JP2002160105A - Cutting tool made of surface coating cemented carbide having high chipping resistance - Google Patents

Cutting tool made of surface coating cemented carbide having high chipping resistance

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Publication number
JP2002160105A
JP2002160105A JP2000319750A JP2000319750A JP2002160105A JP 2002160105 A JP2002160105 A JP 2002160105A JP 2000319750 A JP2000319750 A JP 2000319750A JP 2000319750 A JP2000319750 A JP 2000319750A JP 2002160105 A JP2002160105 A JP 2002160105A
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JP
Japan
Prior art keywords
layer
thickness
average
cemented carbide
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000319750A
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Japanese (ja)
Other versions
JP4019244B2 (en
Inventor
Takashi Koyama
孝 小山
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Priority to JP2000319750A priority Critical patent/JP4019244B2/en
Publication of JP2002160105A publication Critical patent/JP2002160105A/en
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Publication of JP4019244B2 publication Critical patent/JP4019244B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Powder Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a cutting tool made of surface coating cemented carbide having high surface lubricity against chips. SOLUTION: (a) A Ti compound layer comprising one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer having an average layer thickness of 0.5 to 15 μm as a lower layer, (b) an Al2O3 layer and/or an Al2O3-ZrO2 mixing layer having an average layer thickness of 1 to 15 μm as an intermediate layer, (c) a composite oxide layer of Ti and Al represented by the composition formula (Ti1-WAlW)OX, satisfying W is 0.02 to 0.15 and X is 1.2 to 1.7, and having an average layer thickness of 0.1 to 3 μm as a surface substrate layer, (d) a hard coating layer comprising a Ti nitrogen oxide layer represented by the composition formula TiN1-Y(O)Y, satisfying Y, namely atomic ratio to Ti, is 0.01 to 0.4, and having an average layer thickness of 0.05 to 2 μm as a surface layer are chemically and/or physically deposited on the surface of a WC base cemented carbide substrate with a total average layer thickness of 3 to 30 μm.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、特に各種の鋼や
鋳鉄などの高速切削加工に用いた場合に、硬質被覆層が
すぐれた耐チッピング性を発揮する表面被覆超硬合金製
切削工具(以下、被覆超硬工具という)に関するもので
ある。
The present invention relates to a surface-coated cemented carbide cutting tool (hereinafter referred to as a cutting tool) in which a hard coating layer exhibits excellent chipping resistance, particularly when used for high-speed cutting of various steels and cast irons. , Coated carbide tools).

【0002】[0002]

【従来の技術】一般に、切削工具には、各種の鋼や鋳鉄
などの被削材の旋削加工や平削り加工にバイトの先端部
に着脱自在に取り付けて用いられるスローアウエイチッ
プ、前記被削材の穴あけ切削加工などに用いられるドリ
ルやミニチュアドリル、さらに前記被削材の面削加工や
溝加工、肩加工などに用いられるソリッドタイプのエン
ドミルなどがあり、また前記スローアウエイチップを着
脱自在に取り付けて前記ソリッドタイプのエンドミルと
同様に切削加工を行うスローアウエイエンドミル工具な
どが知られている。
2. Description of the Related Art Generally, cutting tools include a throw-away tip which is detachably attached to a tip of a cutting tool for turning or planing of various materials such as steel and cast iron. Drills and miniature drills used for drilling and cutting of solids, and solid type end mills used for face milling and grooving of the work material, shoulder machining, and the like, and the detachable tip is detachably attached. In addition, a throw-away end mill tool or the like that performs cutting in the same manner as the solid type end mill is known.

【0003】さらに、従来、上記の切削工具として、炭
化タングステン基超硬合金基体(以下、超硬基体とい
う)の表面に、(a)下部層として、0.5〜15μm
の平均層厚を有し、Tiの炭化物(以下、TiCで示
す)層、窒化物(以下、同じくTiNで示す)層、炭窒
化物(以下、TiCNで示す)層、炭酸化物(以下、T
iCOで示す)層、および炭窒酸化物(以下、TiCN
Oで示す)層のうちの1種または2種以上からなるTi
化合物層、(b)中間層として、1〜15μmの平均層
厚を有し、酸化アルミニウム(以下、Al23で示す)
層、および例えば特開昭57−39168号公報や特開
昭61−201778号公報に記載されるAl23の素
地に酸化ジルコニウム(以下、ZrO2で示す)相が分
散分布してなるAl23−ZrO2混合層(以下、Al2
3−ZrO2混合層と云う)のいずれか、または両方、
(c)表面層として、0.05〜2μmの平均層厚を有
するTiN層、以上(a)〜(c)で構成された硬質被
覆層を3〜30μmの全体平均層厚で化学蒸着および/
または物理蒸着してなる被覆超硬工具が知られており、
この被覆超硬工具が、例えば各種低合金鋼や鋳鉄などの
連続切削や断続切削に用いられていることも知られてい
る。また、上記の従来被覆超硬工具において、硬質被覆
層の表面層を構成するTiN層は、自体が黄金色の表面
色調を有することから、工具の使用前と使用後の識別を
容易にするために設けられていることもよく知られると
ころである。
Further, conventionally, as the above-mentioned cutting tool, (a) a lower layer having a thickness of 0.5 to 15 μm
, A carbide layer of Ti (hereinafter, referred to as TiC), a nitride (hereinafter, also referred to as TiN) layer, a carbonitride (hereinafter, referred to as TiCN) layer, a carbonate (hereinafter, referred to as T
iCO) layer and carbonitride (hereinafter TiCN)
O) or one or more of these layers
A compound layer, (b) an intermediate layer having an average layer thickness of 1 to 15 μm, and aluminum oxide (hereinafter referred to as Al 2 O 3 )
Layer and zirconium oxide (hereinafter referred to as ZrO 2 ) phase dispersedly distributed on an Al 2 O 3 substrate described in, for example, JP-A-57-39168 and JP-A-61-201778. 2 O 3 —ZrO 2 mixed layer (hereinafter referred to as Al 2
O 3 referred to -ZrO 2 mixed layer) either or both,
(C) As a surface layer, a TiN layer having an average layer thickness of 0.05 to 2 μm, and a hard coating layer composed of the above (a) to (c) with a total average layer thickness of 3 to 30 μm by chemical vapor deposition and / or
Or coated carbide tools made by physical vapor deposition are known,
It is also known that this coated carbide tool is used for continuous cutting or intermittent cutting of various low alloy steels, cast iron, and the like. In the above-mentioned conventional coated carbide tool, the TiN layer constituting the surface layer of the hard coating layer itself has a golden surface tone, so that it is easy to distinguish the tool before and after use. It is also well-known that it is provided in.

【0004】また、一般に、上記の被覆超硬工具の硬質
被覆層を構成するTi化合物層や、Al23層 および
Al23−ZrO2混合層が粒状結晶組織を有し、かつ
前記Al2O3層はα型結晶構造をもつものやκ型結晶構
造をもつものなどが広く実用に供されるており、さらに
例えば特開平6−8010号公報や特開平7−3288
08号公報に記載されるように、上記被覆超硬工具の硬
質被覆層を構成する前記Ti化合物層のうちのTiCN
層を、層自身の靱性向上を目的として、通常の化学蒸着
装置にて、反応ガスとして有機炭窒化物を含む混合ガス
を使用し、700〜950℃の中温温度域で化学蒸着す
ることにより形成して縦長成長結晶組織をもつようにす
ることも知られている。
In general, a Ti compound layer, an Al 2 O 3 layer and an Al 2 O 3 -ZrO 2 mixed layer which constitute a hard coating layer of the above-mentioned coated carbide tool have a granular crystal structure, and As the Al2O3 layer, those having an α-type crystal structure and those having a κ-type crystal structure are widely used for practical use. Further, for example, JP-A-6-8010 and JP-A-7-3288
08, the TiCN layer of the Ti compound layer constituting the hard coating layer of the coated cemented carbide tool
A layer is formed by chemical vapor deposition at a medium temperature range of 700 to 950 ° C. using a mixed gas containing an organic carbonitride as a reaction gas with a normal chemical vapor deposition apparatus for the purpose of improving the toughness of the layer itself. It is also known to have a vertically elongated crystal structure.

【0005】[0005]

【発明が解決しようとする課題】一方、近年の切削加工
に対する省力化および省エネ化の要求は強く、これに伴
い、切削加工は高速化の傾向にあるが、上記の従来被覆
超硬工具において、特にこれの硬質被覆層の表面層を構
成するTiN層は被削材である各種鋼に対する付着性の
強いものであるため、特に高い発熱を伴う高速切削加工
では、切粉が高温加熱されることと相まって前記TiN
層に強力に付着し、前記TiN層を硬質被覆層から局部
的に剥がし取るように作用するが、この場合前記TiN
層は中間層であるAl23層 およびAl23−ZrO2
混合層に対しても密着性のすぐれたものであることか
ら、これらの中間層を含み、その他の構成層も前記Ti
N層と一緒に局部的に剥がし取られ、この結果刃先にチ
ッピング(微小欠け)が発生し、比較的短時間で使用寿
命に至るのが現状である。
On the other hand, in recent years, there has been a strong demand for labor saving and energy saving for cutting work, and with this, cutting work tends to be accelerated. In particular, since the TiN layer that constitutes the surface layer of the hard coating layer has a strong adhesiveness to various types of steel as a work material, the chip is heated to a high temperature, particularly in high-speed cutting with high heat generation. Combined with the TiN
Strongly adheres to the layer and acts to locally peel off the TiN layer from the hard coating layer;
Layer is an intermediate layer the Al 2 O 3 layer and Al 2 O 3 -ZrO 2
Since it has excellent adhesion to the mixed layer, these intermediate layers are included, and the other constituent layers are also made of the Ti.
At present, the chip is locally peeled off together with the N layer, and as a result, chipping (small chipping) occurs at the cutting edge, which results in a relatively short service life.

【0006】[0006]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、上記の硬質被覆層の表面層がT
iN層で構成された従来被覆超硬工具に着目し、特にこ
れの高速切削加工条件下での耐チッピング性の向上を図
るべく研究を行った結果、 (a)上記の従来被覆超硬工具の硬質被覆層を形成する
に際して、中間層としてのAl23層 およびAl23
−ZrO2混合層を形成した後で、まず、表面下地層と
して、化学蒸着装置にて、反応ガス組成を、体積%で、 TiCl4:0.2〜10%、 AlCl3:0.05〜1%、 CO2:0.1〜10%、 Ar:5〜60%、 H2:残り、 とし、かつ、 反応雰囲気温度:800〜1100℃、 反応雰囲気圧力:4〜70kPa、 とした条件で、0.1〜3μmの平均層厚を有し、か
つ、 組成式:(Ti1-WAlW)OZ、 で表わした場合、厚さ方向中央部をオージェ分光分析装
置で測定して、いずれも原子比で W:0.02〜0.15、 Z:1.25〜1.90、 を満足するTiとAlの複合酸化物層、 を形成し、このTiとAlの複合酸化物層の上に、表面
層として、通常の条件、即ち、反応ガス組成を、体積%
で、 TiCl4:0.2〜10%、 N2:4〜60%、 H2:残り、 とし、かつ、 反応雰囲気温度:800〜1100℃、 反応雰囲気圧力:4〜90kPa、 とした条件で、0.05〜2μmの平均層厚を有するT
iN層を形成すると、この表面層形成時に上記表面下地
層を構成するTiとAlの複合酸化物層の酸素が拡散し
てきてTi窒酸化物層が形成されるようになり、この場
合前記Ti窒酸化物層形成後の表面下地層は、 組成式:(Ti1-WAlW)OX、 で表わした場合、厚さ方向中央部をオージェ分光分析装
置で測定して、いずれも原子比で W:0.02〜0.15、 X:1.2〜1.7、 を満足するTiとAlの複合酸化物層、となり、一方前
記表面層は、同じく厚さ方向中央部をオージェ分光分析
装置で測定して、拡散酸素の割合がTiに対する原子比
で0.01〜0.4、即ち、 組成式:TiN1-Y(O)、 で表わした場合[ただし、(O)は上記表面下地層から
の拡散酸素を示す]、 Y:Tiに対する原子比で0.01〜0.4、 を満足するTi窒酸化物層となり、この結果の上記Ti
窒酸化物層およびTiとAlの複合酸化物層が硬質被覆
層の表面層および表面下地層として化学蒸着および/ま
たは物理蒸着された被覆超硬工具においては、前記表面
下地層が、材質的に同種の前記表面層とは勿論のこと、
これに含有するAlの作用で硬質被覆層の中間層を構成
するAl23層 およびAl23−ZrO2混合層に対し
ても強固に密着すると共に、特に前記Ti窒酸化物層
が、上記TiN層と同等の黄金色の表面色調を具備する
ため、工具の使用前後の識別を可能とし、かつ被削材で
ある各種鋼に対する付着性のきわめて低いものであるた
め、高熱発生を伴う高速切削加工にも高温加熱された切
粉が付着することがなくなることから、切刃のチッピン
グ発生が著しく抑制され、長期に亘ってすぐれた切削性
能を発揮するようになること。 (b)上記(a)の被覆超硬工具の硬質被覆層の表面下
地層を構成するTiとAlの複合酸化物層においては、
中間層を構成するAl23層 およびAl23−ZrO2
混合層との界面部ではTiに比して相対的にAlの含有
割合を高くし、かつ表面層を構成するTiN層との界面
部では反対にAlに比してTiの含有割合を高くする
と、前記中間層および表面層に対する密着性がさらに一
段と向上するようになることから、前記Al23層 お
よびAl23−ZrO2混合層からなる中間層との界面
部ではTiに比して相対的にAlの含有割合を高く、一
方表面層との界面部では反対にAlに比してTiの含有
割合を高くする成分濃度勾配を厚さ方向に連続的および
/または断続的に形成するのが望ましいこと。以上
(a)および(b)に示される研究結果が得られたので
ある。
Means for Solving the Problems Accordingly, the present inventors have
From the above viewpoint, the surface layer of the hard coating layer is T
Focusing on the conventional coated carbide tool composed of the iN layer, a study was carried out to improve the chipping resistance especially under high-speed cutting conditions. As a result, (a) the conventional coated carbide tool In forming the hard coating layer, an Al 2 O 3 layer and an Al 2 O 3
After forming the -ZrO 2 mixed layer, first, as a surface undercoat layer, by chemical vapor deposition apparatus, the reaction gas composition, by volume%, TiCl 4: 0.2~10%, AlCl 3: 0.05~ 1%, CO 2: 0.1~10% , Ar: 5~60%, H2: rest, and then, and, temperature of reaction atmosphere: 800 to 1100 ° C., reaction atmosphere pressure: 4~70KPa, between the conditions, When it has an average layer thickness of 0.1 to 3 μm and is represented by the composition formula: (Ti 1 -W AlW) O Z , the central part in the thickness direction is measured by an Auger spectroscopic analyzer, Forming a composite oxide layer of Ti and Al satisfying the following atomic ratios: W: 0.02 to 0.15 and Z: 1.25 to 1.90. Then, as a surface layer, the usual conditions, that is, the reaction gas composition is
And TiCl 4 : 0.2 to 10%, N 2 : 4 to 60%, H 2 : remaining, and the reaction atmosphere temperature: 800 to 1100 ° C., and the reaction atmosphere pressure: 4 to 90 kPa. , T with an average layer thickness of 0.05 to 2 μm
When the iN layer is formed, oxygen of the composite oxide layer of Ti and Al constituting the surface underlayer diffuses during the formation of the surface layer, and a Ti nitride oxide layer is formed. In this case, the Ti nitride layer is formed. surface underlayer after the oxide layer forming the composition formula: (Ti 1-W Al W ) O X, in the case where expressed, by measuring the thickness direction central portion Auger spectrometer, both in terms of atomic ratio W: 0.02 to 0.15, X: 1.2 to 1.7, and a composite oxide layer of Ti and Al is satisfied. On the other hand, in the surface layer, the central part in the thickness direction is also subjected to Auger spectroscopy. When the ratio of the diffusion oxygen is 0.01 to 0.4 in atomic ratio with respect to Ti as measured by an apparatus, that is, when represented by the composition formula: TiN 1-Y (O), where (O) is the above surface Shows oxygen diffused from the underlayer], Y: 0.01 to 0.4 in atomic ratio to Ti, And a Ti oxynitride layer satisfying
In a coated carbide tool in which a nitrided oxide layer and a composite oxide layer of Ti and Al are chemically and / or physically deposited as a surface layer and a surface underlayer of a hard coating layer, the surface underlayer is materially Not to mention the same kind of surface layer,
Due to the action of Al contained therein, it adheres firmly also to the Al 2 O 3 layer and the Al 2 O 3 -ZrO 2 mixed layer constituting the intermediate layer of the hard coating layer, and in particular, the Ti nitride oxide layer It has a golden surface tone equivalent to that of the above-mentioned TiN layer, which makes it possible to identify before and after the use of a tool, and has extremely low adhesiveness to various steels as a work material, thus causing high heat generation. Chips heated at a high temperature are not adhered to high-speed cutting, so that chipping of the cutting edge is significantly suppressed and excellent cutting performance is exhibited over a long period of time. (B) In the composite oxide layer of Ti and Al constituting the surface underlayer of the hard coating layer of the coated cemented carbide tool of (a),
Al 2 O 3 layer and Al 2 O 3 —ZrO 2 constituting an intermediate layer
At the interface with the mixed layer, the content of Al is relatively higher than that of Ti, and at the interface with the TiN layer constituting the surface layer, the content of Ti is higher than that of Al. , since it becomes adhesion to the intermediate layer and the surface layer further further improved, compared with Ti at the interface portion between the the Al 2 O 3 layer and Al 2 O 3 -ZrO 2 comprising a mixed layer intermediate layer In the thickness direction, a component concentration gradient is formed which continuously and / or intermittently increases the content ratio of Ti at the interface with the surface layer. It is desirable to do. The research results shown in (a) and (b) above were obtained.

【0007】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、(a)下部層
として、0.5〜15μmの平均層厚を有し、TiC
層、TiN層、TiCN層、TiCO層、およびTiC
NO層のうちの1種または2種以上からなるTi化合物
層、(b)中間層として、1〜15μmの平均層厚を有
する、Al23層 およびAl23−ZrO2混合層、
(c)表面下地層として、0.1〜3μmの平均層厚を
有し、かつ、 組成式:(Ti1-WAlW)OX、 で表わした場合、厚さ方向中央部をオージェ分光分析装
置で測定して、いずれも原子比で W:0.02〜0.15、 X:1.2〜1.7、 を満足するTiとAlの複合酸化物層、(d)表面層と
して、0.05〜2μmの平均層厚を有し、かつ、 組成式:TiN1-Y(O)、 で表わした場合[ただし、(O)は上記表面下地層から
の拡散酸素を示す]、同じく厚さ方向中央部をオージェ
分光分析装置で測定して、 Y:Tiに対する原子比で0.01〜0.4、 を満足するTi窒酸化物層、以上(a)〜(d)で構成
された硬質被覆層を3〜30μmの全体平均層厚で化学
蒸着および/または物理蒸着してなる、耐チッピング性
のすぐれた被覆超硬工具に特徴を有するものである。
The present invention has been made based on the results of the above-mentioned research, and comprises: (a) a lower layer having an average layer thickness of 0.5 to 15 μm on the surface of a cemented carbide substrate;
Layer, TiN layer, TiCN layer, TiCO layer, and TiC
A Ti compound layer composed of one or more of NO layers, (b) as an intermediate layer, an Al 2 O 3 layer and an Al 2 O 3 -ZrO 2 mixed layer having an average layer thickness of 1 to 15 μm;
(C) When the surface underlayer has an average layer thickness of 0.1 to 3 μm and is represented by a composition formula: (Ti 1 -W Al W ) O x , the central part in the thickness direction is Auger spectroscopy. A composite oxide layer of Ti and Al satisfying the following atomic ratios: W: 0.02 to 0.15, X: 1.2 to 1.7, as measured by an analyzer, and (d) a surface layer , Having an average layer thickness of 0.05 to 2 μm, and represented by a composition formula: TiN 1-Y (O), wherein (O) represents oxygen diffused from the surface underlayer. Similarly, the central part in the thickness direction is measured by an Auger spectrometer, and the Ti nitride oxide layer satisfies the following expression: an atomic ratio of Y to Ti: 0.01 to 0.4, which is composed of the above (a) to (d) Excellent chipping resistance, obtained by chemically and / or physical vapor-depositing a coated hard coating layer with a total average layer thickness of 3 to 30 μm. The characteristics of the coated coated carbide tool are as follows.

【0008】この発明の被覆超硬工具において、硬質被
覆層の表面層を構成するTi窒酸物層の拡散酸素の割合
(Y値)をTiに対する原子比で0.01〜0.40と
したのは、その値が0.01未満では切粉に対する付着
性抑制に所望の効果を確保することができず、一方その
値が0.40を越えると、層中に気孔が形成され易くな
り、健全な表面層の安定的形成が難しくなるという理由
によるものである。
In the coated cemented carbide tool of the present invention, the ratio (Y value) of diffused oxygen in the Ti nitride layer constituting the surface layer of the hard coating layer is set to 0.01 to 0.40 in atomic ratio to Ti. If the value is less than 0.01, the desired effect of suppressing adhesion to chips cannot be secured, while if the value exceeds 0.40, pores are easily formed in the layer, This is because it is difficult to stably form a sound surface layer.

【0009】また、同じく表面層を構成するTi窒酸化
物層は、上記の通り、まず、表面下地層として、酸素の
(Ti+Al)に対する割合を原子比で1.25〜1.
90(Z値)としたTiとAlの複合酸化物層を形成
し、ついで前記表面下地層の上に通常の条件でTiN層
を蒸着することにより形成されるものであり、したがっ
て前記TiN層形成時における前記表面下地層からの酸
素の拡散が不可欠となるが、前記表面下地層におけるZ
値が1.25未満であると、前記TiN層への酸素の拡
散反応が急激に低下し、表面層における拡散酸素の割合
(Y値)をTiに対する原子比で0.01以上にするこ
とができず、一方同Z値が1.90を越えると、前記表
面層における拡散酸素の割合がTiに対する原子比で
0.40を越えて多くなってしまうことから、Z値を
1.25〜1.90と定めたものであり、この場合表面
層形成後の表面下地層における酸素の割合(X値)は
(Ti+Al)に対する原子比で1.2〜1.7の範囲
内の値をとるようになる、言い換えれば表面層形成後の
表面下地層のX値が1.2〜1.7を満足する場合に、
前記表面層のY値は0.01〜0.40を満足するもの
となるのである。さらに、上記TiとAlの複合酸化物
層からなる表面下地層においては、上記の通りAl23
層および/またはAl23−ZrO2混合層の中間層と
の界面部では相対的にAlの含有割合を高く、一方Ti
窒酸化物層の表面層との界面部では反対にTiの含有割
合を高くすることにより、これら中間層および表面層に
対する密着性が一段と向上したものになるのであるか
ら、厚さ方向中心部における0.02〜0.15のW値
を中心として、これより下側は相対的にW値を高く、上
側は相対的にW値を低くした成分濃度勾配を厚さ方向に
連続的および/または断続的に形成するのが望ましい。
As described above, the Ti nitride oxide layer, which also forms the surface layer, first serves as a surface underlayer, in which the ratio of oxygen to (Ti + Al) is 1.25 to 1.
Forming a composite oxide layer of Ti and Al having a Z value of 90 and then depositing a TiN layer on the surface underlayer under normal conditions. At this time, diffusion of oxygen from the surface underlayer becomes indispensable.
When the value is less than 1.25, the diffusion reaction of oxygen into the TiN layer is rapidly reduced, and the ratio (Y value) of diffused oxygen in the surface layer is set to 0.01 or more in atomic ratio with respect to Ti. On the other hand, if the Z value exceeds 1.90, the proportion of diffused oxygen in the surface layer increases to more than 0.40 in atomic ratio with respect to Ti. In this case, the ratio (X value) of oxygen in the surface underlayer after the formation of the surface layer is set to a value within the range of 1.2 to 1.7 in atomic ratio to (Ti + Al). In other words, when the X value of the surface base layer after the formation of the surface layer satisfies 1.2 to 1.7,
The Y value of the surface layer satisfies 0.01 to 0.40. Furthermore, in the surface underlayer composed of the composite oxide layer of Ti and Al, as described above, Al 2 O 3
At the interface between the layer and / or the intermediate layer of the Al 2 O 3 —ZrO 2 mixed layer, the content of Al is relatively high.
Conversely, by increasing the content of Ti at the interface between the nitrided oxide layer and the surface layer, the adhesion to the intermediate layer and the surface layer is further improved. With the W value of 0.02 to 0.15 as the center, a component concentration gradient in which the lower side has a relatively higher W value and the upper side has a relatively lower W value is continuously and / or in the thickness direction. It is desirable to form it intermittently.

【0010】さらに、同じく硬質被覆層を構成する表面
層および表面下地層の平均層厚を、それぞれ0.05〜
2μmおよび0.1〜3μmとしたのは、その平均層厚
が0.05μm未満および0.1μm未満では、前者に
あっては所望の表面色調(黄金色)を確保することがで
きず、また後者にあっては表面層への酸素供給が不十分
になり、一方前者の色調付与作用は2μm、後者の酸素
供給作用は3μmの平均層厚で十分満足に行うことがで
きるという理由にもとづくものである。
Further, the average layer thickness of each of the surface layer and the surface base layer also constituting the hard coating layer is set to 0.05 to 0.05.
When the average layer thickness is less than 0.05 μm or less than 0.1 μm, the desired surface tone (golden color) cannot be secured in the former case, and the average thickness is less than 0.1 μm. The latter is based on the reason that the oxygen supply to the surface layer is insufficient, while the former provides a color tone of 2 μm and the latter provides an oxygen supply of 3 μm with an average layer thickness of sufficiently satisfactory. It is.

【0011】また、下部層および中間層の平均層厚をそ
れぞれ0.5〜15μmおよび1〜15μmとしたの
は、前者の下部層(Ti化合物層)の平均層厚が0.5
μm未満になると、切刃にチッピングが発生し易くな
り、一方後者の中間層(Al23層 およびAl23
ZrO2混合層)の平均層厚が1μm未満になると、特
に切刃の逃げ面摩耗の進行が促進するようになり、また
前者の平均層厚が15μmを越えると、耐摩耗性が急激
に低下するようになり、一方後者の平均層厚が15μm
を越えると、切刃にチッピングが発生し易くなるという
理由によるものである。さらに、硬質被覆層の全体平均
層厚を3〜30μmとしたのは、その層厚が3μmでは
所望のすぐれた耐摩耗性を確保することができず、一方
その層厚が30μmを越えると、切刃に欠けやチッピン
グが発生し易くなるという理由によるものである。
The reason why the average layer thickness of the lower layer and the intermediate layer is 0.5 to 15 μm and 1 to 15 μm, respectively, is that the average layer thickness of the lower layer (Ti compound layer) is 0.5
When the thickness is less than μm, chipping tends to occur on the cutting edge, while the latter intermediate layer (Al 2 O 3 layer and Al 2 O 3
When the average layer thickness of the ZrO 2 mixed layer) is less than 1 μm, the progress of the flank wear of the cutting edge in particular is accelerated, and when the former average layer thickness exceeds 15 μm, the wear resistance rapidly decreases. And the average layer thickness of the latter is 15 μm
Is exceeded, chipping is likely to occur on the cutting edge. Further, the reason why the total average layer thickness of the hard coating layer is set to 3 to 30 μm is that if the layer thickness is 3 μm, it is not possible to secure a desired excellent wear resistance, and if the layer thickness exceeds 30 μm, This is because chipping and chipping are likely to occur in the cutting blade.

【0012】[0012]

【発明の実施の形態】つぎに、この発明の被覆超硬工具
を実施例により具体的に説明する。 (実施例1)原料粉末として、いずれも0.5〜4μm
の範囲内の所定の平均粒径を有するWC粉末、(Ti,
W)C(重量比で、以下同じ、TiC/WC=30/7
0)粉末、(Ti,W)CN(TiC/TiN/WC=
24/20/56)粉末、(Ta,Nb)C(TaC/
NbC=90/10)粉末、Cr3C2粉末、およびCo
粉末を用意し、これら原料粉末を表1に示される配合組
成に配合し、ボールミルで72時間湿式混合し、乾燥し
た後、100MPaの圧力で所定形状の圧粉体にプレス
成形し、この圧粉体を6Paの真空中、1300〜15
00℃の範囲内の所定温度に1時間保持の条件で真空焼
結することによりISO・CNMG120408に規定
するスローアウエイチップ形状をもった超硬基体(チッ
プ)A〜Fをそれぞれ製造した。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide tool of the present invention will be specifically described with reference to examples. (Example 1) As raw material powders, each was 0.5 to 4 μm.
WC powder having a predetermined average particle size in the range of (Ti,
W) C (weight ratio, hereinafter the same, TiC / WC = 30/7)
0) powder, (Ti, W) CN (TiC / TiN / WC =
24/20/56) powder, (Ta, Nb) C (TaC /
NbC = 90/10) powder, Cr3 C2 powder, and Co
Powders are prepared, and these raw material powders are blended in the composition shown in Table 1, wet-mixed in a ball mill for 72 hours, dried, and then pressed into a green compact having a predetermined shape at a pressure of 100 MPa. The body is placed in a vacuum of 6 Pa, 1300 to 15
Vacuum sintering was performed at a predetermined temperature in the range of 00 ° C. for one hour to produce superhard substrates (chips) A to F having a throw-away chip shape specified in ISO • CNMG120408.

【0013】ついで、これらの超硬基体(チップ)A〜F
の表面に、ホーニングを施した状態で、通常の化学蒸着
装置を用い、表2、3(表2中のl−TiCNは特開平
6−8010号公報に記載される縦長成長結晶組織をも
つTiCN層の形成条件を示すものであり、これ以外は
通常の粒状結晶組織の形成条件を示すものである)に示
される条件にて、表4に示される組成および目標層厚の
Ti化合物層(下部層)、Al23層および/またはA
23−ZrO2混合層(中間層)、さらに拡散酸素供
給用TiとAlの複合酸化物層(表面下地層)および拡
散酸素含有のTi窒酸化物層(表面層)からなる硬質被
覆層を形成することにより図1(a)に概略斜視図で、
同(b)に概略縦断面図で示される形状をもった本発明
被覆超硬工具としての本発明表面被覆超硬合金製スロー
アウエイチップ(以下、本発明被覆超硬チップと云う)
1〜10をそれぞれ製造した。
Next, these super-hard substrates (chips) A to F
Table 2 and Table 3 (l-TiCN in Table 2 is a TiCN having a vertically-grown crystal structure described in JP-A-6-8010) using a conventional chemical vapor deposition apparatus with the surface of Under the conditions shown in Table 4), the Ti compound layer (lower portion) having the composition and the target layer thickness shown in Table 4 was obtained under the conditions shown in Table 4. Layer), an Al 2 O 3 layer and / or A
l 2 O 3 -ZrO 2 mixed layer (an intermediate layer), further composite oxide layer (surface preparation layer) diffusion oxygenating Ti and Al and a diffusion of oxygen-containing Ti oxynitride layer (surface layer) hardcoat FIG. 1A is a schematic perspective view showing the formation of a layer.
(B) a throw-away tip made of a surface-coated cemented carbide of the present invention as a coated carbide tool of the present invention having a shape shown in a schematic longitudinal sectional view (hereinafter, referred to as a coated carbide tip of the present invention).
1 to 10 were manufactured respectively.

【0014】また、比較の目的で、表5に示される通
り、拡散酸素供給用TiとAlの複合酸化物層(表面下
地層)および拡散酸素含有のTi窒酸化物層(表面層)
の形成を行なわず、これに代って表面層としてTiN層
を形成する以外は同一の条件で従来被覆超硬工具として
の従来表面被覆超硬合金製スローアウエイチップ(以
下、従来被覆超硬チップと云う)1〜10をそれぞれ製
造した。
For comparison purposes, as shown in Table 5, as shown in Table 5, a composite oxide layer of Ti and Al for supplying diffusion oxygen (surface underlayer) and a titanium nitride oxide layer containing diffusion oxygen (surface layer)
Under the same conditions, except that a TiN layer is formed as a surface layer instead of a conventional coated carbide tool as a conventional coated carbide tool (hereinafter referred to as a conventional coated carbide chip). 1 to 10 were manufactured respectively.

【0015】この結果得られた本発明被覆超硬チップ1
〜10の硬質被覆層を構成する表面層および表面下地層
について、その厚さ方向中央部の酸素含有割合(Y値お
よびX値)をオージェ分光分析装置を用いて測定したと
ころ、表6に示される値を示した。なお、上記表面下地
層の厚さ方向中央部のAl含有割合(W値)を同じくオ
ージェ分光分析装置を用いて測定したところ、表3に示
される目標値と実質的に同じ値を示した。さらに、上記
の本発明被覆超硬チップ1〜10および従来被覆超硬チ
ップ1〜10のそれぞれの硬質被覆層の構成層の層厚を
走査型電子顕微鏡を用いて断面測定したところ、それぞ
れ目標層厚と実質的に同じ平均層厚(5点平均)を示し
た。なお、上記の目標値と実測値の関係は以下の実施例
2、3でも同じ結果を示した。
The coated carbide tip 1 of the present invention obtained as a result
The oxygen content ratio (Y value and X value) at the center in the thickness direction of the surface layer and the surface underlayer constituting the hard coating layer of Nos. 10 to 10 were measured using an Auger spectrometer. Value shown. When the Al content ratio (W value) of the center portion in the thickness direction of the surface underlayer was measured using an Auger spectrometer, the Al values were substantially the same as the target values shown in Table 3. Further, the thickness of each of the constituent layers of the hard coating layer of each of the coated carbide tips 1 to 10 of the present invention and the conventional coated carbide tips 1 to 10 was measured in cross section using a scanning electron microscope. The average layer thickness was substantially the same as the thickness (average at 5 points). The relationship between the target value and the actually measured value showed the same result in Examples 2 and 3 below.

【0016】つぎに、上記本発明被覆超硬チップ1〜1
0および従来被覆超硬チップ1〜10について、これを
工具鋼製バイトの先端部に固定治具にてネジ止めした状
態で、 被削材:JIS・SCM440の丸棒、 切削速度:350m/min.、 切り込み:1.5mm、 送り:0.25mm/rev.、 切削時間:5分、 の条件での合金鋼の乾式高速連続旋削加工試験、並び
に、 被削材:JIS・SNCM439の長さ方向等間隔4本
縦溝入り丸棒、 切削速度:300m/min.、 切り込み:1.5mm、 送り:0.3mm/rev.、 切削時間:5分、 の条件での合金鋼の乾式高速断続旋削加工試験を行い、
いずれの旋削加工試験でも切刃の逃げ面摩耗幅を測定し
た。この測定結果を表6に示した。
Next, the coated carbide tips 1 to 1 according to the present invention will be described.
0 and the conventional coated carbide tips 1 to 10 were screwed to the tip of a tool steel tool with a fixing jig. Work material: JIS SCM440 round bar, Cutting speed: 350 m / min . Infeed: 1.5 mm Feed: 0.25 mm / rev. , Cutting time: 5 minutes, Dry high-speed continuous turning test of alloy steel under the following conditions: Work material: JIS SNCM439 Lengthwise equally spaced four round bar with longitudinal grooves, Cutting speed: 300 m / min . Infeed: 1.5 mm Feed: 0.3 mm / rev. , Cutting time: 5 minutes, Dry high-speed intermittent turning test of alloy steel under the conditions of
In each turning test, the flank wear width of the cutting edge was measured. Table 6 shows the measurement results.

【0017】[0017]

【表1】 [Table 1]

【0018】[0018]

【表2】 [Table 2]

【0019】[0019]

【表3】 [Table 3]

【0020】[0020]

【表4】 [Table 4]

【0021】[0021]

【表5】 [Table 5]

【0022】[0022]

【表6】 [Table 6]

【0023】(実施例2)原料粉末として、平均粒径:
5.5μmを有する中粗粒WC粉末、同0.8μmの微
粒WC粉末、同1.3μmのTaC粉末、同1.2μm
のNbC粉末、同1.2μmのZrC粉末、同2.3μ
mのCr3C2粉末、同1.5μmのVC粉末、同1.0
μmの(Ti,W)C粉末、同1.8μmのCo粉末、
および同1.2μmの炭素(C)粉末を用意し、これら
原料粉末をそれぞれ表7に示される配合組成に配合し、
さらにワックスを加えてアセトン中で24時間ボールミ
ル混合し、減圧乾燥した後、100MPaの圧力で所定
形状の各種の圧粉体にプレス成形し、これらの圧粉体
を、6Paの真空雰囲気中、7℃/分の昇温速度で13
70〜1470℃の範囲内の所定の温度に昇温し、この
温度に1時間保持後、炉冷の条件で焼結して、直径が8
mm、13mm、および26mmの3種の超硬基体形成
用丸棒焼結体を形成し、さらに前記の3種の丸棒焼結体
から、研削加工にて、表7に示される組合せで、切刃部
の直径×長さがそれぞれ6mm×13mm、10mm×
22mm、および20mm×45mmの寸法をもった超
硬基体(エンドミル)a〜hをそれぞれ製造した。
Example 2 As raw material powder, average particle size:
Medium coarse WC powder having 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, 1.2 μm
NbC powder, 1.2 μm ZrC powder, 2.3 μm
m3 Cr2 powder, 1.5 μm VC powder, 1.0
μm (Ti, W) C powder, 1.8 μm Co powder,
And 1.2 μm carbon (C) powder were prepared, and these raw material powders were respectively blended into the blending compositions shown in Table 7,
Further, the wax was added, and the mixture was ball-milled in acetone for 24 hours, dried under reduced pressure, and press-molded into various compacts having a predetermined shape at a pressure of 100 MPa. 13 ° C / min.
The temperature was raised to a predetermined temperature in the range of 70 to 1470 ° C., maintained at this temperature for 1 hour, and then sintered under furnace cooling conditions to obtain a diameter of 8 mm.
mm, 13 mm, and 26 mm to form three types of round bar sintered bodies for forming a cemented carbide substrate, and from the three types of round bar sintered bodies, by grinding, in a combination shown in Table 7, The diameter x length of the cutting edge is 6mm x 13mm, 10mm x
Carbide substrates (end mills) a to h having dimensions of 22 mm and 20 mm × 45 mm were produced, respectively.

【0024】ついで、これらの超硬基体(エンドミル)
a〜hの表面に、ホーニングを施した状態で、通常の化
学蒸着装置を用い、同じく表2、3に示される条件に
て、表8に示される組成および目標層厚のTi化合物層
(下部層)、Al2O3層および/またはAl2O3−Zr
O2混合層(中間層)、さらに拡散酸素供給用TiとA
lの複合酸化物層(表面下地層)および拡散酸素含有の
Ti窒酸化物層(表面層)からなる硬質被覆層を形成す
ることにより、図2(a)に概略正面図で、同(b)に
切刃部の概略横断面図で示される形状を有する本発明被
覆超硬工具としての本発明表面被覆超硬合金製エンドミ
ル(以下、本発明被覆超硬エンドミルと云う)1〜8を
それぞれ製造した。
Next, these super-hard substrates (end mills)
With the honing applied to the surfaces a to h, a Ti compound layer (lower portion) having a composition and a target layer thickness shown in Table 8 was obtained using an ordinary chemical vapor deposition apparatus under the same conditions shown in Tables 2 and 3. Layer), an Al2O3 layer and / or an Al2O3-Zr
O2 mixed layer (intermediate layer), and Ti and A for diffusion oxygen supply
By forming a hard coating layer composed of a composite oxide layer (surface underlayer) and a diffusion oxygen-containing Ti oxynitride layer (surface layer), a schematic front view in FIG. ) End mills (hereinafter, referred to as coated carbide end mills) 1 to 8 of the surface coated cemented carbide alloy of the present invention as coated carbide tools of the present invention having the shape shown in the schematic cross-sectional view of the cutting edge portion. Manufactured.

【0025】また、比較の目的で、表9に示される通
り、上記の拡散酸素含有のTi窒酸化物層(表面層)お
よび拡散酸素供給用のTiとAiの複合酸化物層(表面
下地層)に代って、TiN層(表面層)を形成する以外
は同一の条件で従来被覆超硬工具としての従来表面被覆
超硬合金製エンドミル(以下、従来被覆超硬エンドミル
と云う)1〜8をそれぞれ製造した。
For comparison purposes, as shown in Table 9, the diffusion oxygen-containing Ti oxynitride layer (surface layer) and the Ti / Ai composite oxide layer for supplying diffusion oxygen (surface underlayer) are shown in Table 9. ) In place of forming a TiN layer (surface layer) under the same conditions except that a conventional surface-coated cemented carbide end mill (hereinafter referred to as a conventional coated carbide end mill) as a conventional coated carbide tool is provided. Was manufactured respectively.

【0026】この結果得られた本発明被覆超硬エンドミ
ル1〜8の硬質被覆層を構成する表面層および表面下地
層について、その厚さ方向中央部の酸素含有割合(Y値
およびX値)をオージェ分光分析装置を用いて測定した
ところ、表8に示される値を示した。つぎに、上記本発
明被覆超硬エンドミル1〜8および従来被覆超硬エンド
ミル1〜8のうち、本発明被覆超硬エンドミル1〜3お
よび従来被覆超硬エンドミル1〜3については、 被削材:平面寸法:100mm×250mm、厚さ:5
0mmのJIS・SCM440の板材、 切削速度:80m/min.、 溝深さ(切り込み):2mm、 テーブル送り:550mm/分、 の条件での合金鋼の乾式高速溝切削加工試験、本発明被
覆超硬エンドミル4〜6および従来被覆超硬エンドミル
4〜6については、 被削材:平面寸法:100mm×250mm、厚さ:5
0mmのJIS・SCM440の板材、 切削速度:90m/min.、 溝深さ(切り込み):5mm、 テーブル送り:600mm/分、 の条件での合金鋼の乾式高速溝切削加工試験、本発明被
覆超硬エンドミル7,8および従来被覆超硬エンドミル
7,8については、 被削材:平面寸法:100mm×250mm、厚さ:5
0mmのJIS・SCM415の板材、 切削速度:90m/min.、 溝深さ(切り込み):10mm、 テーブル送り:600mm/分、 の条件での合金鋼の乾式高速溝切削加工試験、をそれぞ
れ行い、いずれの溝切削加工試験でも切刃部先端面の直
径が使用寿命の目安とされる0.2mm減少するまでの
切削溝長を測定した。この測定結果を表8、9にそれぞ
れ示した。
The oxygen content ratio (Y value and X value) at the center in the thickness direction of the surface layer and the surface base layer constituting the hard coating layer of the coated carbide end mills 1 to 8 of the present invention obtained as a result is shown below. When measured using an Auger spectrometer, the values shown in Table 8 were shown. Next, of the coated carbide end mills 1 to 8 of the present invention and the coated carbide end mills 1 to 8 of the present invention, the coated carbide end mills 1 to 3 of the present invention and the conventionally coated carbide end mills 1 to 3 are: Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 80 m / min. , Groove depth (cut): 2 mm, Table feed: 550 mm / min, Dry high-speed grooving test of alloy steel, coated carbide end mills 4 to 6 of the present invention and conventional coated carbide end mills 4 to 6 , Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 90 m / min. , Groove depth (cut): 5 mm, Table feed: 600 mm / min, Dry high-speed grooving test of alloy steel, coated carbide end mills 7 and 8 of the present invention and conventional coated carbide end mills 7 and 8 , Work material: Plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM415 plate, Cutting speed: 90 m / min. , Groove depth (cut): 10 mm, table feed: 600 mm / min, dry high-speed grooving test of alloy steel under the following conditions. The length of the cutting groove up to a reduction of 0.2 mm, which is a measure of the service life, was measured. The measurement results are shown in Tables 8 and 9, respectively.

【0027】[0027]

【表7】 [Table 7]

【0028】[0028]

【表8】 [Table 8]

【0029】[0029]

【表9】 [Table 9]

【0030】(実施例3)上記の実施例2で製造した直
径が8mm(超硬基体a〜c形成用)、13mm(超硬
基体d〜f形成用)、および26mm(超硬基体g、h
形成用)の3種の丸棒焼結体を用い、この3種の丸棒焼
結体から、研削加工にて、溝形成部の直径×長さがそれ
ぞれ4mm×13mm(超硬基体a‘〜c’)、8mm
×22mm(超硬基体d‘〜f’)、および16mm×
45mm(超硬基体g‘、h’)の寸法をもった超硬基
体(ドリル)a‘〜h’をそれぞれ製造した。
(Example 3) The diameters of 8 mm (for forming the super-hard substrates a to c), 13 mm (for forming the super-hard substrates d to f), and 26 mm (for the super-hard substrate g) produced in Example 2 described above. h
(For forming), the diameter x length of the groove forming portion was 4 mm x 13 mm (the carbide substrate a ') by grinding from the three types of round rod sintered bodies. ~ C '), 8mm
× 22 mm (carbide substrate d ′ to f ′) and 16 mm ×
Carbide substrates (drills) a 'to h' each having a size of 45 mm (carbide substrates g 'and h') were manufactured.

【0031】ついで、これらの超硬基体(ドリル)a
‘〜h’の表面に、ホーニングを施した状態で、通常の
化学蒸着装置を用い、同じく表2、3に示される条件に
て、表10に示される組成および目標層厚のTi化合物
層(下部層)、Al2O3層および/またはAl2O3−Z
rO2混合層(中間層)、さらに拡散酸素供給用のTi
とAlの複合酸化物層(表面下地層)および拡散酸素含
有のTi窒酸化物層(表面層)からなる硬質被覆層を形
成することにより、図3(a)に概略正面図で、同
(b)に溝形成部の概略横断面図で示される形状を有す
る本発明被覆超硬工具としての本発明表面被覆超硬合金
製ドリル(以下、本発明被覆超硬ドリルと云う)1〜8
をそれぞれ製造した。
Next, these carbide substrates (drills) a
With the honing applied to the surface of '~ h', using a conventional chemical vapor deposition apparatus, under the same conditions as shown in Tables 2 and 3, the Ti compound layer having the composition and target layer thickness shown in Table 10 ( Lower layer), Al2O3 layer and / or Al2O3-Z
rO2 mixed layer (intermediate layer), and Ti for supplying diffusion oxygen
By forming a hard coating layer composed of a composite oxide layer of Al and Al (a surface underlayer) and a diffusion oxygen-containing Ti oxynitride layer (a surface layer), a schematic front view in FIG. b) A drill made of a surface-coated cemented carbide of the present invention as a coated carbide tool of the present invention having a shape shown in a schematic cross-sectional view of a groove forming portion (hereinafter referred to as a coated carbide drill of the present invention) 1 to 8
Was manufactured respectively.

【0032】また、比較の目的で、表11に示される通
り、上記の拡散酸素含有のTi窒酸化物層(表面層)お
よび拡散酸素供給用のTiとAlの複合酸化物層(表面
下地層)に代って、TiN層(表面層)を形成する以外
は同一の条件で従来被覆超硬工具としての従来表面被覆
超硬合金製ドリル(以下、従来被覆超硬ドリルと云う)
1〜8をそれぞれ製造した。
For comparison purposes, as shown in Table 11, the diffusion oxygen-containing Ti oxynitride layer (surface layer) and the Ti / Al composite oxide layer for supplying diffusion oxygen (surface underlayer) are shown in Table 11. ) In place of forming a TiN layer (surface layer) under the same conditions except that a drill made of a conventional surface-coated cemented carbide as a conventional coated carbide tool (hereinafter referred to as a conventional coated carbide drill)
1 to 8 were produced respectively.

【0033】この結果得られた本発明被覆超硬ドリル1
〜8の硬質被覆層を構成する表面層および表面下地層に
ついて、その厚さ方向中央部の酸素含有割合(Y値およ
びX値)をオージェ分光分析装置を用いて測定したとこ
ろ、表10に示される値を示した。つぎに、上記本発明
被覆超硬ドリル1〜8および従来被覆超硬ドリル1〜8
のうち、本発明被覆超硬ドリル1〜3および従来被覆超
硬ドリル1〜3については、 被削材:平面寸法:100mm×250mm、厚さ:5
0mmのJIS・SCM440の板材、 切削速度:50m/min.、 送り:0.3mm/分、 の条件での合金鋼の湿式高速穴あけ切削加工試験、本発
明被覆超硬ドリル4〜6および従来被覆超硬ドリル4〜
6については、 被削材:平面寸法:100mm×250mm、厚さ:5
0mmのJIS・SCM440の板材、 切削速度:60m/min.、 送り:0.3mm/分、 の条件での合金鋼の湿式高速穴あけ切削加工試験、本発
明被覆超硬ドリル7,8および従来被覆超硬ドリル7,
8については、 被削材:平面寸法:100mm×250mm、厚さ:5
0mmのJIS・SCM415の板材、 切削速度:70m/min.、 送り:0.4mm/分、 の条件での合金鋼の湿式高速穴あけ切削加工試験、をそ
れぞれ行い、いずれの湿式(水溶性切削油使用)高速穴
あけ切削加工試験でも先端切刃面の逃げ面摩耗幅が0.
3mmに至るまでの穴あけ加工数を測定した。この測定
結果を表10、11にそれぞれ示した。
The coated carbide drill 1 of the present invention obtained as a result
The oxygen content ratio (Y value and X value) at the center in the thickness direction of the surface layer and the surface base layer constituting the hard coating layers of Nos. To 8 were measured using an Auger spectrometer. Value shown. Next, the coated carbide drills 1 to 8 of the present invention and the conventional coated carbide drills 1 to 8
Among them, the coated carbide drills 1 to 3 of the present invention and the conventionally coated carbide drills 1 to 3 are: work material: plane dimension: 100 mm × 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 50 m / min. , Feed: 0.3 mm / min, Wet high-speed drilling test of alloy steel under the following conditions: coated carbide drills 4 to 6 according to the present invention and conventional coated carbide drills 4 to 4
About 6, work material: plane dimensions: 100 mm x 250 mm, thickness: 5
0 mm JIS SCM440 plate, Cutting speed: 60 m / min. , Feed: 0.3 mm / min, wet high-speed drilling test of alloy steel under the following conditions: coated carbide drills 7 and 8 according to the present invention and conventional coated carbide drills 7 and 8
For No. 8, Work material: Plane dimensions: 100 mm × 250 mm, thickness: 5
0 mm JIS SCM415 plate, Cutting speed: 70 m / min. , Feed: 0.4mm / min, Welding high-speed drilling cutting test of alloy steel under the following conditions, and the flank surface of the tip cutting surface in any wet (using water-soluble cutting oil) high-speed drilling cutting test. Wear width is 0.
The number of drilling processes up to 3 mm was measured. The measurement results are shown in Tables 10 and 11, respectively.

【0034】[0034]

【表10】 [Table 10]

【0035】[0035]

【表11】 [Table 11]

【0036】[0036]

【発明の効果】表4〜11に示される結果から、硬質被
覆層の表面層がTiN層の形成時に表面下地層から拡散
してきた酸素と反応して形成されたTi窒酸化物層で構
成された本発明被覆超硬工具は、いずれも高い発熱を伴
う鋼の高速切削加工でも、同じく硬質被覆層を構成する
TiとAlの複合酸化物層(表面下地層)がAl2O3層
およびAl2O3−ZrO2混合層(中間層)、さらに前
記Ti窒酸化物層(表面層)に対して強固に密着し、か
つ前記Ti窒酸化物層(表面層)の高温加熱の切粉に対
する親和性がきわめて低く、切粉が前記Ti窒酸化物層
に付着することがないことから、切刃にチッピングの発
生なく、すぐれた耐摩耗性を発揮するのに対して、硬質
被覆層の表面層がTiN層で構成された従来被覆超硬工
具においては、いずれも切粉が前記TiN層に付着し易
く、前記TiN層が他の構成層とともに前記切粉によっ
て剥がし取られることから、切刃にチッピングの発生し
易く、これが原因で比較的短時間で使用寿命に至ること
が明らかである。上述のように、この発明の被覆超硬工
具は、使用前後の識別工具の特に各種鋼や鋳鉄などの高
速切削加工での実用を可能とするものであり、かつ実用
に際しては切刃にチッピングの発生なく、すぐれた耐摩
耗性を長期に亘って発揮するものである。
From the results shown in Tables 4 to 11, the surface layer of the hard coating layer is composed of a Ti oxynitride layer formed by reacting with oxygen diffused from the surface underlayer when forming the TiN layer. In the coated carbide tool of the present invention, the composite oxide layer (surface underlayer) of Ti and Al also constituting the hard coating layer is mixed with Al2O3 layer and Al2O3-ZrO2 even in high-speed cutting of steel with high heat generation. Layer (intermediate layer) and the Ti nitride oxide layer (surface layer), and the Ti nitride oxide layer (surface layer) has extremely low affinity for high-temperature heating chips. Since the powder does not adhere to the Ti oxynitride layer, it exhibits excellent wear resistance without chipping on the cutting edge, whereas the surface layer of the hard coating layer is composed of a TiN layer. Conventional coated carbide tools, Since the cutting powder easily adheres to the TiN layer, and the TiN layer is peeled off by the cutting powder together with other constituent layers, chipping easily occurs in the cutting blade, which causes a relatively short service life. It is clear that As described above, the coated cemented carbide tool of the present invention enables the practical use of the identification tool before and after use, particularly in high-speed cutting of various steels and cast irons. No wear is exhibited, and excellent wear resistance is exhibited over a long period of time.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は被覆超硬チップの概略斜視図、(b)
は被覆超硬チップの概略縦断面図である。
FIG. 1A is a schematic perspective view of a coated carbide tip, and FIG.
1 is a schematic longitudinal sectional view of a coated carbide tip.

【図2】(a)は被覆超硬エンドミル概略正面図、
(b)は同切刃部の概略横断面図である。
FIG. 2 (a) is a schematic front view of a coated carbide end mill,
(B) is a schematic cross-sectional view of the cutting blade portion.

【図3】(a)は被覆超硬ドリルの概略正面図、(b)
は同溝形成部の概略横断面図である。
FIG. 3A is a schematic front view of a coated carbide drill, and FIG.
FIG. 3 is a schematic cross-sectional view of the groove forming portion.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) B23P 15/28 B23P 15/28 A C04B 41/89 C04B 41/89 J C23C 16/30 C23C 16/30 16/32 16/32 16/34 16/34 16/36 16/36 16/40 16/40 Fターム(参考) 3C037 CC02 CC04 CC09 3C046 FF03 FF10 FF13 FF16 FF19 FF22 FF25 4K018 AD06 BA04 BA11 DA11 FA24 KA15 4K030 AA03 AA06 AA14 BA24 BA36 BA38 BA41 BA42 BA43 BB12 CA03 LA01 LA22 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) B23P 15/28 B23P 15/28 A C04B 41/89 C04B 41/89 J C23C 16/30 C23C 16/30 16 / 32 16/32 16/34 16/34 16/36 16/36 16/40 16/40 F term (reference) 3C037 CC02 CC04 CC09 3C046 FF03 FF10 FF13 FF16 FF19 FF22 FF25 4K018 AD06 BA04 BA11 DA11 FA24 KA15 4K030 AA03 AA06 AA14 BA24 BA36 BA38 BA41 BA42 BA43 BB12 CA03 LA01 LA22

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 炭化タングステン基超硬合金基体の表面
に、 (a)下部層として、0.5〜15μmの平均層厚を有
し、Tiの炭化物層、窒化物層、炭窒化物層、炭酸化物
層、および炭窒酸化物層のうちの1層または2層以上の
複層からなるTi化合物層、 (b)中間層として、1〜15μmの平均層厚を有す
る、酸化アルミニウム層および/または酸化アルミニウ
ムの素地に酸化ジルコニウム相が分散分布してなる酸化
アルミニウム−酸化ジルコニウム混合層、 (c)表面下地層として、0.1〜3μmの平均層厚を
有し、かつ、 組成式:(Ti1-WAlW)OX、 で表わした場合、厚さ方向中央部をオージェ分光分析装
置で測定して、いずれも原子比で W:0.02〜0.15、 X:1.2〜1.7、 を満足するTiとAlの複合酸化物層、 (d)表面層として、0.05〜2μmの平均層厚を有
し、かつ、 組成式:TiN1-Y(O)Y、 で表わした場合[ただし、(O)は上記表面下地層から
の拡散酸素を示す]、同じく厚さ方向中央部をオージェ
分光分析装置で測定して、 Y:Tiに対する原子比で0.01〜0.4、 を満足するTi窒酸化物層、以上(a)〜(d)で構成
された硬質被覆層を3〜30μmの全体平均層厚で化学
蒸着および/または物理蒸着してなる、耐チッピング性
のすぐれた表面被覆超硬合金製切削工具。
1. A surface of a tungsten carbide-based cemented carbide substrate comprising: (a) a lower layer having an average layer thickness of 0.5 to 15 μm, a Ti carbide layer, a nitride layer, a carbonitride layer, (B) an aluminum oxide layer having an average layer thickness of 1 to 15 μm as an intermediate layer, and / or a Ti compound layer comprising one or more of a carbon oxide layer and a carbonitride oxide layer. Or an aluminum oxide-zirconium oxide mixed layer in which a zirconium oxide phase is dispersed and distributed on an aluminum oxide substrate; (c) a surface underlayer having an average layer thickness of 0.1 to 3 μm, and a composition formula: ( Ti 1-W Al W ) O x , where the central part in the thickness direction was measured with an Auger spectrometer, and all were represented by atomic ratios of W: 0.02 to 0.15 and X: 1.2. ~ 1.7, complex oxidation of Ti and Al satisfying Layer, as (d) the surface layer has an average layer thickness of 0.05 to 2 [mu] m, and the composition formula: TiN 1-Y (O) Y, in the case where expressed [However, (O) under the surface Shows the oxygen diffused from the stratum], and also measures the central part in the thickness direction with an Auger spectroscopic analyzer, and the atomic ratio of Y to Ti is 0.01 to 0.4. A cutting tool made of a surface-coated cemented carbide having excellent chipping resistance, wherein the hard coating layer composed of (a) to (d) is chemically vapor-deposited and / or physically vapor-deposited with an overall average layer thickness of 3 to 30 μm.
JP2000319750A 2000-09-18 2000-10-19 Surface coated cemented carbide cutting tools with excellent chipping resistance Expired - Fee Related JP4019244B2 (en)

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