JP2002177861A5 - - Google Patents
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- Publication number
- JP2002177861A5 JP2002177861A5 JP2000383508A JP2000383508A JP2002177861A5 JP 2002177861 A5 JP2002177861 A5 JP 2002177861A5 JP 2000383508 A JP2000383508 A JP 2000383508A JP 2000383508 A JP2000383508 A JP 2000383508A JP 2002177861 A5 JP2002177861 A5 JP 2002177861A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000383508A JP4765166B2 (ja) | 2000-12-18 | 2000-12-18 | 塗液の塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000383508A JP4765166B2 (ja) | 2000-12-18 | 2000-12-18 | 塗液の塗布装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002177861A JP2002177861A (ja) | 2002-06-25 |
| JP2002177861A5 true JP2002177861A5 (ru) | 2008-02-07 |
| JP4765166B2 JP4765166B2 (ja) | 2011-09-07 |
Family
ID=18851153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000383508A Expired - Fee Related JP4765166B2 (ja) | 2000-12-18 | 2000-12-18 | 塗液の塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4765166B2 (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010171172A (ja) * | 2009-01-22 | 2010-08-05 | Eisaku Hibi | 部品保持治具及び、該部品保持治具を用いた負圧吸着装置 |
| JP6765926B2 (ja) * | 2016-10-07 | 2020-10-07 | 株式会社ディスコ | 加工装置 |
| CN106733495A (zh) * | 2016-12-22 | 2017-05-31 | 重庆淳祥电子科技有限公司 | 一种带供油墨系统的传送装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09252043A (ja) * | 1996-03-14 | 1997-09-22 | Nikon Corp | 位置決め方法 |
| JP3646747B2 (ja) * | 1995-11-28 | 2005-05-11 | 東レ株式会社 | 塗布装置および塗布方法並びにカラーフィルタの製造装置およびその製造方法 |
| JPH10233163A (ja) * | 1996-12-17 | 1998-09-02 | Toray Ind Inc | プラズマディスプレイの製造方法および製造装置 |
| JPH1157533A (ja) * | 1997-08-14 | 1999-03-02 | Able:Kk | 薄膜形成装置用塗布ノズルおよびこの塗布ノズルを用いた薄膜形成装置 |
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2000
- 2000-12-18 JP JP2000383508A patent/JP4765166B2/ja not_active Expired - Fee Related