A JP2002205265A (ja) | 2002-07-23 |
| JP2002205265A5 true JP2002205265A5 (enExample) | 2008-05-29 |
| JP4620919B2 JP4620919B2 (ja) | 2011-01-26 |
Family
ID=26603654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001346177A Expired - Fee Related JP4620919B2 (ja) | 2000-11-09 | 2001-11-12 | 研磨定盤の洗浄方法及びその洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4620919B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101310983B1 (ko) * | 2011-07-28 | 2013-10-14 | 현대제철 주식회사 | 연마 부재 교체가 가능한 연마 장치 |
| JP6717691B2 (ja) * | 2016-07-06 | 2020-07-01 | 株式会社荏原製作所 | 基板処理装置 |
| CN117207069B (zh) * | 2023-11-08 | 2024-01-23 | 苏州博宏源机械制造有限公司 | 一种晶圆抛光盘面型修正装置及方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03103719U (enExample) * | 1990-02-09 | 1991-10-28 | ||
| JP2567421Y2 (ja) * | 1992-01-27 | 1998-04-02 | 株式会社スギノマシン | 高速流体噴射ノズル保持装置 |
| JP3366061B2 (ja) * | 1993-06-30 | 2003-01-14 | 澄夫 田中 | 両面研磨機定盤の洗浄装置 |
| JPH09309063A (ja) * | 1996-05-24 | 1997-12-02 | Nippon Steel Corp | 研磨定盤の洗浄方法およびその装置 |
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2001
- 2001-11-12 JP JP2001346177A patent/JP4620919B2/ja not_active Expired - Fee Related