JP2002151240A - Ceramic heater - Google Patents
Ceramic heaterInfo
- Publication number
- JP2002151240A JP2002151240A JP2000347128A JP2000347128A JP2002151240A JP 2002151240 A JP2002151240 A JP 2002151240A JP 2000347128 A JP2000347128 A JP 2000347128A JP 2000347128 A JP2000347128 A JP 2000347128A JP 2002151240 A JP2002151240 A JP 2002151240A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- resistant
- conductive material
- ceramic heater
- metal core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、電気炉等に用い
られるセラミックヒータに関する。The present invention relates to a ceramic heater used for an electric furnace or the like.
【０００２】[0002]
【従来の技術】近年、耐久性が高く、高強度で、さらに
耐熱衝撃性に優れたヒータの必要性が高まっている。2. Description of the Related Art In recent years, there has been an increasing need for a heater having high durability, high strength, and excellent thermal shock resistance.
【０００３】このため、ヒータとしてセラミックス製の
ものが多用されるようになってきた。このセラミックス
製のヒータは、耐熱性、耐酸化性、耐熱衝撃性、高温強
度などが優れており、また、抵抗値が発熱体に適した値
を有しているため、電気炉の発熱源として好適なものと
されている。例えば、従来より、再結晶質の炭化ケイ素
発熱体や、二ケイ化モリブデン発熱体がセラミックヒー
タに広く利用されている。For this reason, ceramic heaters have been widely used as heaters. This ceramic heater has excellent heat resistance, oxidation resistance, thermal shock resistance, high-temperature strength, etc., and has a resistance value suitable for the heating element. It is considered suitable. For example, recrystallized silicon carbide heating elements and molybdenum disilicide heating elements have been widely used in ceramic heaters.
【０００４】[0004]
【発明が解決しようとする課題】しかし、前記再結晶質
の炭化ケイ素発熱体や二ケイ化モリブデン発熱体からな
るセラミックヒータは、炭化ケイ素や二ケイ化モリブデ
ン粉末に有機バインダーなどを混合して、所定の形状に
成形したのち、焼成処理をすることにより製造されてい
るので、一般に組織性状の緻密性が低く、高い気孔率を
有している。そのため、高温における耐酸化性が低く、
長期の使用には耐えないものであった。しかも、二ケイ
化モリブデン発熱体からなるセラミックヒータは、数１
００℃の比較的低温域において熱力学的に不安定であ
り、相変態を起こして粉体化してしまう傾向がある。そ
のため、温度の上昇と降下を伴う繰り返し使用によっ
て、寿命の低下を来す問題がある。However, the ceramic heater comprising the recrystallized silicon carbide heating element or the molybdenum disilicide heating element is prepared by mixing an organic binder or the like with silicon carbide or molybdenum disilicide powder. Since it is manufactured by performing a baking treatment after molding into a predetermined shape, it generally has low texture and high porosity. Therefore, oxidation resistance at high temperature is low,
It could not withstand long-term use. In addition, the ceramic heater composed of the molybdenum disilicide heating element has the following formula:
It is thermodynamically unstable in a relatively low temperature range of 00 ° C., and tends to undergo phase transformation to powder. Therefore, there is a problem that the life is shortened due to the repeated use with the rise and fall of the temperature.
【０００５】さらに、従来のセラミックヒータは、ある
程度の熱容量を自らが持つため、分単位での急速な冷却
が難しく、また、この急速な温度低下を生じないことに
より耐熱衝撃性を有するものでもあった。しかし、物質
の熱処理の都合上、このような急速な処理を要求する場
合には、加熱したセラミックヒータを炉から取り出す以
外に方法がなく、作業が煩わしくなる問題がある。Further, the conventional ceramic heater itself has a certain heat capacity, so that it is difficult to perform rapid cooling in units of minutes, and it does not have such a rapid temperature drop, so that it has thermal shock resistance. Was. However, when such rapid processing is required due to the heat treatment of the substance, there is no other method than removing the heated ceramic heater from the furnace, and there is a problem that the operation becomes complicated.
【０００６】この発明は、前記の点に鑑みなされたもの
であり、緻密で強度が高く、熱容量が小さくて耐熱衝撃
性に優れ、しかも急激な昇温、冷却に追随できる耐久性
の高いセラミックヒータの提供を目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and is a highly durable ceramic heater which is dense, has high strength, has a small heat capacity, has excellent thermal shock resistance, and can follow rapid temperature rise and cooling. The purpose is to provide.
【０００７】[0007]
【課題を解決するための手段】請求項１の発明は、耐熱
金属芯材の周囲に耐熱導電性物質が形成され、該耐熱導
電性物質の周囲に耐熱耐酸化性セラミックスが形成され
た線材の格子状体からなることを特徴とするセラミック
ヒータに係る。According to a first aspect of the present invention, there is provided a wire rod having a heat-resistant conductive material formed around a heat-resistant metal core, and a heat-resistant and oxidation-resistant ceramic formed around the heat-resistant conductive material. The present invention relates to a ceramic heater comprising a lattice.
【０００８】請求項２の発明は、請求項１における耐熱
導電性物質及び耐熱耐酸化性セラミックスが、ＣＶＤ又
はＣＶＩ法で形成されたものであることを特徴とする。A second aspect of the present invention is characterized in that the heat-resistant conductive material and the heat-resistant oxidation-resistant ceramic according to the first aspect are formed by a CVD or CVI method.
【０００９】請求項３の発明は、請求項２における耐熱
金属芯材がモリブデン製であり、耐熱導電性物質が、前
記耐熱金属芯材のモリブデンと気相から供給されたケイ
素とが反応して形成された二ケイ化モリブデンであるこ
とを特徴とする。According to a third aspect of the present invention, the heat-resistant metal core material of the second aspect is made of molybdenum, and the heat-resistant conductive material reacts with the molybdenum of the heat-resistant metal core material and silicon supplied from the gas phase. It is characterized by being formed molybdenum disilicide.
【００１０】請求項４の発明は、請求項２又は３におけ
る耐熱金属芯材の全部が耐熱導電性物質の形成に使用さ
れて、前記耐熱金属芯材全体が耐熱導電性物質と同材質
のものに変化していることを特徴とする。According to a fourth aspect of the present invention, the heat-resistant metal core is entirely used for forming a heat-resistant conductive material, and the entire heat-resistant metal core is made of the same material as the heat-resistant conductive material. It is characterized by having changed to.
【００１１】[0011]
【発明の実施の形態】以下この発明の実施形態について
説明する。図１はこの発明の一実施例に係わるセラミッ
クヒータの部分拡大平面図、図２は図１におけるセラミ
ックヒータの骨格構造を示す概略断面図、図３は他の実
施例における骨格構造を示す概略断面図である。Embodiments of the present invention will be described below. FIG. 1 is a partially enlarged plan view of a ceramic heater according to one embodiment of the present invention, FIG. 2 is a schematic cross-sectional view showing a skeleton structure of the ceramic heater in FIG. 1, and FIG. 3 is a schematic cross-section showing a skeleton structure in another embodiment. FIG.
【００１２】図１、２に示すこの発明の一実施例に係わ
るセラミックヒータ１０は、耐熱金属芯材１１の周囲に
耐熱導電性物質１２が形成され、さらにその周囲に耐熱
耐酸化性セラミックス１３が形成された線材１５の格子
状体からなる。ここでの格子状体は、線材が縦・横に織
りなされた織物、あるいは網等をいう。線材１５間の織
目又は網目１４は開口している必要はなく、隣り合う線
材１５同士が接触して織目又は網目１４を閉じていても
よい。In a ceramic heater 10 according to an embodiment of the present invention shown in FIGS. 1 and 2, a heat-resistant conductive material 12 is formed around a heat-resistant metal core material 11, and a heat-resistant oxidation-resistant ceramic 13 is further formed around the heat-resistant conductive material 12. It is formed of a lattice of the formed wire 15. The lattice-like body here refers to a woven fabric or a net or the like in which a wire is woven vertically and horizontally. The weave or mesh 14 between the wires 15 need not be open, and the wires or meshes 14 may be closed by contacting adjacent wires 15.
【００１３】耐熱金属芯材１１としては、溶融温度が
１，４００℃以上のものとされ、モリブデン、ニッケ
ル、チタン、タングステン、タンタル、ジルコニウム、
ニオブ等を挙げることができる。また、この耐熱金属芯
材１１は、予め耐熱金属芯材１１を織物状とした金属繊
維織物が好適である。その際の線サイズ及び織目又は網
目サイズは適宜とされる。例として、１５０メッシュ程
度を示す。The heat-resistant metal core material 11 has a melting temperature of 1,400 ° C. or more, and includes molybdenum, nickel, titanium, tungsten, tantalum, zirconium,
Niobium and the like can be mentioned. The heat-resistant metal core material 11 is preferably a metal fiber woven fabric in which the heat-resistant metal core material 11 is woven in advance. In this case, the line size and the weave or mesh size are appropriately determined. As an example, about 150 mesh is shown.
【００１４】耐熱導電性物質１２としては、溶融温度が
１，０００℃以上、抵抗値が２×１０-4〜１×１０-6Ω
・ｃｍのものが好適であり、二ケイ化モリブデン、窒化
チタン、炭化ジルコニウム等を挙げることができる。こ
の耐熱導電性物質１２は、公知のＣＶＤ又はＣＶＩ法に
より形成されたものが緻密で強度に優れるため好まし
い。The heat-resistant conductive material 12 has a melting temperature of 1,000 ° C. or more and a resistance value of 2 × 10 -4 to 1 × 10 -6 Ω.
Cm is preferable, and examples thereof include molybdenum disilicide, titanium nitride, and zirconium carbide. The heat-resistant conductive material 12 is preferably formed by a known CVD or CVI method because it is dense and has excellent strength.
【００１５】前記耐熱導電性物質１２は、該耐熱導電性
物質１２の全元素をすべて気相から供給して、ＣＶＤ又
はＣＶＩ法により前記耐熱金属芯材１１上に付加したも
のでもよい。また、前記耐熱導電性物質１２を構成する
構成元素の一つを耐熱金属芯材１１に含まれる金属と
し、残りの元素を気相法で供給して、金属繊維芯材１１
を消費する形で耐熱導電性物質１２を形成すれば、前記
耐熱金属芯材１１と耐熱導電性物質１２が、より強固に
密着してセラミックヒータ１０の強度が高くなるために
好ましい。例えば、前記耐熱金属芯材１１としてモリブ
デンを用い、該モリブデンと、気相から供給されたケイ
素との反応により、二ケイ化モリブデンからなる耐熱導
電性物質１２を形成する場合を挙げる。The heat-resistant conductive material 12 may be a material in which all the elements of the heat-resistant conductive material 12 are supplied from a gas phase and are added onto the heat-resistant metal core material 11 by CVD or CVI. Further, one of the constituent elements constituting the heat-resistant conductive material 12 is a metal contained in the heat-resistant metal core material 11, and the remaining elements are supplied by a vapor phase method to form the metal fiber core material 11.
It is preferable to form the heat-resistant conductive material 12 in a form in which the heat-resistant metal core material 11 and the heat-resistant conductive material 12 are more firmly adhered to each other and the strength of the ceramic heater 10 is increased. For example, a case where molybdenum is used as the heat-resistant metal core material 11 and the heat-resistant conductive material 12 made of molybdenum disilicide is formed by a reaction between the molybdenum and silicon supplied from the gas phase.
【００１６】さらに、気相から供給された元素と前記耐
熱金属芯材１１のすべてとを反応させて耐熱導電性物質
１２を形成してもよい。その場合、前記耐熱金属芯材１
１はすべて耐熱導電性物質１２と同材質となり、図３に
示す例のように、セラミックヒータ１０Ａの骨格は、耐
熱金属芯材１１であったところまで耐熱導電性物質１２
で構成されるため、より強度が高いものとなる。符号１
５Ａは線材を示す。Further, the heat-resistant conductive material 12 may be formed by reacting the element supplied from the gas phase with all of the heat-resistant metal core material 11. In this case, the heat-resistant metal core 1
1 are made of the same material as the heat-resistant conductive material 12. As shown in the example shown in FIG.
, The strength is higher. Sign 1
5A shows a wire.
【００１７】耐熱耐酸化性セラミックス１３としては、
耐熱性及び耐酸化性を有する物質であればよく、好まし
くは炭化ケイ素、窒化ケイ素、炭化クロム、酸化クロ
ム、酸化アルミニウム、シリカのいずれかからなるもの
である。ここで耐熱性としては溶融温度が１，０００℃
以上、耐酸化性としては酸素拡散バリア層の形成される
ものが好ましい。この耐熱耐酸化性セラミックス１３と
して、特に炭化ケイ素、窒化ケイ素および炭化クロムは
耐熱性及び耐酸化性に優れるため最適である。この耐熱
耐酸化性セラミックス１３は、公知のＣＶＤ又はＣＶＩ
法により前記耐熱導電性物質１２の外周に形成されたも
のが緻密で強度に優れるため好ましい。The heat and oxidation resistant ceramics 13 include
Any substance having heat resistance and oxidation resistance may be used, and is preferably made of any of silicon carbide, silicon nitride, chromium carbide, chromium oxide, aluminum oxide, and silica. Here, as the heat resistance, the melting temperature is 1,000 ° C.
As described above, the oxidation resistance is preferably that in which an oxygen diffusion barrier layer is formed. As the heat-resistant and oxidation-resistant ceramics 13, silicon carbide, silicon nitride and chromium carbide are particularly preferable because of their excellent heat resistance and oxidation resistance. This heat-resistant and oxidation-resistant ceramic 13 is made of a known CVD or CVI.
A material formed on the outer periphery of the heat-resistant conductive material 12 by a method is preferable because it is dense and has excellent strength.
【００１８】[0018]
【実施例】・実施例１ まず、モリブデンよりなる金属繊維織物（１５０メッシ
ュ、商品名：モリブデン金網、ニラコ製、平面寸法５×
５ｃｍ）を反応容器に入れ、その反応容器を電気炉内に
収納して反応容器内が１，０００℃になるように加熱す
る。他方、１級塩化ケイ素を入れた飽和容器に水素（純
度９９．９％）を通過させ、形成される水素と塩化ケイ
素の混合気体が塩化ケイ素濃度４％となるように前記水
素の流量を保ち、得られる混合気体を、一時リザーバー
タンクに蓄える。EXAMPLES Example 1 First, a metal fiber woven fabric made of molybdenum (150 mesh, trade name: molybdenum wire mesh, made by Nilaco, plane dimension 5 ×
5 cm) is placed in a reaction vessel, and the reaction vessel is housed in an electric furnace and heated to 1,000 ° C. in the reaction vessel. On the other hand, hydrogen (purity: 99.9%) is passed through a saturated vessel containing primary silicon chloride, and the flow rate of the hydrogen is maintained such that the mixed gas of hydrogen and silicon chloride has a silicon chloride concentration of 4%. The obtained gas mixture is temporarily stored in a reservoir tank.
【００１９】次いで、前記リザーバータンクの混合気体
を、前記１，０００℃になっている反応容器内に５０ｍ
ｌ供給して金属繊維織物のモリブデンと反応させ、その
後、反応容器から真空排気を行った。前記混合気体の供
給から真空排気までの工程を２０，０００回繰り返して
行い、これにより前記モリブデンとケイ素を反応させて
二ケイ化モリブデン（ＭｏＳｉ2）からなる耐熱導電性
物質を金属繊維織物のモリブデン周囲に形成した。Next, the mixed gas in the reservoir tank was poured into the reaction vessel at 1,000 ° C. for 50 m.
and then reacted with molybdenum of the metal fiber fabric, and then the chamber was evacuated. The steps from the supply of the mixed gas to the evacuation are repeated 20,000 times, whereby the molybdenum and silicon are reacted to form a heat-resistant conductive material composed of molybdenum disilicide (MoSi 2 ) on the metal fiber fabric molybdenum. Formed around.
【００２０】次いで、水素（純度９９．９％）とメタン
（純度９９．９％）を２４：１で混合した混合気体を、
１級塩化ケイ素を入れた飽和容器に通過させ、形成され
る塩化ケイ素、水素およびメタンからなる混合気体が塩
化ケイ素濃度４％となるように前記水素とメタンの流量
を保ち、得られる塩化ケイ素、水素およびメタンからな
る混合気体を、一時リザーバータンクに蓄える。そし
て、前記塩化ケイ素、水素およびメタンからなる混合気
体を、リザーバータンクから前記反応容器内に５０ｍｌ
供給して反応させ、その後、反応容器から真空排気を行
った。前記塩化ケイ素、水素およびメタンからなる混合
気体の反応容器への供給から真空排気までの工程を１
０，０００回繰り返して、前記二ケイ化モリブデン上に
炭化ケイ素からなる耐熱耐酸化性セラミックスを形成し
て、図１及び図２の構造からなるセラミックヒータを得
た。Next, a mixed gas obtained by mixing hydrogen (purity 99.9%) and methane (purity 99.9%) at a ratio of 24: 1 is used.
Passing through a saturated vessel containing primary silicon chloride, maintaining the flow rates of the hydrogen and methane so that the mixed gas formed of silicon chloride, hydrogen and methane has a silicon chloride concentration of 4%; A gas mixture consisting of hydrogen and methane is temporarily stored in a reservoir tank. Then, 50 ml of the mixed gas comprising the silicon chloride, hydrogen and methane was poured into the reaction vessel from a reservoir tank.
The reaction was supplied and reacted, and then the chamber was evacuated. The steps from supply of the mixed gas comprising silicon chloride, hydrogen and methane to the reaction vessel to evacuation are as follows:
By repeating 000 times, heat-resistant and oxidation-resistant ceramics made of silicon carbide were formed on the molybdenum disilicide to obtain a ceramic heater having the structure shown in FIGS.
【００２１】このようにして得られたセラミックヒータ
に対し、対向する辺の間の抵抗値を測定したところ０．
１Ωであった。また、このセラミックヒータの両端（対
向する辺）間に通電したところ、約１分で、放射温度１
５００℃に達した。通電を終了すると約５分ですみやか
に１００℃以下になった。１分通電５分切断のサイクル
を１００回繰り返しても抵抗値の変化はなく、ヒータと
して正常に動作した。With respect to the ceramic heater thus obtained, the resistance between opposing sides was measured.
It was 1Ω. When electricity was applied between both ends (opposite sides) of the ceramic heater, the radiation temperature was reduced to about 1 minute.
500 ° C. was reached. When the energization was completed, the temperature quickly decreased to 100 ° C. or less in about 5 minutes. The resistance value did not change even if the 1 minute energization 5 minute disconnection cycle was repeated 100 times, and the heater operated normally.
【００２２】・実施例２ 前記実施例１における塩化ケイ素と水素の混合気体を、
リザーバータンクから１，０００℃の反応容器内に５０
ｍｌ供給して反応させ、その後真空排気する繰り返し回
数を４０，０００回に変更した点を除き、他は実施例１
と同様にしてセラミックヒータを得た。このようにして
得られたセラミックヒータは、図３に示すように、耐熱
金属芯材であるモリブデン部分まで、完全に二ケイ化モ
リブデンからなる耐熱耐酸化物質１２に変化していた。Example 2 The mixed gas of silicon chloride and hydrogen in Example 1 was
50 from the reservoir tank into the reaction vessel at 1,000 ℃
Example 1 was repeated except that the number of repetitions of supplying, reacting and then evacuating to 40,000 was changed to 40,000.
In the same manner as above, a ceramic heater was obtained. As shown in FIG. 3, the ceramic heater thus obtained was completely changed to the heat-resistant and oxidation-resistant substance 12 composed of molybdenum disilicide up to the molybdenum portion as the heat-resistant metal core.
【００２３】前記実施例２のセラミックヒータに対し、
対向する辺間の抵抗値を測定したところ６Ωであった。
また、この実施例２のセラミックヒータにおける両端
（対向する辺）間に通電したところ、約１分で、放射温
度１５００℃に達した。通電を終了すると約５分ですみ
やかに１００℃以下になった。１分通電５分切断のサイ
クルを１００回繰り返しても抵抗値の変化はなく、ヒー
タとして正常に動作した。With respect to the ceramic heater of the second embodiment,
When the resistance value between the opposing sides was measured, it was 6Ω.
Further, when a current was applied between both ends (opposed sides) of the ceramic heater of Example 2, the radiation temperature reached 1500 ° C. in about 1 minute. When the energization was completed, the temperature quickly decreased to 100 ° C. or less in about 5 minutes. The resistance value did not change even if the 1 minute energization 5 minute disconnection cycle was repeated 100 times, and the heater operated normally.
【００２４】[0024]
【発明の効果】この発明のセラミックヒータによれば、
耐熱金属芯材の周囲に耐熱導電性物質が形成され、該耐
熱導電性物質の周囲に耐熱耐酸化性セラミックスが形成
された線材の格子状体からなるため、低温から低い抵抗
値を示して急速に高温となることができ、また、高温で
の酸化劣化が起こりにくく、しかも、熱容量が小さく耐
熱衝撃性が高いためにすみやかに温度を低下できるとい
う種々の優れた効果を有する。これらの効果は、請求項
２〜４のように、ＣＶＤ又はＣＶＩにより耐熱金属芯材
の周囲に耐熱導電性物質を形成し、その周囲に耐熱耐酸
化性セラミックスを被覆したものにおいてより優れたも
のとなる。According to the ceramic heater of the present invention,
A heat-resistant conductive material is formed around the heat-resistant metal core material, and a heat-resistant and oxidation-resistant ceramic is formed around the heat-resistant conductive material. In addition, it has various excellent effects that the temperature can be rapidly lowered due to low heat capacity, high thermal shock resistance, and low heat capacity. These effects are superior to those in which a heat-resistant conductive material is formed around a heat-resistant metal core material by CVD or CVI and the heat-resistant oxidation-resistant ceramic is coated around the core as described in claims 2 to 4. Becomes
【図１】この発明の一実施例に係わるセラミックヒータ
の部分拡大平面図である。FIG. 1 is a partially enlarged plan view of a ceramic heater according to one embodiment of the present invention.
【図２】図１におけるセラミックヒータの骨格構造を示
す概略断面図である。FIG. 2 is a schematic sectional view showing a skeleton structure of the ceramic heater in FIG.
【図３】他の実施例における骨格構造を示す概略断面図
である。FIG. 3 is a schematic sectional view showing a skeletal structure according to another embodiment.
１０ セラミックヒータ １１ 耐熱金属芯材 １２
耐熱導電性物質 １３ 耐熱耐酸化性セラミックス １５，１５Ａ 線材Reference Signs List 10 ceramic heater 11 heat-resistant metal core material 12
Heat resistant conductive material 13 Heat resistant oxidation resistant ceramics 15, 15A Wire
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山本 敏博 愛知県名古屋市熱田区千年一丁目16番30号 株式会社イノアックコーポレーション船 方事業所内 Ｆターム(参考） 3K092 PP09 QA01 QB08 QB11 QB12 QB24 QB78 RA01 RD09 RD25 RD34 RE02 RE05 TT37 VV09 VV34 4K030 AA03 AA09 AA17 BA37 BA48 BB12 CA02 LA00 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Toshihiro Yamamoto 1-16-30 Millennichi, Atsuta-ku, Nagoya-shi, Aichi F-term in Inoac Corporation Shipbuilding Works (reference) 3K092 PP09 QA01 QB08 QB11 QB12 QB24 QB78 RA01 RD09 RD25 RD34 RE02 RE05 TT37 VV09 VV34 4K030 AA03 AA09 AA17 BA37 BA48 BB12 CA02 LA00
Claims (4)
形成され、該耐熱導電性物質の周囲に耐熱耐酸化性セラ
ミックスが形成された線材の格子状体からなることを特
徴とするセラミックヒータ。A ceramic comprising a heat-resistant conductive material formed around a heat-resistant metal core material, and a wire-like lattice in which a heat-resistant and oxidation-resistant ceramic is formed around the heat-resistant conductive material. heater.
ックスが、ＣＶＤ又はＣＶＩ法で形成されたものである
ことを特徴とする請求項１記載のセラミックヒータ。2. The ceramic heater according to claim 1, wherein the heat-resistant conductive material and the heat-resistant oxidation-resistant ceramic are formed by CVD or CVI.
熱導電性物質が、前記耐熱金属芯材のモリブデンと気相
から供給されたケイ素とが反応して形成された二ケイ化
モリブデンであることを特徴とする請求項２記載のセラ
ミックヒータ。3. The heat-resistant metal core material is made of molybdenum, and the heat-resistant conductive material is molybdenum disilicide formed by reacting the molybdenum of the heat-resistant metal core material with silicon supplied from a gas phase. 3. The ceramic heater according to claim 2, wherein:
形成に使用されて、前記耐熱金属芯材全体が耐熱導電性
物質と同材質のものに変化していることを特徴とする請
求項２又は３記載のセラミックヒータ。4. The heat-resistant metal core is entirely used for forming a heat-resistant conductive material, and the entire heat-resistant metal core is changed to the same material as the heat-resistant conductive material. Item 4. The ceramic heater according to item 2 or 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000347128A JP4592926B2 (en) | 2000-11-14 | 2000-11-14 | Heater with ceramic layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000347128A JP4592926B2 (en) | 2000-11-14 | 2000-11-14 | Heater with ceramic layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002151240A true JP2002151240A (en) | 2002-05-24 |
| JP4592926B2 JP4592926B2 (en) | 2010-12-08 |
Family
ID=18820909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000347128A Expired - Fee Related JP4592926B2 (en) | 2000-11-14 | 2000-11-14 | Heater with ceramic layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4592926B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020155449A (en) * | 2019-03-18 | 2020-09-24 | 日本特殊陶業株式会社 | Manufacturing method of electrode embedded member |
Citations (6)
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|---|---|---|---|---|
| JPS59134585A (en) * | 1983-01-21 | 1984-08-02 | ティーディーケイ株式会社 | Structure of heater |
| JPS61183888A (en) * | 1985-02-09 | 1986-08-16 | 株式会社リケン | Metal heat generating body having heatproof electric insulation film |
| JPS61195580A (en) * | 1985-02-22 | 1986-08-29 | 京セラ株式会社 | Ceramic heater |
| JPS62170183A (en) * | 1986-01-22 | 1987-07-27 | 株式会社東芝 | Tungsten or molybdenum heater which is excellent in acid errosion resistant properties and manufacture of the same |
| JPH05270930A (en) * | 1991-09-17 | 1993-10-19 | Hiroyuki Yoshiura | Far infrared ray emitting ceramic body and its production |
| JPH0655034A (en) * | 1992-06-10 | 1994-03-01 | Shimadzu Corp | Purifying device for exhaust gas and its production |
-
2000
- 2000-11-14 JP JP2000347128A patent/JP4592926B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59134585A (en) * | 1983-01-21 | 1984-08-02 | ティーディーケイ株式会社 | Structure of heater |
| JPS61183888A (en) * | 1985-02-09 | 1986-08-16 | 株式会社リケン | Metal heat generating body having heatproof electric insulation film |
| JPS61195580A (en) * | 1985-02-22 | 1986-08-29 | 京セラ株式会社 | Ceramic heater |
| JPS62170183A (en) * | 1986-01-22 | 1987-07-27 | 株式会社東芝 | Tungsten or molybdenum heater which is excellent in acid errosion resistant properties and manufacture of the same |
| JPH05270930A (en) * | 1991-09-17 | 1993-10-19 | Hiroyuki Yoshiura | Far infrared ray emitting ceramic body and its production |
| JPH0655034A (en) * | 1992-06-10 | 1994-03-01 | Shimadzu Corp | Purifying device for exhaust gas and its production |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020155449A (en) * | 2019-03-18 | 2020-09-24 | 日本特殊陶業株式会社 | Manufacturing method of electrode embedded member |
| JP7249827B2 (en) | 2019-03-18 | 2023-03-31 | 日本特殊陶業株式会社 | Method for manufacturing electrode-embedded member |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4592926B2 (en) | 2010-12-08 |
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