JP2002174642A - Inspection probe and inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make the life longer and facilitate narrowing of an inspection probe in an inspection probe showing little attenuation of an electric signal. SOLUTION: A pressing member 5 lying between an arrowhead 3 and a coil spring S1 and energized toward a socket 1 by a rear end part 4 has a sliding surface 5e in surface contact with an inner periphery of the socket 1 and an end surface 5a inclined in an axial direction. The rear end part 4 of the arrowhead 3 has a tapered surface 4a keeping line contact with the end surface 5a. The end surface 5a of the pressing member 5 abuts against the tapered surface 4a of the rear end part 4 inclined in the axial direction, and the pressing member 5 presses the rear end part 4 of the arrowhead 3 pushed by the coil spring S1, so that the pressing member 5 is pushed against the inner periphery of the socket 1 by pressing of the end surface 5a and the tapered surface 4a.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a chip component, an LS
The present invention relates to an inspection probe used for extracting an electric signal from a terminal of an electronic component such as an LCD or an LCD and performing an electrical continuity inspection and the like, and an inspection apparatus provided with the inspection probe.

[0002]

2. Description of the Related Art Conventionally, an inspection apparatus provided with a pin contact type inspection probe has been used for extracting and inspecting an electrical signal from a terminal of an electronic component such as a chip component, an LSI, and an LCD.

FIG. 7 is a diagram showing an example of a conventional inspection probe and an inspection apparatus. The inspection device D4 shown in FIG. 7 includes an insulating block C4 in which a holding hole 10 is formed, and an inspection probe A4 is arranged in the holding hole 10. The inspection probe A4 is provided with the holding hole 1
0, a conductive and cylindrical sleeve 11 fitted inside
And a cylindrical conductive socket 12 fitted inside the sleeve 11.

A rear end 13a of an arrowhead 13 serving as a plunger is slidably provided in the socket 12 in the axial direction (the direction of arrow A in the figure). Has a size that does not fall out of the socket 12. The end face 13b of the rear end 13a is a plane perpendicular to the axial direction, and a contracted coil spring S4 is installed between the end face 13b and the rear end of the socket 12. The arrowhead 13 is made of a conductive member.

However, when conducting an electrical continuity test or the like using the test probe A4 shown in FIG.
No. 4 had a long electric resistance value of 3 to 5 mm and had a problem that an electric signal from a terminal of an electronic component was attenuated. Further, the contact between the rear end portion 13a of the arrowhead 13 and the inner periphery of the socket 12 lacks stability.

FIG. 8 is a diagram showing an example of a conventional improved inspection probe and inspection apparatus. Inspection device D5 shown in FIG.
Has been developed and put to practical use in order to solve the problem of the inspection device D4 in FIG. This inspection device D5
In the inspection probe A5, the end face 13t of the rear end portion 13a of the arrowhead 13 is a plane inclined with respect to the axial direction (the direction of the arrow A in the figure). Further, a ball 14 which is a metal ball is provided between the end face 13t and the coil spring S4.

[0007] With the configuration of FIG.
When the ball 14 is pressed at t, the ball 14 is pressed against the inner periphery of the socket 12 (this mechanism is called a bias mechanism). As a result, the electric signal from the terminal of the electronic component flows from the rear end 13a of the arrowhead 13 to the socket 12 almost without passing through the coil spring S4, so that the attenuation of the electric signal is prevented. Moreover, the ball 14
And the inner periphery of the socket 12 is stable, so that the electric resistance value is also stable.

[0008]

However, the bias mechanism shown in FIG. 8 has a disadvantage that the ball 14 is in point contact with the inner periphery of the socket 12 and the rear end 13a of the arrowhead 13, so that it is easily worn and has a short life. there were. For example, while the inspection probe having the configuration of FIG. 7 can be used 100,000 to 1,000,000 times, the inspection probe having the configuration of FIG.
It can be used only about 100,000 times.

[0009] Further, as the density and integration of electronic components have increased, thinner inspection probes have been desired. However, it is difficult to manufacture a small-diameter ball, which hinders the manufacture of a thinner inspection probe.

Accordingly, the present invention has been made in view of the above circumstances, and provides an inspection probe having a small attenuation of an electric signal, which has a long life and is easy to reduce the diameter of the inspection probe, and is provided with the inspection probe. It is an object to provide an inspection device.

[0011]

According to the present invention for solving the above-mentioned problems, a first aspect of the present invention (see FIGS. 1 and 2) is that a cylindrical socket (1) is brought into contact with a terminal of a component to be inspected. A contact member (3) having a contact portion (6) that slides in the socket (1) and a sliding portion (4) that slides in the axial direction in the socket (1), and a contact member (3) in the socket (1). A biasing spring (S1), the probe (A1) being interposed between an end surface of a sliding portion of the contact member (3) and the spring (S1), and being connected to the sliding portion (S1). 4) A pressing member (5) is urged toward the socket (1) by the pressing member (5), and the pressing member (5) is a sliding surface that makes line contact or surface contact with the inner peripheral surface of the socket (1). (5e), and a pressing end surface (5a) inclined with respect to the axial direction, and a sliding portion of the contact member (3). ) Has a pressed surface (4a) for line contact or surface contact in response to the pressing end surface (5a), in the inspection probe, characterized in that.

According to a second aspect of the present invention, the sliding portion (4) of the contact member (3) is formed in a conical shape, and the pressed surface (4a) is tapered. The inspection probe according to claim 1, wherein:

According to a third aspect of the present invention, the pressing member (5) has a locking surface (5b) inclined at an angle different from the pressing end surface (5a) with respect to the axial direction. 3. The inspection probe according to claim 2, wherein:

According to a fourth aspect of the present invention, an inspection probe (A1) according to any one of the first to third aspects.
And support means for supporting the inspection probe (A1);
And an electrical signal is extracted from the terminal by bringing the inspection probe (A1) into contact with a terminal of the component to be inspected.

[Operation] With the above configuration, the pressed end surface (5a) of the pressing member (5) is placed on the pressed surface (4a) of the sliding portion (4).
Abut against the axial direction. Since the pressing member (5) is pressed by the spring (S1) and presses the sliding portion (4) of the contact member (3), the pressing member (5) is pressed by the pressing end surface (5a) and the pressed surface (4a). 5) is pressed against the inner peripheral surface of the socket (1).

The reference numerals in the parentheses are for comparison with the drawings, and do not limit the configuration of the present invention.

[0017]

As described above, according to the first aspect of the present invention, the sliding surface of the pressing member is pressed against the inner peripheral surface of the socket by line contact or surface contact. In the contact member and the pressing member, the pressed surface and the pressing end surface make line contact or surface contact. As a result, the electric signal from the terminal of the inspected component is
It flows from the contact member to the socket and passes little through the spring. Therefore, the attenuation of the electric signal is small, and the contact member and the pressing member, and the pressing member and the inner periphery of the socket are all in the pressed state, so that the contact is stable and the electric resistance value is stable.

Furthermore, the pressing member and the inner peripheral surface of the socket 1 are in line contact or surface contact, and the pressing member and the contact member are also in line contact or surface contact. Long life.

Further, the processing of the pressing end face of the pressing member and the pressed surface of the contact member is simpler than the processing of the ball or the like, so that the pressing member or the contact member having a small diameter can be easily processed. That is, it is easy to reduce the diameter of the inspection probe.

According to the second aspect of the present invention, since the sliding portion is conical, the contact member having a small diameter can be easily processed by the existing processing technique.

According to the third aspect of the present invention, an excessive force acts on the pressing end surface of the pressing member so as to cut into a wedge shape between the sliding portion of the contact member and the inner peripheral surface of the socket. Also, the locking surface comes into contact with and slides against the sliding portion, so that the safety is high.

According to a fourth aspect of the present invention, there is provided an inspection probe having a small attenuation of an electric signal, a long life,
Provided is an inspection apparatus in which the diameter of an inspection probe can be easily reduced.

[0023]

FIG. 1 is a diagram showing an inspection probe according to the present embodiment. The inspection device according to the present embodiment includes:
Inspection devices D4 and D5 described in “Prior Art” are provided with an insulating block (support means) having a holding hole formed therein, and an inspection probe A1 disposed in the holding hole. Since the same applies, the illustration of the block or the like in which the holding hole is formed is referred to FIG. 7 or FIG. 8 and is omitted in FIG. Similarly, the inspection probe A1 of the present embodiment
Is similar to the inspection probes A4 and A5 described in the "prior art" in that it has a conductive and cylindrical sleeve fitted inside the holding hole of the block. The illustration of the sleeve or the like refers to FIG. 7 or FIG. 8 and is omitted in FIG.

As shown in FIG. 1, the inspection probe A1 has a cylindrical conductive socket 1 fitted inside a sleeve (not shown). The inspection probe A1 of this embodiment is of a type having arrowheads 3 (contact members) on both sides, and a rear end portion 4 (sliding portion) of each arrowhead 3 in the socket 1.
Are slidably provided in the socket 1 in the axial direction (the direction of arrow A in the figure). Each rear end 4 is sized so as not to fall out of the socket 1. Each arrowhead 3 is made of a conductive member. In the socket 1, the rear end 4
Each of the pressing members 5 is provided so as to be slidable in the axial direction, and a coil spring S1 (spring) is contracted between the pressing members 5 and 5.

FIG. 2 is a diagram illustrating details of the pressing member and the arrowhead. As shown in the side view of FIG. 2A and the end view of FIG. 2B, each pressing member 5 has a shape in which one end of a cylinder is cut at two intersecting planes. That is, the pressing member 5 is formed with end surfaces 5a (pressing end surfaces) and 5b (locking surfaces) that intersect each other, and these end surfaces 5a and 5b are both inclined with respect to the axial direction (the direction of arrow A in the drawing). It is a flat surface. The intersection line 5t between the end faces 5a and 5b is slightly closer to one side (the end face 5b side) than the center axis of the pressing member 5. The side surface of the pressing member 5 is a sliding surface 5e.
Are in surface contact (or line contact) with the inner peripheral surface of the socket 1.

As shown in FIG. 2C, each of the arrowheads 3 has a rear end 4 inserted in the socket 1 and a front end 6 (contact) for contacting a terminal of an electronic component (component to be inspected). Part)
And the end of the rear end 4 has a conical shape centered on the central axis of the rear end 4. Therefore, the rear end 4
Is formed with a tapered surface 4a (pressed surface) which is a side surface of a cone.

Since the inspection probe A1 is configured as described above, the end surface 5a of the pressing member 5 formed on the tapered surface 4a of the rear end portion 4 of the arrowhead 3 at an inclination matching the tapered surface 4a. Abuts. Since the pressing member 5 is pressed by the coil spring S1 and presses the rear end portion 4 of the arrowhead 3, the pressing surface of the end surface 5a and the tapered surface 4a causes the pressing member 5 to move the sliding surface 5e to the inner peripheral surface of the socket 1. (This mechanism is called a bias mechanism).

Thus, an electric signal from the terminal of the electronic component flows from the front end 6 of the arrowhead 3 to the rear end 4 of the arrowhead 3 to the socket 1 almost without passing through the coil spring S1. Therefore, the attenuation of the electric signal is small, and the rear end 4 of the arrowhead 3, the pressing member 5, and the inner periphery of the socket 1 are all in the pressed state, so that they are stably contacted and the electric resistance value is also low. stable.

Further, the sliding surface 5e of the pressing member 5 and the inner peripheral surface of the socket 1 are in surface contact (or line contact), and the pressing member 5 and the rear end 4 of the arrowhead 3 are in line contact (end surface 5a). And the tapered surface 4a), so that the life due to abrasion is prolonged instead of point contact such as a ball.

The processing of the end surfaces 5a and 5b of the pressing member 5 and the tapered surface 4a of the rear end 4 of the arrowhead 3 is simpler than a ball or the like. For example, the tapered surface 4a has an arrowhead (FIGS. 7 and 8).
(See the arrowhead tip of the type indicated by.) The same technique can be used to process small diameters. Therefore, it is easy to reduce the diameter of the inspection probe.

Since the pressing member 5 is formed with the end surface 5b together with the end surface 5a, an excessive force acts on the pressing member 5 so that the end surface 5a of the pressing member 5 is positioned between the rear end 4 of the arrowhead 3 and the inner periphery of the socket 1. The end face 5b abuts on the tapered face 4a of the rear end portion 4 to prevent wedge-like biting between them, so that the safety is high.

FIG. 3 is a view showing an inspection probe according to another embodiment. Although the inspection probe A1 shown in FIG. 2 has the same arrowhead 3 on both sides, the inspection probe of the present invention is not limited to the one having the same arrowhead (contact member) on both sides. For example, as shown in FIG. 3, one of the sockets 1 is provided with the same arrowhead 3 as that described in FIGS.
The other end of the socket 1 may be provided with a butt 30 of a type fixed to the socket 1. Also in this case, since the pressing member 5 is provided on the arrowhead 3 side and the coil spring S1 is contracted between the pressing member 5 and the arrowhead 30, the inspection probe of the type shown in FIG. It has the same effect as A1.

FIG. 4 is a view showing an inspection probe according to still another embodiment. Although the inspection probe A1 shown in FIGS. 1 and 3 has the arrowhead 3 or the arrowhead 30 on both sides, the inspection probe of the present invention may have an arrowhead (contact member) only on one side. For example, as shown in FIG. 4, the same arrowhead 3 as that described in FIGS. 1 and 2 is provided on only one of the sockets 1 and a lead wire 40 is connected to the other of the socket 1. Also in this case, the pressing member 5 is provided on the arrowhead 3 side, and the coil spring S1 is contracted between the pressing member 5 and the rear end of the socket 1. The same effect as the probe A1 is exhibited.

FIG. 5 is a view showing an inspection probe according to still another embodiment, and is an enlarged view of the vicinity of a pressing member. Various shapes other than those described above are possible for the shape of the pressing member 5. For example, as shown in FIG. 5, the pressing member 5 has a shape in which one end of a cylinder is cut by one plane, and an end surface 5 a (pressing end surface) serving as a cutout is aligned with the tapered surface 4 a of the rear end 4 of the arrowhead 3. Inclined. Also in this case, the end face 5a
The pressing member 5 is pressed against the inner periphery of the socket 1 by pressing between the socket 1 and the tapered surface 4a. Since only the end face 5a needs to be formed, the processing of the pressing member 5 is simplified.

The rear end portion 4 of the arrowhead 3 may be in line contact or surface contact with the pressing member 5 by a contact line or contact surface inclined with respect to the axial direction. Any shape such as a pyramid shape (or a polygonal pyramid shape having five or more corners) and a roof shape having a ridge may be used.

FIGS. 6A and 6B are views showing a pressing member according to still another embodiment, in which FIG. 6A is a view from the end face side, and FIG. 6B is a side view. For example, the pressing member 5 shown in FIG. 6 may be used instead of the pressing member 5 of FIG. The pressing member 5 of FIG.
A conical mortar-shaped hole is formed at one end of the cylindrical body, and the axis of the hole does not coincide with the axis of the cylindrical body and is deviated. Of the wall surfaces of the hole, the side through which the axis of the cylindrical body passes (the right side in FIG. 6) is an end surface 5a corresponding to the pressing end surface, and the end surface 5a with respect to the axis of the hole.
The end surface 5b corresponding to the locking surface is located at a position symmetrical to the left side (on the left side in FIG. 6).

The tip 6 (contact portion) of the arrowhead 3 is not limited to the shape shown in FIG. 1 and the like, but may be any shape such as the shape shown in FIGS.

[Brief description of the drawings]

FIG. 1 is a view showing an inspection probe according to an embodiment.

FIG. 2 is a diagram illustrating details of a pressing member and an arrowhead.

FIG. 3 is a diagram showing an inspection probe according to another embodiment.

FIG. 4 is a diagram showing an inspection probe according to another embodiment.

FIG. 5 is a view showing an inspection probe according to still another embodiment, and is an enlarged view of the vicinity of a pressing member.

FIG. 6 is a diagram showing a pressing member according to still another embodiment.

FIG. 7 is a diagram showing an example of a conventional inspection probe and an inspection apparatus.

FIG. 8 is a diagram showing an example of a conventional improved inspection probe and an inspection apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Socket 3 Contact member (arrowhead) 4 Sliding part (rear end) 4a Pressed surface (tapered surface) 5 Pressing member 5a Pressed end surface (end surface) 5b Locking surface (end surface) 5e Sliding surface 6 Contact part (tip) Part) A1 Probe for inspection S1 Spring (coil spring)

Claims (4)

[Claims] 1. A contact member having a cylindrical socket, a contact portion that contacts a terminal of a component to be inspected, and a sliding portion that slides in the socket in the axial direction, and a contact member in the socket. A biasing spring, comprising: a pressing member interposed between an end surface of a sliding portion of the contact member and the spring, and biased toward the socket by the sliding portion. The pressing member has a sliding surface that makes line contact or surface contact with the inner peripheral surface of the socket, and a pressing end surface that is inclined with respect to the axial direction. An inspection probe having a pressed surface that makes line contact or surface contact corresponding to the pressed end surface. 2. The inspection probe according to claim 1, wherein a sliding portion of the contact member is formed in a conical shape, and the pressed surface is tapered. 3. The inspection probe according to claim 2, wherein the pressing member has a locking surface inclined at a different angle from the pressing end surface with respect to the axial direction. 4. An inspection probe according to claim 1, further comprising: a support means for supporting the inspection probe, wherein the inspection probe is connected to a terminal of a component to be inspected. An inspection device, wherein an electrical signal is taken out from the terminal by making contact.