JP2002156328A - Microscopic device capable of mapping measurement and mapping method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device, capable of executing comparatively inexpensive mapping without requiring complicated works for mapping a measuring object or without complicating an optical system, and to provide a method for mapping comparatively simply. SOLUTION: This microscopic device 2, capable of executing mapping measurement of a sample to be measured 4, is equipped with a stage 6 for loading the sample to be measured 4, and an aperture 22 arranged on a conjugate plane b relative to an observation plane of the sample to be measured, capable of restricting an observation range of the sample to be measured by the size of the opening. The device 2 is characterized by executing a mapping measurement in a specific range of the sample to be measured, without moving the stage on the plane parallel to the observation plane by adjusting the opening position of the aperture, because the opening of the aperture can be set not about the optical axis of the microscopic device on the conjugate plane relative to the observation plane of the sample to be measured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microscope and a method for mapping a sample to be measured using the same, and more particularly to an improvement in a mechanism and method for mapping and measuring a sample to be measured in a microscope capable of performing mapping measurement.

[0002]

2. Description of the Related Art It is widely practiced to measure the physical properties and the like of various objects to be measured using a so-called microscope. For example, an infrared spectrum of an object to be measured is measured using a microscope, and the infrared spectrum characteristics are measured. It is possible to analyze components and the like of a specific minute portion of an object to be measured.

When a sample to be measured is magnified and observed at a high magnification with such a microscope, the field of view becomes very narrow, and it becomes difficult to capture a specific range of the object to be measured as a whole. Therefore, in order to capture the whole of the sample to be measured or a specific range as a whole, an observation image or spectrum observed at a high magnification is mapped, and the mapping enables visual observation of a high-magnification observation image or wide-field measurement data such as physical distribution. There was a technology to confirm it.

Conventionally, such mapping is performed by driving a sample stage on which an object to be measured is mounted, and measuring a measurement site of the object to be measured one by one, or by using a two-dimensional detector. Was taken.

[0005]

In a method of driving a sample stage on which an object to be measured is mounted and measuring a point to be measured of the object to be measured one by one, an aperture for limiting a visual field is located on an optical axis. Since it was configured to operate symmetrically with respect to the optical axis, it was necessary to change the measurement site by driving the sample stage so that the measurement site coincided with the optical axis. Although this method is easy to extend from single-point measurement and is effective when the mapping area is large, the object to be measured is shifted by the movement of the sample stage, and the positional relationship between the driving amount of the stage and the object to be measured changes. In such a case, accurate mapping cannot be performed,
The measurement had to be repeated from the beginning. Also,
If the mapping measurement range is limited by the aperture, only a very small range near the optical axis can be mapped, and even if the site desired to be measured is in the same field of view,
When the aperture is set, it is necessary to relocate the aperture near the optical axis so that the portion desired to be measured falls within the aperture range of the aperture, and very complicated work is required to perform a wide range of mapping measurement. I was

In the method using a two-dimensional detector, since the two-dimensional detector itself also has a function of a micro-aperture, mapping can be performed within a certain range within the same visual field. The measurement speed was high. However, the two-dimensional detector is expensive, and it is necessary to form a sample image on the detector surface without aberration, which causes a problem that the optical system becomes difficult. When mapping a wider area, it is necessary to use the above-described method of measuring one point at a time. In addition, in the case where infrared light is used as an example, a two-dimensional detector has a normal reading speed. Because it is slower than infrared detectors, general FTI
It was difficult to sample data at the driving speed of R. For this reason, when a two-dimensional detector is generally used, a method of sampling data by a step scan method has been adopted. That is, an FTIR capable of step driving was required.

As described above, the conventional apparatus and method for mapping an object to be measured have a problem that complicated work is required or the apparatus becomes complicated and expensive. The present invention has been made in view of the above problems, and its object is to perform relatively inexpensive mapping without complicated work required for performing mapping of an object to be measured and without complicating an optical system. It is an object of the present invention to provide a device for obtaining the data, and to provide a method for performing mapping with relative ease using the device.

[0008]

In order to achieve the above object, a microscope according to the present invention is a microscope capable of performing mapping measurement of a sample to be measured. An aperture is disposed in a plane conjugate to the observation plane of the sample, and has an aperture capable of limiting the observation range of the sample to be measured by the size of the opening.
An opening not centered on the optical axis of the microscope can be set in a plane conjugate with the observation plane of the sample to be measured, and the stage is adjusted in a plane parallel to the observation plane by adjusting the opening position of the aperture. It is characterized in that mapping measurement of a specific range of a sample to be measured is performed without moving.

Further, in the microscope of the present invention, an optical system for magnifying and observing the sample to be measured, a light source for irradiating the observation surface of the sample with light, and detecting light from the sample to be measured. Detecting means and control means for dividing the specific range for mapping into further subdivided parts, matching the aperture of the aperture to one of the subdivided parts, and operating the detecting means, It is preferable that the control means performs mapping by sequentially aligning the openings of all or a plurality of subdivided parts and operating the detection means. In the microscope of the present invention,
It is preferable that the microscope is a total reflection measuring device having a total reflection prism that comes into contact with the observation surface of the sample to be measured.

In the microscope of the present invention, it is preferable that the shape of the contact surface of the sample to be measured of the total reflection prism is a flat type total reflection prism. The method for mapping a sample to be measured according to the present invention is a mapping method performed using the above-mentioned microscopic device, wherein the position of the aperture is adjusted without moving the stage in a plane parallel to the observation plane. It is characterized in that a mapping measurement of a specific range of a measurement sample is performed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail using an embodiment of the microscope of the present invention. FIG. 1 shows a schematic cross-sectional view of a microscope according to an embodiment of the present invention.
As shown in FIG. 1, the microscope 2 according to the present invention includes a stage 6 on which a sample 4 to be measured is mounted, lenses 8 and 10 for magnifying and observing the sample 4 to be measured, and an optical system 14 including a semi-transmissive mirror 12. And a light source 16 for irradiating the observation surface a of the sample 4 with light, a detecting unit 16 for detecting light from the sample 4 to be measured, and a control unit 20.

In this embodiment, a spectrophotometer (16) is used for the light source and the detecting means, and the spectrophotometer plays the role of both. The reflected light of the half mirror 12 is introduced to the eyepiece 18,
The enlarged image of the sample to be measured can be visually observed.

A characteristic of the microscope 2 is that it is disposed in a plane b conjugate to the observation plane a of the sample 4 to be measured, and the observation range of the sample 4 to be measured can be limited by the size of the opening. An aperture 22 is provided. The aperture 22 can set an opening that is not centered on the optical axis 24 of the microscope 2 in a plane b conjugate to the observation plane a of the sample to be measured. By adjusting the position, mapping measurement of a specific range of the sample 4 to be measured can be performed without moving the stage 6 in a plane parallel to the observation surface a.

This is because the microscopic aperture is in a plane b conjugate to the observation surface a of the sample 4 to be measured, and limiting light with the microscopic aperture is equivalent to restricting the observation area of the sample to be measured. It is possible from that.

FIG. 2 shows a configuration diagram of the aperture according to the present embodiment. As shown in FIG. 3A, the aperture according to the present embodiment includes four plates 26, 28, 30, and 32.
An opening of an arbitrary size can be set by adjusting the interval between the left and right plates 26 and 28 and the interval between the upper and lower plates 30 and 32.

FIG. 3 is a diagram for explaining the operation of such an aperture.
It describes in. Conventionally, as shown in FIG.
The left and right plates 26 and 28 and the upper and lower plates 3 with respect to the optical axis 24 located at the center in the visual field of the microscope shown in FIG.
0 and 32 were each configured to operate symmetrically. That is, the aperture set by the aperture can always be set only with the optical axis as the center. However, in the present invention, each plate 26, 2
8, 30, and 32 can operate independently of each other.
As shown in (b), an opening that does not center on the optical axis 24 can be set.

[0017] With this, it is possible to set an aperture not centered on the optical axis, and to map that portion.
It is possible to perform mapping of a part in the same field of view or a specific range without moving the stage.

In the present embodiment, an aperture formed by four plates is used, but the present invention is not limited to this, and a circular aperture-shaped aperture as shown in FIG. 2B may be used. There is no particular limitation on the form of the aperture as long as an aperture not centered on the optical axis can be set.

With such a configuration, it is possible to reduce the complicated work of matching the mapping measurement site with the optical axis at the time of mapping measurement, and to perform measurement with a normal detector. Thus, the cost of the apparatus can be reduced.

A further characteristic feature of the present invention is that the specific range in which the control means 20 performs the mapping is divided into further subdivided portions, and the aperture of the aperture is made to coincide with one of the subdivided portions, and Activating the detection means.

In this embodiment, the control means 20 is constituted by a personal computer. The control means 20 can communicate bidirectionally with the spectrophotometer 16 which also serves as a light source and a detection means, controls the wavelength of light emitted from the spectrophotometer to the sample to be measured, monitors the control state, and emits light. It is possible to store the intensity of light from the object to be detected detected by the wavelength on a hard disk of a computer as a control means. Then, it is also possible to analyze the measurement result, make a graph, and display the graph on a computer display.

The control means 20 can control the operation of the aperture 22, and is configured to control the position at which the aperture of the aperture is set in accordance with the operation state of the spectrophotometer.

With such a configuration, the control means 20
Can perform mapping by sequentially aligning the openings of all or a plurality of subdivided portions and activating the detection means.

FIG. 4 is an explanatory diagram for explaining a procedure in which mapping is performed by the control means. As shown in FIG. 5A, when it is desired to perform mapping within the visual field 36, a further smaller range group 38 is set in the entire range of the visual field, and the aperture of the aperture is made to coincide with each of the fine ranges 38. Then, measurement is performed sequentially in each of the minute ranges 38 and mapping is performed.

As shown in FIG. 4B, a mapping area 40 is defined in a part of the visual field 36, and a small range group is defined in the mapping area 40. It is also possible to perform the measurement by making the aperture of the aperture coincide with the aperture 42 and to sequentially perform the measurement in each of the minute ranges 42 for mapping.

As described above, the microscopic apparatus of the present invention, in which the movement of the stage is not used as much as possible in the mapping work, is preferably a total reflection measuring apparatus having a total reflection prism which comes into contact with the observation surface of the sample to be measured. It is.

In the total reflection measuring device, a prism is brought into contact with the sample surface, light is reflected at the boundary between the prism and the sample to be measured, and the reflected light is measured. by this,
Optical analysis is possible even for a measurement object having a large absorbance.

In such a total reflection measuring device, it is necessary to bring a prism into contact with the sample to be measured. Conventionally, in order to perform mapping with a total reflection measuring device, the prism is brought into contact with the sample to be measured and measurement is performed. The mapping was performed in such a manner that the prism was moved away from the sample to be measured to the next measurement point, and the prism was brought into contact with the sample again and measurement was performed. If the contact is made, the mapping can be performed in a specific wide range, so that the time required for the mapping measurement can be greatly reduced.

In the conventional method in which the contact and isolation of the prism are repeated with respect to the sample to be measured, the sample to be measured may be greatly damaged. Can be minimized.

Further, in the total reflection measuring apparatus, since the pressing pressure of the prism on the sample to be measured affects the measurement result, in the conventional mapping measurement in which the prism is brought into contact again at each measurement point, the pressing pressure of the prism changes. In some cases, accurate results could not be obtained.However, in the microscope of the present invention, once the prism is brought into contact with the sample to be measured, mapping can be performed in a specific wide range, so that the pressing pressure of the prism is reduced. Mapping measurements can be made under uniform pressure.

The prism used in such a total reflection measuring device includes a prism having a flat contact surface and a curved surface having a contact surface with the sample to be measured. In the microscope of the present invention, It is preferable that the shape of the sample contact surface of the total reflection prism is a flat type total reflection prism.

By using the flat type total reflection prism as described above, when the prism is brought into contact with the sample to be measured, the prism comes into contact with a wider surface, so that the prism is once pressed against the sample to be measured. It is possible to preferably perform the mapping measurement.

Although the present embodiment has been described using a microscope in which the light to be irradiated on the sample to be measured is infrared light, the present invention is not limited to this, and various types of light such as ultraviolet light and visible light may be used. The present invention is applicable to an apparatus using a light source, and is not particularly limited.

As described above, the microscope of the present invention can map a specific range of the sample to be measured by adjusting the opening position of the aperture. Therefore, the stage can be moved in a plane parallel to the observation surface of the sample to be measured. There is no need to move with. Therefore, the mapping method according to the present invention is a mapping method performed using the microscope, and by adjusting the opening position of the aperture, the sample to be measured can be moved without moving the stage in a plane parallel to the observation plane. It is preferred to perform a specific range of mapping measurements.

Such a mapping method not only significantly reduces the measurement time, but also minimizes the damage to the sample to be measured when applied to the apparatus of the present invention which can be used by a total reflection measuring apparatus. Becomes possible,
Mapping measurement can be performed under a uniform pressing pressure of the prism.

[0036]

As described above, the use of the microscope and the mapping method of the present invention makes it possible to greatly reduce the measurement time.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a microscope apparatus according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of an aperture according to the embodiment.

FIG. 3 is an operation explanatory diagram of an aperture according to an embodiment of the present invention.

FIG. 4 is an explanatory diagram illustrating a mapping procedure by a control unit according to an embodiment of the present invention.

[Explanation of symbols]

 2 Microscope 4 Sample to be Measured 6 Stage 8, 10 Lens 12 Semi-Transmissive Mirror 14 Optical System 16 Light Source, Detecting Means (Spectrophotometer) 20 Controlling Means

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Takamasa Chisaka 5F, 2967, Ishikawa-cho, Hachioji-shi, Tokyo F-term in Japan Nippon Bunko Co., Ltd. (reference) 2G059 AA03 BB08 EE01 EE12 FF01 GG09 HH01 HH02 HH03 JJ12 JJ13 JJ22 KK01 KK07 2H052 AC04 AC13 AC29 AD35 AF07 AF21 AF25

Claims (5)

[Claims] 1. A microscope capable of performing mapping measurement of a sample to be measured, comprising: a stage on which the sample to be measured is mounted; and a stage arranged on a plane conjugate with an observation surface of the sample to be measured. An aperture that can be limited by the size of the opening is provided, and the aperture can set an opening that is not centered on the optical axis of the microscope within a plane conjugate with the observation surface of the sample to be measured. A microscope apparatus which performs mapping measurement of a specific range of a sample to be measured without adjusting a stage in a plane parallel to an observation plane by adjusting an opening position. 2. The microscopic apparatus according to claim 1, wherein an optical system for magnifying and observing the sample to be measured, a light source for irradiating the observation surface of the sample with light with light, and light from the sample to be measured. Control means for dividing the specific range to be mapped into further subdivided parts, making the aperture of the aperture coincide with one of the subdivided parts, and operating the detection means, Wherein the control means performs mapping by sequentially aligning apertures of all or a plurality of subdivided parts and operating the detection means. 3. The microscopic device according to claim 2, wherein the microscopic device is a total reflection measuring device having a total reflection prism that comes into contact with an observation surface of a sample to be measured. 4. The microscopic device according to claim 3, wherein the shape of the contact surface of the sample to be measured of the total reflection prism is a flat type total reflection prism. 5. A mapping method performed by using the microscope according to claim 1, wherein the stage is moved in a plane parallel to the observation plane by adjusting an opening position of the aperture. A method for mapping a sample to be measured, wherein a mapping measurement of a specific range of the sample to be measured is performed without the need.