JP2002162354A - Optical sensor of oxygen and pressure having for very fast responding function - Google Patents
Optical sensor of oxygen and pressure having for very fast responding functionInfo
- Publication number
- JP2002162354A JP2002162354A JP2000359554A JP2000359554A JP2002162354A JP 2002162354 A JP2002162354 A JP 2002162354A JP 2000359554 A JP2000359554 A JP 2000359554A JP 2000359554 A JP2000359554 A JP 2000359554A JP 2002162354 A JP2002162354 A JP 2002162354A
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- JP
- Japan
- Prior art keywords
- oxygen
- pressure
- function
- sensor
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- Force Measurement Appropriate To Specific Purposes (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は酸素感応色素を用いた光
学的酸素センサー、特に、安定性の高い、高速応答性に
優れた光学的酸素センサーに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical oxygen sensor using an oxygen-sensitive dye, and more particularly to an optical oxygen sensor having high stability and excellent high-speed response.
【0002】[0002]
【従来の技術】従来、酸素センサーとして知られている
酸素感応塗料は、酸素消光性を有する光励起物質を、塩
化ビニル、ポリスチレン等の酸素透過性樹脂に溶かした
ものであった。この塗料を母材に塗布して酸素センサー
とするが、この塗料を用いたセンサーにおいては、光励
起物質と酸素の接触は樹脂内の酸素の拡散現象に依存す
るため、酸素感度が温度に依存したり、圧力変動に対す
る時間応答性が悪いという問題があった。また、低温に
おいては、樹脂の酸素透過性が低下するため、感度が極
めて小さくなり、高層大気環境での微量酸素検出、物体
表面での微小圧力測定や低温風洞での供試体の表面の圧
力分布測定等に利用することは出来なかった。2. Description of the Related Art Conventionally, an oxygen-sensitive paint known as an oxygen sensor has been obtained by dissolving a photoexcitable substance having an oxygen quenching property in an oxygen-permeable resin such as vinyl chloride and polystyrene. This paint is applied to a base material to form an oxygen sensor, but in a sensor using this paint, the contact between the photoexcitable substance and oxygen depends on the diffusion phenomenon of oxygen in the resin, so the oxygen sensitivity depends on the temperature. And poor time response to pressure fluctuations. Also, at low temperatures, the oxygen permeability of the resin decreases, resulting in extremely low sensitivity, detection of trace amounts of oxygen in the upper atmosphere, measurement of minute pressure on the surface of the object, and pressure distribution on the surface of the specimen in the low-temperature wind tunnel. It could not be used for measurement.
【0003】このため、本発明者は、先に光励起物質を
樹脂中に分散させるのではなく、直接に酸素に接触させ
るため、センサー母材表面に多孔質膜を形成し、この多
孔質膜中に直接光励起物質を吸着保持する方法と、この
方法を用いて作成したセンサーを提案した(特許第31
01671号)。この方法によるセンサーは、高い感度
を有し、低温での感度の低下も少ない極めて優れたもの
ではあったが、多孔質膜の形成に適したセンサー母材が
限られること、多孔質膜に光励起物質を吸着させる操作
が、どのような供試体においても容易であるとは云えな
いことなどの問題も残されていた。[0003] For this reason, the present inventor formed a porous film on the surface of a sensor base material in order to directly contact oxygen with the photoexcited substance instead of dispersing the photoexcited substance in the resin. Proposed a method of directly adsorbing and holding a photoexcited substance on a substrate, and a sensor prepared by using this method (Japanese Patent No. 31131).
01671). The sensor by this method has high sensitivity and is extremely excellent with little decrease in sensitivity at low temperature, but the sensor base material suitable for forming the porous film is limited, and the photoexcitation of the porous film is limited. There still remains a problem that the operation of adsorbing a substance is not easy in any specimen.
【0004】[0004]
【発明が解決しようとする課題】本発明は、速い時間応
答性と温度変化の影響を受けない高い酸素感度を有しな
がら、容易に酸素感応膜の形成が可能な高機能感圧塗料
を得ようとするものである。SUMMARY OF THE INVENTION The present invention provides a high-performance pressure-sensitive paint which can form an oxygen-sensitive film easily while having a fast time response and a high oxygen sensitivity which is not affected by temperature changes. It is to try.
【0005】[0005]
【課題を解決するための手段】本発明の光学的酸素及び
圧力センサーは、基板表面に、自己組織化機能を持ち、
かつ、酸素および感圧機能を有する色素によって形成さ
れた薄膜からなることを特徴とする。上記自己組織化機
能を持つ感酸素および感圧機能を有する色素は、励起光
により発光し、分子内にカルボキシル基あるいはスルホ
ン基を持つことを特徴とし、上記基板は金属酸化物層で
あることを特徴とし、酸化アルミニウム、酸化チタン、
酸化鉄などが用いられる。An optical oxygen and pressure sensor according to the present invention has a self-organizing function on a substrate surface.
In addition, it is characterized by comprising a thin film formed of oxygen and a dye having a pressure-sensitive function. The oxygen-sensitive dye having a self-organizing function and the dye having a pressure-sensitive function emit light by excitation light and have a carboxyl group or a sulfone group in a molecule, and the substrate is a metal oxide layer. Features, aluminum oxide, titanium oxide,
Iron oxide or the like is used.
【0006】[0006]
【発明の実施の形態】より具体的には、上記自己組織膜
を形成する色素として、テトラキス(4−カルボキシフ
ェニル)ポルフィリン(TCPP)を、物体基板として
酸化アルミニウムを持ちいた例について説明する。上記
TCPPを溶解したエタノールまたはメタノール溶液
に、サンプル基板として表面に酸化層を有するアルミニ
ウム基板を浸漬することによってその表面に自己組織膜
が形成される。溶液濃度が10-3mol/lの場合、浸漬
時間約10秒でその形成は終わる。表面にTCPPが自
己組織膜を形成した上記基板をアルコール類で洗浄し、
超音波洗浄機によって洗浄することにより、酸素および
圧力センサーを作成することが出来る。More specifically, an example in which tetrakis (4-carboxyphenyl) porphyrin (TCPP) is used as a dye for forming the self-organizing film and aluminum oxide is used as an object substrate will be described. By immersing an aluminum substrate having an oxide layer on the surface as a sample substrate in an ethanol or methanol solution in which the TCPP is dissolved, a self-assembled film is formed on the surface. When the solution concentration is 10 −3 mol / l, the formation is completed in about 10 seconds of immersion. The substrate on which TCPP has formed a self-assembled film on its surface is washed with alcohol,
Oxygen and pressure sensors can be made by cleaning with an ultrasonic cleaner.
【0007】このようにして作成されたセンサーの構造
を図1に模式図として示す。図示のようにカルボキシル
基は金属酸化物表面に結合し、膜表面に酸素感応色素が
配列された自己組織膜が基板表面に形成される。このよ
うに、基板上に、酸素感応色素が表面に密に配列された
自己組織化薄膜が形成されるので、基板に対して強く結
合し、高い安定性を持つセンサーが、極めて簡便に作成
出来、しかも、表面に密に配列する酸素感応色素が、直
接に酸素ガスに接触するので高速応答性が得られる。膜
は自己組織化されるので、複雑な基板表面にも均一に形
成されるという特徴を有する。FIG. 1 is a schematic view showing the structure of the sensor thus produced. As shown, the carboxyl group binds to the surface of the metal oxide, and a self-assembled film having an oxygen-sensitive dye arranged on the surface of the film is formed on the surface of the substrate. In this way, a self-assembled thin film in which the oxygen-sensitive dye is densely arranged on the surface is formed on the substrate, so that a sensor that strongly binds to the substrate and has high stability can be produced extremely easily. In addition, since the oxygen-sensitive dyes densely arranged on the surface come into direct contact with oxygen gas, high-speed response can be obtained. Since the film is self-assembled, it is characterized in that it is uniformly formed on a complicated substrate surface.
【0008】応答速度の計測結果を以下に示す。上記の
センサーを配置した圧力チャンバーを、基準圧力発生装
置により1kPaにし、その状態で電磁弁を開け、大気
圧に開放することにより、ステップ状の圧力変化を作り
だした。圧力チャンバーは約1.5CCと非常に小さ
く、加えて電磁弁に約160Vの高電圧をかけること
で、チャンバー内圧力(P−Pmin)/(Pmax−Pmi
n)変化10%→90%が0.639msecという短
時間で生じるようにした。The measurement results of the response speed are shown below. The pressure chamber in which the above-mentioned sensor was disposed was adjusted to 1 kPa by a reference pressure generator, and in that state, the solenoid valve was opened to open to atmospheric pressure, thereby creating a stepwise pressure change. The pressure chamber is as small as about 1.5 CC. In addition, by applying a high voltage of about 160 V to the solenoid valve, the pressure in the chamber (P-Pmin) / (Pmax-Pmi
n) The change from 10% to 90% was caused in a short time of 0.639 msec.
【0009】計測用励起光源にはキセノンランプを用
い、圧力変化に対応するセンサーの発光を光電子増倍管
により検出し、周波数フィルターを介してオシロスコー
プに電圧値として出力した。励起光用には340〜44
0nmの干渉フィルターを用い、センサーの発光検出用
にはその色素に合った干渉フィルターを用いた。温度に
よる発光状態の変化を見るために、センサー基板温度の
制御のため、ペルチェ素子を用いた。基板温度は、ホル
ダのセンサー近傍に取り付けた熱電対によりモニタし
た。また、比較基準となる圧力変換器には、共振周波数
が500kHzまであるシリコンダイアフラム型の電子
式圧力センサーを用いた。A xenon lamp was used as the excitation light source for measurement, and the light emission of the sensor corresponding to the pressure change was detected by a photomultiplier tube and output as a voltage value to an oscilloscope via a frequency filter. 340 to 44 for excitation light
An interference filter of 0 nm was used, and an interference filter suitable for the dye was used for light emission detection of the sensor. A Peltier device was used to control the temperature of the sensor substrate in order to observe changes in the light emission state due to temperature. The substrate temperature was monitored by a thermocouple attached to the holder near the sensor. Further, a silicon diaphragm type electronic pressure sensor having a resonance frequency up to 500 kHz was used as a pressure transducer serving as a reference for comparison.
【0010】TCPP膜温度が20℃の場合の測定結果
を図2に、電子式圧力センサーの測定結果と共に示す。
この他、TCPP膜温度が30℃、40℃、50℃にお
いても測定したが、その測定結果は上記20℃の場合の
測定結果と重なってしまい、温度による変化は認められ
なかった。このように、TCPP膜の測定結果は温度に
よらず電子式圧力センサーの測定値とほぼ一致してお
り、しかも、3ms周期程度の気圧変動を忠実に検出し
ていることが判る。FIG. 2 shows the measurement results when the temperature of the TCPP film is 20 ° C., together with the measurement results of the electronic pressure sensor.
In addition, the measurement was also performed at a TCPP film temperature of 30 ° C., 40 ° C., and 50 ° C., but the measurement results overlapped with the measurement results of the case of 20 ° C., and no change due to the temperature was observed. Thus, it can be seen that the measurement result of the TCPP film almost coincides with the measurement value of the electronic pressure sensor irrespective of the temperature, and that the pressure fluctuation of about 3 ms period is faithfully detected.
【0011】[0011]
【発明の効果】上記のように、本発明の超高速応答機能
を有する光学的酸素及び圧力センサーは、基板上に自己
組織化膜を形成する酸素感応色素を用いることにより、
安定な光学的酸素および圧力センサーを、容易に作成す
ることが出来、そのセンサーは電子式圧力センサーと同
程度の高速応答性を有する従来に例を見ないセンサーを
得ることが出来た。As described above, the optical oxygen and pressure sensor having an ultra-high-speed response function of the present invention uses an oxygen-sensitive dye which forms a self-assembled film on a substrate.
A stable optical oxygen and pressure sensor could easily be made, and the sensor could obtain an unprecedented sensor with a high-speed response comparable to an electronic pressure sensor.
【図1】本発明の高速応答機能を有する光学的酸素及び
圧力センサーの構造を示す模式図である。FIG. 1 is a schematic view showing the structure of an optical oxygen and pressure sensor having a high-speed response function according to the present invention.
【図2】本発明の光学的酸素及び圧力センサーの高速応
答機能を示す圧力・温度感度試験の結果を示すグラフで
ある。FIG. 2 is a graph showing a result of a pressure / temperature sensitivity test showing a high-speed response function of the optical oxygen and pressure sensor of the present invention.
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F051 AB03 AC04 2G043 AA01 BA09 CA01 EA01 JA03 KA03 KA05 LA02 2G054 AA01 CA08 CE02 EA03 FA19 GE01 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F051 AB03 AC04 2G043 AA01 BA09 CA01 EA01 JA03 KA03 KA05 LA02 2G054 AA01 CA08 CE02 EA03 FA19 GE01
Claims (3)
素および感圧機能を有する色素によって形成された薄膜
からなることを特徴とする超高速応答機能を有する光学
的酸素及び圧力センサー1. An optical oxygen and pressure sensor having an ultra-fast response function, comprising a thin film formed on a substrate surface with a dye having a self-organizing function and an oxygen-sensitive function.
感圧機能を有する色素は、励起光により発光し、分子内
にカルボキシル基あるいはスルホン基を持つものである
ことを特徴とする請求項1の超高速応答機能を有する光
学的酸素及び圧力センサー2. The dye according to claim 1, wherein the dye having an oxygen-sensitive function and the pressure-sensitive function having a self-organizing function emits light by excitation light and has a carboxyl group or a sulfone group in a molecule. Oxygen and pressure sensor with ultra-fast response function
徴とする請求項1の超高速応答機能を有する光学的酸素
及び圧力センサー3. The optical oxygen and pressure sensor having an ultra-fast response function according to claim 1, wherein said substrate is a metal oxide layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2000359554A JP2002162354A (en) | 2000-11-27 | 2000-11-27 | Optical sensor of oxygen and pressure having for very fast responding function |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000359554A JP2002162354A (en) | 2000-11-27 | 2000-11-27 | Optical sensor of oxygen and pressure having for very fast responding function |
Publications (1)
Publication Number | Publication Date |
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JP2002162354A true JP2002162354A (en) | 2002-06-07 |
Family
ID=18831303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2000359554A Pending JP2002162354A (en) | 2000-11-27 | 2000-11-27 | Optical sensor of oxygen and pressure having for very fast responding function |
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JP (1) | JP2002162354A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005233802A (en) * | 2004-02-20 | 2005-09-02 | Yokogawa Electric Corp | Physical quantity measuring instrument and physical quantity calibration method using it |
JP2005283259A (en) * | 2004-03-29 | 2005-10-13 | National Institute Of Advanced Industrial & Technology | Sensor using pressure sensitive material and its manufacturing method |
-
2000
- 2000-11-27 JP JP2000359554A patent/JP2002162354A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005233802A (en) * | 2004-02-20 | 2005-09-02 | Yokogawa Electric Corp | Physical quantity measuring instrument and physical quantity calibration method using it |
JP2005283259A (en) * | 2004-03-29 | 2005-10-13 | National Institute Of Advanced Industrial & Technology | Sensor using pressure sensitive material and its manufacturing method |
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