JP2002190273A - Electromagnetic field superimposed sector type spectroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electromagnetic field superimposed sector type spectroscope which is capable of operation in high pressure atmosphere under such a process as sputtering, and has sufficient performance at a low cost. SOLUTION: The spectroscope is formed by electrodes for producing an electric field and magnetic poles or magnets for producing a magnetic field, and sorts mass and energy of charged particles by making them pass through arcuate orbits with specified curvatures in an electromagnetic field in which the electric field and the magnetic field intersect at right angles. In the device, the surfaces of the magnetic poles or the magnets function as electrodes producing electric fields.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mass spectrometer mainly for measuring the mass of gaseous molecules, and more particularly to a mass spectrometer operating even in a high pressure atmosphere during a process such as sputtering.

[0002]

2. Description of the Related Art The principle of mass measurement of gaseous molecules is as follows. After a molecule to be measured is ionized by an ion source, the ions are electromagnetically mass-separated by a mass spectrometer to obtain a specific mass / charge value. Only the ions having the arriving at the collector reach the collector and the current is measured.

As a method of ionization, electrons emitted from a filament heated to about 1800 ° C.
In general, a method is used in which a gas is bombarded with energy of about V to separate electrons from the gas into positively charged ions.

As an electromagnetic mass separation method, a method using only a high-frequency electric field and a magnetic field, and a method using an electrostatic electric field and a magnetic field (electromagnetic field superposition) are known. There are a magnetic sector type and an electromagnetic field superimposed type using an E × B type and an electromagnetic field superimposed sector type.

In order to operate the mass spectrometer in a high pressure atmosphere during a process such as sputtering, in addition to the necessary conditions for a normal mass spectrometer, 1) the process of ions separated by mass is short ( It is necessary that stray ions scattered by gas molecules and electrodes do not reach the collector, and 3) stray light from the ion source does not reach the collector.

The condition 1) is necessary for the ions to be mass-separated to reach the collector without colliding with the high-pressure, that is, high-density, atmosphere gas. Of the same degree is required. In an ordinary sputtering process, an Ar atmosphere of about 1 Pa is used.
mm.

As mass spectrometers satisfying such conditions, mass filter type mass spectrometers having an ultra-miniaturized overall size currently exist. However, in the case of the mass filter type mass spectrometer, the precision of the quadrupole is strictly about 1 micron, and the frequency of the applied high frequency is also 10 MHz.
Since it is as high as z, the manufacturing cost is very high. In addition, since the energy of the ions passing through the quadrupole must be as low as about 10 eV, it is difficult to distinguish between the stray ions scattered in 2) and the ions separated normally by mass, and sufficient performance is obtained. Has not been achieved. Further, since the entrance and the exit are on a straight line, there is a problem that stray light of 3) is likely to enter.

A mass spectrometer, which is also called an E × B (Eixby) type, also called a Wien filter type, passes ions through a space (electromagnetic field portion) in which a magnetic field and an electric field are orthogonal to each other to obtain a specific mass / charge value. This is a method in which mass spectrometry is performed by moving only the held ions straight, and has the advantages that the structure is simple and the accuracy and electric control are not strict. In the E × B type, the inlet and the outlet are in a straight line.

[0009] Like the E × B type, the electromagnetic field superimposed sector type allows ions to pass through a space (electromagnetic field portion) in which a magnetic field and an electric field are orthogonal to each other, but an ion having a specific mass / charge value is a specific one, ie, , The ions pass on an arc orbit having a curvature specific to the mass / charge value of the ions. This method is E
Although the structure is slightly more complicated than that of × B, there is an advantage that energy convergence characteristics can be obtained by selecting conditions.
In some cases, it may be advantageous that the inlet and the outlet are not on a straight line depending on the purpose.

However, the E × B type and the electromagnetic field superimposed sector type have a practical problem in generating a magnetic field, and are not widely used as mass spectrometers. The E × B type is only slightly used for purifying irradiated ions by an ion implanter or the like. In this case, since the masses of the irradiation ions and the contaminating impurities are greatly different, the mass resolution (width) is 10 mass units (atom mass unit).
t :; amu) is enough. Also, usually 1
For use in a low-pressure atmosphere of 0 ^-4 Pa or less, the ion stroke in the mass spectrometer is set to about 100 mm,
In most cases, the pole gap is about 30 mm.

In a mass spectrometer using only a magnetic field such as a magnetic sector type mass spectrometer, the magnetic field generation space, that is, the magnetic pole gap can be considerably reduced.
Electromagnets and magnets are not so large. However, in the E × B type or the electromagnetic field superposed sector mass spectrometer, the magnetic field and the electrostatic field must be orthogonal to each other, so that the magnetic pole gap becomes large, and the electromagnet and the magnet become large.

FIGS. 7 (a) and 7 (b) show a conventional example of an electromagnetic field portion of an electromagnetic field superposed sector mass spectrometer. Since ions pass through the electromagnetic field with a specific curvature, the electromagnetic field is curved when viewed from the vertical direction (upward) of the ion traveling direction, but the cross section perpendicular to the ion traveling direction has the same shape everywhere. It is. FIG. 7A is an enlarged cross-sectional view of the vicinity of the electromagnetic field in the ion traveling direction.

In FIG. 7A, reference numeral 1 denotes a yoke, reference numeral 2,
Reference numeral 3 denotes a magnet, and reference numerals 51 and 52 denote electrodes. FIG.
FIG. 7B is an enlarged view of a portion indicated by a broken line 104 in FIG.
The space indicated by reference numeral 100 surrounded by 1 and 52 is an electromagnetic field part, and the inside of the circle indicated by reference numeral 101 is a range through which the ion beam passes. Also, in FIG.
Lines of electric force are generated as indicated by reference numeral 102, and lines of magnetic force are generated as indicated by reference numeral 103. The distance between the magnets 2 and 3 in the electromagnetic field portion corresponds to the magnetic pole gap. Here, a permanent magnet is used to generate a magnetic field, and without using magnetic poles,
The magnet directly faces the electromagnetic field. The ions to be mass-separated are traveling from the back side to the front side of the plane of the paper perpendicularly to the plane of the paper, and the diameter thereof is represented as a circle 101. As shown by the lines of electric force 102 and the lines of magnetic force 103, the magnetic field is formed in the vertical direction in the figure, and the electric field is formed in the horizontal direction.

The basic operation of the electromagnetic field superposed sector mass spectrometer is as follows. The intensity of the magnetic field and the electric field is within the range where the ion beam passes, that is, inside the circle indicated by reference numeral 101 in FIG. Must be uniform and orthogonal. If this condition is satisfied, only the ion beam having a specific mass / charge amount of the ion beam that has traveled from the back side to the front side of the paper perpendicular to the paper surface goes straight, and other ions The beam is deflected left and right. Changing the strength of the magnetic field and the electric field changes the mass / charge amount of the ion beam traveling straight. Therefore, if an aperture and a collector electrode are provided at a position where the ion beam passes, mass separation can be performed. If the intensity of the electric and magnetic fields is not uniform, the sensitivity and resolution will be degraded.

In FIGS. 7A and 7B, the width of the electrode is increased in order to ensure the uniformity of the electric field. Due to the presence of this large width electrode, the pole gap is necessarily large. In order to ensure the uniformity of the magnetic field even in this large pole gap, the width of the magnets 2 and 3 is large. For these reasons, the magnets 2 and 3 and the yoke 1 must be very large.

For these reasons, an electromagnetic field superposition sector type mass spectrometer has hardly been used as a normal mass spectrometer. Furthermore, as a mass spectrometer capable of operating even in a high pressure atmosphere during a process such as sputtering, an electromagnetic field superposed sector mass spectrometer has never been used.

[0017]

The object of the present invention is to
An object of the present invention is to realize a mass spectrometer which can be operated in a high-pressure atmosphere during a process such as sputtering, has sufficient performance, and has a low production cost.

In order to operate in a high-pressure atmosphere, it is required that the ion stroke in the mass spectrometer be very short as described above. To achieve this, it is necessary to make the magnetic pole gap of the electromagnetic field superimposed sector mass spectrometer very small. This is for the following two reasons.

The first reason is an end face (fringing) effect which is a problem common to all mass spectrometers. That is, in the vicinity of the end face of the electromagnetic field space, the electromagnetic field strength becomes weak due to the influence of the outer space where no electromagnetic field exists, and mass separation cannot be performed in that part. That is, the length in the ion passage direction that can be effectively separated by mass is reduced. Specifically, it is known that effective mass separation is not performed for the lengths of about half the electrode gap and the magnetic pole gap inside the respective end faces of the inlet and the outlet. For a sputtering process of about 1 Pa, the length of the mass separation portion must be about 10 mm. Therefore, if an attempt is made to secure a length for effective mass separation of about 7 mm, the electrode gap and the magnetic pole gap are reduced by about 3 mm.
mm.

The second reason is to achieve the required strong magnetic field strength. About 10mm (effectively about 7m
In order to perform mass separation with sufficient resolution in a mass separation section having a short m), a strong magnetic field strength is required.
Water (18 am) which is a particular problem in the sputtering process
In order to measure u) separately from Ar ²⁺ (40 amu) as a background, a magnetic field strength of 5 to 10 kGauss is required. In order to achieve such a strong magnetic field strength without using an extremely large electromagnet or magnet, the magnetic pole gap needs to be very small, about 3 to 5 mm.

However, if the magnetic field superposition sector type mass spectrometer is shortened to about 3 mm in magnetic pole gap with the conventional structure, a large problem in performance occurs. This state is shown in FIG. In FIG. 8, the uniformity of the magnetic field is maintained, but the uniformity of the electric field is not ensured. That is, the width of the electrodes 51 and 52 is reduced due to the reduced magnetic pole gap, and the circle indicated by the reference numeral 101 is a range through which the ion beam traveling from the back side to the front side of the paper perpendicularly to the paper passes. , The surfaces of the magnets 2 and 3 are present in the immediate vicinity. The surfaces of the magnets 2 and 3 have a certain voltage when the magnet is a conductor, and have a random potential with respect to time and place when the magnet is an insulator. Instead of a uniform electric field in which the potential surface is parallel to the electrode surface, a distorted electric field distribution is strongly influenced by the potential of the magnet.

[0022]

The present inventors have paid attention to an electromagnetic field superimposed sector type mass spectrometer as a mass spectrometer capable of operating at a high pressure. That is, the electromagnetic field superimposed sector mass spectrometer is essentially suitable for a high pressure mass spectrometer because of its relatively simple structure and high ion energy of 100 to 1000 eV. Thought. In particular, the high ion energy means that stray ions that form the background and ions that have been normally mass-separated can easily be separated by a simple electrostatic deflector separately. This is a great advantage for high pressure applications.

The stray ions are the same as in the case of the E × B type, but the stray light of 3) is more advantageous with the electromagnetic field superimposed sector type. Light from a filament at 1800 ° C. and light from gas molecules excited by 70 eV electron impact (vacuum ultraviolet light) are emitted from the ion source. When these stray lights enter the collector, a uniform false signal is generated. That is, noise is generated. In a normal mass spectrometer, the distance between the ion source and the collector is 100 to 300 mm,
In a high-pressure mass spectrometer, the ion stroke needs to be shortened to about 10 mm. Therefore, the effect of stray light, which is inversely proportional to the square of the distance, is generally 100 to 9 in the high-pressure mass spectrometer.
00 times stronger. Therefore, in a mass filter type or an E × B type in which the entrance and the exit are on a straight line, noise may increase due to the influence of stray light. In this respect, in the electromagnetic field superimposed sector type, the entrance and the exit are not in a straight line, so that the influence of stray light is greatly reduced.

Accordingly, the invention relating to the technique of forming an electromagnetic field is carried out, and the magnetic pole or the surface of the magnet for forming a magnetic field in an electromagnetic field superimposed sector mass spectrometer is made to function as an electrode for forming an electric field. An attempt was made to resolve it.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION To solve the above-mentioned problems, an electromagnetic field superposition sector type mass spectrometer proposed by the present inventors is as follows.

That is, a charged particle is composed of an electrode for forming an electric field and a magnetic pole or magnet for forming a magnetic field. In an electromagnetic field superimposed sector mass spectrometer that separates charged particles by mass and energy, the surface of the magnetic pole or magnet facing the electromagnetic field space is
An electromagnetic field superposition sector type mass spectrometer characterized by functioning as an electrode for forming an electric field. By making the magnetic poles or magnet surfaces facing the electromagnetic field space function as electrodes for forming an electric field as described above, it is possible to perform electric field correction in the electromagnetic field space, or both electric field generation and electric field correction. Even if the magnetic pole gap is reduced by bringing the opposing magnetic poles or magnets closer to each other for forming a magnetic field, a uniform electric field in which the equipotential surface between the electrodes is parallel to the electrode surface can be formed.

In the above, in order to make the surface of the magnetic pole or magnet facing the electromagnetic field space function as an electrode for forming an electric field, a configuration is adopted in which a quasi-conductive film is provided on the surface of the magnetic pole or magnet facing the electromagnetic field space. can do.
By providing a quasi-conductive film, for example, a thin film of silicon carbide, having a uniform sheet resistance value on the surface facing the magnetic field or the electromagnetic field space of the magnetic pole or magnet, the electric potential of the surface along the direction of the electric field is increased. It can change at a constant increase or decrease rate, and performs electric field correction in the electromagnetic field space, or both generation and correction of the electric field in the electromagnetic field space.

In the above-mentioned electromagnetic field superimposed sector mass spectrometer, the quasi-conductor film is not provided on the surface of the magnetic pole or the magnet facing the electromagnetic field space. A plurality of magnetic poles or magnets which are electrically insulated are arranged in the same magnetic pole direction, and a plurality of magnetic poles or magnets which are electrically insulated such that different magnetic poles face the plurality of magnetic poles or magnets, respectively. The plurality of magnetic poles or the surfaces of the magnets facing each other may be configured to function as electrodes for forming an electric field. Even with such a configuration, the potential applied to the magnetic pole or the magnet for forming a magnetic field facing the different magnetic poles is a predetermined value with respect to the potential applied to the electric field forming electrode, for example, , 電位, or the same potential, it is possible to perform the electric field correction in the electromagnetic field space, or both the electric field generation and the electric field correction in the electromagnetic field space. As described above, a plurality of magnetic poles or magnets which are electrically insulated are arranged in the same magnetic pole direction, and a plurality of magnetic poles or magnets which are respectively electrically insulated such that different magnetic poles face the plurality of magnetic poles or magnets. Even if the magnetic poles or magnets are arranged in the same magnetic pole direction to form a magnetic pole or magnet for forming a magnetic field, these magnets are electrically insulated so that the surfaces of these magnets do not come too close to the ion beam passing range. Improve the uniformity of the electric field and magnetic field in the electromagnetic field space by cutting off the corners of the magnetic poles or magnets arranged in the direction of the magnetic pole that are close to each other in the direction toward the electromagnetic field. be able to.

Further, another invention proposed by the present application is to arrange a plurality of electrically-conductive magnetic poles or magnets, each of which is electrically insulated, in a point-symmetric manner, and to provide a center where the plurality of conductive magnetic poles or magnets face each other. An electromagnetic field superposition sector type that forms an electromagnetic field space in which an electric field and a magnetic field are orthogonal to each other and separates the charged particles' mass and energy by passing charged particles on an arc orbit of a specific curvature in the electromagnetic field space In the mass spectrometer, the potential of the surface of the plurality of conductive magnetic poles or magnets facing the electromagnetic field space, which also functions as an electrode for forming an electric field, is not only a voltage for mass separation but also a voltage for deflection and a voltage for non-polarization. The relationship of the linear coupling of the point correction voltage, or the deflection voltage,
An electromagnetic field superimposed sector type mass spectrometer characterized by being adjusted so as to have a linear coupling relationship between an astigmatism correction voltage and a convergence voltage. By adjusting the electric potential of the surface of the plurality of conductive magnetic poles or magnets facing the electromagnetic field space that also functions as electrodes for forming an electric field to the above-described specific relationship, electric field correction in the electromagnetic field space, or electromagnetic In addition to performing both electric field generation and electric field correction in the field space, deflection and astigmatism correction of charged particles, or deflection, astigmatism correction and convergence of charged particles can be performed.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiment described in the following embodiment, and the technical features described in the present specification are not limited thereto. Various changes can be made within the scope of creation of thought.

[0031]

Embodiment 1 FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention. Since the ions pass through the electromagnetic field with a specific curvature, the electromagnetic field is curved as shown in FIGS. 1 (a) and 1 (b) when viewed from the vertical direction (top) of the ion traveling direction. The cross section perpendicular to the ion traveling direction has the same shape everywhere. 1 (a) is a perspective view, FIG. 1 (b) is a cross-sectional view as seen from a direction (top) perpendicular to the ion traveling direction, and FIG. 1 (c).
Is an enlarged view of the vicinity of the electromagnetic field in a cross-sectional view perpendicular to the ion traveling direction.

As shown in FIG. 1A, conductive magnets 2 and 3 are arranged so that opposite poles face each other, and a voltage of + V and a voltage of -V are applied between them. The electrodes 51 and 52 made of non-magnetic material to which the voltage is applied are arranged.

As shown in FIG. 1B, the electrode 5
Numerals 1 and 52 have an arc shape centered on the same point, and an electric field is formed between these electrodes. A magnetic field generated by the magnets 2 and 3 is formed orthogonal to the electric field, and ions pass through the electromagnetic field with a specific curvature. Even if the opening angle of the circular arc is an arbitrary value, the function of mass separation can be achieved, but it is known that a specific angle depending on the positional relationship between the ion source and the convergence point has energy convergence characteristics. The energy convergence characteristic means that ions having the same mass converge at the same place even if they have different energies, which is extremely advantageous in terms of sensitivity and resolution. The shapes of the magnets 2 and 3 are not necessarily arc-shaped, but may be any shape as long as a magnetic field perpendicular to an electric field is formed at least between the electrodes 51 and 52.

As shown in FIG. 1C, between the magnets 2 and 3 and the electrodes 51 and 52, insulating films 53 and 54 made of non-magnetic material and a silicon carbide film made of non-magnetic material 55 and 56 are provided so that the silicon carbide films 55 and 56 are in electrical contact with the electrodes 51 and 52, respectively. The shapes of silicon carbide films 55 and 56 do not necessarily need to be arc-shaped, and any shape may be used outside at least between electrodes 51 and 52.

In FIG. 1, a space surrounded by magnets 2 and 3 and electrodes 51 and 52 and denoted by reference numeral 100 is an electromagnetic field portion.
The inside of the circle denoted by reference numeral 101 is a range where the ion beam traveling from the back side to the front side of the paper perpendicular to the paper surface passes.

In this embodiment as well, FIG.
(B) Electric force lines in the direction indicated by reference numeral 102, reference numeral 10
Magnetic lines of force in the direction indicated by 3 are generated, but these are omitted in FIG. Further, a yoke indicated by reference numeral 1 in FIG. 7A of the conventional example exists, but is omitted in FIG.

The distance between the magnets 2 and 3 in the electromagnetic field portion 100 corresponds to the magnetic pole gap, which is set to about 3 mm in this embodiment.

In the present invention, the magnets 2 and 3 and the electrode 5
Silicon carbide films 55, 5 interposed between
6 is in electrical contact with the electrodes 51 and 52, so that the surfaces of the magnets 2 and 3 facing the electromagnetic field space 100 function as electrodes for forming an electromagnetic field.

Further, the silicon carbide films 55 and 56 are made of 10 ⁵
It is made of a film having a uniform sheet resistance value of about 〜１０10 ⁹ Ω, whereby the surfaces of the magnets 2 and 3 are in contact with each other via the insulating films 53 and 54 between the electrodes 51 and 52. The potential of the silicon carbide films 55 and 56, that is, the electrodes 51 and 5
Between the two, the potentials of the surfaces of the magnets 2 and 3 facing the electromagnetic field space are the electrodes 51 and 52 to which + V and -V voltages are applied.
Is determined by the distance from the electrode surface, and changes at a specific rate of increase or decrease along the direction of the electric field (the direction of the lines of electric force not shown). To be more precise, when the electrodes 51 and 52 are cylindrical, the cross-sectional area of the silicon carbide film (the cross section in the vertical direction with the current flowing between the electrodes) is proportional to the distance (r) from the center of the circular arc, so that The resistance value is r
And the voltage drop difference value at a minute distance at each position is inversely proportional to r. The surface potential at each position is
Since it is determined by integration of the difference value, it is proportional to the logarithm of r. On the other hand, when the magnetic pole gap is very long, that is, when an ideal cylindrical electric field is formed, it is known that the electric field strength at each point is inversely proportional to r, and the potential is proportional to the logarithm of r. Have been. Therefore, the electrode 5
An electric field in which the equipotential surface between the electrodes 1 and 52 is parallel to the surfaces of the electrodes 51 and 52, that is, an ideal cylindrical electric field is formed.

On the other hand, electrodes 51 and 52, insulating films 53 and 5
4 and the silicon carbide films 55 and 56 are all made of a non-magnetic material, so that the magnetic field generated by the magnets 2 and 3 is not disturbed by these and has a uniform magnetic field intensity.

In this way, in this embodiment, despite the magnetic pole gap being reduced to about 3 mm, the electromagnetic field part 100 forms the same ideal electromagnetic field part as when the magnetic pole gap is very long. ing.

In this embodiment, the insulating film 5
Although the magnets 3 and 54 were used, the magnets 2 and 3 used in this embodiment were made of such a structure because they were conductors. When magnets 2 and 3 are insulators, insulating films 53 and 54 are interposed between silicon carbide films 55 and 56 that are in electrical contact with electrodes 51 and 52 and the surfaces of magnets 2 and 3. do not have to.

The yoke 1 not shown in FIG.
Is effective in improving the strength of the magnetic field and decreasing the strength of the leakage magnetic field to the outside, but is not necessarily essential.

[0044]

Embodiment 2 FIG. 2 is a view showing a schematic configuration of a second embodiment of the present invention, and is an enlarged cross-sectional view perpendicular to the ion traveling direction. The perspective view and the view seen from the vertical direction (upper side) are omitted because they are similar to FIGS. 1A and 1B, respectively.

Conductor magnets 2 and 3 are arranged so that the opposite poles face each other, and a silicon carbide film made of a non-magnetic material is interposed on the surfaces thereof through insulating films 53 and 54 made of a non-magnetic material. 55 and 56 are provided.

Terminals 57 and 58 are electrically connected to the right end and the left end of the silicon carbide film 55 in FIG. 2, and similarly, the terminal 59 is located at the right end and the left end of the silicon carbide film 56 in FIG. , 60 are electrically connected.

In FIG. 2, the space between the silicon carbide films 55 and 56 provided on the surfaces of the magnets 2 and 3 respectively becomes the electromagnetic field part 100. The inside of the circle denoted by reference numeral 101 is a range where the ion beam traveling from the back side to the front side of the paper perpendicular to the paper surface passes.

Also in this embodiment, FIG.
(B) Electric force lines in the direction indicated by reference numeral 102, reference numeral 10
Magnetic lines of force in the directions indicated by 3 will be generated, but these are omitted in FIG. Further, a yoke indicated by reference numeral 1 in FIG. 7A of the conventional example exists, but is omitted in FIG.

The distance between the magnets 2 and 3 in the electromagnetic field portion 100 corresponds to the magnetic pole gap.
mm.

As shown in FIG. 2, the terminals 57 and 59 have +
A voltage of -V is applied to V and the terminals 58 and 60, respectively. Thus, the surfaces of the silicon carbide films 55 and 56, that is, the magnets 2 and 3 facing the electromagnetic field space function as electrodes for forming an electromagnetic field.

Further, the silicon carbide films 55 and 56 are made of films having a uniform sheet resistance value of about 10 ⁵ to 10 ⁹ Ω as in the first embodiment shown in FIG. A typical cylindrical electric field is formed.

Further, similarly to the first embodiment, the insulating film 5
3, 54 and the silicon carbide films 55 and 56 are all made of a non-magnetic material, so that the magnetic field generated by the magnets 2 and 3 is not disturbed by the insulating films 53 and 54 and the silicon carbide films 55 and 56. The magnetic field strength is uniform.

In this way, in the present embodiment as well, despite the fact that the magnetic pole gap is reduced to about 4 mm, the same ideal electromagnetic field as in the case where the magnetic pole gap is very long is formed in the electromagnetic field part 100. ing.

The reason for using the insulating films 53 and 54 in the second embodiment is the same as in the first embodiment. When the magnets 2 and 3 are insulators, the insulating films 53 and 54 are
It is not necessary to interpose between the silicon carbide films 55 and 56 and the surfaces of the magnets 2 and 3.

The yoke 1 not shown in FIG.
Is effective in improving the strength of the magnetic field and reducing the strength of the leaked magnetic field to the outside, but is not necessarily indispensable as in the first embodiment.

Compared to the first embodiment shown in FIG. 1, the configuration of the second embodiment has an advantage that the deflected ion beam does not scatter on the electrode because no electrode is required.

[0057]

Embodiment 3 FIG. 3 is a view showing a schematic configuration of a third embodiment of the present invention, and is an enlarged sectional view perpendicular to the ion traveling direction. The perspective view and the view seen from the vertical direction (upper side) are omitted because they are similar to FIGS. 1A and 1B, respectively.

The conductor magnets 4, 5, 6, 7 are electrically insulated from the magnet 4 and the magnet 5, are arranged side by side so that the same poles are adjacent to each other, and the magnet 6 and the magnet 7 are electrically connected. The magnets 4 and 5 are insulated and are arranged side by side so that the same poles are adjacent to each other, and the pair of magnets 6 and 7 arranged side by side are opposite to each other. Are located.

Non-magnetic electrodes 51 and 52 to which + V and -V voltages are applied are arranged between the magnets 4 and 5 and the magnets 6 and 7 arranged as described above. .

As shown in FIG. 3, the magnet 4 and the magnet 6
Have a voltage of + V / 2, and the magnets 5 and 7 have −
A voltage of V / 2 is applied. Thus, magnet 4,
A voltage is applied to 5, 6, and 7, between the magnet 4 and the magnet 5,
Further, the magnet 4 and the magnet 5 and the magnet 6 and the magnet 7 are juxtaposed and electrically insulated so that an electric field is formed between the magnet 6 and the magnet 7, respectively. In this embodiment, electrical insulation is attained by providing gaps between the magnets 4 and 5 and between the magnets 6 and 7, respectively. It suffices that the discharge does not occur between the electrodes and the electric field is large enough to maintain the electric field. In addition, without providing a gap, an insulating film can be interposed between the magnets 4 and 5 and between the magnets 6 and 7 to achieve electrical insulation.

In FIG. 3, magnets 4, 5, 6, 7 and electrodes 5
A space surrounded by reference numerals 1 and 52 and denoted by reference numeral 100 is an electromagnetic field portion. The inside of the circle denoted by reference numeral 101 is a range where the ion beam traveling from the back side to the front side of the paper perpendicular to the paper surface passes.

In this embodiment, too, FIG.
(B) Electric force lines in the direction indicated by reference numeral 102, reference numeral 10
Magnetic lines of force in the direction indicated by 3 are generated, but these are omitted in FIG. Further, a yoke indicated by reference numeral 1 in FIG. 7A of the conventional example exists, but is omitted in FIG.

The distance between the magnets 4 and 5 and the magnets 6 and 7 in the electromagnetic field portion 100 corresponds to the magnetic pole gap, and is about 5 mm in this embodiment.

The magnets 4, 5,
The potentials on the surfaces of 6, 7 are the same as those of the first and second embodiments shown in FIGS.
Although the potential is not proportional to the logarithm of the distance r from the center of the arc as in the case of the above, + V / 2,
Since a voltage of −V / 2 is applied, + V,
It has a potential of an intermediate value between the electrodes 51 and 52 to which the voltage of −V is applied.

The range 101 through which the ion beam passes
The magnets 4, 5, 6, and 6 in the direction of the electromagnetic field unit 100 are separated from each other so as to help improve the uniformity of the electric and magnetic fields.
As shown in FIG. 3, corners 7 are cut.

As a result, a substantially uniform electric field is formed in the electromagnetic field portion 100. Although the potential is not strictly proportional to the logarithm of r, it is not a major obstacle if the distance between the electrodes is short.

On the other hand, when examining the magnetic field in the electromagnetic field portion 100, the magnets 4 and 5 have different potentials electrically, but are magnetically arranged side by side with only a small gap at the center. Since the angle toward the electromagnetic field part 100 is only cut, the magnets 4 and 5 arranged in parallel operate in substantially the same manner as the magnet 2 in the first embodiment shown in FIG. The same applies to the magnets 6 and 7 arranged opposite to each other, and the magnets 6 and 7 arranged in parallel perform almost the same operation as the magnet 3 in the embodiment 1 shown in FIG.

Since the electrodes 51 and 52 are made of a non-magnetic material, the magnetic field generated by the magnets 4, 5, 6 and 7 is not disturbed by the electrodes 51 and 52 and has a uniform magnetic field intensity. Become.

Therefore, also in this embodiment, a substantially uniform magnetic field is formed in the electromagnetic field portion 100.

Therefore, also in this embodiment, the magnetic pole gap is set to 5
mm.
, An almost ideal electromagnetic field portion in which the strengths of the magnetic field and the electric field are uniform and orthogonal to each other is formed.

When the embodiment shown in FIG. 3 is compared with the first and second embodiments (FIGS. 1 and 2), the surface of the magnet itself facing the electromagnetic field space functions as an electrode for forming an electric field. Another advantage is that it is not necessary to use a silicon carbide film.

[0072]

Fourth Embodiment FIG. 4 is a view showing a schematic configuration of a fourth embodiment of the present invention, and is an enlarged sectional view perpendicular to the ion traveling direction. The perspective view and the view seen from the vertical direction (upper side) are omitted because they are similar to FIGS. 1A and 1B, respectively.

The magnets 8, 9, 10, and 11 of the conductors are such that the magnets 8 and 9 are electrically insulated from each other,
The magnets 10 and 1 are arranged side by side so that the same poles are adjacent to each other.
1 are also electrically insulated from each other, are arranged side by side so that the same poles are adjacent to each other, and have a set of magnets 8 and 9 arranged side by side and a set of magnets 10 and 11 arranged side by side. However, they are arranged so as to face each other.

Non-magnetic electrodes 61 and 62 to which + V and -V voltages are applied, respectively, are disposed between the magnets 8 and 9 and the magnets 10 and 11 arranged as described above. Electrode 61, magnets 8, 10 and electrode 6
2 and the magnets 9 and 11 are electrically connected to each other.

The magnets 8, 9 facing the electromagnetic field portion 100
Unlike the case of the third embodiment shown in FIG. 3, the surface potentials of the electrodes 10 and 11 are not intermediate potentials of the electrodes 61 and 62. , And thus have the same potential as the electrodes 61 and 62.

As described above, the magnets 8 and 9 and the magnets 10 and 11 are so formed that an electric field is formed between the magnets 8 and 10 and the magnets 9 and 11 having the same potential as the electrodes 61 and 62, respectively. And are juxtaposed electrically insulated from each other. In this embodiment, electrical insulation is achieved by providing gaps between the magnets 8 and 9 and between the magnets 10 and 11, respectively.
It is sufficient that no discharge occurs between these magnets and the magnitude is such that an electric field can be maintained. Further, without providing a gap, an insulating film can be interposed between the magnets 8 and 9 and between the magnets 10 and 11 to achieve electrical insulation.

In FIG. 4, a space surrounded by magnets 8, 9, 10, 11 and electrodes 61, 62 and denoted by reference numeral 100 is an electromagnetic field portion. The inside of the circle denoted by reference numeral 101 is a range where the ion beam traveling from the back side to the front side of the paper perpendicular to the paper surface passes.

Also in this embodiment, FIG.
(B) Electric force lines in the direction indicated by reference numeral 102, reference numeral 10
Magnetic lines of force in the direction indicated by 3 are generated, but these are omitted in FIG. Further, a yoke indicated by reference numeral 1 in FIG. 7A of the conventional example exists, but is omitted in FIG.

The distance between the magnets 8 and 9 and the magnets 10 and 11 in the electromagnetic field portion 100 corresponds to the magnetic pole gap, and is about 5 mm in this embodiment.

Further, as in the third embodiment, by further increasing the distance from the range 101 through which the ion beam passes, the ion beam is directed toward the electromagnetic field portion 100 so as to help improve the uniformity of the electric field and the magnetic field. The corners of the magnets 8, 9, 10, 11 are
As shown in FIG. 4, each is cut further deeper.

Thus, also in this embodiment, a substantially uniform electric field is formed in the electromagnetic field portion 100. Although the potential is not strictly proportional to the logarithm of the distance r from the center of the arc, as in the case of the first and second embodiments shown in FIGS. Does not.

On the other hand, when examining the magnetic field in the electromagnetic field unit 100, for the same reason as in the third embodiment (FIG. 3), a substantially uniform magnetic field is formed in the electromagnetic field unit 100 also in this embodiment. I have.

Therefore, also in this embodiment, the magnetic pole gap is set to 5
Despite the reduction to mm, the electromagnetic field part 100 forms an almost ideal electromagnetic field part in which the strength of the magnetic field and the intensity of the electrolysis are uniform and orthogonal.

Compared with the third embodiment, the fourth embodiment is advantageous in that the parts are simplified.

[0085]

Fifth Embodiment FIG. 5 is a view showing a schematic configuration of a fifth embodiment of the present invention, and is an enlarged cross-sectional view perpendicular to the ion traveling direction. The perspective view and the view seen from the vertical direction (upper side) are omitted because they are similar to FIGS. 1A and 1B, respectively.

At the center of the yoke 1, conductive magnets 12, 13, 14, 1 are connected via an insulating magnet mounting ring 16.
5 are mounted electrically insulated.

The space surrounded by the magnets 12, 13, 14, 15 constitutes the electromagnetic field part 100,
Is the range through which the ion beam traveling from the back side to the front side of the paper perpendicular to the paper surface passes. In FIG. 5, the lines of electric force are generated as indicated by reference numeral 102, and the lines of magnetic force are generated as indicated by reference numeral 103.

In this embodiment, as shown in FIG. 5, the magnets 12 and 13 are arranged so that the same poles are adjacent to each other in a perpendicular direction. Similarly, the magnets 14 and 15 are also arranged so that the same poles are adjacent to each other in a perpendicular direction. And magnet 12 and magnet 14, magnet 13 and magnet 15
And are arranged so that the opposite poles face each other.

The four magnets have the same shape and are arranged four times rotationally symmetric with respect to the center. Such a magnet 1
The arrangement of 2, 13, 14 and 15 is similar to a quadrupole lens known as a strong focus lens, but the orientation of the magnetic poles is different.

By the arrangement of the magnets as described above, reference numeral 1
The lines of magnetic force represented by 03 are magnets 12, 13, 14, 15
In the range 101 through which the ion beam passes in the space surrounded by the circles, the direction from the bottom to the top in FIG. 5 is reached, and a substantially uniform magnetic field is formed in this space.

The voltages V1, V2, V3, and V4 shown below are applied to the magnets 12, 13, 14, and 15, respectively, so that not only mass separation as an electromagnetic field superimposing sector but also electrostatic deflection is performed. As an instrument, deflection of the ion beam in the X-axis and Y-axis directions can be performed, and as an electrostatic astigmatism corrector, primary astigmatism correction of the ion beam can be performed.

Magnet 12: V1 = + Vm + Vy−Vs Magnet 13: V2 = −Vm−Vx + Vs Magnet 14: V3 = −Vm−Vy−Vs Magnet 15: V4 = + Vm + Vx + Vs where Vm: voltage for mass separation, Vx: X Axial deflection voltage, Vy: Y-axis deflection voltage, Vs: Astigmatism correction voltage.

Looking at + Vm and -Vm, which are the voltages for mass separation, in FIG. 5, the right magnets 12 and 15 have a potential of + Vm, and the left magnets 13 and 14 have a potential of -Vm.

Since the magnets 12 and 15 and the magnets 13 and 14 are symmetric with respect to the horizontal direction in FIG. 5, the lines of electric force are in the horizontal direction near the center. Therefore, a substantially uniform electric field in the horizontal direction is formed near the center by + Vm and -Vm.

Therefore, as described above, a substantially uniform magnetic field from the bottom to the top in FIG. 5 near the center of the magnets 12 to 15 and a substantially uniform electric field in the horizontal direction near the center in FIG. Causes mass separation as an electromagnetic field superimposed sector. Although the potential is not strictly proportional to the logarithm of the distance r from the center of the arc, as in the case of the first and second embodiments shown in FIGS. Does not.

As described above, in order to apply different voltages to the four magnets 12 to 15 to form electric fields, the magnets 12, 13, 14, 15 are electrically connected as described above. Must be insulated.

In this embodiment, the magnets 12 to 15
Are electrically insulated from each other by arranging a gap between each of them. The interval of this gap is determined by the magnet 12
It is sufficient that a discharge is not generated between each of Nos. 1 to 15 and that the electric field can be maintained. It is to be noted that an electrical insulation can be achieved by interposing an insulating film between each of the magnets 12 to 15 without using a configuration in which a gap is arranged.

XV direction deflection voltages + Vx, -Vx
Note that the lower right magnet 15 is + Vx and the upper left magnet 1
3 is the potential of -Vx. Therefore, + Vx,
The ion beam is deflected in the X-axis direction by −Vx.
Similarly, the ion beam is deflected in the Y-axis direction by + Vy and -Vy.

Focusing on the astigmatism correction voltages + Vs and -Vs, the potentials of the magnets facing each other become equal potentials, and the potentials of the magnets in the perpendicular direction are opposite in polarity. Therefore, primary astigmatism correction for adjusting the shape of the ion beam in the one-dimensional direction by + Vs and -Vs is performed.

When the fifth embodiment is compared with the fourth embodiment (FIG. 4), the advantage is that the parts are simpler.

[0101]

[Embodiment 6] FIG. 6 is a view showing a schematic configuration of a sixth embodiment of the present invention, and is an enlarged sectional view perpendicular to the ion traveling direction. The perspective view and the view seen from the vertical direction (upper side) are omitted because they are similar to FIGS. 1A and 1B, respectively.

At the center of the yoke 1, conductive magnets 17, 18, 19, 2 are connected via an insulating magnet mounting ring 16.
Reference numerals 0, 21, 22, 23, and 24 are attached so as to be electrically insulated from each other.

The space surrounded by the magnets 17 to 24 constitutes the electromagnetic field portion 100, and the inside of the circle denoted by reference numeral 101 advances from the back side of the paper to the front side perpendicular to the paper. Is the range through which the ion beam comes.

As shown in FIG. 6, the magnets 17, 18, 1
9 and 20 are arranged so that the same poles are adjacent to each other at an angle of 45 degrees, and the magnets 21, 22, 23 and 24 are also arranged at 45 degrees.
The same poles are arranged next to each other with an angle of degrees. Then, the magnet 17 and the magnet 21 and the magnet 18 and the magnet 2
2. The magnet 19 and the magnet 23, and the magnet 20 and the magnet 24 are arranged such that different poles face each other. The eight magnets have the same shape and are arranged eight times rotationally symmetric with respect to the center.

With the arrangement of the magnets as described above, the magnet 1
In the range 101 through which the ion beam passes in the space surrounded by 7 to 24, a substantially uniform magnetic field is formed from below to above in FIG.

The magnets 17 to 24 have V1, V2, V3, V4, V5, V6, V7, and V8 shown below, respectively.
Is applied, not only the mass separation as an electromagnetic field superposition sector mass spectrometer, but also the deflection of the ion beam in the X and Y axes as an electrostatic deflector, and the ion beam as an astigmatism corrector. Secondary astigmatism correction and convergence in the X-axis direction of the ion beam as a three-dimensional focusing mass spectrometer can be performed.

Magnet 17: V1 = + Vm + Vdx + a · Vdy + Vsx + Vf Magnet 18: V2 = + Vm + a · Vdx + Vdy + Vsy Magnet 19: V3 = −Vm−a · Vdx + Vdy−Vsx−Vf Magnet 20: V4 = −Vd−Vd−Vm -Vsy-Vf Magnet 21: V5 = -Vm-Vdx-a.Vdy + Vsx-Vf Magnet 22: V6 = -Vm-a.Vdx-Vdy + Vsy-Vf Magnet 23: V7 = + Vm + a.Vdx-Vdy-Vsx magnet 24: V8 = + Vm + Vdx-a.Vdy-Vsy + Vf where Vm: voltage for mass separation, Vdx: voltage for deflection in the X-axis direction, Vdy: voltage for deflection in the Y-axis direction, Vsx: for astigmatism correction in the X-axis direction Voltage, Vsy: Y-axis direction astigmatism correction voltage,
Vf: X-axis direction convergence voltage, a: an arbitrary coefficient.

Looking at + Vm and -Vm, in FIG. 6, the right magnets 17, 18, 23, and 24 have a potential of + Vm, and the left magnets 19, 20, 21, and 22 have a potential of -Vm.
Magnets 17 and 18 and magnets 23 and 24 and magnets 19 and 2
Since 0 and the magnets 21 and 22 are line-symmetric with respect to the horizontal direction in FIG. 6, the electric force lines are in the horizontal direction near the center. Therefore, a substantially uniform electric field in the horizontal direction is formed near the center portion by + Vm and -Vm.

Thus, as described above, a substantially uniform magnetic field from the bottom to the top in FIG. 6 near the center of the magnets 17 to 24 and a substantially uniform electric field in the horizontal direction near the center in FIG. Causes mass separation as an electromagnetic field superimposed sector. Although the potential is not strictly proportional to the logarithm of the distance r from the center of the arc, as in the case of the first and second embodiments shown in FIGS. Does not.

As described above, in order to apply different voltages to the eight magnets 17 to 24 to form electric fields, the magnets 17 to 24 are electrically insulated as described above. There is a need.

In this embodiment, the magnets 17 to 24
Are electrically insulated from each other by arranging a gap between each of them. The spacing of this gap is determined by the magnet 17
It suffices that the discharge is not generated between each of the first to fourth embodiments and that the electric field can be maintained. It is to be noted that an electrical insulation can be achieved by interposing an insulating film between each of the magnets 17 to 24 without using a configuration in which a gap is arranged.

+ Vdx, -Vdx, + Vdy, -Vdy
Although the detailed description is omitted, the principle of operation is well known as an octupole electrostatic astigmatism corrector for large deflection angles. In conclusion, +
Vdx, -Vdx causes deflection in the X-axis direction to be + Vdy,-
The deflection in the Y-axis direction is performed by Vdy.

+ Vsx, -Vsx, + Vsy, -Vsy
Although the detailed description is omitted here, this operation principle
It is well known as a polar electrostatic stigmator. As a result, secondary astigmatism correction for adjusting the shape of the ion beam in the two-dimensional direction is performed based on + Vsx, -Vsx, + Vsy, and -Vsy.

It is known that an electromagnetic field superposed sector mass spectrometer having a uniform electromagnetic field space has a function of converging an ion beam in the direction of a magnetic field, but has no function of converging in a direction of an electric field. Therefore, a method is known in which a curved electrode is used to slightly curve the electric field in the electrode field space so as to have a convergence effect also in the direction of the electric field. According to the conventional example shown in FIG. 7, the electrodes 51 and 52 are not flat plates but curved in an arc shape. By this method, so-called three-dimensional convergence in which the ion beam converges in two-dimensional directions is achieved.

In this embodiment, the conductive magnets 17 to 24, which also function as electrodes, have the same shape.
This function can be realized. That is, by applying + Vf to the two rightmost magnets and applying -Vf to the four leftmost magnets, the electric field in the electromagnetic field space is slightly curved rightward. Thus, in the present embodiment, three-dimensional convergence of the ion beam is achieved.

In the above description, a magnet that does not use a magnetic pole is used for generating a magnetic field. However, the present invention is not limited to such an embodiment. A magnet using magnetic poles can be used, and an electromagnet can be used instead of a magnet. In addition, the shape of the yoke is not limited as long as it only needs to connect magnets or electromagnets. In some cases, the yoke may not be used at all.

When a magnetic pole is used, the formation of a silicon carbide film as a quasi-conducting film provided on the magnet surface facing the electromagnetic field space performed in Examples 1 and 2 shown in FIGS. 3,
The shapes and arrangements of the magnets in the vicinity of the electromagnetic field space performed in the embodiments 3, 4, 5, and 6 shown in FIGS. 4, 5, and 6 may be realized for the magnetic poles.

In Examples 1 and 2, the silicon carbide films 55 and 56 having uniform sheet resistance were formed on the surfaces of the magnets 2 and 3, but the present invention is not limited to such an embodiment. For example, instead of a silicon carbide film, a film that becomes a quasiconductor by a quasiconductor material or an insulating material containing an appropriate amount of a conductive material can be used. Furthermore, instead of a uniform film, a plurality of elongated conductive films are formed side by side along the direction of the electric field in an insulated state, and each conductive film is divided using a different silicon carbide film or resistor. Can also be applied. Alternatively, a quasi-conductive film having a small sheet resistance value may be formed so as to be folded in a single stroke along the direction of the electric field. In addition, whatever the configuration, the thin film formed on the surface of the magnet facing the electromagnetic field space may cause the potential on the surface of the magnet to change monotonically along the direction of the electric field.

In Examples 3 and 4, two magnets are arranged in the same magnetic pole direction, but the present invention is not limited to such an embodiment. Three or more magnets can be arranged in the same magnetic pole direction. In addition, any configuration may be used as long as a plurality of electrically insulated magnets can be arranged in the same magnetic pole direction to generate an electric field in the electrode boundary space and correct the electric field.

Further, the size and angle of the corner cut of the magnet used in the third and fourth embodiments shown in FIGS. 3 and 4 for the purpose of improving the uniformity of the electric and magnetic fields can be changed. It can also be a curved cut. Strictly speaking, the potential should be strictly proportional to the logarithm of the distance r from the center of the arc, so that it is possible to approach this by changing the shape of the cut with each magnet. Desirably, the optimal shape is determined by computer simulation.

Further, in Embodiments 5 and 6 shown in FIGS. 5 and 6, the shapes of the plurality of magnets are the same, but they may be different from each other. When a cylindrical electrode is used, strictly speaking, the potential should be proportional to the logarithm of the distance r from the center of the arc, so that it can be approached by changing the shape of each magnet. Preferably, the optimum shape is determined by computer simulation.

In Examples 5 and 6, four or eight magnets of the same shape were used symmetrically, but the present invention is not limited to such an embodiment. Different shaped magnets can be used, or six or ten magnets can be used. In any other configuration, the potentials of a plurality of electrically insulated magnetic poles or magnets are changed with a certain relationship, so that not only electric field generation in the electromagnetic field space, electric field correction, but also ion beam It is only required that deflection, astigmatism correction, and convergence can be performed.

In the above description, the electric field for the superposition of the electromagnetic field is a cylindrical electric field and the magnetic field is uniform. However, the present invention is not limited to this. The electric field may be a toroidal electric field depending on the distance r from the center of the arc, or the magnetic field may be a rotationally symmetric non-uniform magnetic field depending on r.

In the above description, the electromagnetic field superposed sector type mass spectrometer of the present invention has been described as a mass spectrometer which operates even in a high-pressure atmosphere. It is not used only in very high pressure atmosphere. It can also be used as a mass spectrometer operating in a normal pressure atmosphere or for purifying an ion beam.

Further, the use of the electromagnetic field superimposed sector type mass spectrometer of the present invention is not limited to the mass spectrometer. In other words, in the above-described embodiment, only the case where the electromagnetic field superimposed sector mass spectrometer of the present invention is used for the purpose of mass separation of ions having the same energy has been described, but the present invention is not limited to this. It can also be used for energy separation of ions and electrons with the same mass.

[0126]

According to the present invention, it is possible to operate in a high-pressure atmosphere during a process such as sputtering, and furthermore, the effect of stray light is greatly reduced and sufficient performance is obtained. Low mass spectrometer can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a first preferred embodiment of an electromagnetic field superimposed sector mass spectrometer of the present invention,
(A) is a perspective view, (b) is a top cross-sectional view, and (c) is a cross-sectional view perpendicular to the ion traveling direction, in which the vicinity of the electromagnetic field is enlarged.

FIG. 2 is a schematic configuration diagram of a second preferred embodiment of the electromagnetic field superimposed sector mass spectrometer of the present invention.

FIG. 3 is a schematic configuration diagram of a third preferred embodiment of the electromagnetic field superimposed sector mass spectrometer of the present invention.

FIG. 4 is a schematic configuration diagram of a fourth preferred embodiment of the electromagnetic field superposed sector mass spectrometer of the present invention.

FIG. 5 is a schematic configuration diagram of a fifth preferred embodiment of the electromagnetic field superimposed sector mass spectrometer of the present invention.

FIG. 6 is a schematic configuration diagram of a sixth preferred embodiment of the electromagnetic field superimposed sector mass spectrometer of the present invention.

7 (a) is a schematic configuration diagram of a conventional electromagnetic field superposed sector mass spectrometer, and FIG. 7 (b) is an enlarged view of a part of the electromagnetic field superposed sector mass spectrometer shown in FIG. 7 (a). Figure.

FIG. 8 is a schematic configuration diagram illustrating a case where a magnetic pole gap is reduced in a conventional electromagnetic field superimposed sector mass spectrometer.

[Explanation of symbols]

1 yoke 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12,
13, 14, 15, 17, 18, 19, 20, 21, 2
2, 23, 24 Conductor magnet 16 Magnet mounting ring 51, 52 Nonmagnetic electrode 53, 54 Nonmagnetic insulating film 55, 56 Nonmagnetic silicon carbide film 57, 58, 59, 60 Terminal 61, 62 Non-magnetic electrode 100 Electromagnetic field 101 Range through which ion beam passes 102 Line of electric force 103 Line of magnetic force

Claims (4)

[Claims] An electric field is formed by an electrode for forming an electric field, and a magnetic pole or a magnet for forming a magnetic field. An electromagnetic field superposition sector type mass spectrometer that separates charged particles by mass and energy by passing the magnetic field or the surface of a magnet facing an electromagnetic field space as an electrode for forming an electric field. Superimposed sector mass spectrometer. 2. The method according to claim 1, wherein a quasi-conductive film is provided on a surface of the magnetic pole or the magnet facing the electromagnetic field space so that the surface of the magnetic pole or the magnet facing the electromagnetic field space functions as an electrode for forming an electric field. An electromagnetic field superposition sector mass spectrometer according to claim 1. 3. A magnetic pole or magnet for forming a magnetic field,
A plurality of magnetic poles or magnets each electrically insulated are arranged in the same magnetic pole direction, and a plurality of magnetic poles or magnets respectively electrically insulated such that different magnetic poles face the plurality of magnetic poles or magnets. 2. The electromagnetic field superimposed sector mass spectrometer according to claim 1, wherein the magnetic field superposition sector type mass spectrometers are arranged side by side in the same magnetic pole direction, and surfaces of a plurality of opposing magnetic poles or magnets function as electrodes for forming an electric field. 4. A plurality of electrically-conductive magnetic poles or magnets, each of which is electrically insulated, are arranged point-symmetrically, and an electric field and a magnetic field are orthogonal to a center portion facing the plurality of conductive magnetic poles or magnets. An electromagnetic field superimposed sector mass spectrometer that forms an electromagnetic field space and passes charged particles on an arc orbit of a specific curvature in the electromagnetic field space to separate the mass and energy of the charged particles. The potential of the surface of the plurality of conductive magnetic poles or magnets facing the electromagnetic field space, which also functions as an electrode to be formed, is related to the primary coupling of the deflection voltage and the astigmatism correction voltage, in addition to the mass separation voltage. ,
Alternatively, an electromagnetic field superimposed sector mass spectrometer characterized by being adjusted so as to have a linear relationship between a deflection voltage, an astigmatism correction voltage, and a convergence voltage.