JP2002169118A5 - - Google Patents
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- Publication number
- JP2002169118A5 JP2002169118A5 JP2000368332A JP2000368332A JP2002169118A5 JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5 JP 2000368332 A JP2000368332 A JP 2000368332A JP 2000368332 A JP2000368332 A JP 2000368332A JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000368332A JP4585684B2 (en) | 2000-12-04 | 2000-12-04 | Acousto-optic device stationary system in laser beam lithography system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000368332A JP4585684B2 (en) | 2000-12-04 | 2000-12-04 | Acousto-optic device stationary system in laser beam lithography system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002169118A JP2002169118A (en) | 2002-06-14 |
| JP2002169118A5 true JP2002169118A5 (en) | 2007-12-27 |
| JP4585684B2 JP4585684B2 (en) | 2010-11-24 |
Family
ID=18838604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000368332A Expired - Fee Related JP4585684B2 (en) | 2000-12-04 | 2000-12-04 | Acousto-optic device stationary system in laser beam lithography system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4585684B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007144951A (en) * | 2005-11-30 | 2007-06-14 | Ricoh Co Ltd | Image forming apparatus |
| DE102007053199A1 (en) * | 2007-11-06 | 2009-05-14 | Leica Microsystems Cms Gmbh | Device and method for controlling an acousto-optic component |
| US8593722B2 (en) * | 2011-07-05 | 2013-11-26 | Electro Scientific Industries, Inc. | Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4890539A (en) * | 1972-03-01 | 1973-11-26 | ||
| JPS6173920A (en) * | 1984-09-19 | 1986-04-16 | Fuji Photo Film Co Ltd | Stabilizing device for quantity of laser exposure |
| JPS61189575A (en) * | 1985-02-19 | 1986-08-23 | Canon Inc | Image forming device |
| JPS6319962A (en) * | 1986-07-12 | 1988-01-27 | Konica Corp | Picture recording device utilizing stepping motor |
| JPS63231313A (en) * | 1987-03-19 | 1988-09-27 | Asahi Glass Co Ltd | Acoustooptic element |
| JPS63316877A (en) * | 1987-06-19 | 1988-12-26 | Fujitsu Ltd | Image forming device |
| DE19827140C2 (en) * | 1998-06-18 | 2002-12-12 | Zeiss Carl Jena Gmbh | Laser scanning microscope with AOTF |
| DE10029167B8 (en) * | 2000-06-19 | 2015-07-02 | Leica Microsystems Cms Gmbh | Method and device for temperature stabilization of optical components |
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2000
- 2000-12-04 JP JP2000368332A patent/JP4585684B2/en not_active Expired - Fee Related