JP2002164685A - Vacuum processing system and electromagnetic shield unit and inclination coil spring - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a vacuum processing system performing processing by generating an electric field in a vacuum container, e.g. a plasma processing system, in which electromagnetic shield effect is ensured over a long term without damaging vacuum shield effect. SOLUTION: Along the joint between a container body 2 constituting a vacuum container 1 and a cover 3, an electromagnetic shield member 7 comprising an O-ring 6 for sustaining vacuum state in the vacuum container 1 and an inclination coil spring obtained by winding a wire or a thin band material while inclining along a face inclining against a face perpendicular to the core of coil.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum processing apparatus for performing processing by generating an electric field in a vacuum vessel such as a plasma processing apparatus, an electromagnetic shield device in various apparatuses, and a gradient coil spring which can be suitably used for them. It is about.

[0002]

2. Description of the Related Art In a plasma processing apparatus such as a dry etching apparatus, a sputtering apparatus, and a plasma CVD apparatus, and other vacuum processing apparatuses that perform processing by generating an electric field in a vacuum container, a container body and a lid constituting the vacuum container are provided. At the joint with the body, the seal part for maintaining the vacuum state in the vacuum vessel and the conduction state between the container body and the lid body are ensured to reduce the effects of electromagnetic wave leakage and disturbance from the joint. An electromagnetic shield part for prevention is provided.

[0003] Generally, a seal portion is provided with an O-ring groove in an annular shape.
The electromagnetic shield is configured by disposing a ring, and the electromagnetic shield portion is configured by disposing an electromagnetic shield member in the annular groove. As a conventional electromagnetic shield member 31, as shown in FIG. 9, a member in which a tubular mesh-shaped conductor 33 is covered on a string-like elastic body 32 made of urethane foam, rubber, or the like is used. Also, as shown in FIG. 10A, a cylindrical coil spring 34 made of a round wire 35 is used, and as shown in FIG. 10B, a cylindrical coil spring 36 made of a thin strip 37 is also proposed. Have been.

[0004]

However, in a plasma processing apparatus or the like, since plasma is generated in a vacuum vessel for processing, a certain amount of heat is generated and the temperature of the shield rises. The string-shaped elastic body 32 of the member 31 is set by thermal creep (permanently deformed), the pressure contact force between the container body and the lid is reduced, and poor conduction between the two occurs, and the electromagnetic shielding function is reduced. However, there is a problem that the plasma becomes unstable and the processing becomes non-uniform.

Further, the mesh-shaped conductor 33 is liable to form a small piece due to a part of the conductor being broken, being caught when arranging it in a groove or being bitten when joining a lid. However, there is also a problem that the small pieces may get into the vacuum vessel and become dust, or may cause contamination.

On the other hand, when the coil springs 34 and 36 as shown in FIGS. 10A and 10B are used, the above problem can be solved because the life is long and dust is hardly generated. Because it is elastically deformed and arranged to be crushed in the direction perpendicular to the coil axis, the reaction force is extremely large,
Due to the reaction force, the lid of the vacuum vessel is pushed up though it is minute, and there is a problem that the vacuum sealing effect by the O-ring is lost.

SUMMARY OF THE INVENTION In view of the above-mentioned conventional problems, the present invention provides a vacuum processing apparatus capable of securing an electromagnetic shielding effect for a long period of time without impairing the vacuum sealing effect, an electromagnetic shielding apparatus for various apparatuses, and a gradient coil spring used therein. It is intended to provide.

[0008]

SUMMARY OF THE INVENTION A vacuum processing apparatus of the present invention is a vacuum processing apparatus for performing processing by generating an electric field in a vacuum vessel such as a plasma processing apparatus. Along with the sealing member for maintaining a vacuum state in the vacuum container, a wire or a thin strip is wound so as to be substantially along an inclined surface with respect to a surface perpendicular to the coil axis. An electromagnetic shield member composed of a gradient coil spring is disposed, and when the gradient coil spring of the electromagnetic shield member is pressed between both members constituting the vacuum vessel, the gradient coil spring is inclined and wound. As a result, the inclined coil spring is deformed so that the surface on which each orbital portion exists falls down in the direction of the coil axis, rather than deforming the shape of each orbital portion. Raw Therefore, the shape of both members can be reliably contacted in a state where the reaction force is small, the conduction state between both members can be secured without impairing the vacuum sealing effect by the sealing member, and there is no danger of generating heat creep and the like. Therefore, the electromagnetic shielding effect can be ensured for a long time.

In the joint between the members constituting the vacuum vessel, an annular groove is formed in the joint surface of one member, and the joint surface of the other member is configured to cover the opening on the annular groove. When the inclined coil spring is arranged continuously inside
Since the inclined coil spring is held in the annular groove and continuously arranged with appropriate contact with both members, both members are reliably conducted over the entire circumference of the joint surface, and a large electromagnetic shielding effect with high reliability Is obtained.

[0010] Further, at the joint between the members constituting the vacuum vessel, an annularly continuous or intermittent groove is formed in the joint surface of one member, and the joint surface of the other member covers the opening on the groove. When the inclined coil spring is intermittently arranged in the groove, the joining surfaces of both members are intermittently conducted over the entire circumference, so that the required electromagnetic shielding effect can be obtained, and the inclined coil spring can be easily manufactured, and the cost can be reduced. It can be reduced.

Further, when the winding inclination angle of the wire relative to the coil axis in the inclined coil spring is set to 10 ° to 60 °, preferably 30 ° to 45 °, a state in which deformation upon pressing is easy and a small reaction force is generated. Thus, the conduction state can be secured.
That is, when the winding inclination angle is 10 ° or less, the shape of each orbital portion is deformed at the time of pressing, so that the pressing force and the reaction force are increased, and if it is 60 ° or more, it becomes difficult to collapse and deform each orbital portion, It is difficult to obtain the above-mentioned effects.

Further, in the electromagnetic shield device according to the present invention, at the joint between the members constituting the housing, a groove is formed continuously or intermittently in the joint surface of one member in an annular shape, and the joint surface of the other member is formed. An electromagnetic shield comprising an inclined coil spring in which a wire or a thin plate is wound so as to cover the opening on the groove and is inclined substantially along a surface inclined with respect to a surface substantially perpendicular to the coil axis. Since the members are arranged in the grooves, conduction at the joints between the members constituting the housing of various devices can be ensured, and the electromagnetic shielding effect can be obtained in the same manner as described above.

Further, in the inclined coil spring according to the present invention, the wire or the thin plate is wound so as to be inclined substantially along a surface inclined with respect to a surface substantially perpendicular to the coil axis. It can be effectively used as an electromagnetic shield member as described above.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a plasma processing apparatus according to an embodiment of the present invention will be described with reference to FIGS.

In FIG. 1, reference numeral 1 denotes a vacuum vessel, which is composed of a vessel body 2 having an upper surface opening made of aluminum or stainless steel whose inner surface is hard anodized, and a lid 3 of the same material for closing the opening. ing. As shown in FIGS. 2 and 3, an annular groove 4 for vacuum sealing is provided on the inner peripheral side, and an annular groove for electromagnetic shielding is provided on the outer peripheral side, on the joint surface of the upper end of the peripheral wall of the container body 1 with the lid 3. 5 are formed. The vacuum container 1 may be a cylindrical container having a planar circular shape as shown in FIG. 3A, or a box-shaped container having a rectangular planar shape as shown in FIG. 3B. An O-ring 6 is housed and arranged in the annular groove 4 on the inner peripheral side. The O-ring 6 is pressed and compressed by the lower surface of the lid 3 to generate a predetermined sealing pressure, and the gap between the container body 2 and the lid 3 is generated. The vacuum seal at the joint is secured. An electromagnetic shield member 7 is housed and arranged in the annular groove 5 on the outer peripheral side. The electromagnetic shield member 7 is pressed and deformed, and the bottom surface of the annular groove 5 and the lower surface of the lid 3 are reliably brought into contact with the reaction force,
The continuity between the container body 2 and the lid 3 is ensured.

A lower electrode 8, which is also a substrate mounting table, is provided at a lower portion in the vacuum vessel 1, and a substrate 9 to be processed is provided. On top of the lower electrode 8, the upper electrode 1
0, and a matching tuner 1
2 are connected. The high frequency power supply 13 is also connected to the lower electrode 8. The vacuum vessel 1 is grounded,
The lower electrode 8 and the upper electrode 10 are supported by the vacuum vessel 1 via an insulator 14.

Further, the vacuum vessel 1 is provided with a vacuum exhaust system (not shown) and a gas introduction system (not shown), and exhausts while supplying an appropriate working gas into the vacuum vessel 1. Thus, the inside of the vacuum vessel 1 is maintained at an appropriate pressure.

In the above-described configuration, the high-frequency power supply 11 is connected to the upper electrode 10 while evacuating while supplying an appropriate working gas into the vacuum container 1 and maintaining the inside of the vacuum container 1 at an appropriate pressure.
When a high-frequency voltage is applied, plasma is generated between the upper electrode 10 and the lower electrode 8, and the substrate 9 placed on the lower electrode 8 can be subjected to plasma processing such as etching. At this time, a high-frequency voltage is also applied to the lower electrode 8 by the high-frequency power supply 13 so that the substrate 9 to be processed is
Can be controlled.

In the above-described vacuum vessel 1 of the plasma processing apparatus, the electromagnetic shield member 7 of the present embodiment is different from that of FIG.
As shown in (a) and (b), an inclined coil spring in which a wire 16 is wound in such a manner that it is inclined substantially along a plane R inclined at an angle θ ° to a plane Q perpendicular to the coil axis O. 15. FIG. 4 shows that the wire 16 is wound in a cylindrical coil shape having a center diameter D, and the wire 16 is rotated in the direction of the coil axis O by θ.
It shows an example in which the cross section is flattened to form a flat elliptical shape when tilted. In addition, since the wire 16 is spirally wound, each circling portion does not lie on a plane, and the meaning that it substantially follows the inclined surface R means an average distance from each portion of the circulating portion. Is assumed to be the closest virtual plane R, and each orbital portion is understood to be substantially along the surface R. The angle θ ° is 10 ° to 60 °, preferably 30 °.
° to 45 °. Also, the inclined coil spring 1
The center diameter D of 5 depends on the size of the planar shape of the vacuum vessel 1 and is about 2 to 15 mm, preferably about 5 to 10 mm. If it is less than 2 mm, it is difficult to obtain a sufficient conduction state due to insufficient contact area. Conversely, if it exceeds 15 mm, a large arrangement space is required, which is not preferable.

As shown in FIG. 5A, for example, such a tilted coil spring 15 winds a wire 16 before quenching around a normal cylindrical coil 17 and turns the coil 17 as shown by an arrow 19. A load in an oblique direction is applied, and a load in a shear direction along the coil axis direction is applied to the top and bottom of the coil 17 to restrain the coil 17 in an inclined state as shown in FIG. Plastically deformed gradient coil 18
Is formed and quenched in that state.

As a method of forming the inclined coil 18 by plastically deforming the coil 17 into an inclined shape, as shown in FIG. 6, a cylindrical coil 1 wound with a wire 16 is used.
7 is inserted into a cored bar 20 having a notched flat portion 21 formed on the upper portion thereof, and these are housed in a receiving groove 2 formed in a support die 22.
3 and pressurizing tool 24 from above bearing metal mold 22.
By pressing in such a manner that the coil 17 is slid in the coil axis direction, the inclined coil 18 in which the coil 17 is inclined at the required angle θ ° can be formed. Furthermore, the core metal 20
The upper end of the notch flat portion 21 is projected from the upper end surface of the supporting die 22 by δ, and the coil 17
The wire 16 at the upper end of the coil 17 is compressed and plastically deformed, so that the coil 17 can be plastically deformed in an inclined shape with the plastic deformation. The notch flat portion 21 has a circular arc surface on both sides and a smooth metal core 2.
The notch flat portion 21 is not necessarily a perfect flat surface, but may be formed of an arc surface having a radius of curvature larger than the radius of the cored bar 20.

Further, as shown in FIG. 7 (a), an external force is applied to the coil 17 formed by winding the wire into a cylindrical shape so as to shear the coil 17 along the axial direction of the coil as described above to cause plastic deformation. When the gradient coil 18 is to be formed as shown in FIG. 7B, the winding pitch of the coil is set to P, the winding inclination angle is set to θ, and each winding part is sequentially shifted by g = Psin θ. Therefore, the gradient coil 18 can be formed by plastic deformation without difficulty by loosening the coil by the amount of displacement g, thereby preventing the gradient coil 18 from being twisted. By doing so, quenching can be performed with good workability thereafter.

As shown in FIG. 8, a core metal 25 having an inclined step 27 formed at one end of a shaft 26 having a circular or flat elliptical cross section and an engaging groove 28 for the wire 16 is formed.
, One end of the wire 16 is engaged with the locking groove 28 and wound around the outer periphery of the shaft body 26 along the inclined step portion 27. The gradient coil 18 may be manufactured by forming the gradient coil 18 by winding sequentially along the gradient coil 18 and hardening the gradient coil 18.

According to the plasma processing apparatus having the above configuration,
The inclined coil spring 15 of the electromagnetic shield member 7 is
When the inclined coil spring 15 is pressed between the container body 2 and the lid 3, the inclined coil spring 15 is wound obliquely. However, since the surface on which each orbital portion is present is deformed so as to fall in the direction of the coil axis, the deformation easily occurs with a remarkably small pressing force. Between the container body 2 and the lid 3 without impairing the vacuum sealing effect of the O-ring 6 arranged in the annular groove 4 for sealing. The conduction state can be secured.
Thus, like the container body 2, the entire lid 3 can be reliably set to the ground potential, a high electromagnetic shielding effect can be ensured, and there is no possibility of causing thermal creep or the like. Can be maintained.

The winding inclination angle of the wire 16 with respect to the coil axis in the inclined coil spring 15 is 10 ° to 60 °,
Since the angle is preferably set to 30 ° to 45 °, the conductive state can be secured in a state where deformation at the time of pressing is easy and a small reaction force is generated. If the winding inclination angle is 10 ° or less, the shape of each orbital portion is deformed at the time of pressing, so that the pressing force and the reaction force increase, and if it is 60 ° or more, it becomes difficult for the orbital portion to fall over itself.

An electromagnetic shield member 7 composed of an inclined coil spring 15 is provided in an annular groove 5 formed on the joint surface of the container body 2.
Are arranged continuously, and the lower surface of the lid 3 covers the opening of the annular groove 5, so that the inclined coil spring 15 is held in the annular groove 5 over the entire circumference of the joint surface between the container body 2 and the lid 3. Both the main body 2 and the lid 3 are appropriately brought into contact with each other, both are reliably conducted, and a large electromagnetic shielding effect can be obtained with high reliability.

In the above description of the embodiment, as shown in FIG. 3 (a), an electromagnetic coil comprising an inclined coil spring 15 which is continuous over the entire circumference in the annular groove 5 at the joint between the container body 2 and the lid 3 is shown. An example in which the shield member 7 is arranged is shown in FIG.
(B) As shown in FIG.
May be arranged in the annular groove 5 by connecting the electromagnetic shield member 7 through an appropriate spacer 29. Further, instead of the annular groove 5 continuous over the entire circumference, the intermittent groove may be connected to the entire circumference of the joint. The inclined coil springs 15 having an appropriate length may be arranged in each of the intermittent grooves. Also in this case, the joint surface between the container body 2 and the lid 3 is intermittently conducted over the entire circumference, a required electromagnetic shielding effect is obtained, and the long inclined coil spring 15 is not required. 15 can be easily manufactured, and the cost can be reduced.

Although the above-mentioned inclined coil spring 15 is exemplified by a wire wound with a circular cross section, a wire having an arbitrary cross section can be used, and a thin wire as shown in FIG. A strip may be used.

In the above description, an example is shown in which the O-ring 6 as the sealing member is disposed on the inner peripheral side and the electromagnetic shield member 7 is disposed on the outer peripheral side. However, the present invention is not limited to this. Although it may be disposed, it is preferable to dispose the seal member on the inner peripheral side because the possibility of dust entering the vacuum vessel 1 can be reduced.

Further, in the above-described embodiment, a parallel plate type plasma processing apparatus of a capacitive coupling type has been exemplified as a plasma processing apparatus. However, a high frequency voltage is applied to a coil or an antenna disposed outside a vacuum vessel to apply a vacuum. An electromagnetic wave is introduced into the vacuum vessel through a dielectric plate constituting a part of the vessel wall, and an inductively coupled plasma processing apparatus that generates plasma in the vacuum vessel, or a vacuum vessel using a permanent magnet or an electromagnet. The same effect can be obtained in a vacuum vessel such as a magnetron plasma processing apparatus in which a magnetic field is formed by applying the electromagnetic shield device according to the present invention.

Also, the contents of the plasma processing can be applied to vacuum containers of various plasma processing apparatuses for performing dry etching, film formation by sputtering or plasma CVD, and modification of the thin film surface.

Further, in the above description, an example in which a sealing member and an electromagnetic shield member are used in combination in a vacuum processing apparatus such as a plasma processing apparatus in which an electric field is generated in a vacuum vessel has been described. The tilted coil spring is applied to the joints of the housings of various devices such as microwave ovens, IH cookers and electronic rice cookers that do not use a vacuum container, and the joints between the opening of the housing and the door. In addition, conduction between the joints in the housing can be ensured, and a high electromagnetic shielding effect can be achieved.

[0033]

According to the vacuum processing apparatus of the present invention, the sealing member for maintaining the vacuum state in the vacuum vessel along the joint between the members constituting the vacuum vessel as described above, and the coil shaft Since an electromagnetic shield member made of an inclined coil spring in which a wire or a thin strip is wound so as to be substantially along an inclined surface with respect to a surface perpendicular to the core, the inclined coil of the electromagnetic shield member is provided. When the spring is pressed between both members constituting the vacuum vessel, the inclined coil spring is deformed so that the surface on which each orbital portion exists falls in the direction of the coil axis, and the shape of both members is reduced in a state where the reaction force is small. The contact between the two members can be secured without impairing the vacuum sealing effect of the sealing member, and there is no danger of thermal creep, etc., and the electromagnetic shielding effect can be secured for a long period of time. That.

Further, an annular groove is formed on the joining surface of one member constituting the vacuum vessel, and the joining surface of the other member is configured to cover the opening on the annular groove. When disposed, the inclined coil spring is held in the annular groove and continuously arranged in a state of appropriately contacting the two members, so that both members are reliably conducted over the entire circumference of the joint surface, and large with high reliability. An electromagnetic shielding effect can be obtained.

[0035] Further, an annular continuous or intermittent groove is formed in the joint surface of one member constituting the vacuum vessel, and the joint surface of the other member is formed so as to cover the opening on the groove. When the springs are intermittently arranged, the joining surfaces of the two members are intermittently conducted over the entire circumference, so that the required electromagnetic shielding effect can be obtained, and the inclined coil spring can be easily manufactured, and the cost can be reduced.

Further, by setting the winding inclination angle of the wire relative to the coil axis in the inclined coil spring to 10 ° to 60 °, preferably 30 ° to 45 °, deformation at the time of pressing is easy and small reaction force is reduced. The conduction state can be ensured in the state where it occurs.

Further, according to the electromagnetic shield device of the present invention, at the joint between the members constituting the casing, a groove is formed continuously or intermittently at the joint surface of one member and an annular groove is formed on the other member. The joining surface is configured to cover the opening on the groove, and the electromagnetic shield member made of the inclined coil spring is arranged in the groove, so that conduction at the joining portion between members constituting the housing of various devices is ensured. The electromagnetic shielding effect can be obtained in the same manner as described above.

According to the inclined coil spring of the present invention,
Since the wire or the thin strip is wound so as to be inclined substantially along a surface that is inclined with respect to a surface substantially perpendicular to the coil axis, to be effectively used as an electromagnetic shielding member as described above. Can be.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view illustrating a schematic configuration of a plasma processing apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged detail view of a portion A in FIG. 1;

FIG. 3 is a plan view taken along the line BB of FIG. 1 showing two examples of a state of disposing a seal member and an electromagnetic shield member in the embodiment.

FIGS. 4A and 4B show a tilted coil spring of the embodiment, wherein FIG. 4A is a longitudinal sectional view and FIG. 4B is a side view.

FIG. 5 is an explanatory diagram of a step of forming the inclined coil spring of the embodiment.

FIG. 6 is a vertical sectional side view of a forming step of the inclined coil spring of the embodiment.

FIG. 7 is an explanatory diagram of a step of forming the inclined coil spring of the embodiment.

FIG. 8 is an explanatory diagram of another forming step of the gradient coil spring of the embodiment.

FIG. 9 is a perspective view of a conventional electromagnetic shield member.

FIG. 10 is a perspective view of another two electromagnetic shield members of the conventional example.

[Description of Signs] 1 Vacuum container 2 Container body 3 Lid 5 Annular groove 6 O-ring (seal member) 7 Electromagnetic shield member 15 Inclined coil spring 16 Wire rod

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification code FI Theme coat ゛ (Reference) H01L 21/3065 H05H 1/46 A H05H 1/46 H01L 21/302 C F-term (Reference) 3E084 AA02 AA05 AA12 AA22 AA23 AB10 BA01 CA01 CA03 CC01 CC02 FA09 GA08 GB12 HA04 HB08 HC02 HD01 JA20 4K030 FA01 KA10 KA30 KA32 KA45 5E321 AA03 BB44 CC09 GG05 5F004 BA04 BB29 BC01

Claims (6)

[Claims] 1. A vacuum processing apparatus, such as a plasma processing apparatus, which generates an electric field in a vacuum vessel and performs a process, for maintaining a vacuum state in the vacuum vessel at a joint between members constituting the vacuum vessel. A seal member and an electromagnetic shield member composed of an inclined coil spring in which a wire or a thin plate is wound so as to be substantially along an inclined surface with respect to a surface perpendicular to the coil axis are annularly arranged. A vacuum processing apparatus characterized in that: 2. A joining portion between members constituting a vacuum vessel, wherein an annular groove is formed in a joining surface of one member, and a joining surface of the other member is configured to cover an opening on the annular groove. 2. The vacuum processing apparatus according to claim 1, wherein inclined coil springs are continuously arranged in the inside. 3. A joint portion between members constituting a vacuum vessel, wherein a continuous or intermittent groove is formed annularly on a joint surface of one member, and a joint surface of the other member covers an opening on the groove. 2. The vacuum processing apparatus according to claim 1, wherein the inclined coil spring is intermittently arranged in the groove. 4. The winding inclination angle of the wire relative to the coil axis in the inclined coil spring is 10 ° to 60 °, preferably 30 °.
The vacuum processing apparatus according to any one of claims 1 to 3, wherein the angle is set to? 5. A joining portion between members constituting a housing, wherein a groove is formed in a ring shape continuously or intermittently with a joining surface of one member, and a joining surface of the other member covers an opening on the groove. An electromagnetic shield member composed of an inclined coil spring in which a wire or a thin strip is wound so as to be substantially along an inclined surface with respect to a surface perpendicular to the coil axis is disposed in the groove. An electromagnetic shielding device characterized by the above. 6. An inclined coil spring, wherein a wire or a thin strip is wound so as to be inclined substantially along a plane inclined with respect to a plane perpendicular to the coil axis.