JP2002160824A - Board carrying arm - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a board carrying arm capable of securely holding a board with a small contact area between a board and a board holding part. SOLUTION: A V-shape board holding part 4 opened at an angle wider than a right angle of each corner part of a glass board 2 is provided at four positions on a installation base 3 to hold four corners of the glass board 2. The installation base 3 is provided with a resist piece suction port 7. With this structure, a contact area between the glass board 2 and the board holding part 4 is smaller than a conventional L-shape board holding part, and the adhesion of the resist to the board holding parts 4 can be reduced, and the resist pieces dried and scattered on the installation base 3 is sucked for elimination. Re-adhesion of the resist pieces to the glass board 2 can be further reduced to improve the yield.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a substrate transfer arm for transferring a rectangular substrate such as a glass substrate for a liquid crystal display to a predetermined place.

[0002]

2. Description of the Related Art FIG. 10 is a plan view showing a main part of a substrate transfer arm conventionally used in a liquid crystal display production line. In the figure, 10 is a conventional substrate transfer arm, 2 is a rectangular glass substrate, 3 is an installation table on which the glass substrate 2 is placed horizontally, and a driving means (not shown)
Is moved to a predetermined place. Reference numeral 44 denotes a substrate holding portion provided at four places on the mounting table 3 and holding four corners of the glass substrate 2. The conventional substrate transport arm 10 transports the glass substrate 2 to predetermined transfer locations while holding the four corners of the glass substrate 2 with the L-shaped substrate holder 44, and raises and lowers pins provided at each transfer location. Was configured to receive the glass substrate 2. On the other hand, as a transfer arm for fixing a substrate without using an L-shaped substrate holding portion, for example, in Japanese Patent Application Laid-Open No. 5-100199, a substrate placed on a mounting table is fixed by a cylindrical stopper and a pressing tool. A transfer arm that holds a substrate by the force of a pinch and a spring has been proposed. Further, Japanese Utility Model Laid-Open Publication No. 5-38890 discloses a mechanism in which a glass substrate is placed on a tapered claw and the substrate is transported.

[0003]

In a conventional substrate transfer arm 10 as shown in FIG. 10, when a glass substrate 2 coated with a resist is transferred on a liquid crystal display production line, for example, The adhered resist adheres to the L-shaped substrate holding portion 44, which is dried,
When peeled off, it becomes a resist piece, is scattered on the mounting table 3, and may adhere again to the glass substrate 2, causing a decrease in yield. Therefore, in order to reduce the adhesion of the resist to the substrate holding unit 44, the glass substrate 2 and the substrate holding unit 4
It was necessary to reduce the contact area of No. 4. Further, the conventional substrate transfer arm 10 requires a long time for cleaning,
There is a problem that the operation rate of the device is low. Also, as disclosed in Japanese Patent Application Laid-Open No. Hei 5-100199, in the method of sandwiching the substrate between the cylindrical stopper and the pressing tool, the contact area between the substrate and the holding portion is small, but there is a problem that the substrate is displaced. . As a method of preventing the substrate displacement, there is a method of fixing the back surface of the substrate with a vacuum pad having a vacuum suction function, but there is a problem that the mechanism of the substrate transfer arm becomes complicated.

Further, as another means for solving the problem of resist adhesion, an edge remover for dissolving the resist adhering to the side surface of the glass substrate 2 with a chemical has been conventionally used. However, when a device is formed up to the end of the glass substrate 2, there is a problem that a pattern defect occurs due to the influence of the edge remover. Edge remover is
In general, a chemical solution is discharged from the front and back surfaces of the substrate to the edge of the substrate. However, when a device is formed at the edge of the substrate as described above, the chemical solution is discharged only from the back surface of the substrate. There is a problem that the resist remains on the side surface of the substrate close to the above.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and can surely hold a substrate, has a small contact area between the substrate and the substrate holding portion, and has a high yield and a low device operation rate. It is an object of the present invention to obtain a substrate transfer arm capable of improving the performance.

[0006]

A substrate transfer arm according to the present invention is provided with a mounting table on which a rectangular substrate is mounted horizontally and holding four corners of the substrate provided at four positions on the mounting table. A substrate holding arm, and a substrate transfer arm provided with a driving means for moving the installation table to a predetermined place, wherein the substrate holding part has a square shape that is wide-angled with respect to a right angle of the substrate corner. It is presented. The substrate holding portion contacts only one side surface of the substrate corner portion and hardly contacts the other side surface. Further, the installation table has a suction port for sucking a resist piece adhered around the installation table. Further, the substrate holding unit has a suction port for sucking a resist piece attached around the substrate holding unit.
Further, the substrate holding unit has a mechanism for discharging a chemical solution for dissolving the resist attached to the substrate holding unit.

[0007] Further, an installation table on which a rectangular substrate is placed horizontally, a substrate holding section provided at a plurality of positions on the installation table to hold the substrate, and a driving means for moving the installation table to a predetermined location are provided. A substrate transfer arm, wherein the substrate holding unit comprises:
It has a substantially columnar or substantially quadrangular prism shape, and holds the substrate in contact with side surfaces near four corners of the substrate. Further, the substrate holding portion has a slope on a side surface on a side in contact with the substrate. Further, an installation table on which a rectangular substrate is placed horizontally, a columnar substrate holding section provided at a plurality of positions on the installation table to hold the substrate, and a driving unit for moving the installation table to a predetermined location are provided. A substrate transfer arm, wherein the substrate holding unit has a mechanism for rotating about a rotation axis parallel to a side surface of the substrate, and dissolves the resist attached to the substrate holding unit when the substrate separates from the substrate holding unit. It rotates while passing through a container filled with a chemical solution.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 (a)
FIG. 3 is a plan view illustrating a main part of the substrate transfer arm according to the first embodiment of the present invention. In the figure, 1 is a substrate transfer arm in the present embodiment, 2 is a rectangular glass substrate, 3 is an installation table on which the glass substrate 2 is placed horizontally, and is set at a predetermined place by a driving means (not shown). Be moved. 4 is the installation base 3
The substrate holding unit is provided at the upper four positions and holds the four corners of the glass substrate 2. The substrate holding unit has a V-shape that is wide-angled with respect to the right angle of the corner of the glass substrate 2. The corner portion of the glass substrate 2 is held in contact with only one side surface and hardly in contact with the other side surface. The substrate transfer arm 1 according to the present embodiment transfers the glass substrate 2 to predetermined transfer locations while holding the four corners of the glass substrate 2 with the V-shaped substrate holding section 4 and is provided at each transfer location. The glass substrate 2 is configured to be received by the lift pins.

According to the present embodiment, the conventional L-shape (see FIG. 10) is obtained by forming the substrate holding portion 4 into a dogleg shape.
The contact area with the glass substrate 2 was smaller than that of the substrate holder 44 of FIG. Therefore, even when the glass substrate 2 on which the resist is applied is transported, the amount of the resist attached to the substrate holding unit 4 can be reduced as compared with the related art. When the resist adhered to the substrate holding unit 4 is dried and peeled, the resist scatters on the mounting table 3 and re-adheres to the glass substrate 2 to cause a decrease in yield. Since the re-adhesion of the resist pieces to the holding unit 4 can be reduced, the yield can be improved. Further, when the glass substrate 2 is placed horizontally, a phenomenon in which the substrate warps and bouncing occurs. However, by holding the four corners by the V-shaped substrate holding portion 4 in the present embodiment, the glass substrate 2 can be prevented.

Note that the substrate holding section 4 in this embodiment is
The shape of the side surface may be such that it is stood perpendicular to the mounting table 3 as shown in FIG. 1B, or the side surface in contact with the glass substrate 2 is inclined as shown in FIG. You may have. Further, as shown in FIG. 2, the setting table 3 of the substrate transfer arm 1 may be made openable and the glass substrate 2 may be delivered at each transfer location. 2A shows a state in which the installation table 3 is closed, and FIG. 2B shows a state in which the installation table 3 is open. In FIG. 2, reference numeral 5 denotes packing provided in the opening / closing section, and reference numeral 6 denotes a cylinder. I have. FIG. 1 shows that the U-shaped substrate holding portion 4 is in contact with only the short side surface of the glass substrate 2, but the arrangement pattern of the substrate holding portion 4 is not limited to this. , FIG. 3 (a)
The substrate holders 4a, 4a arranged diagonally as shown in FIG.
c may hold the side surface on the long side of the glass substrate 2, and similarly, the substrate holding portions 4b and 4d may be arranged to hold the side surface on the short side. Further, as shown in FIG. 3B, the substrate holding portion 4e may hold the glass substrate 2 by point contact without making any contact with any side surface of the glass substrate 2.

Embodiment 2 FIG. 4 is a plan view showing a main part of the substrate transfer arm according to the second embodiment of the present invention. In the figure, reference numeral 7 denotes a suction port provided on the installation table 3 for sucking a resist piece attached to the vicinity of the installation table 3. In the drawings, the same or corresponding parts have the same reference characters allotted, and description thereof will not be repeated. In the present embodiment, as in the first embodiment, in the substrate transfer arm 1 provided with the U-shaped substrate holding portion 4, the mounting table 3 is provided with a resist piece suction port 7 on the mounting table 3 so as to hold the substrate. Since it is possible to reduce the adhesion of the resist to the part 4 as compared with the related art, and to remove the resist pieces that are dried and scattered on the installation table 3 by suction,
The re-adhesion of the resist pieces to the glass substrate 2 can be further reduced, and the yield can be improved.

Embodiment 3 FIG. 5A is a perspective view showing a substrate holding portion of the substrate transfer arm according to Embodiment 3 of the present invention, and FIG. 5B is a sectional view. In the figure, reference numeral 8 denotes a suction port provided on the substrate holding unit 4 for sucking a resist piece adhered around the substrate holding unit 4. In the present embodiment, similar to the first embodiment, in the substrate transfer arm 1 having the U-shaped substrate holding portion 4, the substrate holding portion 4 is provided with a resist suction port 8 to hold the substrate. The adhesion of the resist to the glass substrate 2 can be reduced by reducing the amount of the resist attached to the glass substrate 2 and removing the resist scattered around the substrate holding unit 4 by drying. Can be further reduced, and the yield can be improved.

Embodiment 4 FIG. 6A is a plan view illustrating a main part of a substrate transfer arm according to Embodiment 4 of the present invention, and FIG. 6B is a cross-sectional view illustrating a substrate holding unit. In the figure, 9 is a discharge port for discharging a chemical solution that dissolves the resist attached to the substrate holding unit 4, 10 is a chemical pipe for supplying a chemical solution to the discharge port 9, 11 is a waste liquid port for collecting the discharged chemical solution, and 12 is a waste liquid port. Shows waste tubing. In the figure, the same,
Corresponding parts have the same reference characters allotted, and description thereof will be omitted. In this embodiment, a mechanism for discharging a chemical solution for dissolving the resist attached to the substrate holding unit 4 is provided in the U-shaped substrate holding unit 4. The operation is as follows. After the substrate transfer arm 1 transfers the glass substrate 2 on which the resist is adhered and delivers it to the transfer destination, the substrate transfer arm 1 discharges the chemical solution from the discharge port 9 provided in the substrate holding unit 4, Dissolve the attached resist. The discharged chemical liquid is collected by the waste liquid port 11. A suck-back mechanism is provided in the chemical pipe 10 so that dripping does not occur after the chemical liquid is discharged. According to the present embodiment, the adhesion of the resist can be prevented by the self-cleaning of the substrate holding unit 4, so that the re-adhesion of the resist pieces to the glass substrate 2 can be reduced, and the cleaning time of the substrate transfer arm 1 can be reduced. Since it can be shortened, the yield and the operation rate of the apparatus can be improved.

Embodiment 5 7 (a) and 8 (a)
FIG. 7B is a plan view showing a main part of a substrate transfer arm according to a fifth embodiment of the present invention, and FIGS.
FIGS. 8B and 8C are perspective views showing the substrate holding unit.
In the figure, reference numeral 4f denotes a substantially columnar substrate holding portion provided at a plurality of positions on the mounting table 3 and holds the glass substrate 2, and 4g denotes a similar substantially quadrangular columnar substrate holding portion. In the drawings, the same or corresponding parts have the same reference characters allotted, and description thereof will not be repeated. In the present embodiment, the substantially columnar substrate holding portion 4f or the substantially quadrangular columnar substrate holding portion 4g contacts the side surfaces near the four corners of the glass substrate 2 and holds the glass substrate 2. The contact area between the substrate holding unit and the glass substrate 2 can be reduced as compared with the related art, and the re-adhesion of the resist pieces to the glass substrate 2 can be reduced. The shape of the side surfaces of the columnar or quadrangular columnar substrate holders 4f and 4g is shown in FIG.
As shown in FIG. 8B and FIG. 8B, the shape may be stood perpendicular to the installation table 3, or may be inclined as shown in FIGS. 7C and 8C. The substrate transfer arm using a columnar or quadrangular columnar substrate holder is
It has been proposed in the past (for example, see JP-A-5-1001).
No. 99), conventionally, a substrate is sandwiched and held using a pressing tool. However, by providing a plurality of columnar or quadrangular columnar substrate holding portions 4f and 4g near the corners of the glass substrate 2 as in the present embodiment, the substrate can be held without using a pressing tool. .

Embodiment 6 FIG. 9A is a plan view showing a substrate holding portion of the substrate transfer arm according to Embodiment 6 of the present invention, and FIG. 9B is a side view. In the figure, 4h
Is a column-shaped substrate holding portion provided at a plurality of locations on the mounting table 3 for holding the glass substrate 2, 13 is a rotation axis parallel to the side surface of the glass substrate 2, and 14 is a container filled with a chemical solution for dissolving the resist. is there. In the drawings, the same or corresponding parts have the same reference characters allotted and description thereof will not be repeated. In the present embodiment, the rotation axis 1 parallel to the side surface of the glass
3 is provided, and the substrate transfer arm transfers the glass substrate 2 on which the resist is attached to the transfer destination, and adheres to the substrate holding unit 4h when the glass substrate 2 separates from the substrate holding unit 4h. The resist was rotated while passing through a container 14 filled with a chemical solution for dissolving the resist.
According to the present embodiment, similarly to Embodiment 4, the self-cleaning of the substrate holding unit 4h can prevent the adhesion of the resist, so that the re-adhesion of the resist pieces to the glass substrate 2 can be reduced, and Since the time for cleaning the substrate transfer arm can be shortened, the yield and the operation rate of the apparatus can be improved.

[0016]

As described above, according to the substrate transfer arm of the present invention, the conventional L-shape is obtained by making the shape of the substrate holding portion wide-angled with respect to the right angle of the substrate corner. The contact area between the substrate and the substrate holder is smaller than that of the mold substrate holder, and less resist adheres to the substrate holder when the resist-coated substrate is transported. Adhesion can be reduced, and the yield can be improved.

Further, in a substrate transfer arm having a U-shaped substrate holding portion, a suction port for sucking a resist piece is provided on the installation table or the substrate holding portion, so that the resist is attached to the substrate holding portion. Is reduced as compared with the related art, and the dried resist pieces can be removed by suction, so that the re-adhesion of the resist pieces to the substrate can be further reduced.

Further, in a substrate transfer arm having a U-shaped substrate holding portion, by providing a mechanism for discharging a chemical solution for dissolving the resist to the substrate holding portion, it is possible to reduce the re-adhesion of the resist pieces to the substrate. In addition, the cleaning time of the substrate transfer arm can be shortened, so that the yield and the operation rate of the apparatus can be improved.

[Brief description of the drawings]

FIG. 1 is a plan view and a side view showing a substrate transfer arm according to a first embodiment of the present invention.

FIG. 2 is a plan view showing a substrate transfer arm according to the first embodiment of the present invention.

FIG. 3 is a plan view showing a substrate transfer arm according to the first embodiment of the present invention.

FIG. 4 is a plan view showing a substrate transfer arm according to a second embodiment of the present invention.

FIGS. 5A and 5B are a perspective view and a cross-sectional view illustrating a substrate holding unit of a substrate transfer arm according to a third embodiment of the present invention.

FIG. 6 is a plan view and a cross-sectional view illustrating a substrate transfer arm according to a fourth embodiment of the present invention.

FIG. 7 is a plan view and a perspective view illustrating a substrate transfer arm according to a fifth embodiment of the present invention.

FIG. 8 is a plan view and a perspective view showing a substrate transfer arm according to a fifth embodiment of the present invention.

FIG. 9 is a plan view and a side view showing a substrate holding unit of a substrate transfer arm according to a sixth embodiment of the present invention.

FIG. 10 is a plan view showing a conventional substrate transfer arm.

[Explanation of symbols]

1, 10 substrate transfer arm, 2 glass substrate, 3 mounting table, 4, 4a, 4b, 4c, 4d, 4e, 4f, 4g,
4h, 44 substrate holder, 5 packing, 6 cylinder, 7, 8 suction port, 9 discharge port, 10 chemical pipe, 1
1 waste liquid port, 12 waste liquid piping, 13 rotating shaft, 14 container filled with chemicals.

Continued on the front page F term (reference) 2H088 FA17 FA18 FA30 HA01 3C007 DS01 ES03 ET08 EV03 EV05 EV23 FS01 FT11 HS12 NS09 3F061 AA01 BA03 BB08 BD01 BE03 BE05 BE43 CA01 CB05 DB04 5F031 CA04 CA05 GA06 GA10 GA13 GA14 GA15 GA35 PA35

Claims (8)

[Claims] 1. A mounting table on which a rectangular substrate is placed horizontally, a substrate holder provided at four positions on the mounting table to hold four corners of the substrate, A substrate transfer arm provided with a driving means for moving the substrate to a place, wherein the substrate holding portion has a wide-angled, rectangular shape with respect to a right angle of the substrate corner. Transfer arm. 2. The substrate transfer arm according to claim 1, wherein the substrate holding portion contacts only one side surface of the substrate corner and hardly contacts the other side surface. 3. The substrate transfer arm according to claim 1, wherein the installation table has a suction port for sucking a resist piece attached around the installation table. 4. The substrate according to claim 1, wherein the substrate holding unit has a suction port for sucking a resist piece attached around the substrate holding unit. Transfer arm. 5. The substrate transfer according to claim 1, wherein the substrate holding unit has a mechanism for discharging a chemical solution for dissolving the resist attached to the substrate holding unit. arm. 6. A mounting table on which a rectangular substrate is placed horizontally, a substrate holding section provided at a plurality of positions on the mounting table to hold the substrate, and a drive for moving the mounting table to a predetermined location. A substrate transfer arm provided with means, wherein the substrate holding section has a substantially columnar or quadrangular prism shape, and holds the substrate in contact with side surfaces near four corners of the substrate. Substrate transfer arm. 7. The substrate transfer arm according to claim 1, wherein the substrate holding section has a slope on a side surface on a side in contact with the substrate. 8. A mounting table on which a rectangular substrate is placed horizontally, a columnar substrate holding section provided at a plurality of positions on the mounting table and holding the substrate, and the mounting table placed at a predetermined location. A substrate transfer arm provided with a driving unit for moving,
The substrate holding unit has a mechanism for rotating about a rotation axis parallel to the side surface of the substrate. When the substrate separates from the substrate holding unit, the substrate holding unit is filled with a chemical solution that dissolves the resist attached to the substrate holding unit. A substrate transfer arm that rotates while passing through a container that has been set.