JP2002176011A - Tape adhering machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small-sized tape adhering machine at a low cost. SOLUTION: The tape adhering machine rotates and moves a moving wheel 21 by a combination of a forward rotation, a reverse rotation and a stop of each of a first drive wheel 23 and a second drive wheel 26, and drives a release roller 18. The machine further drives the wheel 23, the wheel 26, drives an adhering roller 17 and drives feeding threads 32 by suitably dividing an output of one motor by a clutch mechanism (not shown).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tape attaching machine for attaching a semiconductor wafer to an adhesive tape.

[0002]

2. Description of the Related Art Conventionally, before a scribe (dicing) step of a semiconductor wafer, a step of attaching a semiconductor wafer and a frame on a ring to an adhesive tape has been performed. As an apparatus for automating this step, For example, an apparatus described in JP-A-1-207943 has been proposed. In the device described in JP-A-1-207943,
By appropriately driving the sticking roller and the peeling roller, tape sticking and unnecessary tape peeling can be automatically performed.

[0003]

However, in the above-described conventional apparatus, actuators such as a motor and an air cylinder are used to perform operations such as movement of a sticking roller, rotation of a peeling roller, and movement of a peeling roller. It has to be provided for each operation, and there is a problem that the device becomes large and the manufacturing cost is high.

An object of the present invention is to provide a small and inexpensive tape sticking device.

[0005]

The present invention solves the above-mentioned problems by the following means. In addition, in order to make it easy to understand, description is given with reference numerals corresponding to the embodiment of the present invention, but the present invention is not limited to this. That is, the invention of claim 1 provides the tape (50) having an adhesive property on one side from the non-adhesive surface side of the tape (50) to which the tape is attached.
, 42) to the application roller (1
7) cutting means (60) for cutting the tape stuck to the member to be stuck into a stuck shape; a peeling roller (18) for peeling off unnecessary portions of the tape after cutting; Tape sticking comprising: a pair of gripping rollers (19) for gripping the tape sandwiching the tape; and a roller drive unit (20) for rotating the peeling roller and moving the tape in a direction along the tape feeding direction. The roller drive unit is provided coaxially and integrally with the peeling roller, and is rotatably driven by a driving wheel (21) that is rotatable and movable in a direction along the tape feeding direction. A first driving wheel (23), a first driven wheel (24) provided in a direction along the tape feeding direction with respect to the first driving wheel, and the first driving wheel and the first driving wheel. The first on the first driven vehicle A wrapping conductive member (25), a second drive wheel (26) that rotationally drives by obtaining a driving force, and a second drive wheel provided in a direction along the tape feeding direction with respect to the second drive wheel. 2 driven wheels (27), and a second winding conductive member (28) mounted on the second driving wheel and the second driven vehicle, wherein the first winding conductive member comprises: Being hung on the moving vehicle, the second winding conductive member is hung at a position substantially rotationally symmetric with a position of the moving vehicle on which the first winding conductive member is hung. It is a tape sticking machine.

According to a second aspect of the present invention, there is provided a sticking roller for pressing the tape against the member to be stuck from the non-adhesive side of the tape having one-sided adhesive, and sticking the tape to the member to be stuck. Cutting means for cutting the tape into an affixed shape, a peeling roller for peeling off unnecessary portions of the tape after cutting, a gripping roller paired with the affixing roller to grip and hold the tape, A roller driving unit that rotates and moves in a direction along the tape feeding direction, wherein the roller driving unit is provided coaxially and integrally with the bonding roller, and rotates and rotates the tape. A moving vehicle that can move in a direction along the tape feeding direction, a first driving wheel that rotates by obtaining driving force, and a direction that is in the direction along the tape feeding direction with respect to the first driving wheel. Provided A first driven vehicle, a first driving vehicle and a first wrapping conductive member mounted on the first driven vehicle, a second driving vehicle that is driven to rotate by obtaining a driving force, and A second driven wheel provided in a direction along the tape feeding direction with respect to the driving wheel, and a second wrapping transmission member mounted on the second driven wheel and the second driven wheel Wherein the first winding conductive member is hung on the moving vehicle, and the second winding conductive member is a position where the first winding conductive member of the moving vehicle is hung. A tape application machine characterized in that the tape application machine is set at a position that is substantially rotationally symmetric.

[0007] The third aspect of the present invention is the first or second aspect.
3. The tape applying machine according to claim 1, wherein the roller driving unit (2)
0) is characterized in that it has a clutch mechanism that divides the output from the same drive source and arbitrarily combines forward rotation, reverse rotation, and stop of the first and second driving wheels (23, 26). It is a tape pasting machine.

[0008] The invention of claim 4 is the first to third aspects of the present invention.
The tape applying machine according to any one of the above, further comprising: a holding unit (30) that holds the members to be applied (41, 42) and moves between a tape applying position and a take-out position, and the clutch mechanism includes: The sticking roller (17) or the peeling roller not coaxial with the moving vehicle (21);
An output from the driving source is also separated from the holding unit (30).

[0009] The invention of claim 5 is the invention of claims 1 to 4.
In the tape pasting machine according to any one of the above, the moving vehicle (21), the first and second driving wheels (23,
26), driven wheels (24, 27), wrapping conductive members (2
5, 28) is a tape applying machine characterized by a toothed belt wheel and a toothed belt, a chain gear and a chain, or a pin-on gear and a rack.

[0010]

Embodiments of the present invention will be described below in more detail with reference to the drawings. FIG.
1 is a diagram showing an embodiment of a tape applying machine according to the present invention. Note that X, Y, and Z in FIG. 1 represent coordinate axes, and CW
(Clockwise) and CCW (counterclockwise) represent rotation directions on the XY plane. The tape applying machine according to the present embodiment includes a supply roller 11 and a residue winding roller 1.
2, separator take-up roller 13, guide roller 1
4, a tape feed mechanism having a sticking roller 17, a peeling roller 18, and a gripping roller 19;
Guide roller 22, first driving wheel 23, first driven wheel 2
4, a roller drive unit 20 having a first belt 25, a second drive wheel 26, a second driven wheel 27, and a second belt 28
And a holding section 30 having a table 31 and a feed screw 32.
Is a device for sticking only a predetermined range.

The supply roller 11 is a roller around which an unused tape 50A is wound, and is provided with an appropriate rotation resistance, so that it does not rotate carelessly.

The residue winding roller 12 is a roller for winding a residue tape from which a necessary portion has been removed, and is applied with a very weak rotation force in the winding direction so that the residue tape 50D is not loosened. .

The separator winding roller 13 is a roller for winding the separator 50C peeled off from the unused tape 50A.

The guide rollers 14, 15, 16 are rollers for guiding the tapes 50A to 50D to predetermined positions, and are provided rotatably.

The sticking roller 17 is a roller for pressing the tape 50B against the semiconductor wafer 41 and the frame 42 to stick the tape 50B. The sticking roller 17 is rotatably provided, and can move in the transport direction (X-axis direction) of the tape 50 by receiving a driving force from a clutch mechanism (not shown).

The peeling roller 18 is a roller for peeling off the residue tape 50D attached to the frame 42, and rotates and moves integrally with the moving wheel 21 via the shaft 18a.

The gripping roller 19 is a roller pressed against the peeling roller 18 by urging means (not shown) with the tape 50 interposed therebetween, and rotates and moves following the rotation and movement of the peeling roller 18.

The moving wheel 21 is a belt wheel that is rotatable integrally with the peeling roller 18, and includes a first wheel and a second wheel described later.
Of the first and second belts 25 and 28, and rotates in the X-axis direction according to the moving direction of the first and second belts 25 and 28. Note that the first and second belts 25 and 28 used in the present embodiment are toothed belts, and therefore, the moving vehicle 21, first and second driving wheels 23 and 26, and first and second driving wheels 23 and 26 described below. Second driven vehicle 2
4, 27 are provided with teeth corresponding to the tooth shape of the belt.

The guide roller 22 is a roller that ensures that the first and second belts 25 and 28 are hung on the moving vehicle 21. The guide roller 22 has no teeth because it is in contact with the side of the belt where there are no teeth.

The first driving wheel 23 and the second driving wheel 26
Is a belt wheel that is supported so as to rotate by obtaining a driving force individually from a clutch mechanism (not shown).

First driven vehicle 24 and second driven vehicle 27
Is a belt wheel having the same shape as the first driving wheel 23 and the second driving wheel 26. A line connecting the rotation centers of the first driving wheel 23 and the first driven wheel 24, and a second driving wheel 26
A line connecting the rotation center of the second driven wheel 27 and the second driven wheel 27 is disposed so as to be substantially parallel to the X-axis, and they have different positions in the Y-axis direction.

The first belt 25 is a toothed wrapping conductive member that is wrapped around the first driving wheel 23 and the first driven wheel 24. On the other hand, the second belt 28 is
And a toothed wrapping conductive member that is wrapped around the second driven wheel 27. The first belt 25 and the second belt 28
Are hung on the moving vehicle 21, the first belt 25 is hung on the + Y side of the moving vehicle 21, and the second belt 28 is hung on the −Y side of the moving vehicle 21.

FIG. 2 is a view for explaining the basic operation of the roller driving section 20. The roller drive unit 20 can control the rotation of the first and second driving wheels 23 and 26 to cause the moving vehicle 21 to perform three types of eight kinds of operations.

FIG. 2A shows the first and second driving wheels 2.
3 and 26 are rotated in different directions. In this case, the moving vehicle 21 moves only without rotating. FIG.
In (a), the first driving wheel 23 rotates in the CW direction,
Since the second driving wheel 26 is rotating in the CCW direction,
The moving vehicle 21 moves in the + X direction. In this type of operation, if the directions of rotation of the first and second driving wheels 23 and 26 are exchanged, the moving direction of the moving vehicle 21 becomes the −X direction, so that two types of operations are possible.

FIG. 2B shows the first and second driving wheels 2.
In this case, one of the wheels 3 and 26 is stopped and the other is rotated. In this case, the moving vehicle 21 moves while rotating. In FIG. 2B, since the first driving vehicle 23 is stopped and the second driving vehicle 26 is rotating in the CCW direction, the moving vehicle 21 rotates in the + X direction while rotating in the CCW direction. Make the move. This type of operation includes a combination of which of the first and second driving wheels 23 and 26 is stopped and a direction of rotation in which direction. All combinations (four ways) of direction and moving direction can be performed.

FIG. 2C shows the first and second driving wheels 2.
3 and 26 are rotated in the same direction. In this case, the moving vehicle 21 only rotates without moving. FIG.
In (c), the first and second driving wheels 23 and 26 are CCW
Therefore, the mobile vehicle 21 rotates in the CCW direction without moving on the spot. This kind of behavior
If the rotation directions of the first and second driving wheels 23 and 26 are changed, the rotation direction of the moving vehicle 21 becomes the CW direction, so that two operations are possible.

The table 31 is a table for holding the semiconductor wafer 41 and the frame 42 by suction, and is moved by a feed screw 32 between the tape attaching position and the take-out position in the Z-axis direction.

The feed screw 32 is a feed screw that rotates by receiving a driving force from a clutch mechanism that applies a driving force to the attaching roller 17 and the first and second driving wheels 23 and 26.

In the present embodiment, the clutch mechanism is a mechanism that divides the rotational force of one motor (not shown) into a plurality of outputs by belt driving and includes a clutch for selecting an output shaft. Note that the clutch mechanism is not limited to the belt drive, and may be configured using a gear train.

The semiconductor wafer 41 is a wafer that has been subjected to a so-called pre-process, and is a wafer before scribing is performed.

The frame 42 is a frame for holding the semiconductor wafer 41 attached to the tape 50 in a later step.

The tape 50 is an adhesive tape. In an unused state (50A), a separator 50C is attached to the adhesive surface.

(Tape Pasting Operation) FIGS. 3 and 4 are diagrams for explaining the tape pasting operation. 3 and 4 show a series of operations, and FIGS. 3 (a) to 3 (d) to 4
The operation proceeds in the flow from (e) to FIG. 4 (h). Hereinafter, the tape sticking operation of the tape sticking machine according to the present embodiment will be described with reference to FIGS. In addition, the peeling roller 1
Since the rotation and movement of 8 are performed by the operation of the roller driving unit 20 described above, the description of the operation of this portion will be omitted.

FIG. 3A shows a state in which the previous tape attaching operation has been completed and the table 31 has been retracted to the take-out position. In this state, the wafer 4 is
1 and the frame 42 are set and sucked. At this time, the peeling roller 18 is rotated in the CCW direction on the spot to return the position of the tape 50 by a predetermined amount. This is an operation for narrowing the interval P after punching shown in FIG. 1 and preventing waste of the tape.

Next, + X without rotating the peeling roller 18
(FIG. 3B). At this time, since the peeling roller 18 is not rotating, the peeling roller 18 and the holding roller 19 move while holding the tape 50. At this time, the attaching roller 17 also moves in the + X direction.

The peeling roller 18 and the sticking roller 17 have + X
When the movement to the predetermined position at the end is completed, the table 31 on which the wafer 41 and the frame 42 are set moves to the sticking position by the rotation of the feed screw 32 (FIG. 3C).

When the movement of the table 31 is completed, the sticking roller 17 moves in the -X direction, and sticks the tape 50 to the wafer 41 and the frame 42 [FIG.
(D)]. When the movement of the sticking roller 17 is started (FIG. 3C), since the tape 50 is slackened,
The peel roller 18 is rotated in the CW direction for a predetermined time to remove slack.

When the application roller 17 moves to the -X end and the application is completed, the cutter 60 as the cutting means moves from the + Y direction, and cuts the tape 50 into a circular shape on the frame 42 [FIG. )]. In this embodiment, the cutter 60 is driven by air.

When the cutting is completed, the cutter 60 retreats in the + Y direction, and the sticking roller 17 moves in the + X direction [FIG.
(F)]. At this time, the affixing roller 17 again applies the tape 5
0 is pressed against the wafer 41 and the frame 42, and the movement ends at the + X end [FIG. 4 (g)].

Finally, the peeling roller 18 moves in the −X direction while rotating in the CW direction, and
Also moves in the -X direction to peel off the residue tape 50D [FIG. 4 (h)]. At this time, since the application roller 17 advances while pressing the wafer 41 and the frame 42, the residue tape 50D can be surely peeled off without the wafer 41 and the frame 42 coming off the table 31.

According to the present embodiment, the moving wheel 21, the guide roller 22, the first driving wheel 23, the first driven wheel 24, the first belt 25, the second driving wheel 26, the second driven wheel 2
7. Since the roller driving unit 20 having the second belt 28 is used, the rotation and movement of the peeling roller 18 can be controlled only by controlling the rotation of the first and second driving wheels 23 and 26. It can be small and inexpensive. Further, the output of one motor is output to the first and second driving wheels 23 and 26.
Since the clutch mechanism is provided to output the rotation separately for the rotation of the attachment roller 17 and the rotation of the feed screw 32, the size and cost can be further reduced.

(Modifications) Various modifications and changes are possible without being limited to the above-described embodiments, and these are also within the equivalent scope of the present invention. For example, in the present embodiment, the example in which the roller driving unit 20 uses the toothed belt has been described. However, the invention is not limited thereto, and a chain gear and a chain may be used, or a pinion gear and a rack may be used.

In the present embodiment, the peeling roller 1
8 is driven by a roller driving unit 20 and the gripping rollers 19 are driven.
Has shown an example in which the tape 50 is gripped between the peeling roller 18, but the present invention is not limited to this. The sticking roller 17 is driven by a roller driving unit, and the gripping roller 19 holds the tape 50 between the sticking roller 17. You may hold it.

[0044]

As described above in detail, according to the present invention, the moving vehicle, the first driving vehicle, the first driven vehicle, the first winding conduction member, the second driving vehicle, the second driving vehicle, and the like. The operation of the peeling roller or the sticking roller is performed by the driven wheel and the roller drive unit having the second winding conductive member, so that the tape sticking machine can be made small and inexpensive.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of a tape applying machine according to the present invention.

FIG. 2 is a diagram illustrating a basic operation of a roller driving unit 20.

FIG. 3 is a diagram illustrating a first half of a tape attaching operation.

FIG. 4 is a diagram illustrating the latter half of the tape attaching operation.

[Explanation of symbols]

 REFERENCE SIGNS LIST 11 supply roller 12 residue take-up roller 13 separator take-up roller 14, 15, 16 guide roller 17 attaching roller 18 peeling roller 19 gripping roller 21 moving wheel 21 22 guide roller 23 first drive wheel 24 first driven wheel 25 first 1 belt 26 second driving wheel 27 second driven wheel 28 second belt 31 table 32 feed screw 41 semiconductor wafer 42 frame 42 50 tape

Claims (5)

[Claims] 1. A sticking roller that sticks the tape by pressing the tape against a member to be stuck from a non-adhesive side of a tape having adhesiveness on one side, and a shape in which the tape stuck to the member to be stuck is stuck. Cutting means for cutting the tape, an exfoliating roller for exfoliating unnecessary portions of the tape after cutting, a gripping roller paired with the exfoliating roller to grip and hold the tape, rotation of the exfoliating roller and rotation of the tape. A roller driving unit that moves in a direction along the feeding direction, wherein the roller driving unit is provided coaxially and integrally with the peeling roller, and rotates along the feeding direction of the tape. Moving vehicle that can move in a direction, a first driving vehicle that rotates by obtaining a driving force, and a first driven member that is provided in the direction along the tape feeding direction with respect to the first driving vehicle. car A first winding conduction member hung on the first driving wheel and the first driven wheel; a second driving wheel rotatably driven by obtaining a driving force; and a second driving wheel. A second driven wheel provided in a direction along the tape feeding direction, and a second wrapping conductive member wound on the second drive wheel and the second driven wheel. The first wrapping conductive member is wrapped around the moving vehicle, and the second wrapping conductive member is connected to the first
A tape-applying machine, which is hung at a position substantially rotationally symmetric with respect to the position at which the wrapping conductive member is hung. 2. A sticking roller for pressing the tape against the member to be stuck from the non-adhesive side of the tape having an adhesive property on one side, and a sticking shape of the tape stuck to the member to be stuck. Cutting means for cutting the tape, a peeling roller for peeling off unnecessary portions of the tape after cutting, a gripping roller paired with the sticking roller and holding the tape with the tape in between, a rotation of the sticking roller, and a rotation of the tape. A roller driving unit that moves in a direction along the feeding direction, wherein the roller driving unit is provided coaxially and integrally with the sticking roller, and rotates and moves in the tape feeding direction. A movable vehicle that can move in the direction along the first direction, a first driving vehicle that rotates and obtains a driving force, and a first vehicle that is provided in the direction along the tape feed direction with respect to the first driving vehicle. Driven car A first winding conduction member hung on the first driving wheel and the first driven wheel; a second driving wheel rotatably driven by obtaining a driving force; and a second driving wheel. A second driven wheel provided in a direction along the tape feeding direction, and a second wrapping conductive member wound on the second drive wheel and the second driven wheel. The first wrapping conductive member is wrapped around the moving vehicle, and the second wrapping conductive member is connected to the first
A tape-applying machine, which is hung at a position substantially rotationally symmetric with respect to the position at which the wrapping conductive member is hung. 3. The tape pasting machine according to claim 1, wherein the roller driving unit divides an output from the same driving source to rotate the first and second driving wheels forward and backward, A tape applying machine, characterized by having a clutch mechanism for stopping and arbitrarily combining. 4. One of claims 1 to 3
The tape pasting machine according to any one of the preceding claims, further comprising: a holding unit that holds the member to be pasted and moves between a tape pasting position and a take-out position, wherein the clutch mechanism is not coaxial with the moving vehicle. Wherein the output from the drive source is also divided into the roller or the peeling roller and the holding unit. 5. The method according to claim 1, wherein:
In the tape pasting machine according to the item, the moving wheel, the first and second driving wheels, driven wheels, the winding conductive member are a toothed belt wheel and a toothed belt, or
A chain gear and a chain, or a pin-on gear and a rack.