JP2002170863A5 - - Google Patents

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Publication number
JP2002170863A5
JP2002170863A5 JP2000364357A JP2000364357A JP2002170863A5 JP 2002170863 A5 JP2002170863 A5 JP 2002170863A5 JP 2000364357 A JP2000364357 A JP 2000364357A JP 2000364357 A JP2000364357 A JP 2000364357A JP 2002170863 A5 JP2002170863 A5 JP 2002170863A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000364357A
Other languages
Japanese (ja)
Other versions
JP4444486B2 (ja
JP2002170863A (ja
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Publication date
Application filed filed Critical
Priority to JP2000364357A priority Critical patent/JP4444486B2/ja
Priority claimed from JP2000364357A external-priority patent/JP4444486B2/ja
Publication of JP2002170863A publication Critical patent/JP2002170863A/ja
Publication of JP2002170863A5 publication Critical patent/JP2002170863A5/ja
Application granted granted Critical
Publication of JP4444486B2 publication Critical patent/JP4444486B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000364357A 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法 Expired - Fee Related JP4444486B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000364357A JP4444486B2 (ja) 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000364357A JP4444486B2 (ja) 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法

Publications (3)

Publication Number Publication Date
JP2002170863A JP2002170863A (ja) 2002-06-14
JP2002170863A5 true JP2002170863A5 (cg-RX-API-DMAC7.html) 2007-11-08
JP4444486B2 JP4444486B2 (ja) 2010-03-31

Family

ID=18835318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000364357A Expired - Fee Related JP4444486B2 (ja) 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法

Country Status (1)

Country Link
JP (1) JP4444486B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7479764B2 (ja) * 2020-08-07 2024-05-09 株式会社ディスコ 切削装置

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