JP2002186811A - Oxide ceramics filter and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an oxide ceramics filter of high quality having excellent strength characteristics and fracture toughness and enhanced in filtering capacity, and a method for manufacturing the same. SOLUTION: The oxide ceramics filter is manufactured by integrally forming a filter film on a base material, wherein oxide ceramics formed into long fibers are formed in a matrix comprising oxide ceramics as a reinforcing material, from oxide ceramics having a component different from the matrix component of the base material by sintering. The thickness of the filter film is 200 μm or less and the strength thereof by an O-ring test is 30 MPa or less.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an oxide ceramic filter applied to an environment purification type device such as air purification or water purification, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In a refuse incinerator or the like, a large amount of dust tends to be generated due to the nature of fuel. For this reason, from the viewpoint of environmental protection, dust is removed by using a bag filter, an electric dust collector or the like for dust removal.

[0003] In the above-mentioned bag filter and the like, filters formed of various materials are applied. Among various materials, ceramics have excellent strength characteristics at high temperatures and chemical stability under severe environments. In particular, non-oxide ceramics such as SiC and Si ₃ N ₄ have attracted attention in recent years because of their high strength and high fracture toughness.

However, although non-oxide ceramics have excellent characteristics, they require firing in a non-oxidizing atmosphere in the manufacturing process, and require a high temperature during firing, resulting in a low manufacturing cost. There was a problem of soaring. Also, when a filter made of non-oxide ceramics is actually used, the non-oxide ceramics are oxidized in a high-temperature atmosphere, thereby deteriorating the filter characteristics. It has been difficult to put such filters into practical use.

Therefore, conventionally, an oxide ceramic having excellent oxidation resistance under high temperature atmosphere and excellent chemical stability has been applied as a filter.

[0006] Usually, filters formed of oxide ceramics are formed of monolithic ceramics made of the same material. Then, a plurality of pores are formed inside to form a filter.

[0007]

However, since the filter made of the monolithic ceramics described above has a structure in which a plurality of pores are formed inside, if the filter is used for a long period of time, the pore portion will be the starting point of destruction. And there is a problem that cracks occur. Then, once a crack is generated, the filter is formed from a ceramic material, so that the crack grows, and it has been difficult to suppress the growth of the crack.

On the other hand, in order to suppress the propagation of cracks, ceramic filters have been developed using ceramics having a long fiber length as a reinforcing material and having improved strength characteristics and fracture toughness.

The above-mentioned ceramics filter is constituted by impregnating ceramics into a preform formed of long fiber ceramics as a reinforcing material.

[0010] In such a filter, crack growth can be suppressed, but since the preform is formed inside the filter, the preform hinders the filtration process, and as a result, the filter performance is reduced. Had a problem.

Further, there has been no example in which the influence of the orientation method and weaving method of long fibers upon forming a preform on filter characteristics has been studied.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and provides a high-quality oxide ceramic filter having high strength characteristics and high fracture toughness, improved filter characteristics, and a method of manufacturing the same. The purpose is to provide.

[0013]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies in order to solve the above-mentioned object, and as a result, a long-fiber oxide ceramic has been used as a reinforcing material, and the inside and outside of the long fiber have been oxidized. A filter is formed by forming a matrix by impregnating with ceramics, and a filter membrane made of oxide ceramics is formed on the base to improve the strength characteristics and fracture toughness of the filter.
The inventors have found that the filter performance can be improved and a high-performance filter can be obtained, and the present invention has been completed.

That is, the oxide ceramics filter according to the present invention comprises a base material in which a long fiber-reinforced oxide ceramics is formed as a reinforcing material in a matrix made of oxide ceramics, and a matrix of the base material is formed on the base material. A filtration membrane is integrally formed from an oxide ceramic having a different component from the filtration ceramic, and the thickness of the filtration membrane is 200 μm.
m or less, and the O-ring strength is 30 MPa or less.

According to the present invention, since a filtration membrane is integrally formed on a substrate, a matrix component of the substrate and a component different from the substrate are provided between the substrate and the filtration membrane. By virtue of the sintering of the components of the filtration membrane, a vitreous material is formed, and the base material and the filtration membrane can be firmly bonded. Since the filtration membrane made of only the oxide ceramics is formed on the base material as described above, the formation of the reinforcing material can prevent the filter performance from lowering and improve the filter characteristics.

Although the thickness of the filtration membrane is specified to be 200 μm or less, if the thickness exceeds 200 μm, the pressure loss increases and the filter efficiency decreases. The pressure loss can be similarly reduced by setting the bulk density of the filter to 70% or less, and the filter efficiency can be improved.

Further, in the present invention, as an indicator of the breaking strength characteristic of the filter, an O-ring test
-The ring strength is specified as 30 MPa or less, but if the O-ring strength is higher than 30 MPa, the production cost rises and, furthermore, when a crack occurs, the crack growth cannot be effectively suppressed. .

Further, in the above oxide ceramic filter, it is desirable that the porosity of the substrate is 30% or more. The reason why the porosity of the base material is specified as 30% or more is that even if the pressure loss is reduced by changing the thickness of the filtration membrane, the pressure loss of the entire oxide ceramics filter increases if the porosity of the base material is low. This is because the filter performance deteriorates.

Further, by controlling the porosity of the filtration membrane, dust and the like can be efficiently removed. Therefore, the porosity of the filtration membrane is desirably 60% or more. If the porosity of the filtration membrane is lower than 60%, the pressure loss becomes too large, and excellent strength characteristics cannot be obtained.

In addition, the spherical resin is contained in the slurry for forming a filtration membrane.
By adding graphite and an organic binder and firing after the addition, the porosity of the filtration membrane can be controlled.

When a spherical resin and graphite are added to the slurry for forming a filtration membrane, it is possible to form a filtration membrane having a controlled pore size by controlling the size of the added substance. When a spherical resin is added, the pores formed are spherical, so that the strength of the filtration membrane does not decrease. In addition, when graphite is added, since it does not contain impurities, the chemical stability of the filtration membrane can be ensured.

Further, by controlling the amount of the organic binder to be added, the distance between the particles of the filtration membrane can be controlled. Since the pores formed by controlling the amount of the organic binder added are extremely fine, the strength of the filtration membrane does not decrease.

In the oxide ceramic filter of the above aspect, when the base material is cylindrical, the weaving direction of the fibers in the outermost layer of the elongated oxide ceramic is set to the circumferential direction of the base material. It is desirable to be within 5 °. By setting the weaving direction of the fibers within 5 °, the outermost layer of the base material can be flattened, thereby improving the bonding strength between the base material and the filtration membrane.

In the oxide ceramic filter, the base
The material matrix is 3Al₂O₃・ 2SiO₂, Al
₂O₃, Al₂O₃-YAG composite material, Al₂O₃-S
iC composite and 3Al₂O₃・ 2SiO₂-2Si
O₂・ Al₂O₃-CaZrO₃Any one of composite materials
It is desirable to be composed of oxide ceramics whose main component is a seed.
Good. In this way, the matrix of the substrate is mullite (3
Al₂O₃・ 2SiO ₂), Al₂O₃, Al₂O₃−
YAG composite material, Al₂O₃-SiC composite material and 3
Al₂O₃・ 2SiO₂-2SiO₂・ Al₂O₃-C
aZrO₃Use a material mainly composed of a composite material
Oxide ceramic with excellent chemical stability and environmental resistance
Filter can be obtained.

In particular, since mullite has a high melting point,
A filter applicable at high temperatures is obtained. Also, Al ₂ O
For _{3 -YAG (Al 5 Y 3 O} 13) composite material is a material having a high temperature _strength, Al ₂ O 3 -SiC composite material is a material having excellent high-temperature strength and thermal shock resistance,
An oxide ceramic filter having high temperature strength can be obtained. In _{addition, 3Al 2 O 3 · 2SiO 2} -2SiO 2
· _Al 2 _{O 3} -CaZrO 3 composite material, because they contain 2SiO ₂ · _{Al 2 O 3} is a relatively low melting point materials, high temperature firing is not required in the manufacturing process, the manufacturing cost can be reduced it can.

Further, the oxide ceramics of the above embodiment
In Ruta, the filtration membrane is Al₂O ₃, 3Al₂O₃・
2SiO₂, 3Al₂O₃・ 2SiO₂-2SiO₂・
Al ₂O₃-CaZrO₃Composite materials and ZrO₂No
Made of oxide ceramics containing at least one of the main components
It is desirable. Thus, the main component of the filtration membrane is Al₂O
₃, Mullite (3Al₂O₃・ 2SiO₂), 3Al₂
O₃・ 2SiO₂-2SiO₂・ Al₂O₃-CaZr
O₃Composite materials and ZrO₂One of the main components
To provide excellent chemical stability and environmental resistance
It becomes possible to construct a ceramic filter.

Since mullite (3Al ₂ O ₃ .2SiO ₂ ) has a high melting point, a ceramic filter usable up to high temperatures can be constructed. 3Al ₂ O ₃ · 2SiO ₂ -2Si
_{O 2 · Al 2 O 3 -CaZrO} 3 composites, because it contains 2SiO ₂ · _{Al 2 O 3} is a relatively low melting point materials, is possible to high temperature firing is not required manufacturing cost in the manufacturing process it can.

Further, in the oxide ceramic filter according to the above aspect, the oxide long fiber is made of Al ₂ O ₃ , 3Al
_{2 O 3 · 2SiO 2, Al} 2 O 3 -YAG composites, A
l ₂ O ₃ -SiO ₂ and it is preferably made of oxide ceramics as a main component any one of ZrO _2. As described above, when the main component of the oxide long fiber is any one of Al ₂ O ₃ , mullite, Al ₂ O ₃ —SiO ₂ and ZrO ₂ , the chemical stability of the oxide ceramic filter is improved. And environmental resistance can be improved.

[0029] In particular, mullite _{(3Al 2} O 3 · 2SiO
_{Since 2} ) has a high melting point, it can be used at high temperatures. Also, Al ₂ O ₃ —YAG (Al ₅ Y ₃ O
₁₃ ) Since the composite material is a fiber having excellent high-temperature strength, a ceramic filter having high strength at high temperatures can be constructed. Further, by using Al ₂ O ₃ —SiO ₂ as the main component, the manufacturing cost can be reduced. Further, according to ZrO ₂ , an oxide ceramics filter having high strength near room temperature can be obtained.

The method for manufacturing an oxide ceramic filter according to the present invention comprises the steps of weaving long fibers made of oxide ceramic to form a preform having an outermost layer flat, and impregnating the preform with oxide ceramic. Forming a substrate, applying an oxide ceramic material having a component different from that of the matrix onto the substrate to form a molded body, and firing the molded body in an air atmosphere And the following.

In the present invention, by flattening the outermost layer of the preform, the sintering strength between the base material and the filtration membrane can be improved to prevent peeling, thereby producing a high quality oxide ceramic filter. it can. Note that the sintering temperature of the molded body is preferably about 1200 ° C.

In the above-mentioned method for producing an oxide ceramic filter, it is desirable to weave long fibers by a filament winding method. According to the filament winding method, the fiber spacing of the preform can be made dense, and in particular, a ceramics filter having excellent strength characteristics can be produced. In the present invention, the filament winding method is particularly specified, but is not limited to this method.
It is also possible to apply the following braiding method or three-dimensional weaving.

In the braiding method, many fibers can be knitted at a time, and the control of the fiber angle is easy, so that the production cost can be reduced.

In addition, the three-dimensional weaving is capable of forming a shape at one time, and has excellent strength characteristics against peeling because the fibers are introduced in a direction perpendicular to the fiber peeling direction.

Further, in the above method for manufacturing an oxide ceramic filter, a cylindrical preform is produced,
It is desirable that the outermost layer of the preform be flat within 5 ° with respect to the circumferential direction of the base material.

In the present invention, by defining the fiber weaving direction in the outermost layer of the preform within 5 ° with respect to the circumferential direction of the base material, the resistance to breakage becomes highest. The reason for this is that if the weave angle of the fibers is greater than 5 °, cracks in the filtration membrane occur with lower strength.

[0037]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an oxide ceramic filter of the present invention and a method for manufacturing the same will be described with reference to FIGS.
This will be described with reference to FIG.

First Embodiment (FIGS. 1 to 7) In this embodiment, a hollow cylindrical filter made of oxide ceramics was manufactured by the following procedure, and the filter performance was evaluated.

First, a long fiber material was prepared by using a long fiber ceramic having Al ₂ O ₃ as a main component and B ₂ O ₃ and SiO _{2 as} subcomponents, and impregnating the resin with the long fiber ceramic.

Next, the long fiber material was wound around a mandrel, and a hollow cylindrical preform was formed by a filament winding method. The preform was obtained by flattening the outer peripheral surface. Specifically, the outer peripheral surface was flattened by setting the weaving angle of the long fiber material to 1 ° with respect to the circumferential direction of the mandrel. Things.

Then, the preform was impregnated with a mullite slurry containing mullite (3Al ₂ O ₃ .2SiO ₂ ), water and a dispersant to form a long fiber composite, and the long fiber composite was dried.

On the other hand, a slurry for a filtration membrane was prepared in which the main component was Al ₂ O ₃ and water and a dispersant were added.

A slurry for a filtration membrane was applied to the surface of the dried long fiber composite to obtain a molded product.

The molded body was fired at 1200 ° C. in an air atmosphere to produce a hollow cylindrical filter. The obtained hollow cylindrical filter has a base material reinforced by a long fiber mainly composed of alumina in a matrix mainly composed of mullite, and a thickness of 10 formed integrally on the substrate.
0 μm filtration membrane.

With respect to the obtained filter, the porosity (%) and the bulk density (%) of the substrate and the filtration membrane were measured.
The porosity was measured using a mercury poroximeter method. The bulk density indicates the ratio of the density of the obtained filter when the theoretical density of the densified ceramic is 100%. As a result, the porosity of the substrate in the filter was 60%, and the porosity of the filtration membrane was 60%.
%Met. The bulk density of the filter was 60%.

Further, the filter was subjected to a breaking strength test and a filter performance evaluation test.

The breaking strength test was performed by measuring the O-ring strength. The measurement conditions are inner diameter d, outer diameter D,
The filter is gripped from above and below the outer peripheral surface of a hollow cylindrical filter having a width L, a load P (20 MPa) is applied at a crosshead speed of 0.5 mm / min, and a stress σ (σ = (P × (D−d)) / (L × d ² )).

The filter performance evaluation test was conducted by passing a spherical resin having an average particle size of 20 μm through a filter and measuring the particle removal rate (%) per unit time before and after the filter. In the following examples, the test conditions were the same.

As a result of a breaking strength test and a filter performance evaluation test, the breaking strength was 20 MPa, and the particle removal rate was about 70%.

Next, according to Examples 1 to 8 shown below, filters in which the filter material, the thickness of the filtration membrane, and the like were variously changed were manufactured, and the performance of the filters was tested.

Example 1 (FIG. 1) In this example, a filter was manufactured by changing the matrix material of the base material.

Specifically, the main component of the matrix material
With Al₂O₃, Al₂O₃-YAG (Al₅Y₃O
₁₃) Composite material, Al₂O₃-SiC, 3Al₂O₃・
2SiO ₂-2SiO₂・ Al₂O₃-CaZrO₃Duplicate
Change to a material selected from any one of the composite materials
Ruta was prepared.

The obtained filter was subjected to a filter performance evaluation test. The result is shown in FIG.

As shown in FIG. 1, even when the matrix material of the base material was changed, the particle removal rate showed a high value of 70% or more, and the filter performance was good.

Example 2 (FIG. 2) In this example, a filter was manufactured by changing the material of the filtration membrane.

Specifically, the main component of the slurry for the filtration membrane is
3Al₂O₃・ 2SiO₂, ZrO ₂, 3Al₂O₃・
2SiO₂-2SiO₂・ Al₂O₃-CaZrO₃Duplicate
Change to one of the materials selected from
Ruta was prepared.

The obtained filter was subjected to a filter performance evaluation test. The result is shown in FIG.

As shown in FIG. 2, even when the material of the filtration membrane was changed, the particle removal rate showed a high value of 70% or more, indicating that the filter performance was excellent.

Example 3 (FIG. 3) In this example, a filter was manufactured by changing the material of the ceramic long fiber.

Specifically, the main component of the ceramic long fiber
To 3Al₂O₃・ 2SiO₂, Al ₂O₃−YAG (A
l₅Y₃O₁₃) Composite material, ZrO₂I want to be selected from
A filter was manufactured by changing one of the materials.

The obtained filter was subjected to a filter performance evaluation test. The result is shown in FIG.

As shown in FIG. 3, even when the material of the ceramic long fiber was changed, the particle removal rate showed a high value of 70% or more, and the filter performance was good.

Example 4 (FIG. 4) In this example, a filter was manufactured by changing the thickness of the filtration membrane.

Specifically, a filter was prepared in which the amount of the slurry for the filtration membrane was adjusted to change the thickness of the filtration membrane.

A filter performance evaluation test was performed on the obtained filter. FIG. 4 shows the results.

As shown in FIG. 4, the thickness of the filtration membrane was 200
When the particle size was not more than μm, the particle removal rate was as high as 70% or more and the filter performance was good. However, when the thickness of the filtration membrane exceeded 200 μm, the particle removal rate was reduced to 50% or less. As a result, the filter performance was significantly reduced.

Embodiment 5 (FIGS. 5 and 6) In this embodiment, a filter for a filtration membrane having a different porosity by changing the slurry concentration was manufactured. A filter performance evaluation test was performed on this filter. The result is shown in FIG.

As shown in FIG. 5, the porosity of the filtration membrane was 60
% Or more, the particle removal rate was as high as 70% or more and the filter performance was good, but the porosity of the filtration membrane was 60%.
%, It was found that the particle removal rate was reduced and the filter performance was reduced.

Further, a filter was prepared by adding 40% of graphite and an organic binder to the slurry for the filtration membrane to change the porosity of the filtration membrane. A filter performance evaluation test was performed on this filter. The result is shown in FIG.

As shown in FIG. 6, the porosity of the filtration membrane can be increased to 60% or more by adding graphite or an organic binder to the filtration membrane slurry.
Filter performance could be improved.

Example 6 (FIG. 7) In this example, a filter was manufactured by changing the porosity of the substrate, and a filter performance evaluation test was performed. The result is shown in FIG.
Shown in

As shown in FIG. 7, the porosity of the substrate was 30%.
Although it was possible to remove particles even in the case described above, it was possible to increase the particle removal rate to about 70% by setting the porosity of the base material to 60% or more.

Embodiment 7 (FIG. 8) In this embodiment, a filter was manufactured by changing the bulk density of the filter, and a filter performance evaluation test was performed. FIG. 8 shows the result.

As shown in FIG. 8, by setting the bulk density of the filter to 70% or less, it was possible to increase the particle removal rate to a high value of about 70% or more.

Example 8 (FIG. 9) In this example, four types of filters were manufactured in which the breaking strength of the filter, that is, the O-ring strength was changed in the range of 10 to 40 MPa. The filters were evaluated for crack propagation resistance.

The crack growth resistance was evaluated by first applying a stress to a ceramic test piece formed from the same material (monolithic material) having pores therein, and measuring the length of the crack generated when the stress was applied. did. Next, the same stress as that applied to the ceramic test piece was applied to the filter of this example, and the length of the crack generated at this time was measured. The crack length of the filter of the present embodiment when the crack length of the ceramic test piece formed of a monolithic material is 1 is converted, and the numerical value is used as the crack resistance. FIG. 9 shows the result.

As shown in FIG. 9, the O-ring strength is 30
By setting the pressure to not more than MPa, the crack propagation resistance was a value of 4.0 or more, and it was possible to suppress the crack propagation as compared with a ceramics filter formed of a monolithic material.

As described in Examples 1 to 8 above, according to the present embodiment, the porosity of the material forming the filter, the base material and the filtration membrane are within the scope of the present invention. In addition, an oxide ceramic filter having excellent filter performance can be obtained while improving strength characteristics and fracture toughness.

Second Embodiment (FIGS. 10 to 13) In this embodiment, as shown in the following Examples 9 and 10, a filter was manufactured by changing the method of manufacturing a preform for reinforcing a base material. .

Example 9 (FIG. 10) In this example, a filter was manufactured by using a filament winding method. Note that the manufacturing procedure is almost the same as the manufacturing method shown in the first embodiment.

The difference from the first embodiment is that the weaving angle (°) of the long fiber material on the outer peripheral surface is changed when the long fiber material is wound around the mandrel.

Specifically, the weaving angle of the long fiber of the outermost layer is 3 °, 5 °, 7 °, 1 ° with respect to the circumferential direction of the mandrel.
Preforms were manufactured by changing the angle to 0 °, and various filters using the preform as a reinforcing material were manufactured.

The initial breaking strength of each of the above filters was measured. The initial breaking strength was the same as the measurement condition of the breaking strength test shown in the first embodiment. The result is shown in FIG.

As shown in FIG. 10, by setting the weave angle of the fiber in the outermost layer of the preform to 5 ° or less,
The initial breaking strength could be about 4 MPa or more, and the breaking strength characteristics could be improved.

Embodiment 10 (FIGS. 11 to 13) In this embodiment, a preform is formed by using a filament winding method, a cloth lamination method, a braiding method or a three-dimensional weaving method, and the preform is used as a reinforcing material. Each of the prepared filters was manufactured.

First, the breaking strength of the filter manufactured by the cloth lamination method and the filter manufactured by the filament winding method were measured, and the breaking strengths of both filters were compared. The conditions for measuring the breaking strength were the same as in the first embodiment. The result is shown in FIG.

As shown in FIG. 11, the filter using the filament winding method had a higher breaking strength and a better breaking strength characteristic than the cloth lamination method.

Next, the peel strength of the filter manufactured by the cloth lamination method and the filter manufactured by the three-dimensional weaving method were measured, and the peel strength of both filters was compared. The peel strength was 1 cm square, using a 5 mm thick test piece,
The strength at the time of pulling in a direction perpendicular to the fiber laminating direction at a crosshead speed of 0.5 mm / min and peeling was measured. The result is shown in FIG.

As shown in FIG. 12, the filter made by three-dimensional weaving has a peel strength about twice that of the filter made by the cloth lamination method, and the filter made by three-dimensional weaving has According to this, the strength characteristics could be improved.

Finally, the manufacturing costs of the filter manufactured by the cross lamination method and the filter manufactured by the braiding method were compared. In addition, when the manufacturing cost by the cross lamination method is set to 1, the manufacturing cost by the braiding method is shown by numerical values. The result is shown in FIG.

As shown in FIG. 13, the filter manufactured by using the blading method was able to reduce the cost as compared with the cross lamination method.

Therefore, according to the present embodiment, by setting the weaving angle of the long fibers of the outermost layer of the preform to 5 ° or less, the surface of the base material can be flattened. Sintering strength can be improved to prevent separation of the two. Therefore, the reliability of the oxide ceramic filter can be improved.

Further, since the filtration membrane is formed on the surface of the base material and the filtration membrane is formed of monolithic ceramics in which no reinforcing material is introduced, the characteristics of the filter performance can be improved. In this embodiment, the cylindrical preform is formed by the filament winding method. However, for example, when the preform is formed by the cross lamination method or the three-dimensional weaving method, the preform may be formed in a rectangular parallelepiped shape. The shape is not limited to a cylindrical shape.

[0094]

As described above, according to the oxide ceramic filter and the method of manufacturing the same of the present invention, a high quality oxide ceramic having excellent filter performance and improved strength characteristics and fracture toughness is provided. A filter can be provided.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a first embodiment of the present invention, and is a diagram illustrating a relationship between the type of an oxide matrix of a substrate and filter performance.

FIG. 2 is a diagram showing the relationship between the type of filtration membrane and filter performance.

FIG. 3 is a diagram showing a relationship between types of long fiber ceramics and filter performance.

FIG. 4 is a diagram showing a relationship between the thickness of a filtration membrane and filter performance.

FIG. 5 is a diagram showing the relationship between the porosity of the filtration membrane and the filter performance.

FIG. 6 is a diagram showing a relationship between a filtration membrane slurry additive substance and a porosity of the filtration membrane.

FIG. 7 is a diagram showing the relationship between the porosity of a substrate and filter performance.

FIG. 8 is a diagram showing the relationship between the bulk density of a filter and filter performance.

FIG. 9 is a diagram showing a relationship between O-ring strength and crack propagation resistance of the filter.

FIG. 10 is a diagram showing the relationship between the fiber weave angle of the outermost layer of the preform and the initial breaking strength of the filter.

FIG. 11 is a diagram showing a relationship between a fiber weaving method of a preform and a filter breaking strength.

FIG. 12 is a diagram showing a relationship between a fiber weaving method of a preform and a peel strength of a filter.

FIG. 13 is a diagram showing the relationship between the fiber weaving method of the preform and the manufacturing cost.

Claims (9)

[Claims] 1. A substrate comprising a matrix of oxide ceramics and an oxide ceramic having a long fiber as a reinforcing material formed thereon, and an oxide ceramic having a component different from the matrix component of the substrate on the substrate. The filtration membrane is integrally formed by sintering, and the thickness of the filtration membrane is 200 μm.
m, and the O-ring strength is 30 MPa or less. 2. The oxide ceramic filter according to claim 1, wherein the porosity of the base material is 30% or more, and the porosity of the filtration membrane is 60% or more. 3. The oxide ceramic filter according to claim 1, wherein the base material is cylindrical.
An oxide ceramic filter, wherein the weaving direction of the fiber in the outermost layer of the oxide ceramic having a long fiber is within 5 ° with respect to the circumferential direction of the base material. 4. The oxide ceramic filter according to claim 1, wherein the matrix is 3Al ₂ O ₃ .2SiO ₂ , Al ₂ O ₃ , Al ₂ O.
_3-YAG composite _material, Al ₂ O 3 -SiC composite material and _{3Al 2 O 3 · 2SiO 2 -2SiO} 2 · Al 2 O 3
-CaZrO ₃ oxide ceramic filter, comprising the oxide ceramic mainly composed of any one of the composite material. 5. The method according to claim 1, wherein
In the oxide ceramic filter, the filtration membrane is made of Al.
₂O₃, 3Al₂O₃・ 2SiO₂, 3Al ₂O₃・ 2
SiO₂-2SiO₂・ Al₂O₃-CaZrO₃composite
Material and ZrO₂Oxidation with any one of the main components
Oxide ceramics made of oxide ceramics
Filter. 6. The oxide ceramic filter according to claim 1, wherein the long oxide fibers are Al ₂ O ₃ , 3Al ₂ O ₃ .2SiO ₂ , Al ₂ O.
_3-YAG composite _material, Al ₂ O 3 -SiO ₂ and Zr
An oxide ceramics filter comprising an oxide ceramic containing any one of O ₂ as a main component. 7. A step of weaving long fibers made of an oxide ceramic to form a preform having an outermost layer flat, a step of impregnating the preform with an oxide ceramic to form a base material, An oxide comprising: a step of applying an oxide ceramic material having a component different from the matrix component onto a base material to form a molded body; and a step of firing the molded body in an air atmosphere. Manufacturing method of ceramics filter. 8. The method for manufacturing an oxide ceramic filter according to claim 7, wherein the long fibers are woven by a filament winding method. 9. The method for manufacturing an oxide ceramic filter according to claim 8, wherein a cylindrical preform is produced, and a fiber woven direction of an outermost layer of the preform is 5 ° with respect to a circumferential direction of the base material. A method for producing an oxide ceramics filter, characterized in that: