RU2431213C2 - Device for directing ion beam, having electrodes on parallel plates - Google Patents

Abstract

FIELD: physics.

SUBSTANCE: device for directing an ion beam along an essentially continuous beam line in at least one field which creates a force acting on the ions in the said ion beam, has at least one section having an essentially flat plate-like multi-terminal network having a top flat plate and bottom flat plate. Said force is essentially symmetrical in the parallel direction or essentially asymmetrical in the perpendicular direction relative the centre plane in which the beam line lies. Each of the said plates has first electrode terminals across which corresponding potential values are applied and which generate at least part of the said at least one field. The boundary of the end field lies on each end of the said at least one section and said first electrode terminals are essentially thin and flat.

EFFECT: possibility of using the device when analysing an electron beam or when analysing aerosol transportation.

50 cl, 17 dwg

Description

FIELD OF TECHNOLOGY

The present invention relates to a charged particle transport device in which an electrode system is arranged to focus charged particles in the transverse direction. More specifically, the present invention relates to the formation of the necessary transverse fields by electrode strips on flat plates arranged substantially parallel to each other, as well as options and applications.

BACKGROUND

In the prior art, charged particles are transported in a vacuum or in a buffer gas using transverse forces caused by multipolar electric fields formed by rod-shaped electrodes that are parallel to and around the particle beam. Such fields can be a direct current field or an RF field, i.e. fast-changing high-frequency field. Such fields are used in many devices in which it is necessary to transport charged particles over fairly long distances without loss of beam intensity. Typically, these devices can be estimated by the pressure of the buffer gas in the transport area or by the pressure of the residual gas in vacuum.

The prior art includes the following options for transporting particles:

1. Transportation of charged particles in an area in which the pressure of the buffer gas is from several mbar to several bar, as described in [G. Eiceman, "Ion mobility spectrometry", CRC-Press, Boca Raton, 2006] can be placed in this area :

1.1 ion mobility spectrometer or

1.2 differential mobility spectrometer, also known as a high-intensity asymmetric ion mobility spectrometer.

2. Transportation of charged particles in an area in which the pressure of the buffer gas is from less than mbar to several mbar. In this area can be placed:

2.1 "beam cooler" in which ions collide with atoms or molecules of a buffer gas and in the process transfer their kinetic energy to them. Thus, the ions are “cooled” and the phase space occupied by the ion beam decreases.

2.2. "Ionization chamber" in which molecular ions decay into parts when they collide with atoms or molecules of a buffer gas.

2.3 "transport line", in which ions are transported from the high-pressure region to the low-pressure region or vice versa.

3. Transportation of charged particles to an area in which the residual gas pressure is less than about 1 μbar. In this area can be placed:

3.1 a beam transport channel as in particle accelerators or particle beam direction systems, or

3.2 mass spectrometer, consisting of a sector field, high-frequency four-terminal or isochronous time-of-flight energy system [P.H. Dawson, “Quadrupole mass spectrometry and its application”, Elsevier, Amsterdam, 1976].

In the above examples, it is important that essentially all (or at least a large part) of the initially existing charged particles arrive at the end of the transport line. In the prior art, this can be achieved by using one or multiple lenses that repeatedly refocus the charged particle beam along the transport line with the curved axis Z of the beam.

To simultaneously focus charged particles on the beam axis in the direction of the X and Y axes, if the Cartesian coordinate system XY is arranged perpendicular to the beam axis, axisymmetric electrostatic or magnetic lenses can be used. However, magnetic or electrostatic quadrupole, i.e. 4-pole lenses primarily for focusing charged particles in the X-axis or Y-axis direction and defocusing them in the other direction, as described in [H. Wollnik, “Charged Particle Optics”, Acad. Press, Orlando, 1987].

In some cases, magnetic or electrostatic hexapole or octapole, i.e. with 6 poles or 8 poles, systems that create nonlinear forces that move charged particles closer to the beam axis or further from the beam axis. In all 4-, 6-, or 8-pole devices, usually called multipoles, the general effect on the charged particles is such that the charged particles collect in the region of the beam axis along both X and Y axes. This common action occurs because in each multipole the forces acting on charged particles towards the beam axis, there are generally more forces acting on charged particles in the direction from the beam axis. The reason for this is that these forces grow with increasing distance from the axis when they pass through the multipole, and also because the beam diameters are always larger when forces directed towards the axis of the beam act on the particles, while the beam diameters are smaller when the forces acting on the particles from the axis of the beam act on the particles.

Although charged particle beams can be efficiently transported by separate short 4-, 6- and 8-pole devices, a longer single device can also be used if high-frequency potentials are applied to its electrodes [PHDawson, “Quadrupole Mass Spectrometry and its Application ", Elsevier, Amsterdam, 1976]. In this case, similar focusing and defocusing forces will act on the ions during their passage through the high-frequency multipole.

In the prior art, electric multipolar circuits are formed from 2N = 4, 6, 8 ... rod-shaped electrodes located parallel to the axis of the ion beam and around it through equal polar angles Δθ = π / N, and the potential + V _{No is} applied to the electrodes with even numbers potential -V _{No is} applied to electrodes with odd numbers. The most common multipoles are quadrupoles with a configuration of 2N = 4 poles, as shown in figure 1, in which 4 electrodes are located through equal polar angles π / 2 around an opening with a diameter of 2G ₀ .

In cylindrical R, θ, Z coordinates, the potential V _N (R, θ) in the 2N-pole is independent of Z and can be described as:

Here θ is the polar angle around the Z axis and Ф is the polar angle by which the configuration of 2N electrodes is rotated relative to the plane θ = 0, i.e. XZ plane, as shown in FIG. However, in practice, the exact potential distribution according to formula (1) is approximate, since real electrodes are used, the shape of which is limited by tolerances.

In the case of a classical electric 2N-pole with N = 2, as shown in FIG. 1, the potential distribution V ₂ (R, θ-Ф) in formula (1) is approximated by applying the potentials + V ₂₀ , -V ₂₀ , + V ₂₀ , -V ₂₀ to the electrodes with vertices at θ-Ф = 0, π / 2, π, 3π / 4, where θ is the polar angle. For an accurate representation of V ₂ (R, θ-Ф) in formula (1), the electrodes in the XY plane must have a hyperbolic shape. Due to the symmetry of the electrodes, the potential distribution V ₂ (R, θ-Ф) has 4-fold symmetry, where Ф is the angle by which the configuration of the electrodes is rotated relative to the plane θ = 0, as shown in Fig. 1 for the cases Ф = 0 and Ф = π / 4. The potential takes a zero value along the dashed lines in FIG. 1, while the field E ₂ = gradV ₂ (G ₀ ) is constant along the so-called circumference of the hole with a diameter of 2G ₀ . Thus, the resulting forces acting on the charged particles are constant along this circle, but change direction, as indicated by the small arrows in figure 1.

SUMMARY OF THE INVENTION

Features of the embodiments are reduced to a device for directing an ion beam along a substantially continuous axis of the beam in at least one field in which a force acts on the ions in the beam. This device comprises at least one section that contains a substantially flat plate-like multipole having an upper flat plate and a lower flat plate, the force acting on charged particles being essentially symmetrical in the parallel direction or essentially asymmetric in the perpendicular direction relative to the plane containing the axis beam, and each of these plates, namely the upper flat plate and lower flat plate containing the first electrode strips to which are attached potentials, wherein the first electrode strips generate at least a portion of at least one field, the boundary field boundary being located at each end of the at least one section, and the first electrode strips are substantially thin and flat.

In this device, the upper planar plate and the lower planar plate are arranged substantially parallel to or inclined to the plane of the at least one section, the extrapolated line of intersection of the upper planar plate and the lower planar plate being substantially perpendicular to the axis of the ion beam.

In the device, at least one section includes at least one section, which is a straight section and a curved section that is curved inside the plane, the straight sections of at least one section containing essentially quadrangular first electrode strips parallel to the axis of the ion beam, and the curved sections of the at least one section contain essentially curved first electrode strips, the distance to which from the axis of the ion beam is substantially constant.

In the device, the axis of the ion beam in at least one section has at least one of the properties, including straightness, curvature and curvilinearity.

In the device, each of the first electrode strips has at least one of the edges, which are indicated as (a) a straight line and (b) a curved edge, and the width essentially perpendicular to the axis of the ion beam is less than the length along the axis of the ion beam for each of the first electrode strips. In addition, the lengths or angles of deviation of the first electrode strips are equal to at least, respectively, the lengths or angles of deviation of the adjacent one first electrode strip. In addition, the lengths or angles of deviation of the first electrode strips are not equal to at least the lengths or angles of deviation, respectively, of the adjacent one first electrode strip, and vary linearly or nonlinearly depending on the corresponding distance from the axis of the ion beam.

In the device, the width of at least one of the first electrode strips increases along the axis of the ion beam. Also, the ratio of the widths of the first electrode strips to the distance between the upper flat plate and the lower flat plate is a constant or variable value that varies along the axis of the ion beam. In addition, potentials are applied to at least two first electrode strips for a period of time to form a field along the axis of the ion beam.

In the device, the width of at least one of the first electrode strips increases and decreases along the axis of the ion beam so that the width is maximum in the middle part.

In the device, the width of the first electrode strips is greater at distances farther from the ion beam.

In the device, the width of the central of the first electrode strips is equal to or greater than the widths of the adjacent first electrode strips.

In the device, the ions are directed to one of these plates, which are indicated as an upper flat plate and a lower flat plate, namely, a plate having a larger ion-attracting potential applied to this plate for a certain period of time, and also having an opening allowing emission of at least a portion of the ions.

In the device, the ions are directed along the plane under the action of various potentials applied for a certain period of time to the first electrode strips to form a field parallel to the plane.

The device also comprises second electrode strips located substantially perpendicular to the plane of the first surface and the second surface, the second electrode strips being substantially thin and flat. In the device, the second electrode strips (a) are substantially rectangular or (b) are substantially curved and are located at a constant minimum distance from the axis of the ion beam. In addition, the widths of the second electrode strips are larger at more remote distances from the indicated plane. Also, the width of at least one of the second electrode strips increases along the axis of the ion beam. In addition, the width of at least one of the second electrode strips increases and decreases along the axis of the ion beam so that the width is maximum in the middle part. In addition, the ions are directed to one of these surfaces, the first surface and the second surface being indicated, namely, to a surface having a greater ion attracting potential applied to the second electrode strips for a certain period of time, and there is a hole in these surfaces, allowing the emission of at least a portion of the ions. The system also uses a plate-like multipole for transporting an ion beam in a low-pressure buffer gas in a vacuum ion transport system in which the residual gas pressure is so low that the ion experiences a substantially minimal amount of ion-atom and ion-molecular collisions, and high-frequency multipolar fields are generated and multipolar DC fields to allow mass analysis, the distance between the first surface and the second surface being substantially smaller e the distance between the upper flat plate and the lower flat plate. Additionally, at least one of such potentials as (a) essentially constant potentials and (b) sinusoidal potentials is applied to each of the second electrode strips in the device. In addition, in the device, at least one of such potentials is applied to each of the second electrode strips, such as (a) substantially constant potentials and (b) rectangular switched potentials. In addition, at least one of the high-frequency potentials, including at least one frequency, is applied to one of the second electrode strips, and each at least one frequency may differ from the others of at least one of the characteristics, including the amplitude and phase.

In the device, the first electrode strips comprise a conductive material or a material having a conductive surface, the potential along each of the electrode strips being substantially constant.

In the device, the first electrode strips are formed of at least one wire.

In the device, the first electrode strips contain plates of conductive material on the corresponding insulating substrates or substrates with low conductivity, and are formed in the form of printed circuit boards. In addition, the pads are separated by an area that is less than or equal to the thickness of any of the first electrode strips. A conductive layer is also provided that is configured to shield the high-frequency field formed by the overlays if high-frequency potentials are applied.

In the device, at least one of the high-frequency potentials, variable with at least one frequency, is applied to one of the first electrode strips, and each at least one frequency can differ from the others of at least one of the characteristics, including the amplitude and phase . In addition, at least the dipole field can be modulated by a frequency independent of other multipolar fields for at least one section.

In the device, at least one of such potentials is applied to each of the first electrode strips, such as (a) essentially constant potentials and (b) sinusoidal potentials.

In the device, at least one of such potentials is applied to each of the first electrode strips, such as (a) essentially constant potentials and (b) rectangular switched potentials.

In the apparatus, a common potential is applied to the outer of the first electrode strips, and a potential substantially greater than the common potential is applied to the off-center inner of the first electrode strips, and a potential substantially lower is applied to the central of the first electrode strips than the potential applied to the inner first electrode strips.

The device used a plate multipole for focusing the ion beam in the direction of the plane in a high-pressure buffer gas from several bar to less than 1 mbar in an ion mobility spectrometer or in a differential mobility spectrometer, and the presence of high-frequency multipolar fields and multipolar DC fields during the passage of these ions along the indicated axis of the ion beam is provided by a plate multipole.

The device uses a plate multipole to transport an ion beam in a medium-pressure buffer gas from about 1 mbar to less than 1 μbar in a beam cooler, in which ions lose energy as a result of ion-atom and ion-molecular collisions so that as a result of the phase space of the ion beam decreases, moreover, during the flight of these ions along the axis of the ion beam, the presence of high-frequency multipolar fields in the plate multipole is ensured.

The device uses a plate multipole to transport an ion beam in a medium-pressure buffer gas from about 1 mbar to less than 1 mbar in an ionization chamber in which molecules decay into parts as a result of ion-atom and ion-molecular collisions, and fragmentation ions are released.

The device uses a plate multipole for transporting an ion beam in a low-pressure buffer gas, in a vacuum ion transport system in which the residual gas pressure is so low that the ion experiences a substantially minimal amount of ion-atom or ion-molecular collisions, and high-frequency multipolar fields are formed and multipolar DC fields with the possibility of mass analysis.

In the device, the field of plate-like multipoles is limited by essentially rectangular slot-type electrodes, which are rotation bodies, or gratings located at potential sites that repel ions relative to the axis of the ion beam so that ions in a plate-like multipole are trapped as in a linear quadrupole ion trap, with high-frequency multipolar fields and multipolar DC fields are formed with the possibility of mass analysis.

BRIEF DESCRIPTION OF THE DRAWINGS

The above features of the embodiments will become clearer when describing specific embodiments of the present invention with reference to the accompanying drawings.

Figure 1 illustrates the shape of the prior art electrical quadrupole electrode with rod-shaped electrodes that have vertices at θ-Φ = 0, π / 2, k, 3π / 4, where θ is the polar angle. In example A, such an electrode configuration is shown for Φ = 0, and in example B for Φ = π / 4.

Figure 2 illustrates an embodiment in which flat and thin first electrode strips with a length L are located on two parallel plates, the distance between which 2G ₀ . If we describe the different electrode strips with the coordinates X, Y of the centers of their widths w ₁ , w ₂ , w ₃ , w ₄ , w ₅ and apply potentials to these electrode strips that are essentially identical to the potentials in the X, Y coordinates in the prior art multipole with rod-shaped electrodes, it is possible to achieve a uniform distribution of potential in a multipole.

Figure 3 illustrates an exemplary embodiment in which the flat and thin first electrode strips are located on two parallel plates, the distance between which 2G ₀ , as in figure 2. In this example, the electrode strips are bent and, therefore, represent ring segments if the Z axis of the beam is an arc of a circle of radius ρ, which has a deflection angle F. The average lengths of the different electrode strips are listed below, listed from left to right: Ф [ρ + ( w _1/2 + w ₂ + w _3/2)] F [ρ + (w ₂ + w ₃₎ / 2], P _ρ, F [ρ- (w ₃ + w ₄₎ / 2], F [ ρ- (w _3/2-w -w _{4 5/2)].}

Figure 4 illustrates an exemplary embodiment in which the flat and thin first electrode strips are located on two plates on Y _u and Y _d , and the flat and thin second electrode strips are located on two perpendicularly mounted surfaces placed on X _l and X _r . This configuration of the electrode strips is designated as A for the direct axis Z of the ion beam and B for the curved axis Z of the ion beam.

FIG. 5 illustrates an embodiment of the configuration of electrode strips, which is a change in FIG. 2 and shows flat and thin first electrode strips located on two plates that are inclined relative to each other so that the distance 2G (Z) separating them changes with a change in Z This causes a change in the fields and the multipole strength along the Z coordinate.

FIG. 6 illustrates an embodiment of the present invention, showing two possible methods of using “tapering first electrode strips” in the electrode strip configurations shown in FIG. 2 and FIG. 5, i.e. these are examples in which the widths w (Z) of the tapering first electrode strips 2, 3, 4 change along the Z axis, which, in turn, causes a change in the field strength in multipoles, which changes in the Z direction, as shown in Example B. B Example A, the ratio w (Z) / G (Z) between the width w (Z) of a particular electrode strip and the distance 2G (Z) separating the two plates is called the ratio w / G, which is essentially independent of Z.

FIG. 7 illustrates an embodiment of two possible methods for creating a direct current field in the Z direction in the configuration of electrode strips shown in FIG. 2 or FIG. 5 using the “tapering first electrode strips” shown in FIG. 6. Here, the electrode strips are located on two parallel plates, and in Example A, the same high-frequency and constant potential that is applied to the electrode strips 3 is also applied to the electrode strips 3a, although an additional constant and high-frequency can be applied to these electrode strips potential. In Example B, the same was done with respect to the electrode strips 2a, 3a, and 4a.

Fig. 8 illustrates an embodiment of two devices similar to those shown in Fig. 7, in which the flat and thin first electrode strips have different average lengths, which leads to a curved and also predominantly inclined input or output circuit of a plate multipole. In Example A, different electrode strips are made with the same width and thus have straight sides, while in Example B, four electrode strips are made with different widths and have curved sides.

Fig. 9 illustrates an embodiment of a plate-like multipole, which functions similarly to that shown in Fig. 7 and in which forces in the Z-axis act on the ions, which concentrate the ions approximately in the middle of the shown configuration of the electrode strips, if the ion-attracting potential is additionally applied to these central electrode stripes. In Example A, this is achieved by a double trapezoidal central electrode strip, while in Example B this double trapezoidal central electrode strip is provided with an additional circular protrusion, which increases the action of the force directed to the center of the system. Also shown in both examples are openings through which ions can be extracted substantially perpendicular to the first electrode strips on the upper or lower plates. The center electrode strips are also indicated as separated in the Z axis direction, and in option A, a direct current field can be formed in the Z axis direction for a short period of time after the ions have been concentrated. The same can be done in option B. Before removing the ions, they can be moved towards the middle of the circular protrusion.

Figure 10 illustrates an embodiment in which the flat and thin first electrode strips (2, 3) are made in the form of metal plates on an insulated or low conductive substrate (5) and are made using printed circuit boards obtained by etching. The shown example also provides grounding and shielding (1, 4) of the active configuration of the electrode strips.

11 illustrates edge field limiters placed both in front of and behind a plate multipole. Example A shows two such edge field limiters at each end of a multipole with all limiters A ₁ , A ₂ , A ₃ , A ₄ made in the form of a slot type design. In Example B, two such edge field limiters are shown at each end of the multipole with all limiters B ₁ , B ₂ , B ₃ , B ₄ made in the form of a frame structure.

12 illustrates edge field limiters (A) of a rectangular frame type, (B) of a slot type, and (C) of a ring type. These examples are shown with and without wire gratings, and they can be replaced by wire mesh.

13 illustrates a combination of four plate-type multipole terminals A, B, C, D and a rod-type quadrupole mass analyzer of the prior art, all parts being located on one straight Z axis. In this example, the rod-type quadripole is located along the beam after the plate-like multipole D although it can be located between any two of the lamellar multipoles. As shown in the drawing, all lamellar multipoles are separated by delimiters of the edge field of the slot type, although these delimiters can be reduced to one between two lamellar multipoles, removed completely or replaced by delimiters of the edge field of another type. It was also shown that ions can be extracted perpendicular to the lamellar multipole D.

Fig. 14 illustrates a combination of several plate-like multipoles that are located along the straight Z axes, except for the multipole C, which is located along the curved axis Z. This plate-like multipole is particularly suitable for use as an ionization chamber in which molecular ions decay into parts as a result of atomic and ion-molecular collisions, which, for example, can be investigated by mass analysis in a plate-like multipole D, if the corresponding high-frequency potential and oyanny potential will be applied to the electrode strips so that the device is operated as a high frequency filter or a linear quadrupole ion trap for mass analysis. Lamellar multipole D can also be used as a lamellar multipole, which concentrates ions in its middle part and pushes them perpendicular to its upper plate or directs an ion beam to the rod-type quadrupole mass analyzer.

Fig. 15 illustrates 5 electrode strips on two parallel plates Pu and Pd, segmented in the direction of the Z axis. This configuration provides the application of the X-axis constant and high-frequency potentials to all the electrode strips, which are characterized by a certain value of X, and allows the addition of axis-dependent Z high-frequency and constant potentials to the potentials of all electrode strips, which are characterized by a given value of Z. Fig. 15 also illustrates how different potentials can be applied to different electrodes. ktrodam via connecting conductors Lu and Ld, located between the grounding plates G2u, G1u and G1d, G2d respectively, which may be performed technology of multilayer printed circuit boards.

Fig. 16 illustrates 5 electrode strips segmented in the Z-axis direction and placed on two parallel plates Pu and Pd, as shown in Fig. 15. However, in FIG. 16, the active elements are placed very close to the electrode strips so that the necessary high-frequency energy is reduced and the high-frequency scattering fields are also weakened. These active elements are housed in a housing in which the pressure of the residual gas may differ from the pressure of the residual gas in which the ions move. In some cases, water cooling of Cu and Cd may be provided in this housing.

17 illustrates electrode strips formed in such a way that they can form a single lens field if suitable high-frequency or constant potentials are applied to the respective electrodes. In the same manner, an "immersion lens" and an ion mirror field can be formed, moreover, they are usually formed only by axisymmetric electrodes.

DESCRIPTION OF EMBODIMENTS OF THE INVENTION

Embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, the same reference numbers are used to denote the same elements in different drawings. Only those specific meanings are given in the description, for example, the detailed design and shape of the elements that are necessary for a comprehensive understanding of the invention. Thus, it is obvious that the present invention can be performed without these specific values described. In addition, functions or constructions known from the prior art are not described in detail since they would complicate the description of the invention with unnecessary details.

Figure 2 illustrates an embodiment of the present invention in which a superposition of multipolar potential distributions is made by five double electrode strips, although in some cases more or less number of electrode strips may be recommended. The configuration of the electrode strips is made on parallel plates located at a distance of 2G ₀ , and the diameter of the hole is the same as that shown in FIG. As shown in figure 2, there are 5 electrode strips located on each plate and having a width of w ₁ , w ₂ , w ₃ , w ₄ , w ₅ , and w ₁ and w ₅ more than other widths and can be extended to very large values of X and -X. In addition, points 1a, 2a, 3a, 4a, 5a and lines passing through these points parallel to the Z axis are marked in the middle plane. To simplify the configuration of the electrode strips in figure 2:

- the location and width of the electrode strips are shown to be substantially symmetrical about the X axis;

- the widths of the various electrode strips are shown to be substantially identical on the upper and lower plates, i.e. they are also essentially symmetrical about the y axis.

However, lamellar multipoles (i.e., the upper plate and the lower plate are essentially parallel to each other, and each of them contains thin and flat electrode strips) can also be performed if the electrode strips are located asymmetrically with respect to the X axis or Y axis or asymmetrically relative to both of these axes.

Although the potential distribution in the 2N-pole according to formula (1) for N> 2 can be formed by rod-type electrodes located at equal polar angles Δθ = π / N around the beam axis at equal distances G ₀ , essentially the same potential distribution, or at least close, can be formed by thin flat electrode strips on parallel plates (also called "plate multipoles") located at a distance of 2G ₀ . The electrode strips on these flat surfaces can be installed with high mechanical precision so that the potential distribution can be exactly reproduced from one device to the next. Also, this configuration of the electrode strips allows you to build a device for which the distance 2G ₀ is essentially small, and also a multipole at N = 1, i.e. a dipole that can be performed with high precision.

If you place the coordinate system so that the XZ plane is in the middle between the plates shown in figure 2, then these plates are located in the coordinates Y ₀ = ± G ₀ , the coordinates of the electrode strips and, thus, the points at which formula (1) should work , can be found from the formulas θ = arctan (G ₀ / X) and R = G ₀ / sinθ, where X is approximately the coordinate of the center of each strip. In this configuration of the electrode strips, the mentioned exact dipole potential distribution (N = 1) is added to the established multipolar potential distribution by increasing the potentials of all electrode strips by ± V ₁₀ in the coordinates Y = ± G ₀ .

In the case of such two-plate arrangements of electrode strips, it is preferable to describe the potential distribution V _N not in cylindrical coordinates, but rather in the Cartesian coordinate system XYZ. In this case, formula (1) should be rewritten as follows:

For the region between the plates shown in FIG. 2, i.e. for -G ₀ ≤Y≤G ₀ with N = 1, 2, 3, 4 ... received:

where V _N0 represents the maximum potential at the circumference of the hole with a diameter of 2G ₀ . If it is necessary to form potential distributions at Φ = 0, then the potentials on the electrode strips in + X and -X should be essentially equal, provided that the electrodes themselves are located symmetrically with respect to X = 0.

In the case of a substantially large number of electrode strips located in positions with different X coordinates on two such parallel plates, the distance between which Y = ± G ₀ , formulas (3) (a) - (d) can be used to determine suitable potentials V (X, ± G ₀ ) applied to the electrode strips:

If the electrode strips are characterized not by a single value of X, but rather by a range of values of X, then the potentials that can be determined by formulas (4a) - (4d) are only approximate values, and the finally obtained potential distribution only approximates the summation V _N (X , Y) the desired superposition of multipolar potentials. However, the corresponding potential distribution can be accurately determined by numerically solving the Laplace equation with boundary conditions given by the geometry and potentials of the electrode strips. Using the potential distribution obtained in this way along the circle with a diameter of 2G ₀ shown in FIG. 2, the values of various multipolar components can be found from the Fourier analysis of the distribution of this potential. The reason is that the values of the fields of various 2N-poles change along this circle as cos [N (θ-Ф)]. By changing the potentials of the various electrodes, one can approximate the desired superposition for multipoles. Further, this result can then be improved many times by repeating this procedure for variously chosen widths X of different electrode strips.

Although in some cases a direct axis Z is required, i.e. the line of the ion beam, there are cases in which this axis must be curved or even rounded. The corresponding field is a “toroidal condenser” as described in [H. Wollnik, “Optics of Charged Particles”, Acad. Press, Orlando, 1987], can be formed in accordance with the configuration of the electrode strips, similar to that shown in figure 2 and shown in figure 3, on which four-sided (for example, but not as restrictive features, rectangular or trapezoidal) electrode the stripes in figure 2 are replaced by curved (for example, but not as a restrictive feature, ring) segments. As in FIG. 2, FIG. 3 also shows only five double electrode strips, although in many cases fewer or more electrode strips may be recommended. If the potentials of different curved segments are different, then a field can be formed in the radial direction, i.e. in the X direction, in FIG. 3, in this case, the axis of the beam is substantially rounded and it is located in the XZ plane, which also contains its center of curvature. The electrode configuration shown in FIG. 3 provides substantially the same hole diameter 2G ₀ as in FIG. 2. As in figure 2, figure 3 also shows 5 electrode strips located on each plate and having widths w ₁ , w ₂ , w ₃ , w ₄ , w ₅ , and w ₁ , w ₅ more than the widths of the remaining electrode strips . In addition, points 1a, 2a, 3a, 4a, 5a and lines that pass through these points and are concentric with respect to the curved Z axis are marked in the middle plane. Here, this concentricity is meant as parallelism.

Although in figure 2 and figure 3 the width of all electrode strips is essentially the same, it can preferably be chosen different. To accurately determine potentials close to the ion beam, one or more electrode strips close to the ion beam can be replaced with several small electrode strips to which slightly different potentials can be applied. It is also possible to choose a wider central electrode strip compared to neighboring ones, which, if the width of this central electrode strip is substantially greater than the distance between the plates, can provide an amplification of the eight-pole component in the distribution of the multipolar potential.

The configuration of the electrode strips shown in FIG. 2 can provide clear fields of a four-terminal or other straight-line multipole, and the same can be said of the configuration of the electrode strips shown in FIG. 3 with respect to a clear field of a toroidal condenser whose Z axis is rounded . However, at least for large values of G ₀ in the direction of the X axis, an essentially wide construction is necessary. This wider construction can be made smaller by adding additional electrode strips on the surfaces perpendicular to the reference plane XZ to the electrode strips on the parallel plates on Y _u and Y _d on ortho surfaces, as mentioned above. In such systems, in the case of a straight axis Z, the electrode strips on the plates on Y _u and Y _d and the electrode strips on the ortho surfaces on X _l and X _r essentially represent rectangles. In the case of a curved Z axis, the electrode strips on the plates Y _u and Y _d essentially represent annular segments, and the electrode strips on perpendicular surfaces are essentially cylinders. The shapes of these second electrode strips are illustrated in FIG. In such a system, a field region of a rectangular multipole can be formed for which the potential distribution along the orthosurfaces on X _l and X _r limits the fields to the largest and smallest values of X, while the accuracy of the potential distribution is essentially determined by the shape and potentials of the electrode strips on parallel plates on Y _u and Y _d .

Although in addition to electrode strips in parallel plates, it is often recommended to use additional electrode strips on ortho-surfaces, it should be noted that the same desired potential distributions can be obtained only by electrode strips on parallel plates without electrode strips on ortho-surfaces. In such cases, the potential distribution along the circumference of the hole with a diameter of 2G ₀ is mainly formed by the widths w of the electrode strips 2, 3, 4 and the potentials applied to them. In this case, the effect of the electrode strips 1 and 5 is the same, although much less. It should be noted that such changes will also affect the potential at points along the Z axis. However, in order to keep the potential along the Z axis unchanged, you can always add some high-frequency and constant potential V _u to all electrode strips on the upper plate or subtract it from them , which also applies to other high-frequency and constant potential V _d relative to all electrode strips on the bottom plate.

If the potentials of the electrode strips 1 and 5 are selected corresponding to the electric potential of the Earth, and approximately the same potential is also applied to the electrode strips 3, then usually suitable field configurations can be found by applying the potentials to the electrode strips 2 and 4, essentially identical to the value of V ₀ . If the width of the electrode strips 2, 3, 4 is approximately 2G ₀ , i.e. w ₂ = w ₃ = w ₄ = 2G ₀ , it is obvious, for example, that the potential distribution around the Z axis is essentially the distribution of the potential of a regular four-terminal network, as described in formula (1) for N = 2, in which V ₂₀ represents a significant portion of V ₀ .

Quantitative calculation of potentials V ₁ , V ₂ , V ₃ , V ₄ , V ₅ at points 1a, 2a, 3a, 4a, 5a in figure 2 and figure 3, which determine the middle of the gaps between each pair of u, d electrode strips with different widths of w ₂ and w ₄ , shows that the potentials V ₂ and V ₄ essentially increase with increasing ratios w ₂ / G ₀ and w ₄ / G ₀ and that small potentials V ₁ , V ₃ , V ₅ show a similar dependence.

Although the detailed potential distribution between the electrode strips on two parallel plates should be numerically determined, it can be argued that when the Z-dependent distances 2G (Z) and the widths w (Z) of the different electrode strips change, the potential along the Z axis remains approximately constant if the relation ( w / G) does not change significantly with a change in Z. Therefore, in such cases it can be expected that the field strengths in a multipole increase or decrease with a change in Z. In other cases, more complex field distributions should be expected, as well as field shapes in the direction of the Z axis. Thus, for these cases it was found that the application of high-frequency potentials to different electrode strips leads to the action of corresponding forces on ions in the direction of the Z axis, and the application of constant potentials to different electrode strips leads to acceleration or deceleration ions in the Z direction.

A change in said w / G ratio can be achieved:

1) a decrease in G (Z) with an increase in Z from G ₀ to G ₀ (1-δ _G ) along the entire length of the electrode strips, for example, by tilting the two plates relative to each other, as shown in FIG. 5, and

2) the use of "tapering quadrangular" electrode strips (see Fig.6), in contrast to the "rectangular" electrode strips shown in Fig.2, or the use of "tapering curved" electrode strips (not shown in the drawings) as opposed to "curved "electrode strips shown in figure 3, i.e. increasing the width w _{2 of the} electrode strips 2u, 2d from w ₂ to w ₂ (1 + δ _w2 ) and the width w _{4 of the} electrode strips 4u, 4d from w ₄ to w ₄ (1 + δ _w4 ) with a change in Z. In the most general case δ _{w2 is} not equal to δ _w4 , although in most cases, choose δ _w2 ≈ δ _w4 , as shown in _Fig.6 .

Thus, a change in the ratio (w / G) depending on Z can be achieved both by changing the distance G (Z) between the plates, and by using tapering electrode strips with a width w (Z). In addition, these two variations can also be used together.

Two configurations of tapering straight electrode strips are illustrated in FIG. 6, although tapering curved electrode strips not shown in the drawing are also possible. In both cases, the transverse field strength in the multipole increases with increasing Z. In addition, in case B, the potential also changes along the Z axis, while in case A, the potential along the Z axis is essentially independent of Z, because the narrowing angles are different electrode strips with a width w (Z), as well as the distance between the plates G (Z), are selected so that the ratio (w / G) is essentially constant.

A change in potential along the Z axis creates a constant electric field in the Z direction inside the plate multipole. Such a field is very effective in transporting an ion beam along the Z axis of the configuration of electrode strips, similar to those shown in FIG. 2 or FIG. 3, filled with a buffer gas. In this case, the ions lose energy as a result of ion-atom or ion-molecular collisions and ultimately stop moving forward unless there is a gas pressure gradient or electric field acting in the Z direction that would move the ions along the Z axis. Such fields can be created by rod-shaped or ring-shaped structures known from the prior art, but according to an embodiment of the present invention in this example, such a field is created by inclined or tapering electrode strips shown in and Fig. 5, Fig. 6 and Fig. 7. Such a field can be generated by applying constant potentials to the electrode strips 3 in the configuration of the tapering electrode strips shown in Example B of FIG. 6. In the Z direction, such a field can also be formed using the configuration of tapering electrode strips shown in Example A in Fig. 7, if high-frequency and constant potentials are also applied to the electrode strips 3a, also applied to the electrode strips 3, plus an additional attractive or a constant potential repelling the ions, and in Example B of FIG. 7, if high-frequency and constant potentials are applied to the electrode strips 2a, 3a, 4a, also applied to the electrode strips 2, 3, 4, plus an additional attractive or ion repulsive constant potential.

In some cases, it may be advisable to change the lengths of the various electrode strips, as shown in FIG. 8, for the case of curved input circuits of plate multipoles. Such circuits can be formed both at the input and at the output of the plate multipole, and can be bent, as shown in Fig. 8, but they can also be inclined or have a non-circular bend. All these changes provide an additional way to control the forces acting on the ion beam in the transverse direction.

Non-standard change in the shape of the tapering electrode strips shown in Fig.9. As shown in the drawing, the electrode strips are narrowed on both sides so that the constant potentials added to these electrode strips cause forces that are directed to the middle position on the Z axis. This method can be applied to plate multipoles, sections of which have a straight axis , as well as to plate multipoles, sections of which have a curved axis. In both cases, the ions will be grouped together in the form of a small cloud in the middle position on the Z axis. Then, from this position, the ions can be extracted:

1) in the direction of the Y axis through the extraction opening shown in Fig. 9, which can be rectangular, as shown in Fig. 9, or of another shape, in order to ensure optimal ion extraction, which can be achieved by applying various potentials to electrode strips on the upper and lower plates;

2) in the direction of the X axis by applying for a short period of time different potentials to different electrode strips with different positions on the X axis, and potentials that are applied for a short period of time to the electrode strips on the upper plate and potentials that are for a short period of time applied to the electrode strips on the bottom plate are substantially identical. Such an extraction of ions in the direction of the X axis can be especially effective in the case of a section with a curved axis, moreover, the ions will tend to concentrate in the cloud if the extraction is carried out in the concave direction, and disperse if the extraction is carried out in the convex direction;

3) in the Z direction by applying a field acting in the Z direction, which can be formed by various potentials applied to the boundary field limiters at the inlet and outlet of the plate multipole, or by dividing the electrode strip tapering on both sides into two tapering strips, the first of which increases along width along the Z axis, and the second decreases in width along the Z axis. In this case, various constant potentials can be applied to these two tapering electrode strips for a short period of time.

Multipolar circuits with or without a dipole field can be made, as shown in FIGS. 2-9, with differently formed electrode strips on the “plates”. They may be:

1) made of insulated metal billets, and these electrode strips must be mounted so that the mounted structure could not be visible at all or only slightly visible from the location of the ions;

2) made of insulated metal wires to which potentials are applied, different for each wire or different for different groups of wires. Such a design may be preferable if the air from the space in which the ion movement occurs is strongly evacuated to such an extent that the final residual pressure is very low;

3) are made as metal plates on printed circuit boards (see FIG. 10), for example, placed on substrates of ceramic material or on substrates of epoxy material, which for most applications should be selected with a low content of adsorbed gases. This is a great way to align the electrode strips with high accuracy. This design also provides effective shielding of high-frequency fields by placing grounding conductive layers on the opposite side of the substrate material, as shown in FIG. 10. When using multilayer printed circuit boards, this shielding layer can be placed in the middle of the thickness of the substrate. Two-layer or multi-layer shielding can also be used in this technology. In the case of printed circuit boards, it is preferable to separate the electrode strips with only small gaps, the width of which is at best smaller than the thickness of the metal plates, so that the accumulated charge of the insulated substrate material has only a small effect on the total potential distribution;

4) are made as metal plates on printed circuit boards with low conductivity. This can be achieved by applying a low conductive film to the entire surface of the printing plate or by using a low conductive substrate material, for example, the so-called “unfired ceramic”. In this case, the potential between the different electrode pads can be linearly interpolated.

A distinctive feature of the plate multi-terminal is that the potential V _{N0 of} any multi-pole potential distribution, as defined in formula (1), can be easily changed, and thus, the tension in the corresponding multi-terminal can be easily changed. This can be done either continuously for the constant component, or as a function of time. Thus, it is especially possible to change the intensities of multipolar fields with the same or different frequency or phase shift, as in a dipole field. This makes it possible, for example, to add a rotating field of another frequency to a multipolar field of one frequency. Such a design may be preferred for fragmentation of molecular ions [V. Raznikov et al., Rap. Comm. in Mass Spectrom. 15 (2001) 1912].

In addition, any of these frequencies may change over time. This may be preferable, for example, for an ion mobility spectrometer or a differential mobility spectrometer, so that different focusing forces act on ions with smaller and larger masses. Moreover, lamellar multipoles, in which the dominant polarity is the polarity of a four-terminal, are flexible devices on the basis of which four-terminal can be created with a variable field strength or angle of inclination Ф, the values of which can be chosen so that they are constant or varying in time.

In addition, the control of a plate multipole can be carried out not by frequencies, but rather by rapidly changing voltages, as, for example, this was done in a digital ion trap [P.H. Dawson, “Quadrupole mass spectrometry and its application,” Acad. Press, Orlando, 1976], constructed from rod type electrodes. This is especially useful if complex compositions of different frequencies are needed, and if the addition of a constant potential or a pulsed constant potential is also necessary.

Lamellar multipoles are often limited by edge field limiters; their two forms are shown in FIG. 11. Such limiters prevent the propagation of fields formed in the plate multipole, too far from the plate multipole. Such boundary field limiters are shown in FIG. They may be:

a) formed in the form of a frame of rectangular, round or elliptical shape;

b) made in the form of a "slotted type" diaphragm, which can be easily integrated into the design of a multipole assembled from printed circuit boards.

All of these diaphragms can also be limited by gratings, as shown in FIG. 12, in which case the frame design is not essential.

If substantially the same potential is applied to the electrode strips A ₂ , A ₃ or B ₂ , B ₃ as the potential in the reference plane XZ, then the field of the plate multipole will be appropriately limited. In this case, the electrode strips A ₁ , A ₄ or B ₁ , B ₄ can be removed. However, there are other options for using these edge field limiters.

1. When a constant potential repelling ions is applied to the electrodes A ₂ , A ₃ or B ₂ , B _3, those ions that are already inside the plate multipole cannot fly out and therefore move back and forth along the Z axis. Thus, if If the potentials are applied to the electrode strips, then the plate multipole can be used as an ion trap that simply holds ions, examines them by mass analysis, or prepares them for grouped extraction in the direction of the X, Y, or Z axes, as already described in Chez 9 in the description. The presence of ions in the trap can be facilitated by the presence of, or, as described above, achieved only by the presence of electrode strips tapering on both sides.

2. When applying a constant potential attracting ions to the electrodes A ₃ or B ₃ located on the output sides of the plate multipoles shown in FIG. 11 and repelling constant potential ions to the electrodes A ₄ or B _4, it can be seen that a small ion-capturing region is formed from which ions can be extracted in the Z-axis direction by simply replacing the potential on the electrode strips A ₄ or B ₄ with an ion attracting potential.

Lamellar multipoles can be used in various cases, some of which are listed below and which are partially illustrated in FIG. 13 and FIG. 14, although there are many other configurations in which they can be used.

1. Plate multipoles can transport ions from one section to the next. It can be just overcoming the gap along the Z axis by ions or moving ions from one type of analysis to another.

2. The plate multipole can be used as a beam cooler in which ions lose energy as a result of ion-atom or ion-molecular collisions, while the ion cloud is compressed to a small amount of phase space. This can be done by simply transferring the ions through the entire length of the lamellar multipole or by capturing the ions, as described above in the description of FIG.

3. The plate-like multipole can be used as an ionization chamber in which molecular ions decay as a result of ion-molecular or ion-atom collisions. The resulting ion fragments can then be subjected to mass analysis in a sector-field analyzer, quadrupole filter or in-flight mass spectrometer. Such fragmentation of molecular ions can be achieved by simple one-time ion transfer across the entire length of the plate-like multipole used as an ionization chamber, or by trapping ions, as discussed above with respect to FIG. 11.

4. The lamellar multipole can be used as a quadrupole mass analyzer. Such an application can be achieved by simple one-time ion transfer through the entire length of the plate multipole, in which case a mass filter can be mentioned. However, mass analysis can also be performed using a plate-like multipole as an ion trap for mass analysis, with which ions can be captured, as described above with respect to FIG. 11.

For options 1, 2, 3, in most cases it is enough to just apply high-frequency voltages to different electrode strips. However, in this case only low-mass ions can be eliminated, while all other ions can pass through. Additionally, applying constant voltage to different electrode strips, it is possible to ensure the conservation of ions of only a special, usually short, mass range. In cases 2 and 3, such mass analysis capabilities can also be realized by applying not only high-frequency, but also constant potentials to different electrode strips. In these cases, however, usually limited mass analysis is usually sufficient.

Combinations of various plate multipoles are shown in FIG. 13 and FIG. Both drawings do not reflect all the tasks that different plate multipoles can solve. Descriptions of some feasible configurations are provided below. However, other options may be implemented.

13 shows four lamellar multipoles A, B, C, D to which a rod-type four-terminal is added on the same Z axis. In this configuration, plate-like multipole A can be used as an ion mobility spectrometer, plate-like multipole B as a transfer section, plate-like multipole C as a mass analyzer, and plate-like multipole D as an ionization chamber for fragmenting molecular ions, which then move to the final quadrupole rod type mass analyzer. However, it should also be pointed out that ions could be extracted from the plate multipole D perpendicular to the plates, for example, in order to be introduced into a time-of-flight mass analyzer not shown.

Additional plate multipoles can also be placed in the configuration shown in Fig. 13, for example, as transfer devices that, for example, would solve the problem of separation of various analyzers well, or which could be used as additional beam coolers. Of course, the rod-type quadrupole mass analyzer can also be placed between two plate-like multipoles instead of being located after the plate-like multipole D. All plate-like multipoles are shown by separated edge field limiters, which can be simplified if necessary or which can be used as ion reflectors in this case, the corresponding plate-like multipole will be used as an ion trap.

On Fig shows the configuration of the plate multi-terminal, similar to that shown in Fig.13. In this case, one of the plate multipoles is shown with a clearly curved axis. For convenience, the deflection angle of this plate-shaped multipole with a curved axis is π, although any other angle can also be selected. If this multi-terminal C with a curved axis is used as an ionization chamber, then the plate multi-terminal D can be used as a mass analyzer or an ion transfer device to another mass analyzer (not shown), if the necessary high-frequency and constant potentials are applied to its electrode strips . Lamellar multipole D can also be used as a lamellar multipole, which concentrates the ions in its middle and pushes them perpendicular to the upper plate, for example during a time-of-flight mass analyzer. At the same time, this plate-like multipole D can also be used as a transfer device to another mass analyzer, for example, similar to the rod-type four-terminal shown above. In this case, the plate-like multipole A can be used, for example, as a beam cooler, and the plate-like multipole B can be used as a mass analyzer that selects precursor ions with a specific molecular weight for fragmentation in the ionization chamber, which here can be the plate-like multipole C.

FIG. 15 shows 5 electrode strips on two parallel plates Pu and Pd having five different X coordinate values, all of which are parallel to the Z axis (see also FIG. 2). However, in FIG. 15, these 5 electrode strips are divided into 4 sections, differing in different average values of the Z coordinate. In this embodiment, the corresponding X-dependent constant and high-frequency potentials are applied to all electrode strips that are characterized by a certain value of X, and are added to these potentials essentially the same Z-dependent high-frequency and constant potentials, also applied to all electrode strips, differing in some value of the Z coordinate. Since this addition should be l made for the electrode strips on the plates Pu and Pd, as a result, a constant field can be formed in the direction of the Z axis.

Since there are essentially many wires for supplying different potentials to different electrode strips, the drawing shows how this task can be accomplished using the connecting conductors Lu and Ld located between the grounding plates G2u, G1u and G1d, G2d, respectively. This arrangement provides the formation of connecting conductors using the technology of strip waveguides and at the same time provides effective high-frequency shielding of the high-frequency fields formed by various electrode strips. This design can be performed on the technology of multilayer printed circuit boards. In this case, for the upper plate Pu, as well as for the lower plate Pd, insulating three-layer substrates are necessary. For simplicity and clarity, these substrates are not shown in the drawing.

On Fig also shows five segmented in the Z-direction of the electrode strips placed on two parallel plates Pu and Pd, as shown in Fig.15. In this case, the final active current voltage control elements are located essentially close to the corresponding final electrode strips, and the connecting conductors do not create additional capacitances with a grounded shield, as well as no additional resistive loads. Such a configuration reduces the magnitude of the required high-frequency energy, as well as the high-frequency fields in the rest of the ion-optical system. However, such an embodiment may require the cooling of the printed circuit boards on which these active elements are placed using water or some other liquid. Such cooling tubes are shown in the drawing and are designated as Cu and Cd. As shown in the drawing, these active elements are housed in a housing in which the pressure of the residual gas may differ from the pressure of the residual gas in the region in which the ions move.

17 shows electrode strips that are formed so that they can create an axisymmetric accelerating or retarding lens field if the correct high-frequency or constant potentials are applied to the respective electrodes. In this case, the ions will begin to move from the potential V ₀ , then they can be accelerated or slowed down to the potential V _m , after which they can be slowed down or accelerated to the potential V ₁ . In the case of V ₁ ≠ V _{0, the} described configuration implements an axisymmetric immersion lens, and in the case of V ₁ = V _{0, the} described configuration implements an axisymmetric single lens.

Using a similar configuration of the electrode strips, a field of an axisymmetric ion mirror known in the art can also be formed, which is used in time-of-flight mass spectrometers in which such a field is usually formed by axisymmetric electrodes.

The above implementation options and their advantages are given only as an example and should not be construed as limiting. The present invention can be easily applied to other types of devices. In addition, the description of exemplary embodiments is intended for illustrative purposes only and does not limit the scope of the present invention in any way, and many variations and modifications thereof will be apparent to those skilled in the art.

INDUSTRIAL APPLICABILITY

Embodiments of the present invention can be used in various types of charged particle analyzers. Such charged particle analyzers include ion mobility spectrometers used to analyze particle traces in a medium, and mass spectrometers used in biology, medicine, or pharmacology, as well as inorganic chemistry for geology or material science. However, embodiments may also be used in electron beam analysis or in aerosol analysis or transportation.

Claims (50)

1. A device for directing an ion beam along a substantially continuous line of the beam in at least one field creating a force acting on the ions in said ion beam, comprising at least one section that contains a substantially planar plate multipole, having an upper flat plate and a lower flat plate, wherein said force is substantially symmetrical in the parallel direction or substantially asymmetric in the perpendicular direction with respect to the middle plane in which the beam line is located, Each of these plates, namely the upper flat plate and the lower flat plate, contains the first electrode strips to which the corresponding potentials are applied and which generate at least part of the specified at least one field, and the boundary of the edge field is located on each the end of said at least one section, and said first electrode strips are substantially thin and flat. 2. The device according to claim 1, characterized in that said upper flat plate and said lower flat plate are arranged substantially parallel to or inclined with respect to said middle plane in said at least one section, an extrapolated line of intersection of said upper flat plate and the specified lower flat plate is essentially perpendicular to the line of the ion beam. 3. The device according to claim 1, characterized in that the at least one section is a straight section or a curved section that is curved relative to the specified mid-plane, and the straight sections contain essentially quadrangular first electrode strips parallel to the lines of the ion beam, and the curved sections contain essentially curved first electrode strips located essentially at a constant distance from the line of the ion beam. 4. The device according to claim 1, characterized in that the specified line of the ion beam in the specified at least one section has at least one of the properties, including straightness, curvature and curvature. 5. The device according to claim 1, characterized in that each of the first electrode strips has at least one of the edges, which are a straight edge and a curved edge, and the width essentially perpendicular to the line of the ion beam is less than the length along ion beam lines for each of the first electrode strips. 6. The device according to claim 5, characterized in that the lengths or angles of deviation of the first electrode strips relative to the vertical axis are equal, respectively, to the lengths or angles of deviation of at least one adjacent first electrode strip. 7. The device according to claim 5, characterized in that the lengths or angles of deviation of the first electrode strips relative to the vertical axis are not equal, respectively, to the lengths or angles of deviation of at least one adjacent first electrode strip and vary linearly or nonlinearly depending on the respective distances to them from the line of the ion beam. 8. The device according to claim 1, characterized in that the width of at least one of these first electrode strips increases along the line of the ion beam. 9. The device according to claim 8, characterized in that the ratio of the widths of the first electrode strips to the distance between the upper flat plate and the lower flat plate is a constant value or a variable that varies along the line of the ion beam. 10. The device according to claim 8, characterized in that the potentials are applied to at least two first electrode strips for such a period of time to form a field along the line of the ion beam. 11. The device according to claim 1, characterized in that the width of at least one of these first electrode strips increases and decreases along the line of the ion beam so that the width is maximum in the middle part. 12. The device according to claim 1, characterized in that the widths of at least some of these first electrode strips are greater at distances farther from the specified ion beam. 13. The device according to claim 1, characterized in that the width of the central of said first electrode strips is greater than or equal to the width of the adjacent first electrode strips. 14. The device according to claim 1, characterized in that said ions are directed to one of said plates, which are indicated as an upper flat plate and a lower flat plate, namely, a plate having a larger potential for attracting ions applied to it during the period time, and also having a hole for the emission of at least part of these ions. 15. The device according to claim 1, characterized in that said ions are directed along said middle plane under the action of various potentials applied to said first electrode strips for a period of time to form a field parallel to said middle plane. 16. The device according to claim 1, characterized in that it further comprises second electrode strips located essentially perpendicular to the indicated middle plane on the first surface and the second surface, said second electrode strips being essentially thin and flat. 17. The device according to clause 16, wherein said second electrode strips are substantially quadrangular or substantially curved and are located at a constant minimum distance from said ion beam line. 18. The device according to clause 16, characterized in that the widths of these second electrode strips are greater at distances more remote from the specified mid-plane. 19. The device according to clause 16, characterized in that the width of at least one of these second electrode strips increases along the line of the ion beam. 20. The device according to clause 16, characterized in that the width of at least one of these second electrode strips increases and decreases along the line of the ion beam so that the width is maximum in the middle part. 21. The device according to clause 16, wherein said ions are directed to one of these surfaces, the first surface and the second surface being indicated, namely, a surface having a larger ion attracting potential applied to said second electrode strips during a period of time, and in said first surface and said second surface there is a hole for emission of at least a portion of said ions. 22. The device according to clause 16, characterized in that the plate multipole is used to transport an ion beam in a low-pressure buffer gas in a vacuum ion transport system in which the residual gas pressure is so low that the ion experiences a substantially minimal amount of ion-atom or ion -molecular collisions, with the formation of high-frequency multipolar fields and multipolar DC fields with the possibility of mass analysis, while the distance between the specified first surface and seemed second surface substantially smaller than the distance between said upper flat plate and said lower plate plane. 23. The device according to clause 16, wherein at least one of such potentials as essentially constant potentials and sinusoidal potentials is applied to each of said second electrode strips. 24. The device according to clause 16, characterized in that at least one of such potentials, such as essentially constant potentials and potentials having a rectangular shape when switching, is applied to each of these second electrode strips. 25. The device according to clause 16, characterized in that at least one of these high-frequency potentials, including at least one frequency, is applied to one of these second electrode strips, each indicated at least one frequency may differ from other frequencies at least one of the characteristics, including the amplitude and phase. 26. The device according to claim 1, characterized in that said first electrode strips comprise a conductive material or a material that has a conductive surface, the potential along each of said electrode strips being substantially constant. 27. The device according to claim 1, characterized in that the first electrode strips are formed of at least one wire. 28. The device according to claim 1, characterized in that the first electrode strips contain overlays of conductive material on the corresponding insulating substrates or substrates with low conductivity and are formed in the form of printed circuit boards. 29. The device according to p. 28, characterized in that said pads are separated by a region that is less than or equal to the thickness of any of these first electrode strips. 30. The device according to p. 28, characterized in that it further comprises at least one conductive layer, which is configured to shield the high-frequency field formed by these overlays, if high-frequency potentials are applied. 31. The device according to claim 1, characterized in that at least one of these high-frequency potentials, including at least one frequency, is applied to one of these first electrode strips, each indicated at least one frequency may differ from other frequencies at least one of the characteristics, including the amplitude and phase. 32. The device according to p, characterized in that at least the dipole field is modulated by a frequency independent of other multipole fields for the specified at least one section. 33. The device according to claim 1, characterized in that at least one of such potentials as essentially constant potentials and sinusoidal potentials is applied to each of these first electrode strips. 34. The device according to claim 1, characterized in that at least one of such potentials, such as essentially constant potentials and potentials having a rectangular shape when switching, is applied to each of these first electrode strips. 35. The device according to claim 1, characterized in that a common potential is applied to the external of said first electrode strips, and a potential substantially greater than said common potential is applied to an off-center inner of said first electrode strips, and to a central one of said first of electrode strips, a potential substantially lower than the potential applied to said inner of said first electrode strips is applied. 36. The device according to claim 1, characterized in that the plate multipole is used to focus the ion beam towards the indicated middle plane in the high-pressure buffer gas from several bar to less than 1 mbar in the ion mobility spectrometer or in the differential mobility spectrometer, the presence of high-frequency multipolar fields and multipolar DC fields during the passage of these ions along the specified line of the ion beam is provided by the specified lamellar multipole. 37. The device according to claim 1, characterized in that the plate-like multipole is used to transport an ion beam in a medium-pressure buffer gas from about 1 mbar to less than 1 μbar in a beam cooler in which ions lose energy as a result of ion-atom or ion-molecular collisions so that the phase space of the ion beam decreases, and during the passage of these ions along the specified line of the ion beam, the presence of high-frequency multipolar fields in the specified plate-like multipole is ensured. 38. The device according to claim 1, characterized in that the plate-like multipole is used to transport an ion beam in a medium-pressure buffer gas from about 1 mbar to less than 1 mbar in an ionization chamber in which the molecules decompose into parts as a result of ion-atom or ion molecular collisions, and fragmentation ions are released. 39. The device according to claim 1, characterized in that a plate-like multipole is used to transport an ion beam in a low-pressure buffer gas in a vacuum ion transport system in which the residual gas pressure is so low that the ion experiences a substantially minimal amount of ion-atom or ion -molecular collisions, and high-frequency multipolar fields and multipolar DC fields with the possibility of mass analysis are formed. 40. The device according to claim 1, characterized in that the field of plate multipoles is limited by electrodes or gratings that are essentially rectangular, slot type or bodies of revolution located at potential sites and repel ions in the direction of the ion beam line so that ions in the plate the multipoles were captured as in a linear quadrupole ion trap, and high-frequency multipolar fields and multipolar DC fields were formed with the possibility of mass analysis. 41. The device according to claim 1, characterized in that the length of at least one of the first electrode strips is divided into at least two sections to which various high-frequency potentials or constant potentials are added so that a field is formed along the ion beam. 42. The device according to clause 16, wherein the length of at least one of the second electrode strips is divided into at least two sections, to which various high-frequency and constant potentials are added so that a field is formed along the ion beam. 43. The device according to claim 1, characterized in that at least one of the first electrode strips is curved within the plates, said at least one of the first electrode strips being arranged in such a way that it approximates the shape of the equipotential line of a single lens, accelerating lenses or ion mirror. 44. The device according to p. 16, characterized in that at least one of the second electrode strips is curved, and the specified at least one of the second electrode strips is located so that it approximates the shape of the equipotential line of a single lens, an accelerating lens or an ion mirror . 45. The device according to claim 1, characterized in that the potentials applied to the various of these first electrode strips of at least one plate multipole are transmitted by connecting conductors located between at least two grounded layers in a multilayer printed circuit board. 46. The device according to claim 1, characterized in that the potentials are applied to various of these electrode strips of at least one plate multipole due to active electronic elements located on the printed circuit board on which the electrode strips are mounted. 47. The device according to claim 1, characterized in that the potentials are applied to various of these first electrode strips of at least one plate multipole due to active electronic elements located in the housing, the pressure of the residual gas inside which may differ from the pressure of the residual gas, in which ions move. 48. The device according to item 46, wherein the printed circuit boards are equipped with water cooling. 49. The device according to item 47, wherein the printed circuit boards are equipped with water cooling. 50. The device according to claim 1, characterized in that the first electrode strips are configured to provide a potential distribution of an axisymmetric electrostatic lens or axisymmetric ion mirror, provided that the necessary potentials are applied to the electrode strips.

Images