JP2002195957A - Foreign object inspecting apparatus and method for linking coordinate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify the operation of alignment and link coordinates without the increase of coordinate errors even if inspecting conditions are changed. SOLUTION: In linkage of coordinates of an object to be inspected w from a primary foreign object inspecting apparatus 10 to a foreign object inspecting apparatus 1 (a foreign object inspecting means 2), alignment data obtained by final alignment is not used, rough alignment data for aligning the object to be inspected with the foreign object inspecting apparatus and calibrating data for aligning on the foreign object inspecting apparatus after the rough alignment are discriminated, and the excess coordinate errors in the linkage of coordinates are suppressed by the application of the calibrating data corresponding to various conditions when a type of the primary foreign object inspecting apparatus, an inspecting recipe, inspecting conditions such as a type, a size and, etc., of the object to be inspected and linking conditions between the primary foreign object inspecting apparatus and the foreign object inspecting apparatus are changed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a foreign matter inspection for inspecting foreign matter on an object to be inspected, such as a wafer, by reproducing stage coordinates of a foreign matter inspection apparatus at coordinate positions of foreign matter based on foreign matter coordinate data. The present invention relates to an apparatus and a coordinate link for linking stage coordinates and foreign substance coordinate data of the foreign substance inspection apparatus.

[0002]

2. Description of the Related Art A foreign substance present on an object to be inspected, such as a wafer, is detected by an optical foreign substance inspection apparatus or the like, and its position is specified.
The foreign matter coordinates are reproduced in the stage coordinates of the foreign matter inspection device, and the foreign matter inspection device performs inspection, analysis, evaluation, and the like of the foreign matter. Such foreign matter inspection using coordinate links is used, for example, for inspection of particles generated in semiconductor manufacturing equipment, and is a combination of an optical foreign matter inspection apparatus and an EPMA apparatus, a review SEM, a foreign matter composition inspection apparatus for wafers, and the like. It has been known.

In such a foreign matter inspection apparatus, coordinate data of foreign matter is obtained by inspecting a wafer with an optical foreign matter inspection apparatus, and based on the coordinate data, foreign matter is positioned by an SEM built in the apparatus, and EPMA or the like is used. To analyze the constituent elements of the foreign matter on the wafer.

[0004] In order to reproduce the coordinates of the foreign matter obtained by the optical foreign matter inspection device into the stage coordinates of the foreign matter inspection device, usually, two alignment steps of rough alignment and fine alignment are performed. Rough alignment is a process of arranging an object to be inspected such as a wafer in a foreign substance inspection apparatus and setting a coordinate origin on the foreign substance inspection apparatus. In rough alignment, for example, two points of an orientation flat portion (orientation flat portion) formed on a wafer and one point of another edge are set as alignment points, and one point formed by these three points is set as a coordinate origin. Can be.

Further, the position of a foreign substance on a wafer obtained from the optical foreign substance inspection apparatus is defined by the coordinate system of the optical foreign substance inspection apparatus, and therefore does not match the coordinate system of the foreign substance inspection apparatus. Fine alignment is a process of linking between these two coordinate systems, and by linking the two coordinate systems by searching for foreign matter corresponding to the foreign matter coordinates obtained by an optical foreign matter inspection device on the foreign matter inspection device. Thus, the foreign object coordinates obtained in advance by the optical foreign object inspection device or the like are reproduced as the stage coordinates of the foreign object inspection device.

FIG. 7 is a schematic diagram for explaining rough alignment and fine alignment. The foreign particle coordinate data (xp, yp) of the foreign particle p on the wafer is obtained by a first foreign particle inspection device such as an optical foreign particle inspection device.
After aligning the wafer with a foreign matter inspection device and performing rough alignment (in the figure), foreign matter coordinate data (xp, yp)
The foreign substance p corresponding to is searched and detected on the foreign substance inspection device,
Foreign object coordinate data (Xp, Yp) on the foreign object inspection device is obtained.

Conventionally, when the primary foreign matter inspection device such as an optical foreign matter inspection device and the inspection conditions such as the type and size of the object to be inspected do not change, it can be obtained by performing rough alignment and fine alignment. The final coordinate link data is filed, and for the same inspection condition, the alignment process is omitted or the operation is simplified by using the filed coordinate link data.

For example, in FIG. 7, foreign object coordinate data (Xp, Yp) corresponding to foreign object coordinate data (xp, yp)
Is filed as coordinate link data, and thereafter, when a foreign substance inspection is performed under the same inspection conditions, the foreign substance coordinates are reproduced on the foreign substance inspection apparatus using the coordinate link data. Normally, by performing the coordinate link, better alignment is performed as compared with the case where the coordinate link is not performed, so that the final alignment can be easily performed.

[0009]

A conventional method of simplifying fine alignment by using final coordinate link data filed is as follows.
The condition is that primary inspection apparatus such as an optical inspection apparatus and inspection conditions such as the type and size of an object to be inspected do not change. Therefore, when the model and equipment of the primary foreign matter inspection apparatus and the type and size of the wafer are changed, it is difficult to perform alignment using only the final coordinate link data, and rough alignment is required.

[0010] At this time, if rough alignment is performed, the final coordinate link data cannot be used, and the coordinate position may be greatly deviated, and it is necessary to detect the position of the foreign substance again on the foreign substance inspection device. Therefore, there is a problem that the alignment operation is complicated and takes a long time in the coordinate link of the conventional particle inspection apparatus. In addition, when the final coordinate link data is used, the first particle inspection apparatus, When the inspection conditions such as the type and size of the inspection object are changed, there is a problem that a coordinate error increases.

The present invention has been made to solve the above-mentioned conventional problems, and has as its object to simplify the alignment operation. In addition, even when the inspection conditions are changed, the coordinate link can be formed without increasing the coordinate error. The purpose is to do.

[0012]

The final coordinate link data used in the conventional foreign matter inspection apparatus is a rough alignment for arranging an object to be inspected in the foreign matter inspection apparatus and setting a coordinate origin on the foreign matter inspection apparatus. And the step of linking between the two coordinate systems of the primary foreign matter inspection device and the foreign matter inspection device, the inspection condition of the primary foreign matter inspection device is If they are different, this coordinate link data cannot be used.

According to the present invention, in the coordinate link from the primary foreign matter inspection device to the foreign matter inspection device for the inspected object, not the alignment data obtained in the final positioning as in the prior art, Rough alignment data for alignment with the inspection apparatus and coordinate link data for alignment performed on the foreign substance inspection apparatus after rough alignment in the foreign substance inspection apparatus are distinguished, and the first foreign substance is determined using the coordinate link data. By converting the coordinate data of the inspection device, the foreign substance coordinates in the foreign substance inspection are obtained.

For this purpose, coordinate link data depending on the primary foreign substance inspection apparatus is stored as calibration data, and the model of the primary foreign substance inspection apparatus, an inspection recipe (inspection specifications such as magnification), and inspection data. When the inspection conditions such as the type and size of the inspection object are changed and the link condition between the primary foreign matter inspection device and the foreign matter inspection device is changed, the calibration data corresponding to each condition is read out, and the calibration data is read out based on the calibration data. The coordinate data of the primary foreign matter inspection device is converted to obtain foreign matter coordinates in the foreign matter inspection. This suppresses an excessive coordinate error in the coordinate link. Therefore, a foreign matter inspection apparatus according to the present invention provides a foreign matter inspection apparatus that reproduces stage coordinates at a coordinate position of a foreign matter using foreign matter coordinate data obtained by a primary foreign matter inspection apparatus. A coordinate linking means for performing a coordinate link between the first and second foreign matter inspection devices;
It is configured to include a storage unit for storing each of the following foreign substance inspection devices, and a coordinate conversion unit for converting the foreign substance coordinates into stage coordinates of the foreign substance inspection apparatus.

Here, the coordinate linking means includes rough alignment for mechanically aligning the object to be inspected with the foreign matter inspection apparatus, and fine alignment for reproducing the coordinate position of the foreign matter on the stage coordinates. The data depends only on the primary foreign matter inspection apparatus obtained from the rough alignment error included in the rough alignment, the rough alignment error included in the fine alignment, and the error dependent on the primary foreign matter inspection apparatus. It is an error. The coordinate conversion means depends on the primary particle inspection device by calibrating the particle coordinate data obtained by the primary particle inspection device using the calibration data corresponding to the primary particle inspection device. The stage coordinates from which the error is removed are obtained.

The first foreign substance inspection apparatus is, for example, an optical foreign substance inspection apparatus, which detects a foreign substance present on an object to be inspected, and obtains its coordinate data. On the other hand, foreign matter inspection devices
Based on the foreign substance coordinate data obtained by the first foreign substance inspection apparatus, the coordinate position of the foreign substance is reproduced on the inspection object mounted on the foreign substance inspection apparatus, and the foreign substance detected by the first foreign substance inspection apparatus is detected. Review the same foreign matter as above and perform inspection analysis.

The foreign matter inspection apparatus according to the present invention includes rough alignment data for aligning an object to be inspected with the foreign matter inspection apparatus, and coordinates for calibrating and aligning a coordinate error on the foreign matter inspection apparatus after rough alignment. The data is distinguished from the link data and stored for each primary foreign matter inspection device. The coordinate link data is data used for alignment performed on the foreign matter inspection device after the rough alignment, corrects a coordinate error included in the first foreign matter inspection device, and transfers the data from the first foreign matter inspection device to the foreign matter inspection device. Is performed on the foreign matter inspection apparatus, and is data unique to the primary foreign matter inspection apparatus or the inspection recipe of the primary foreign matter inspection apparatus.

The coordinate conversion means provided in the foreign matter inspection device uses calibration data corresponding to a primary foreign matter inspection device or an inspection recipe for performing a coordinate link, and is obtained by the primary foreign matter inspection device based on the calibration data. The foreign object coordinate data is subjected to coordinate conversion to obtain foreign object coordinate data on the foreign object inspection device in which the coordinate error has been calibrated. This calibration data is data unique to the primary foreign matter inspection device or inspection recipe, and can be read from the calibration link data storage means corresponding to the primary foreign matter inspection device or inspection recipe. By using the calibration data, if rough alignment is performed, coordinate link can be easily performed only by changing the foreign substance coordinate data in accordance with the changed primary foreign substance inspection apparatus or inspection recipe.

The calibration data is formed by rough alignment data unique to the inspection object (eg, wafer type and size) obtained by rough alignment of the inspection object with the particle inspection apparatus, and the first particle inspection. From the fine alignment data obtained by fine alignment of the object to be inspected from the apparatus to the foreign substance inspection apparatus, calibration data specific to the first foreign substance inspection apparatus or inspection recipe is formed,
The formed calibration data is stored in the calibration data storage means for each primary foreign matter inspection device or inspection recipe.

FIG. 1 is a schematic diagram for explaining the operation of a coordinate link by the foreign matter inspection apparatus of the present invention. In FIG. 1, the foreign matter inspection apparatus of the present invention is composed of two steps. First step (step indicated by the first (n-th) in the figure)
Is a process associated with two alignments, a rough alignment and a fine alignment, using a foreign matter inspection device.
This is a step of obtaining calibration data from an alignment error included in the two steps. Rough alignment (A) for mechanically aligning the object to be inspected with the foreign substance inspection device includes a rough alignment error, and fine alignment (B) for reproducing the coordinate position of the foreign substance on the stage coordinates includes the rough alignment error. And an error depending on the primary foreign matter inspection device. Therefore, an error that depends on the primary foreign matter inspection device is obtained as calibration data (C) from the two errors. This calibration data is specific to inspection conditions such as a primary foreign substance inspection device and an inspection recipe, and is stored for each primary foreign substance inspection device (1 to 3) and each inspection recipe.

Second step (second (n + 1) -th step in the figure)
Is a step of converting the foreign matter coordinate data of the first foreign matter inspection apparatus into the coordinate data of the foreign matter inspection apparatus.
Foreign object coordinate data (xp,
yp), the calibration data (C) corresponding to the primary foreign matter inspection device or inspection recipe is read, and the foreign matter coordinate data (xp, yp) is calibrated using the calibration data (C). Then, the stage coordinates (Xp, Yp) from which the error depending on the primary foreign matter inspection device is removed are obtained. The calibration data (C1, C2, C3) is stored for each primary foreign matter inspection device (1 to 3) and for each inspection condition.
By reading the calibration data corresponding to the used primary particle inspection apparatus and inspection conditions, it is possible to respond to changes in the primary particle inspection apparatus and inspection conditions.

When the model or inspection recipe of the primary particle inspection device is changed, coordinate linking is performed simply by changing the calibration data corresponding to the primary particle inspection device or inspection recipe. Can be. In the alignment using the coordinate link, the position coordinates can be reproduced with the same accuracy as the alignment accuracy in the fine alignment data used for forming the coordinate link data. The calibration data can be formed using the rough alignment data at the time of each fine alignment performed when the primary foreign matter inspection device or the inspection recipe by the primary foreign matter inspection device is changed.

According to the present invention, even if the primary foreign matter inspection device has a large absolute coordinate error, the coordinate link data can be obtained as long as the fine alignment can be performed even once. By using the data, the coordinate link can be easily performed. In addition, the primary foreign matter inspection apparatus generally changes the absolute coordinate error by changing the inspection recipe such as the magnification and the visual field range in addition to the change of the model, but when the change has sufficient reproducibility. The foreign matter inspection device and the coordinate link method of the present invention can be applied to the method. Note that coordinate transformation,
The means for storing the calibration data, forming the calibration data, and the like may be provided in the foreign matter inspection device, or may be constituted by a general-purpose computer separately from the foreign matter inspection device.

[0024]

Embodiments of the present invention will be described below in detail with reference to the drawings. First, one configuration of the foreign substance inspection device of the present invention will be described with reference to the schematic configuration diagram of FIG. In FIG. 2, the foreign matter inspection device 1 performs a coordinate link with the first foreign matter inspection device 10, and obtains foreign matter coordinate data of the foreign matter present on the inspection object w obtained by the first foreign matter inspection device 10. Based on (xp, yp), for the object w to be inspected mounted on the stage of the foreign matter inspection apparatus 1 (foreign matter inspection means 2), the coordinates of the foreign matter are displayed on the stage coordinates of the foreign matter inspection apparatus 1 (foreign matter inspection means 2). Reproduce the position.

The primary foreign matter inspection apparatus 10 can be, for example, an optical foreign matter inspection apparatus, which detects foreign matter p present on an inspection object w such as a wafer, and converts the position coordinates of the foreign matter p into foreign matter coordinate data. Output as (xp, yp). The foreign substance inspection device 1 reproduces the coordinate position of the foreign substance based on the foreign substance coordinate data (xp, yp) and performs inspection and analysis.
A coordinate conversion means 3 for converting the coordinate data of the foreign substance coordinate data (xp, yp) into foreign substance coordinate data (Xp, Yp) on the foreign substance inspection means 2; a calibration data storage means 4 for storing the calibration data C; A calibration data forming means 5 for forming calibration data C from the data A and the fine alignment data B is provided.

Here, the rough alignment data A is data obtained by rough alignment in which the inspection object w is placed on the foreign substance inspection means 2 and a reference point such as an origin is set. This is data obtained each time the device is placed on the foreign matter inspection means 2. The fine alignment data B is data obtained by fine alignment that reproduces the coordinate position on the inspection object w obtained by the first foreign object inspection device on the foreign object inspection device 1, and the rough alignment data B It includes an element based on alignment and an element that depends on the model and inspection recipe of the primary foreign matter inspection apparatus.

Therefore, the calibration data forming means 5 uses the rough alignment data A and the fine alignment data B to extract the elements depending on the model of the primary foreign matter inspection apparatus and the inspection recipe, excluding the elements due to the rough alignment. Then, calibration data for calibrating the coordinate error due to the model of the primary foreign matter inspection device and the inspection recipe is formed. Therefore, the foreign substance inspection means 2 places the inspection object w on the stage, aligns the reference point such as the origin, and performs a rough alignment step, and a foreign substance inspection obtained after the rough alignment by coordinate conversion using calibration data. Two steps of reproducing the foreign object coordinates using the foreign object coordinate data (Xp, Yp) on the means 2 are performed. FIG. 2 shows a configuration in which coordinate conversion means, calibration data storage means, calibration data forming means, and the like are built in the foreign substance inspection apparatus. It can also be configured by software on a computer.

Next, the two steps shown in FIG. 1 will be sequentially described with reference to FIGS. FIGS. 3 and 4 illustrate the first step, and FIGS. 5 and 6 illustrate the second step. First, with reference to the flowchart of FIG. 3 and the state diagram of FIG. 4, a first step of obtaining the calibration data C from an alignment error included in two alignments of the rough alignment and the fine alignment by the foreign matter inspection apparatus will be described.

First, the inspection object w (for example, a wafer)
Is placed on the primary foreign matter inspection device 10a (10b), the foreign matter p on the inspection object w is detected, and the position coordinates (x
p, yp) (step S1). Next, the object to be inspected w is placed on the foreign matter inspection device (the foreign matter inspection means 2) from the first foreign matter inspection device 10 and rough alignment is performed. This rough alignment is performed by the inspection object w with respect to the foreign substance inspection means 2.
This is a process for correcting the positional deviation, and can be determined using a reference point such as the origin.

The position coordinates of the reference point are, for example,
Two points of the orientation flat portion (orientation flat portion) formed on the wafer and one point of the other edge are set as alignment points, and the intersection of the x and y axes formed by these three points is set as the origin, or three points are set. It can be determined by finding the center position of the wafer by applying the equation to a circle or an ellipse. The rough alignment data A is obtained from the positional deviation in the rough alignment (step S2), and the obtained rough alignment data A is temporarily recorded. The position error in this rough alignment is
This is for each inspection object w (step S3).

Next, the inspection object w is finely aligned on a foreign matter inspection apparatus (foreign matter inspection means 2) to thereby remove foreign matter p.
The position coordinates (Xp, Yp) are determined (step S4).
Here, the foreign matter p obtained in steps S1 and S4
Fine alignment data B is obtained from the position coordinates (xp, yp) and (Xp, Yp) (step S5).
The calibration data forming means 5 reads out the rough alignment data A stored in step S3 (step S3).
6) From the read rough alignment data A and the fine alignment data B, calibration data C unique to the primary foreign matter inspection apparatus or inspection recipe is obtained.

The rough alignment data A, the fine alignment data B, and the calibration data C can be generally represented by a determinant, and there is a relationship represented by the following equation (1), and the position coordinates (Xp, Yp) can be expressed by equation (2) using the calibration data C (step S2).
7).

[0033]

(Equation 1)

The obtained calibration data C is recorded for each primary particle inspection apparatus or inspection recipe. This is because the position error on the foreign substance inspection apparatus depends on the model and inspection recipe of the first foreign substance inspection apparatus. Therefore, the calibration data C is determined by specifying the model and inspection recipe of the first foreign substance inspection apparatus. This is because they can be selected and extracted (step S
8). Steps S1 to S8 while changing the primary foreign matter inspection device or inspection recipe used for foreign matter inspection
By repeating the above steps, calibration data C for each primary foreign matter inspection device or inspection recipe can be prepared. The table (a) in FIG. 4 shows an example of the calibration data (steps S9 and S10).

Next, with reference to the flowchart of FIG. 5 and the state diagram of FIG. 6, the second step of converting the foreign substance coordinate data of the primary foreign substance inspection apparatus into the coordinate data of the foreign substance inspection apparatus will be described. On the first foreign matter inspection apparatus 10, foreign matter p present on the inspection object w such as a wafer is detected, and foreign matter coordinate data (xp, yp) is obtained (step S11).
Which calibration data C is to be used is determined based on the model or inspection recipe of the primary foreign matter inspection device 10 used for foreign matter detection (step S12).

The object to be inspected w is placed on the stage of the foreign matter inspection means 2 and rough alignment is performed by aligning a reference point such as the origin. After this rough alignment, the inspection object w
Is an error that depends on the model of the primary foreign matter inspection device and the inspection recipe (step S13). The calibration data determined in step S12 is read from the calibration data storage means 4, and the coordinate conversion means 3 reads the foreign substance coordinate data (x
(p, yp) is subjected to coordinate conversion to obtain foreign object coordinate data (Xp, Yp) on the foreign object inspection means 2. Here, calibration data C
Can be generally represented by a determinant, and the coordinate transformation can be represented by the following equation (1) (step S14).

[0037]

(Equation 2) Foreign object coordinate data (Xp, Yp) obtained in step S14
Fine alignment is performed by positioning using.

In the present invention, foreign object coordinate data (X
p, Yp) is calibrated for an error that depends on the primary foreign matter inspection apparatus, so that the coordinate error included in the positioning using the foreign matter coordinate data is approximately several tens of μm, and the magnification is 1000 times. Can be set to around 100 μm at the maximum (step S15).

The processing of the coordinate link when the above-mentioned primary foreign matter inspection apparatus is changed will be described with reference to FIG. FIG.
Performs foreign matter detection with one primary foreign matter inspection device (for example, primary foreign matter inspection device 10a) among a plurality of primary foreign matter inspection devices 10a to 10d, and obtains the coordinate data (x
(p, yp) is used to perform a foreign substance inspection by a foreign substance inspection device.

In this case, each of the first foreign substance inspection devices 1
At 0a, the position coordinates of the foreign matter on the inspection object w are obtained, the coordinate data (xp, yp) are coordinate-transformed by the coordinate conversion means 3, and the coordinates depending on the primary foreign matter inspection apparatus are calibrated. Data (Xp, Yp) is obtained. At this time, the calibration data storage means stores calibration data C (for example, C) corresponding to the plurality of primary foreign substance inspection devices 10a to 10d.
a1, Ca2, Cb1, Cb2) are stored, and the coordinate link data C (for example, Ca1) corresponding to the primary foreign matter inspection device 10a used is read out to the coordinate conversion means 3 and the primary And the coordinate data (Xp, Yp) is obtained. The foreign matter inspection apparatus 2 performs rough alignment of the inspection object w, and then performs coordinate data (Xp,
Fine alignment is performed using Yp).

On the other hand, in the fine alignment which is usually performed, the positioning is performed by using the foreign particle coordinate data (xp, yp) obtained by the first foreign particle inspection device after the rough alignment. And a coordinate error included in the inspection recipe, the foreign matter position reproduced on the foreign matter inspection apparatus may be shifted by several hundred μm. Therefore, the fine alignment performed in the present invention is extremely easy because the coordinate errors included in the primary foreign matter inspection device and the inspection recipe are calibrated.

Further, according to the present invention, by using the calibration data corresponding to the primary foreign matter inspection device and the inspection recipe, even when the model and the inspection recipe of the primary foreign matter inspection device are changed. And good alignment can be performed.

According to the embodiment of the present invention, even if the primary alignment device having a relatively large absolute coordinate error can perform fine alignment even once, it is unique to the primary particle inspection device. The calibration data can be obtained from the next time, and from the next time, the coordinate link is performed using the calibration data, so that the fine alignment can be performed with less labor. In addition, the first-order particle inspection apparatus generally changes the absolute coordinate error due to the change of the inspection recipe, but the present invention can be applied when the error conversion has reproducibility.

[0044]

As described above, according to the foreign matter inspection apparatus and the coordinate link method of the present invention, the alignment operation can be simplified and the coordinate error can be increased even when the inspection conditions are changed. Linking can be performed without having to do so.

[Brief description of the drawings]

FIG. 1 is a schematic diagram for explaining the operation of a coordinate link by a foreign matter inspection device of the present invention.

FIG. 2 is a schematic configuration diagram for explaining a configuration example of a foreign substance inspection device according to the present invention.

FIG. 3 is a diagram illustrating a first example of obtaining calibration data C by the foreign substance inspection device.
3 is a flowchart for explaining the step of FIG.

FIG. 4 shows a first example of obtaining calibration data C by the foreign substance inspection device.
It is a state diagram for explaining the process of.

FIG. 5 is a flowchart for explaining a second step of converting foreign matter coordinate data of the first foreign matter inspection device into coordinate data of the foreign matter inspection device.

FIG. 6 is a state diagram for explaining a second step of converting foreign substance coordinate data of the first foreign substance inspection apparatus into coordinate data of the foreign substance inspection apparatus.

FIG. 7 is a schematic diagram for explaining rough alignment and fine alignment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Foreign substance inspection apparatus, 2 ... Foreign substance inspection means, 3 ... Coordinate conversion means, 4 ... Calibration data storage means, 5 ... Calibration data formation means, 10, 10a-10d ... Primary foreign substance inspection apparatus, A
... Rough alignment data, B. Fine alignment data, C. Calibration data, w.

Claims (2)

[Claims] 1. A foreign matter inspection apparatus that reproduces stage coordinates at a coordinate position of a foreign matter using foreign matter coordinate data obtained by a primary foreign matter inspection apparatus, wherein coordinates between an object to be inspected and the foreign matter inspection apparatus are used. Coordinate linking means for linking, storage means for storing calibration data for calibrating an error dependent on the primary foreign matter inspection apparatus for each primary foreign matter inspection apparatus, and storing the foreign matter coordinates in the foreign matter inspection apparatus Coordinate conversion means for converting the coordinates into stage coordinates.The coordinate linking means performs rough alignment for mechanically aligning the inspection object with the foreign matter inspection device and fine alignment for reproducing the coordinate position of the foreign matter to the stage coordinates. The calibration data stored by the storage means includes a rough alignment error included in the rough alignment and a rough alignment error included in the fine alignment. And an error dependent only on the primary foreign matter inspection device obtained from the error dependent on the primary foreign matter inspection device and the primary foreign matter inspection device. Calibrating the coordinate data using the calibration data corresponding to the primary foreign matter inspection device to obtain a stage coordinate from which an error dependent on the primary foreign matter inspection device has been removed. Foreign matter inspection device. 2. A method according to claim 1, further comprising the steps of: (a) using a foreign object coordinate data obtained by said first foreign object inspection device to reproduce a stage coordinate at a coordinate position of the foreign object; From the rough alignment error included in the rough alignment for performing the horizontal alignment, the rough alignment error included in the fine alignment for reproducing the coordinate position of the foreign matter to the stage coordinates, and the error dependent on the first foreign matter inspection device. Extracting and storing, as calibration data, an error that depends only on each primary particle inspection device; and comparing the particle coordinate data obtained by the primary particle inspection device with the primary particle inspection device. The corresponding calibration data is read out, and the foreign matter coordinate data is calibrated using the calibration data, thereby removing an error that depends on the primary foreign matter inspection device. Obtaining a coordinate of the stage which has been obtained.