JP2002205265A5 - - Google Patents

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Publication number
JP2002205265A5
JP2002205265A5 JP2001346177A JP2001346177A JP2002205265A5 JP 2002205265 A5 JP2002205265 A5 JP 2002205265A5 JP 2001346177 A JP2001346177 A JP 2001346177A JP 2001346177 A JP2001346177 A JP 2001346177A JP 2002205265 A5 JP2002205265 A5 JP 2002205265A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001346177A
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Japanese (ja)
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JP2002205265A (ja
JP4620919B2 (ja
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Priority to JP2001346177A priority Critical patent/JP4620919B2/ja
Priority claimed from JP2001346177A external-priority patent/JP4620919B2/ja
Publication of JP2002205265A publication Critical patent/JP2002205265A/ja
Publication of JP2002205265A5 publication Critical patent/JP2002205265A5/ja
Application granted granted Critical
Publication of JP4620919B2 publication Critical patent/JP4620919B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001346177A 2000-11-09 2001-11-12 研磨定盤の洗浄方法及びその洗浄装置 Expired - Fee Related JP4620919B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001346177A JP4620919B2 (ja) 2000-11-09 2001-11-12 研磨定盤の洗浄方法及びその洗浄装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000341885 2000-11-09
JP2000-341885 2000-11-09
JP2001346177A JP4620919B2 (ja) 2000-11-09 2001-11-12 研磨定盤の洗浄方法及びその洗浄装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001117793A Division JP3333778B2 (ja) 2000-11-09 2001-04-17 研磨定盤の洗浄方法及びその洗浄装置

Publications (3)

Publication Number Publication Date
JP2002205265A JP2002205265A (ja) 2002-07-23
JP2002205265A5 true JP2002205265A5 (cg-RX-API-DMAC7.html) 2008-05-29
JP4620919B2 JP4620919B2 (ja) 2011-01-26

Family

ID=26603654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001346177A Expired - Fee Related JP4620919B2 (ja) 2000-11-09 2001-11-12 研磨定盤の洗浄方法及びその洗浄装置

Country Status (1)

Country Link
JP (1) JP4620919B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101310983B1 (ko) * 2011-07-28 2013-10-14 현대제철 주식회사 연마 부재 교체가 가능한 연마 장치
JP6717691B2 (ja) * 2016-07-06 2020-07-01 株式会社荏原製作所 基板処理装置
CN117207069B (zh) * 2023-11-08 2024-01-23 苏州博宏源机械制造有限公司 一种晶圆抛光盘面型修正装置及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103719U (cg-RX-API-DMAC7.html) * 1990-02-09 1991-10-28
JP2567421Y2 (ja) * 1992-01-27 1998-04-02 株式会社スギノマシン 高速流体噴射ノズル保持装置
JP3366061B2 (ja) * 1993-06-30 2003-01-14 澄夫 田中 両面研磨機定盤の洗浄装置
JPH09309063A (ja) * 1996-05-24 1997-12-02 Nippon Steel Corp 研磨定盤の洗浄方法およびその装置

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