JP2002170755A - Controller for substrate treating device and substrate treating system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a substrate treating device which treats a substrate, such as a glass substrate, semiconductor wafer, etc., used for liquid crystal display panels, plasma display panels, etc., to make appropriate control by grasping substrate information, such as the position of each substrate, etc. SOLUTION: A substrate treating system is provided with a receiving means which receives the substrate information (names of treating units, names of positions, lot numbers, substrate numbers, etc.), transmitted from the treatment units 10-70 of a substrate treating device 1, a storing means which stores graphic data used for typically displaying the arrangement of the units 10-70, and an allocating means which correlates received substrate information with the graphic data. The system is also provided with a displaying means 240 which displays the correlated substrate information and graphic data.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a control apparatus and a substrate processing system for a substrate processing apparatus, and more particularly to a control apparatus and a substrate processing apparatus for a substrate processing apparatus for a glass substrate and a semiconductor wafer used for a liquid crystal display panel or a plasma display panel. About the system.

[0002]

2. Description of the Related Art In a process of manufacturing a glass substrate (FPD substrate) or a semiconductor wafer for a liquid crystal display device or a plasma display device, a substrate processing apparatus for forming a resist film on the surface of the substrate and performing exposure and development is required. It is. This substrate processing apparatus is an apparatus (in-line system) that connects a plurality of processing units to enable consistent processing. For example, in a photolithography process, the substrate processing apparatus is connected to an exposure apparatus to perform cleaning from resist pre-coating to resist coating / exposure. There is a coater / developer device that can continuously perform development up to development.

In such a substrate processing apparatus, a substrate is carried in by a transfer robot, and predetermined processing (cleaning, resist coating, and development) is performed on the substrate while moving between the processing units. The processing units include, for example, a cleaning unit, a dehydration bake unit, a resist coating unit, a development unit, and a post bake unit. As the predetermined processing,
For example, cleaning before resist coating, dehydration drying, resist coating,
There is development and curing of the resist performed after exposure. Each processing unit is composed of a plurality of processing units.
A predetermined process is performed on the substrate in each processing unit.

[0004]

As described above, the substrate processing apparatus includes a plurality of processing units, and each processing unit also includes a plurality of processing units. Further, the loading of the substrate and the processing in each processing unit are performed continuously, and a plurality of substrates are simultaneously present in the substrate processing apparatus. In such a substrate processing apparatus, it is necessary to grasp information of a substrate such as a processing unit and a processing unit where the substrate exists, and appropriately control the transport and processing of the substrate. In addition, during a series of substrate processing, the entire operation of the apparatus may be stopped for some reason such as a handling error in transporting the substrate, an inconvenience in some processing units or processing units, or safety. For example, if a substrate is damaged due to a handling error when transporting a substrate in a certain processing unit, the damaged substrate is the number of the substrate in which lot, and at that time, the other processing unit and other The operator of the apparatus must recognize the number of the substrate in each lot and the number of the substrate in the processing unit, and take an appropriate response after the fact. That is, of course, the damaged board is removed from the apparatus, and the board is recognized as the number of the board in which lot, and the data of the damaged board in the apparatus is also deleted so that confusion does not occur thereafter. Must be. In addition, with the stoppage of the apparatus, other processing units, for example, a substrate that has been in the heating unit for a long time, a substrate that has stopped during the spin coating operation, and the like, have caused inconvenience in the process. Because of the high possibility, it is necessary to remove these boards to prevent the occurrence of defective products, or to take extra care in the post-process.On the other hand, for boards that have just stopped on the transport path, etc. Even if the process is returned to the normal process without special consideration, there are some processes that do not cause inconvenience in the subsequent processes and there is no fear of occurrence of defective products. Therefore, it is preferable to continue the processing of those substrates as they are. Thus, in the substrate processing apparatus,
It is preferable that an operator can correctly specify and recognize which substrate is present at which processing unit and which processing unit. However, in general, the appearance of a substrate as a material is uniform, and it is difficult to specify the lot and order of the substrate only by looking at the substrate at a glance.

An object of the present invention is to provide a substrate processing apparatus for processing a glass substrate, a semiconductor wafer, or the like used for a liquid crystal display panel, a plasma display panel, or the like, so that appropriate control can be performed by grasping substrate information such as the position of each substrate. It is to be.

[0006]

According to a first aspect of the present invention, a control apparatus for a substrate processing apparatus controls a substrate processing apparatus which performs a predetermined process by moving a substrate between a plurality of processing units. Means, storage means, allocation means, and display means. The receiving means receives substrate information (hereinafter, referred to as substrate information) transmitted from each processing unit.
The substrate information includes, for example, a processing unit name, a name of a processing unit in each processing unit (hereinafter, referred to as a position name), a lot number, and a substrate number for specifying a substrate in each lot. The storage means stores graphic data for schematically showing the arrangement of each processing unit. The allocating unit associates the graphic data with the received board information. The display means displays the graphic data and board information associated with each other by the allocating means.

In the control device according to the first aspect, first, the receiving means receives the board information output from each processing unit. Next, the board information of each board is associated with graphic data for schematically showing the arrangement of each processing unit stored in the storage means. For example, when the substrate information is a developing unit / developing unit / “ABCDE” (lot number) / “15” (substrate number), these substrate information is associated with the graphic data of the coating unit of the developing unit. Then, the display unit displays an image schematically showing the arrangement of each processing unit, and also displays substrate information (lot number, substrate number) corresponding to each position of each processing unit.

According to the control device of the first aspect, the processing unit and the processing section where the substrate exists can be reliably grasped, and the transport and processing of the substrate can be appropriately controlled. In addition, even when the apparatus is stopped accidentally, the processing unit and the processing unit where the substrate exists can be immediately grasped and appropriate measures can be taken.

According to a second aspect of the present invention, in the control apparatus for the substrate processing apparatus, the graphic data includes a name of each processing unit and positional information in each processing unit.

[0010] In the control device according to the second aspect, the graphic data schematically showing the arrangement of each processing unit includes the name and position information (position name) of the processing unit. Generally, when a substrate processing apparatus is configured by a plurality of processing units, it is rare that the arrangement or configuration of the processing units is changed thereafter. Therefore, the name and position name of each processing unit are stored in advance in the storage unit in association with graphic data schematically showing the arrangement of each processing unit. In this case, the substrate information received by the control device does not need to include the processing unit name and the position name, but only needs to include the information for identifying the position of the specific processing unit.

According to the control device of the second aspect, since the substrate information received by the control device may be small, the receiving speed is increased and the processing by the receiving means and the allocating means is simplified. The control device for a substrate processing apparatus according to claim 3 is the control device according to claim 1 or 2, wherein the received substrate information includes a lot number of a lot to which the substrate belongs, and a substrate number for specifying the substrate in the lot. And

In the control device according to the third aspect, the specification of each substrate is performed by the lot number and the substrate number. For each substrate, the lot to which the substrate belongs is specified by the lot number, and the substrate is specified by the substrate number that specifies the substrate in the lot to which the substrate belongs. The lot number is a number that specifies a set of products (substrates) to be used in the manufacturing process. For example, one lot number can be assigned to each cassette storing a plurality of substrates. Also, one lot number can be assigned to a plurality of cassettes. The board number can be specified by, for example, a number indicating a shelf position in the cassette.

According to the control device of the third aspect, each substrate can be reliably specified from among a large number of substrates by the simple specification method of the lot number and the substrate number. According to a fourth aspect of the present invention, in the control device of the third aspect, the received substrate information further includes a name of each processing unit and positional information of each processing unit.

In the control device according to the fourth aspect, when the arrangement and configuration of the processing units are changed, only the graphic data schematically showing the arrangement of the processing units stored in the storage means is rewritten and included in the board information. The board information is changed according to the processing unit name and the position name to be associated with the graphic data after the change.

According to the control device of the fourth aspect, even when the arrangement and configuration of the processing units are changed, it is possible to appropriately display the board information only by making a simple change.

According to a fifth aspect of the present invention, in the control device for a substrate processing apparatus according to any one of the first to fourth aspects, the receiving means receives data with the substrate processing apparatus by TCP / IP.

In the control device according to the fifth aspect, the TCP / I
Data (substrate information) using the P protocol is received, and the received data is used in the allocating means and the display means. According to the fifth aspect of the present invention, since TCP / IP is a de facto standard, it is easy to obtain an application of a display unit corresponding to this.

According to a sixth aspect of the present invention, there is provided a substrate processing system, comprising: a plurality of processing units for performing predetermined processing on a substrate; a substrate transport unit for moving the substrate between the plurality of processing units; and a control unit for controlling the processing unit and the transport unit. Device. Here, each processing unit has a detecting unit and a transmitting unit. The control device has a receiving unit, a storage unit, an allocation unit, and a display unit. The detecting means detects the board information. Here, the substrate information includes, for example, a processing unit name, a position name in each processing unit, a lot number,
A board number that specifies a board in each lot is included. The transmitting means transmits the detected board information in a predetermined data format. The receiving means receives the board information transmitted from the transmitting means of each processing unit. The storage means stores graphic data for schematically showing the arrangement of each processing unit. The allocating unit associates the graphic data with the received board information. The display means displays the graphic data and board information associated with each other by the allocating means.

In the substrate processing system according to a sixth aspect, first, substrate information is detected by the detecting means of each processing unit, and the substrate information is transmitted by the transmitting means. In the control device, the receiving means receives the substrate information output from each processing unit. Next, the board information of each board is associated with graphic data for schematically showing the arrangement of each processing unit stored in the storage means. Then, on the display means, an image schematically showing the arrangement of each processing unit is displayed, and the board information corresponding to each position of each processing unit is also displayed.

According to the substrate processing system of the sixth aspect, similarly to the case of the control device of the first aspect, the transport and processing of the substrate can be appropriately controlled. In addition, even when the apparatus is stopped, the position of the processing unit where each substrate exists can be immediately grasped and appropriate measures can be taken. As a result, in the manufacture of the substrate, the yield can be improved, and breakage of the substrate can be reduced as much as possible.

According to a seventh aspect of the present invention, in the substrate processing system of the sixth aspect, the detecting means is a position detecting sensor provided in each processing unit.
Here, the sensor may be any detection means for detecting the position optically, magnetically or mechanically. In the substrate processing system according to claim 7, a sensor provided in each processing unit specifies a processing unit (position) where the substrate exists, and uses this as position information (position name). According to the substrate processing system of the seventh aspect, the position where the substrate exists can be accurately detected.

According to an eighth aspect of the present invention, in the substrate processing system of the sixth aspect, the detecting means includes a commanding means and a reading means. The command means is provided in each processing unit, and outputs a signal for commanding the substrate transfer means to move the substrate. The reading means receives the signal from the command means and calculates board information. In the substrate processing system according to claim 8, the command means outputs a signal for instructing the transfer means to move the substrate, and the reading means analyzes the command signal to calculate position information (position name). According to the substrate processing system of the eighth aspect, the position name where each substrate exists can be reliably detected.

A control apparatus according to claim 2, further comprising a plurality of processing units for performing predetermined processing on the substrate, a substrate transport means for moving the substrate between the plurality of processing units, and a control unit for controlling the processing unit and the transport means. With the configuration of the substrate processing system including the above, the same effects as those of the control device according to claims 2 to 5 can be obtained.

[0024]

[First Embodiment] [Substrate Processing Apparatus] One embodiment (first embodiment) of a substrate processing system of the present invention is shown in FIGS. FIG. 1 is a plan view of the substrate processing apparatus 1, and FIG. 2 is a block diagram of a substrate processing system including a control device 2 connected to the substrate processing apparatus 1.

As shown in FIG. 1, the substrate processing apparatus 1 is a coater / developer apparatus which connects a plurality of processing units to enable consistent processing, is connected to an exposure machine 7, and is used in a photolithography process. The process from cleaning before resist coating to resist coating, exposure and development can be performed continuously.

The substrate processing apparatus 1 includes an indexer unit 90,
Cleaning unit 10, dehydration bake unit 20, resist coating unit 30, prebake unit 40, I / F unit 50, development unit 60, post bake unit 70,
And each of the processing units of the conveyor unit 80, and further, the transfer robots 4 to 6. Each of the processing units 10 to 90 includes a CPU 10a to 90a, respectively.
, Memories 10b to 90b, and I / Fs (interfaces) 10c to 90c for communicating with the external control device 2
And sensors 10d to 90d for detecting the position of the substrate
(Described later).

The substrate processing apparatus 1 takes out a glass substrate to be processed (hereinafter, “substrate”) from the cassette 3 placed on the indexer section 90 and sends out the glass substrate to each processing section. It is possible to adopt a uni-cassette system in which the cassette is stored. The removal from the cassette 3 and the storage in the cassette 3 are performed by an indexer robot 90R having a pivotable arm for holding the substrate and movable along the rows of the cassette 3.

The cleaning unit 10 is a set of single-wafer processing units, and includes a carry-in unit 11, a washing unit 12, a drying unit 13, and a carry-out unit 14. From the carry-in section 11 to the carry-out section 14, a cleaning process is performed while the substrate is being conveyed by the conveyor.
In addition, a roller conveyor with low dust generation corresponding to the inside of a clean room is adopted.

The dehydration bake unit 20 is a unit in which stationary processing units are stacked in multiple stages, and the transfer robot 5
, Two laminated bodies 20X and 20Y are provided.
The two laminates 20X and 20Y have a total of 3
It includes one heating unit and three cooling units, and further includes a carry-in unit, a carry-out unit, and a passage unit. Cleaning unit 1
0 and the side of the resist coating unit 30 (hereinafter, “going side”)
), A cooling unit, a carry-in unit, a carry-out unit, a heating unit, and a heating unit are laminated from below.
The development unit 60 and the conveyor unit 80 side (hereinafter, referred to as
The stacked body 20Y on the “return side”) has, from the bottom, four cooling units, a passing unit, a cooling unit, and a heating unit.
The transfer robot 5 includes both of the stacked bodies 20X and 20Y.
All the heating units, all the cooling units, the carry-in unit, and the carry-out unit can be accessed, and carry-in and carry-out of the substrate to and from them are performed. In the following description and drawings, the heating unit may be abbreviated as HP, the cooling unit as CP, the loading unit as IN CV, the unloading unit as OUT CV, and the passing unit as a through CV.

In the dehydration bake unit 20, the carry-in section and the carry-out section are provided on the laminate 20X. The carry-in section includes a conveyor for transporting substrates, and the conveyor is connected to a conveyor of the carry-out section 14 of the cleaning unit 10 via a conveyor of a passage section of the post-bake unit 70 described later. The substrate from the unloading section 14 of the cleaning unit 10 to the loading section of the dewatering baking unit 20 through the passing section of the post-baking unit 70 is
It is received by the transfer robot 5 and taken out of the carry-in section, and is put into each section of the dehydration bake unit 20 to be processed. The carry-out section includes a conveyor that is continuous with a carry-in section 31 of the resist coating unit 30 described later. The substrate that has been processed in each section of the dehydration bake unit 20 is taken out by the transfer robot 5, delivered from the transfer robot 5 to the conveyor at the unloading section, and directed from the conveyor to the loading section 31 of the resist coating unit 30. Conveyed. The transfer robot 5 and the conveyors of the loading unit and the unloading unit have a shape capable of transferring substrates without colliding with each other.

In the dehydration bake unit 20, the passing portion is provided in the laminate 20Y. The passing section is provided with a conveyor for transporting the substrate. The conveyor is for connecting the conveyor of the unloading section 65 of the developing unit 60 to the conveyor of the loading section of the post-bake unit 70. That is, the substrate sent out from the unloading section 65 of the developing unit 60 passes through the pass section of the dehydration bake unit 20, reaches the import section of the post bake unit 70, is received by the transfer robot 4, and is taken out of the import section. It is put into each part of the post bake unit 70 and processed. The transfer robot 5 in the dehydration bake unit 20 does not access the passage of the dehydration bake unit 20.

The resist coating unit 30 is a set of single-wafer processing units, and includes a loading unit 31, a coating unit 32, a drying unit 33, an edge rinsing unit 34, and a discharging unit 35. The substrate is carried from the carry-in part 31 to the carry-out part 35 by an intermittent transfer device (not shown).

The pre-bake unit 40 has a plurality of stationary processing units stacked in multiple stages.
, Two laminated bodies 40X and 40Y are provided.
The two laminates 40X and 40Y have a total of 4
It has one heating unit and two cooling units, and further has a carry-in unit and a passage unit. The outgoing laminate 40X is
From the bottom, four sections, a cooling section, a loading section, a heating section, and a heating section, are stacked. On the return side stacked body 40Y, four cooling units, a passing unit, a heating unit, and a heating unit are stacked from below.
The transfer robot 6 includes both of the stacked bodies 40X and 40Y.
Can access all the heating units, all the cooling units, and the carry-in unit, and carry in and carry out the substrates to and from the carry-in units 51 of the adjacent I / F unit 50. The substrate is carried in with respect to 51.

In the pre-bake unit 40, the carry-in section is provided on the laminate 40X. The carry-in section is provided with a conveyor for carrying substrates, and the conveyor is connected to the conveyor of the carry-out section 35 of the developing unit 30. The substrate from the carry-out part 35 of the developing unit 30 to the carry-in part of the pre-bake unit 40 is
And is taken out of the carry-in section and put into each section of the pre-bake unit 40 for processing. The substrate that has been processed in each section of the pre-bake unit 20 is taken out by the transfer robot 6, placed in the carry-in section 51 of the adjacent I / F section 50, and carried to the exposure machine 7. Transfer robot 6
And the conveyor of the loading section and the loading section 5 of the I / F section 50
1 has a shape that allows the substrate to be delivered and received without colliding with each other.

In the pre-bake unit 40, the passing portion is provided in the laminate 40Y. The passing unit includes a conveyor for transporting the substrate, and the conveyor includes an I / F
This is for connecting the conveyor of the carry-out section 52 of the section 50 to the conveyor of the carry-in section 61 of the developing unit 60. That is, the substrate exposed by the exposure device 7 is transferred to the unloading section 5 of the I / F section 50.
2, is sent out from the conveyor, passes through the pass section of the pre-bake unit 40, reaches the carry-in section 61 of the developing unit 60, enters the developing unit 60, and is processed. The transfer robot 6 in the pre-bake unit 40 does not access the passage of the pre-bake unit 40.

The developing unit 60 is a set of single-wafer processing units, and includes a carry-in unit 61, a developing unit 62, a washing unit 63, a drying unit 64, and a carry-out unit 65. From the carry-in section 61 to the carry-out section 65, the developing process is performed while the substrate is carried by the conveyor.

The post-baking unit 70 is formed by stacking stationary processing units in multiple stages, and includes two stacked bodies 70X and 70Y with the transfer robot 4 interposed therebetween. Each of the two stacked bodies 70X and 70Y includes three heating units and one cooling unit, and further includes a carry-in unit, a carry-out unit, and a passage unit. The going-side laminate 70X has a cooling unit, a passing unit, and a heating unit laminated from the bottom. The return layered body 70Y is
The carry-in unit, carry-out unit, heating unit, and heating unit are stacked. The transfer robot 4 includes both of the stacked bodies 70X, 7
All the heating units, all the cooling units, the carry-in unit, and the carry-out unit in 0Y are accessible, and carry in and carry out the substrate to and from them.

In the post-baking unit 70, a carry-in section and a carry-out section are provided in the laminate 70Y. The carry-in section includes a conveyor for carrying the substrates, and the conveyor is connected to the conveyor of the carry-out section 65 of the developing unit 60 via the conveyor of the passage section of the dehydration bake unit 20. The substrate that has reached the carry-in portion of the post-bake unit 70 from the carry-out portion 65 of the developing unit 60 through the passage portion of the dewatering bake unit 20 is received by the transfer robot 4 and taken out of the carry-in portion, and the post-bake unit 70 Is processed in each part. The carry-out section includes a conveyor that is continuous with an inlet of a conveyor unit 80 described later. The substrate that has been processed in each part of the post-baking unit 70 is taken out by the transfer robot 4 and delivered to the conveyor from the transfer robot 4 at the unloading section, and the conveyor unit 8
It is conveyed toward the entrance of 0. The transfer robot 4 and the conveyors of the loading unit and the unloading unit have a shape capable of transferring substrates without colliding with each other.

In the post-baking unit 70, the passing portion is provided on the laminate 70X. The passing section is provided with a conveyor for transporting the substrate. The conveyor is for connecting the conveyor of the unloading section 14 of the cleaning unit 10 to the conveyor of the loading section of the dehydration bake unit 20. That is, the substrate sent out from the unloading section of the cleaning unit 10 passes through the pass section of the post-bake unit 70, reaches the import section of the dehydration bake unit 20, is received by the transfer robot 5, and is taken out of the import section.
The dehydrated bake unit 20 is put into each part and processed. The transfer robot 4 in the post-baking unit 70 does not access the passage of the post-baking unit 20.

The conveyor unit 80 includes a conveyor for transporting substrates. The conveyor is connected to the conveyor at the unloading section of the post-baking unit 70 and reaches the indexer section 90. The substrate sent from the unloading section of the post-baking unit 70 to the conveyor unit 80 is transported by the conveyor of the conveyor unit 80, carried to the indexer section 90, received by the indexer robot 90R, and stored in the cassette 3 of the indexer section 90. Is done.

The transfer robots 4 to 6 can turn but do not have a mechanism for moving in the horizontal direction.
This is a so-called cluster type robot. Each of the transfer robots 4 to 6 has a trunk portion that is installed on the floor surface and can be turned and raised and lowered, and two arm portions that extend from the trunk portion and can hold a substrate at a tip portion.
In each of the above-described baking units, the heating unit is a so-called hot plate. The cooling unit is a so-called cooling plate. In each bake unit,
Each stacked body is separated into the going side and the returning side, and the processing units are also to be arranged separately.However, there is no particular meaning in the location of each processing unit, and either of them is turned by the transfer robot turning. The side processing unit is used in the same manner.

The I / F unit 50 is a mechanism for sequentially transferring substrates between the substrate processing apparatus 1 and the exposing machine 7, and generally includes a transport robot for transporting the substrates and a buffer for adjusting the tact time. (Cassettes, etc.).

The sensors 10d to 90d detect the movement of the substrate between the respective positions in the processing units 10 to 90. The sensors 10d to 90d may use an optical sensor or a magnetic sensor that detects the movement of the substrate by optical or magnetic means, or recognize the amount of movement of a moving means (slider or the like) that holds and moves the substrate. In some cases, mechanical means for detecting the movement of the substrate is used.

The CPUs 10a to 90a are connected to the memories 10b to
Board information stored in 90b and control device 2 (described later)
, And controls the transfer and processing of the substrate in each of the processing units 10 to 90.

Each of the memories 10b to 90b is shown in FIG.
As shown in (1), areas ([1] to [6] in this example) are reserved for each position, and each area stores a position name, a lot number, a board number, and a flag. FIG. 3 shows, as specific examples, times t1, t2, and t2.
3 shows the contents of the memory 60b of the developing unit 60 in FIG.

Here, the position name is the name of each processing unit included in each of the processing units 10 to 90. In the example of FIG. 3, the position name is a carry-in unit, a developing unit, a washing unit, a drying unit, an unloading unit, and a through CV. is there. Note that, here, a portion for moving the substrate (a portion not subjected to process processing) such as a carry-in portion, a carry-out portion, and a through CV is also treated as a position (processing portion) in the same manner as a portion performing the process process on the substrate. . The reason why the through CV is included in the memory 60b of the developing unit 60 is as follows. That is, each of the dewatering bake unit 20, the prebake unit 40, and the postbake unit 70 arranges the laminate over both the going line and the returning line, but the dewatering baking, prebaking, and postbaking are performed. Is performed only in either case of going or returning, so in the line on which the processing is not performed, each bake unit is provided with a passage portion for simply passing the substrate coming from the upstream unit. I have. Since the substrate merely passes through the passage section, it has nothing to do with the operation of each bake unit provided with the passage section. Therefore, the control and management of each passing unit is performed by the CPU of the upstream unit continuous with the passing unit, not by each bake unit provided with the passing unit. Specifically, for example, in the dehydration bake unit 20, the passing unit is provided in the stacked body 20 </ b> Y, and the conveyor of the passing unit is configured such that the conveyor of the unloading unit 65 of the developing unit 60 is the post bake unit 7.
Because it is for connecting to the conveyor of the loading part of 0
The control and management of the passage section of the dehydration bake unit 20 are performed by the CPU 60a of the developing unit 60 which is the upstream unit. Similarly, the CPU 50a of the I / F unit 50 manages the passing unit of the pre-bake unit 40, and the CPU 10a of the cleaning unit 10 manages the passing unit of the post-bake unit 70.
But do each. Therefore, in the example of FIG. 3, the memory 60b for controlling and managing the developing unit 60 is used.
Area corresponding to the carry-out section 65 of the developing unit 60
Subsequent to [5], an area [6] corresponding to the passage of the dehydration bake unit 20 is provided. The same applies to the passage portions of other bake units.

The lot number is a number for specifying a set of products (substrates) used in the manufacturing process. For example, one lot number can be assigned to each cassette 3 storing a plurality of substrates. Also, one lot number can be assigned to a plurality of cassettes 3. In the example of FIG. 3, the lot number is “ABCDE”. The board number is a number for specifying an individual board in the lot to which the board belongs.
Are "16" to "11". When assigning a lot number to each cassette 3, for example, a number indicating a shelf position of each cassette 3 is assigned as a board number. When assigning a lot number to a plurality of cassettes 3, for example, a unique number for distinguishing all shelf positions of the plurality of cassettes is assigned. As described above, in this embodiment, each substrate is specified by the lot number and the substrate number. In the present invention, the board information for specifying the board is associated with each board, but the information is not necessarily limited to the board information including the lot number and the board number, and may be other codes. In short, any information may be used as long as it can specify the substrate.

The flag indicates the presence or absence of a board at each position. In the example of FIG. 3, when a board is present, “1” is set.
And “0” when no substrate is present. I / F
Each of the boards 10c to 90c processes the board information and the like stored in the memories 10b to 90b into a predetermined data format, and transmits the data to a control device 2 (described later) via a network. As the predetermined data format, for example, a protocol such as TCP / IP can be used.

FIG. 4 shows a developing unit 60 similar to FIG.
And shows the contents of data to be transmitted by the I / F 60c corresponding to the contents of the memory 60b at times t1, t2 and t3 (hereinafter referred to as transmission data). As shown in FIG. 4, the transmission data includes a processing unit name / position name / lot number / substrate number / flag. “0” is assigned to the area of the lot number and the board number corresponding to the position where the board does not exist.

The reason why the processing unit name (“developing unit”) is transmitted is to distinguish which processing unit the data is transmitted from in the control device 2. [Control Device] As shown in FIG. 2, the control device 2 sends and receives signals to and from the I / Fs 10c to 90c of the respective processing units via a network, and controls the transport and processing of the substrates in the respective processing units 10 to 90. I do.

The control device 2 includes an I / F 210 and a memory 22
0, a CPU 230, and a monitor 240. A keyboard 2 is used as an input device connected to the CPU 230.
50. I / F 210, memory 220, CP
U230 can be constituted by a personal computer (PC), and monitor 240 may use an external monitor connected to the PC. In addition, the conditions of substrate transfer and processing in each of the processing units 10 to 90 can be changed by input from the keyboard 250.

The I / F 210 is an I / F of each processing unit.
This is a device that transmits and receives signals to and from 10c to 90c. The I / F 210 includes I / Fs 10c to 9 as shown in FIG.
It functions as a receiving means for receiving the board information transmitted from 0c.

The memory 220 includes the processing units 10 to 90
Graphic data schematically showing the outer shape and arrangement of the
How to monitor graphic data and board information 2
This is storage means for storing a display program that describes whether to output the data to the display 40.

FIG. 5 shows the contents of the memory 220. As shown in FIG. 5, the graphic data is stored in each processing unit 10.
The display programs are stored separately in files 0 to 90, respectively, and the display programs are stored in file 0.
Specifically, the indexer unit 90, the cleaning unit 10,
Dehydration bake unit 20, resist coating unit 30,
Pre-bake unit 40, I / F unit 50, developing unit 60, post-bake unit 70, conveyor unit 8
Graphic data that schematically displays the outer shape and arrangement of 0 are stored in files 1 to 9, respectively. Each file has the number of processing units (the number of positions) included in each of the processing units 10 to 90 and the coordinates X1Y indicating the arrangement of each of the processing units 10 to 90 on the screen of the monitor 240.
1 to X9Y9. The display program (file 0) includes I / Fs 10c to 90c of each processing unit.
Are assigned to the files 1 to 9 respectively, and further, based on the coordinates and the number of positions included in the files 1 to 9, the schematic outer shape and arrangement of each processing unit as shown in FIG. It is a program to do.

The CPU 230 includes an I / F 210 and a memory 2
20 and a keyboard 250, and an I / F2
10 and I / F of each processing unit via the network
Signals are transmitted to and received from 10c to 90c, and the transport and processing of the substrate in each of the processing units 10 to 90 are controlled. Also,
Graphic data and a display program are read from the memory 220, and the I / F 210 is read by the display program.
Is allocated to each of the graphic data files 1 to 9. For example, the display program allocates the board information (FIG. 4) from the developing unit 60 to the file 6. Further, the coordinates X6Y included in the file 6
6 on the screen of the monitor 240 shown in FIG.
The schematic outer shape and arrangement of the developing unit 60 are described from the position of (6, Y6). This schematic outer shape includes an area describing the processing unit name (“development unit”) and an area corresponding to the number of positions “5” included in the file 6, and the area corresponding to the number of positions is: The area is further divided into areas for displaying a position name, a lot number, and a board number. Then, the display program draws the processing unit name and the position name in the corresponding area on the monitor 240. Also, the lot number / substrate number is drawn in the area on the monitor 240 corresponding to the position where the flag is “1”, and the area on the monitor 240 corresponding to the position where the flag is “0” is blank.

The monitor 240 is display means connected to the CPU 230. As described above, the monitor 240
The CPU 230 receives the signal processed by the display program, and displays the schematic outer shape, arrangement, and board information (FIG. 6) of the processing unit.

Thus, as shown in FIG. 6, the monitor 240 has a rough arrangement (rectangular shape) of each of the processing units 10 to 90 and a planar arrangement including the positional relationship between the processing units 10 to 90. Image (processing unit image 10G
~ 90G). Each of the processing unit images 10G to 80G is divided into rectangular regions corresponding to internal processing units. In particular, the processing unit images 20 corresponding to the dewatering baking unit 20, the pre-baking unit 40, and the post-baking unit 70, which are configured by stacking a plurality of processing units in multiple stages.
G, 40G, and 70G, the stacked bodies 20X, 20Y, 40X, 40Y, 70X,
At the position of the laminated body corresponding to every 70Y, the vertical arrangement of the processing unit inside the laminated body is simulated and displayed in a plane direction. Furthermore, each processing unit image 10G ~
80G includes an area in which the name of the corresponding processing unit is displayed.

Then, each processing unit image 10G-80G
For the rectangular area corresponding to the individual processing unit inside the processing unit, the position name of the processing unit and information for specifying the substrate existing in the processing unit, that is, the lot number And the board number are displayed.
For example, the cooling unit (the lowermost cooling unit of the stacked body 70X) located below the passing part of the stacked body 70X of the post-baking unit 70 has the position name “CP” and the board information “ABCDE” “ 6 "is displayed. That is, the processing unit located below the passing portion of the stacked body 70X of the post-baking unit 70 is the “CP”, that is, the cooling unit, and the substrate existing therein is the lot “ABCDE”.
"6" -th substrate. Further, for example, neither the lot number nor the substrate number is displayed in the coating unit 32 of the resist coating unit 30, and the blank is blank, indicating that there is no substrate in this processing unit (position).

On the other hand, for the indexer section 90, C
The PU 90a and the CPU 230 transmit and receive, for each set position (port) of the five cassettes of the indexer unit 90, information on which lot number cassette is set at the set position. This information is the information input by the operator from the keyboard 250 and transmitted to the CPU 90a by the CPU 230 and stored in the memory 10b. The processing unit image 90G corresponding to the indexer unit 90 and displayed by the CPU 230 is divided into five rectangular areas corresponding to each port. Then, for each port of the indexer section 90, the CPU 230 displays the lot number of the cassette set therein in the corresponding rectangular area. In the example of FIG. 6, a cassette having a lot number "ABCDE" is placed in "port 1" which is the port closest to the return side.

[Operation of Substrate Processing System] Next, the operation of the substrate processing system will be described in order with reference to FIG. The substrate taken out of the cassette 3 by the indexer robot 90R in the indexer unit 90 is transferred to the cleaning unit 10. The substrate is subjected to a cleaning process while being transported by the conveyor from the loading unit 11 to the unloading unit 14.

The substrate that has reached the unloading section 14 is conveyed by the continuous conveyor as it is and the post-baking unit 70
, And reaches the carry-in section of the dehydration bake unit 20. Here, the substrate is taken out of the loading section by the transport robot 5, first loaded and unloaded to the heating section, then to the cooling section, and subjected to dehydration bake processing by the plurality of heating sections and cooling sections.

Next, the substrate is transferred from the cooling unit to the unloading unit by the transfer robot 5. Then, it is carried to the carry-in section 31 of the resist coating unit 30 by the conveyor of the carry-out section. In the resist coating unit 30, the substrate is loaded into the loading unit 3
While being moved from 1 to the carry-out section 35, various processes related to resist coating are performed. That is, the wafer is first carried from the carry-in section 31 to the coating section 32 by the intermittent transfer device, and then subjected to the drying section 33 and the edge rinse section 34 in this order, and then carried to the carry-out section 35.

The substrate reaching the unloading section 35 is transferred from the unloading section 35 to the loading section of the pre-bake unit 40 by a continuous conveyor, and further transported by the transport robot 6 to be heated and dried in a plurality of heating sections and cooling sections. Is performed. Thereafter, the substrate is transferred to the I / F unit 50 by the transfer robot 6. The substrate conveyed to the I / F unit 50 is transferred to the exposure device 7 and subjected to exposure processing. The exposed substrate is transferred from the exposure machine 7 to the I / F unit 50,
The developer is carried into the developing unit 60 by a continuous conveyor from the I / F unit 50 to the carrying-in part 61 of the developing unit 60 through the passing part of the pre-bake unit 40.

The substrate is subjected to a developing process in the developing unit 60 while being transferred from the carry-in section 61 to the carry-out section 65. The substrate that has reached the carry-out section 65 reaches the carry-in section of the post-bake unit 70 by a continuous conveyor that passes from the carry-out section 65 to the carry-in section of the post-bake unit 70 through the passage section of the dewatering bake unit 20.

In the post-baking unit 70, the wafer is transported by the transport robot 4, subjected to heat treatment by a plurality of heating units and cooling units, and finally transported to the unloading unit. The substrate sent to the unloading unit is transferred from the unloading unit to the conveyor unit 80 by a continuous conveyor, and is conveyed to the vicinity of the indexer unit 90 by the conveyor unit 80. Then, the substrate is stored in the original cassette 3 by the indexer robot 90R.

[Display of Substrate Information] The controller 2 receives the substrate information from each of the processing units 10 to 80 during a series of processing in the substrate processing apparatus 1 as described above, and as shown in FIG. The schematic external shape, arrangement, and board information of the processing unit are output to the monitor 240.

Hereinafter, the display of the board information will be described with reference to the flowcharts shown in FIGS. FIG. 7 is a flowchart of operation execution and transmission of substrate information common to each of the CPUs 10a to 80a of each of the processing units 10 to 80, and FIG. 8 is a flowchart of display of substrate information by the CPU 230 in the control device 2. The operations of the CPU 90a and the memory 90b of the indexer unit 90 are slightly different from those of the other CPUs 10a to 80a, but this will be described later in detail.

The operation and operation of the indexer unit 90 will be described. The indexer unit 90 has five set positions (ports) for setting the cassette 3. When setting the cassette 3 in the indexer unit 90, the operator of the apparatus inputs information on which port of the indexer unit 90 to set the cassette 3 and the lot number of the cassette from the keyboard 250. The input lot number information is stored in the indexer unit 90 via the network.
The information is transmitted to the PU 90a, and the CPU 90a stores the information in the memory 90b. Then, C of the indexer unit 90
In the PU 90a, the indexer robot 90R takes out the substrate from the cassette 3 and loads the substrate into the loading unit 11 of the cleaning unit 10.
At the time of paying out, the lot number and the board number are specified and corresponded to the board. This association is made based on which shelf position of the cassette set by the indexer robot 90R has taken out the substrate. Then, at the same time as actually transferring the substrate to the loading unit 11, the CPU 90a transmits the lot number and the substrate number of the transferred substrate to the CPU 10a of the cleaning unit 10, which is the processing unit on the downstream side, via the network.

Hereinafter, the operation of the flowchart of FIG. 7 will be described using the case of the cleaning unit 10 as an example. The CP of the cleaning unit 10 which is a downstream unit of the indexer unit 90
U10a executes control according to the flowchart shown in FIG. First, in step S11, the presence or absence of acceptance of a substrate is detected. Indexer unit 9 which is the upstream unit
When it is confirmed that the substrate has been delivered from 0, the process proceeds to step S12. In step S12, the board lot number and the board number received from the CPU 90a of the indexer unit 90 at the same time as the delivery of the board are stored in an area of the memory 10b corresponding to the loading unit 11 which is the processing unit in which the received board is present. And the memory 1
The data of 0b is transmitted to the CPU 230. Then, the process proceeds to step S13, in which all the processing units such as the carry-in unit 11 of the cleaning unit 10 perform necessary operations such as transport and process processing so that necessary processing is performed on the substrate. Command. Subsequently, in step S14, the processing unit (position) and the detection result of the sensor 10d provided between the processing units are input and monitored, and step S1 is executed.
In step 5, the monitoring result is analyzed to determine whether or not the substrate has moved between the processing units. If there is no movement of the substrate, the process returns to step S11. On the other hand, if the board is not received in step S11, the process proceeds to step S13,
The same processing as above is performed.

If the movement of the substrate has occurred, step S
16 to determine whether the generated movement of the substrate is a movement of unloading the substrate to the downstream processing unit.
It is determined whether the movement is within the management range. If the substrate is not paid out to the downstream unit, step S18
The substrate information to be moved in accordance with the movement of the substrate is written into the area of the memory 10b corresponding to the processing unit of the movement destination, and is erased from the area corresponding to the processing unit of the movement source. Then, data to be transmitted to the CPU 230 is created based on the stored contents. Next, the process proceeds to step S19, transmits the transmission data created in step S18 to the CPU 230, and returns to step S11.

If the movement of the substrate that has occurred in step S14 is to pay out the substrate to the downstream unit,
Proceeding to step S17, the board information corresponding to the paid out board is transmitted to the downstream unit. Thereafter, the process proceeds to step S18.

The CPU 90 of the indexer unit 90
a, the operation of the memory 90b is described with respect to the other CPUs 10a to 10a.
It is slightly different from 80a. That is, in the indexer unit 90, when the indexer robot 90R takes out a substrate from the cassette 3 and pays it out toward the loading unit 11 of the cleaning unit 10 as described above, the lot number and the substrate number correspond to the substrate. And sends it to the downstream cleaning unit 10. Further, it recognizes the board delivered from the conveyor unit 80, the lot number and the board number transmitted in association with the board, and places the board on the shelf corresponding to the board number in the cassette of the corresponding lot. It is stored by the indexer robot 90R. Further, the memory 90b includes areas respectively corresponding to the set positions of the five cassettes of the indexer section 90, and the area stores the lot numbers of the cassettes placed at the corresponding set positions. The lot number data is transmitted to CPU 230 via / F section 90c. CP
U230 displays, for each port of the indexer unit 90, the lot number of the cassette set therein in the corresponding rectangular area.

In FIG. 8, in step S21, control device 2 determines whether or not board information has been received by I / F 210. If the board information has been received, the board information is sent to the CPU 230, and the process proceeds to step S22. On the other hand, if the board information has not been received, the processing in step S21 is repeated.

In step S22, the graphic data (files 1 to 8) and the display program (file 0) are read from the memory 220, and the process proceeds to step S23. In step S23, the received board information is stored in files 1 to 3 by the display program in the CPU 230.
8 and then proceeds to step S24.

In step S24, the board information and the graphic data allocated in this way are
From 0, it is sent to the monitor 240 and displayed (FIG. 6). Thereafter, the flow returns to step S21 again, and the above processing is repeated.

As a result of these communications and control, the operation of the apparatus and the change of the screen display of the monitor 240 as shown in FIG. 6 are as follows. That is, at time t1, FIG.
When there is no movement of the board in the arrangement state of the board shown in
The CPUs 10a to 80a of the processing units 10 to 80 correspond to S11, S13, S14, S14 in the control flowchart of FIG.
15, S11... (Hereinafter referred to as “normal routine”) are repeated. The board with the board number "1" of the lot number "ABCDE" located at the final position "CV4" of the conveyor unit 80 is received and moved by the indexer robot 90R, and the board no longer exists at that position. The "substrate movement" and "substrate non-existence" are detected by the sensor 80d (S14).
Thus, it is determined that the substrate has moved (S15). In this case, the substrate is paid out to the processing unit outside the processing unit (outside the conveyor unit 80), that is, the downstream unit (S1).
From 6), the CPU 80a transmits the lot number and the board number of the board stored in the area of the memory 80b corresponding to the position “CV4” to the CPU 90a of the indexer unit 90 as the downstream processing unit ( S
17). At the same time, there is “substrate movement” from the position “CV4” and “substrate not present” is detected by the sensor 80d.
The CPU 80a erases the lot number and the board number of the board stored in the area of the memory 80b corresponding to the position "CV4", sets the flag of the corresponding area to "0", and changes the flag. The transmission data is created based on the contents of the memory 80b (S18). Then, the transmission data created from the contents of the memory 80b is transmitted to the CPU 230 (S1).
9) On the screen of the monitor 240, the position “CV
In “4”, neither the lot number nor the board number is displayed, indicating that the board is not present. The indexer robot 90R stores the received substrate in the cassette at “port 1” where the cassette with the lot number “ABCDE” is located.

Thereafter, as a result of the above-described normal routine being carried out and being processed and transported, the substrate of the substrate number “2” at the position “CV3” is carried to the “CV4” and the “substrate movement” When the occurrence and the "substrate presence" in "CV4" are detected (S14) and it is determined that the substrate has been moved (S15), the movement of the substrate in the conveyor unit 80 which is the same processing unit is determined. Therefore, since the payment is not to the downstream processing unit (S16), C
The PU 80a transfers the lot number and the board number of the board stored in the area of the memory 80b corresponding to the position “CV3” to the area of the memory 80b of the part corresponding to the position “CV4” and stores the same. Then, the lot number and the board number of the board stored in the area of the memory 80b corresponding to the position "CV3" are deleted, and the transmission data is created based on the changed contents of the memory 80b (S18). . Then, the transmission data created thereby is transmitted to the CPU 230, and on the screen of the monitor 240, the presence of the substrate of the lot number “ABCDE” with the substrate number “2” at the position “CV4” and the position “CV3” at the position “CV3” Indicates that no substrate is present.

Similarly, when the board with the board number 3 is carried to the position "CV3" and the board with the board number "4" is carried to the position name "CV2", the post-baking unit 7
The board with the board number "5" in the carry-out section "OUT CV" of 0 advances to "CV1". Then, in the post-baking unit 70, the transfer robot 4 performs the transfer operation of the substrate, and the substrate with the substrate number “6” in the cooling unit “CP” is set to “OUT”
CV ”, the substrate of substrate number“ 7 ”in the lower heating unit“ HP ”in the stacked body 70Y is transferred to“ CP ”, and the loading unit“ IN ”in the stacked body 70Y of the post-baking unit 70. The substrate with the substrate number “10” in the “CV” is transferred to the lower heating unit “HP” in the stacked body 70Y.

As a result, the carry-in portion “INCV” in the stacked body 70Y of the post-bake unit 70 does not have a substrate.
The board with the board number “11” in the “CV” is carried into the carry-in section “INCV” of the post-bake unit 70 (time t2). Subsequently, the unloading section 65 of the developing unit 60
The substrate with the substrate number “12” is carried into the passing portion “through CV” of the dehydration bake unit 20 (time t).
3). When the substrate is transported in this manner, at times t1, t
2, the memory 6 of the developing unit 60 at time t3
0b and the content of the data stored in the developing unit 6
The contents of the data transmitted by the CPU 60a of No. 0 to the control unit 2 via the I / F 60c are as shown in FIGS. 3 and 4, respectively. In the screen of the monitor 240, portions corresponding to the respective processing units further divided in the processing unit image 60G are shown in FIG. The lot number of the board and the data of the board number are assigned and displayed in a superimposed manner.

In the substrate processing system of the first embodiment,
Since the information on the substrates is displayed almost in real time and combined with a schematic layout drawing of the processing system so as to be superimposed on the layout drawing, the position of each processing unit 10 to 80 is determined. It is possible to immediately and surely visually recognize whether or not it exists in the processing unit). Thereby, the transport and processing of the substrate in the substrate processing apparatus 1 can be appropriately controlled. In addition, even when the substrate processing apparatus 1 is accidentally stopped or the like, the position of each substrate can be immediately visually recognized, and the subsequent action can be appropriately performed.

[Second Embodiment] [Substrate Processing Apparatus] The substrate processing apparatus 1 of the second embodiment is also shown in FIG.
It has the same configuration as. Hereinafter, only parts different from the first embodiment will be described. As shown in FIG. 9, the substrate processing system according to the second embodiment includes CPUs 10a ′ to 80a ′ and an I / F 10c ′ provided in the substrate processing apparatus 1. ~ 80c '
Is different from that of the first embodiment. Also, the control device 2
I / F 210 ', memory 220', CPU
230 'is also different from that of the first embodiment.

FIG. 10 shows an I / F 60 of the developing unit 60.
9 is a specific example of transmission data of the CPU 60a ′ via the terminal c. The content of the transmission data is the case of the first embodiment (FIG. 4)
And different. That is, in the present embodiment, as shown in FIG. 10, the processing unit name and the position name are not included. C
Unlike the first embodiment, the PUs 10a 'to 80a' read only the lot number, the board number, and the flag from the memories 10b to 80b to create transmission data (FIG. 10). In this case, by creating transmission data in the order of each predetermined position, the position corresponding to each transmission data (lot number / substrate number) is distinguished. The predetermined order is, for example, an order along the processing flow in each of the processing units 10 to 80 (the loading unit 61, the developing unit 62, the washing unit 63,
(Drying section 64, unloading section 65, through CV).

In this embodiment, the transmission data (for example, FIG. 10) is transmitted from the I / Fs 10c to 80c in the order of the predetermined processing units 10 to 80, and the control device 2 transmits the transmission data in the order of the received data. It recognizes from which of the processing units 10 to 80 the data has been transmitted. The predetermined order is, for example, an order along the processing flow in the substrate processing apparatus 1 (the cleaning unit 10, the dehydration bake unit 2
0, resist coating unit 30, pre-bake unit 4
0, the order of the I / F unit 50, the developing unit 60, the post-baking unit 70, and the conveyor unit 80), and each of the processing units 10 to 80 communicates the communication timing to the control device 2 in order and performs the processing in a predetermined order. I have to do that.

[Control Device] FIG. 11 shows the contents of the memory 220 'in the present embodiment. As shown in FIG. 11, the graphic data is stored in each of the processing units 10 to 9.
The display programs are stored separately in files 1 'to 9' for each 0, and the display programs are stored in file 0 '. As in the case of the first embodiment, the cleaning unit 10,
Dehydration bake unit 20, resist coating unit 30,
Pre-bake unit 40, I / F unit 50, developing unit 60, post-bake unit 70, conveyor unit 8
0, graphic data for schematically displaying the outer shape and arrangement of the indexer unit 90 are stored in files 1 'to 9', respectively.
Is stored in

However, unlike the first embodiment, each of the files 1 'to 9' includes a unit name and a position name in addition to the number of processing units (the number of positions) and the coordinates X1Y1 to X9Y9. .

The display program (file 0 ') is stored in the first
As in the embodiment, the I / Fs 10c ′ to
Each board information received from 90c 'is stored in file 1'
To the monitor 240 based on the coordinates and the number of positions included in the files 1 ′ to 9 ′.
Is a program for depicting a schematic outline and arrangement as shown in FIG. However, in the present embodiment, unlike the first embodiment, the processing unit name / position name is not included in the received board information, and the processing unit name / position name is included in the files 1 ′ to 9 ′. Use something.

The CPU 230 'reads the graphic data (files 1' to 9 ') and the display program (file 0') from the memory 220 '. The display program (file 0 ′) identifies from which of the processing units 10 to 90 the board information is sent from the processing units 10 to 90 based on the order of the board information received from the I / F 210 ′. File information of each file 1 '~
Assign to 9 '.

For example, a display program (file 0 ')
Assigns the board information (FIG. 10) from the developing unit 60 to the file 6 '. Further, based on the coordinates X6Y6 included in the file 6 ′, as in the first embodiment, the schematic outer shape and arrangement of the developing unit 60 are calculated from the position (X6, Y6) on the screen of the monitor 240 shown in FIG. Portrays The display program (file 0 ') displays the processing unit name (development unit) and position names (load-in section, development section, washing section, drying section, unload section, through CV) included in file 6' on the screen. Is displayed in the area where
The display program (file 0 ') displays the received board information (lot number and board number) in a corresponding area on the screen.

[Display of Board Information] The display of board information in the present embodiment is performed according to the same flow as in the first embodiment. Hereinafter, the display of the substrate will be described. However, since the basic determination and the flow of the operation are the same as those in the first embodiment, only different portions will be described.
The transmission data created in step (1) does not include a processing unit name or a position name as data as shown in FIG. However, the processing units 10 to 80 transmit these data to the control device 2 in a predetermined order by mutual communication not shown in the flowchart.

Therefore, in step S23, the control device 2 determines which of the processing units 10 to 80 the board information has been transmitted from in accordance with the display program (file 0 ') read by the CPU 230'. Then, the board information is assigned to one of the files 1 ′ to 8 ′, and the process proceeds to step S24. Step S2
At 4, the board information and the graphic data allocated in this way are sent from the CPU 230 'to the monitor 240 and displayed (FIG. 6). In this case, the processing unit names and the position names included in the files 1 'to 8' are displayed in the corresponding areas on the screen. afterwards,
Returning to step S21 again, the above processing is repeated.

The CPU 90 of the indexer unit 90
The control operation of a ′ and the memory 90b ′ is slightly different from that of the first embodiment due to the difference in data created in step S18, but the operation is almost the same as that of the first embodiment. In the indexer section 90, the cassette setting position is port 1
To port 5 are provided, and ports 1 to 5 are written as position names in the memory 220 'of the control device 2 shown in FIG. Then, when displaying the substrate information, as shown in FIG. 6, each position name is displayed in a corresponding rectangular area in the processing unit image 90G corresponding to the indexer unit 90. At this time, the lot name corresponding to each port sent from the CPU 90a 'is displayed in the same rectangular area.

In the substrate processing system according to the second embodiment,
As in the first embodiment, it is possible to reliably visually confirm which processing unit (position) of which processing unit each substrate is in, and appropriately control the transfer and processing of the substrate in the substrate processing apparatus 1. be able to. Further, similarly to the first embodiment, when the substrate processing apparatus 1 is accidentally stopped, or the like,
The position of each substrate can be immediately visually recognized, and the subsequent measures can be taken appropriately.

Further, according to the substrate processing system of the second embodiment, since it is not necessary to include the processing unit name and the position name in the substrate information transmitted from the substrate processing apparatus 1, both the substrate processing apparatus 1 and the control apparatus 2 can be used. In, the processing for display is simplified.

[Other Embodiments] In the above embodiment, a sensor is used as the substrate detecting means. However, a command means for outputting a signal for instructing the substrate transport means to move the substrate and a signal from the command means are received. The presence or absence of the substrate may be detected by a reading unit that calculates the information on the substrate. In particular,
The commanding means and the reading means can be constituted by the CPUs 10a to 90a and a memory storing a program describing a predetermined procedure. When the CPUs 10a to 90a output signals for instructing the substrate transport means to move the substrate,
In 0a to 90a, the program may calculate the position of the substrate based on the output signal.
Also in this case, the position of the substrate can be reliably detected, and the same effects as in the above embodiment can be obtained.

In the above embodiment, the processing unit images 10G, 30G, 50G, 60G, and 80G corresponding to the processing units 10, 30, 50, 60, and 80 have the planar arrangement of the processing units therein. The processing unit images 20G, 40G, and 50G corresponding to the dewatering baking unit 20, the pre-baking unit 40, and the post-baking unit 70 are displayed in a plan view, and the stacked bodies 20X, 20Y, 40X, 40Y,
By arranging the processing unit inside the stack in the vertical direction at the position of the stack corresponding to each of the 70X and 70Y, and converting it to a pseudo-planar direction and displaying it, as a result, the entire three-dimensional device is obtained. The layout is simulated and displayed as a two-dimensional image, and the board information is superimposed on the layout and combined so that the position of the board can be visually and intuitively recognized. But,
In this way, means for expressing a three-dimensional device layout in a three-dimensional image, for example, as in a perspective view, is provided to display the three-dimensional image and combine the image with substrate information. For example, the position of the substrate in each processing unit and each processing unit can be more visually and intuitively recognized. If represented by a three-dimensional image, the layout in the height direction of the device can be more easily understood. In the apparatus configuration shown in FIG. 1, the respective processing units of the respective processing units 10, 30, 60, and 80 are arranged in a horizontal direction, and the transport direction of the substrate is also horizontal. In this case, on the outbound side, the height of the conveyor before the carry-in portion of the dewatering bake unit 20 (all the processing units of the cleaning unit 10 and the passage portion of the post-baking unit 70), and after the carry-out portion of the dewatering bake unit 20 ( All processing units of the resist coating unit 30 and the pre-bake unit 40
The height of the latter is one step higher than the height of the conveyor at the loading section. On the return side, before the carry-in section of the post-bake unit 70 (the dewatering bake unit 20)
And the height of the conveyor at all the processing sections of the developing unit 60 and the passing section of the pre-bake unit 40), and the height of the conveyor after the unloading section of the post-bake unit 70 (all the processing sections of the conveyor unit 80). Compared to the latter, the latter is one step higher. Such a configuration can be expressed more accurately, and the operator can easily understand the configuration.

In the above embodiment, the graphic data is stored in a plurality of files for each processing unit. However, the graphic data of the entire apparatus is stored in one file, the data is displayed collectively, and the board data is stored. May be displayed together. In the above-described embodiment, the control and management of the passage unit of each bake unit are performed by the CPU of the upstream unit for the sake of simplicity. However, a configuration in which the CPU of another unit controls the passage unit may be used.

[0097]

According to the present invention, the information on the substrates is displayed almost in real time, and is displayed together with the schematic layout of the processing system so as to be superimposed on the layout. It is possible to immediately and reliably recognize the position (processing unit) of which processing unit is present. This makes it possible to appropriately control the transport and processing of the substrate in the substrate processing apparatus. In addition, even when the substrate processing apparatus is accidentally stopped or the like, the position of each substrate can be immediately visually recognized, and the subsequent measures can be appropriately performed.

According to another aspect of the present invention, there is no need to include the processing unit name and the position name in the substrate information transmitted from the substrate processing apparatus, so that the processing for display is simplified in both the substrate processing apparatus and the control apparatus. Be transformed into

[Brief description of the drawings]

FIG. 1 is a plan view of a substrate processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a block diagram of the substrate processing system according to the first embodiment of the present invention.

FIG. 3 is a specific example of the contents of a memory of a processing unit.

FIG. 4 is a specific example of data transmitted from an I / F of a processing unit.

FIG. 5 is a specific example of the contents of a memory of a control device.

FIG. 6 is a specific example of board information displayed on a monitor.

FIG. 7 is a flowchart of displaying substrate information common to each processing unit.

FIG. 8 is a flowchart of displaying board information in the control device.

FIG. 9 is a block diagram of a substrate processing system according to a second embodiment of the present invention.

FIG. 10 is a specific example of data transmitted from an I / F of a processing unit.

FIG. 11 is a specific example of the contents of a memory of a control device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Control apparatus 10-90 Processing unit 10c-90c I / F (transmission means) 10d-90d Sensor (detection means) 210 I / F (reception means) 220 Memory 230 CPU 240 Monitor

Claims (8)

[Claims] 1. A control device for controlling a substrate processing apparatus for performing a predetermined process by moving a substrate between a plurality of processing units, comprising: a receiving unit configured to receive information on a substrate transmitted from each of the processing units; Storage means for storing graphic data for schematically showing the arrangement of the processing units; allocating means for associating the graphic data with the received information of the board; and the allocating means associated with the allocating means A control device for a substrate processing apparatus, comprising: display means for displaying graphic data and information on the substrate. 2. The control apparatus for a substrate processing apparatus according to claim 1, wherein said graphic data includes: a name of each processing unit; and positional information in each processing unit. 3. The substrate processing according to claim 1, wherein the received information on the substrate includes a lot number of a lot to which the substrate belongs, and a substrate number for identifying the substrate in the lot. Equipment control device. 4. The control device for a substrate processing apparatus according to claim 3, wherein the received information on the substrate further includes: a name of each processing unit; and positional information on each processing unit. 5. The control apparatus for a substrate processing apparatus according to claim 1, wherein said reception means receives data between said substrate processing apparatus and said substrate processing apparatus by TCP / IP. 6. A plurality of processing units for performing a predetermined process on a substrate; substrate transport means for moving the substrate between the plurality of processing units; a control device for controlling the processing unit and the transport means;
Wherein each of the processing units has a detecting unit for detecting information on the substrate, and a transmitting unit for transmitting the detected information on the substrate, wherein the control unit transmits the information on the processing unit. Receiving means for receiving the information of the board transmitted from the means, storage means for storing graphic data for schematically showing the arrangement of each processing unit, and the graphic data and the information of the received board Assignment means to be associated;
A substrate processing system comprising: a display unit for displaying the graphic data and the information on the substrate associated with each other by the allocating unit. 7. The substrate processing system according to claim 6, wherein said detection means is a sensor for position detection. 8. A detecting means, comprising: a commanding means for outputting a signal for commanding the movement of the substrate to the substrate transporting means; and a reading means for receiving information from the commanding means and calculating information on the substrate. The substrate processing system according to claim 6, which is configured.