JP2002150931A - Manufacturing apparatus and method of plasma display device and plasma display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a manufacturing method of a plasma display device, in which reduction in damage to the substrate is made possible by eliminating electrification on the substrate, that is generated at sandblast process and partition wall of high manufacturing yield, high quality and high precision can be made, and also low cost and high quality display can be realized. SOLUTION: By installing a conductive electrode protection cover material on the top face of the drawing electrode at the substrate edge portion in the sandblast process chamber, electrification on the substrate can be eliminated easily. By having processing carried out on a setter having an electrode protection cover, similar effects can be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a plasma display device used for a display device or the like, and particularly to a step of forming a partition.

[0002]

2. Description of the Related Art In recent years, a plasma display device which has attracted attention as a display device suitable for a thin type is:
For example, it has a configuration shown in FIG. This plasma display device includes a front substrate 1 disposed opposite to each other.
00 and a back substrate 101. Front substrate 100
Display electrodes 102 and 103, dielectric layer 10
4 and an MgO dielectric protection layer 105 are formed in this order. On the back substrate 101, address electrodes 106 are provided.
And a dielectric layer 107, on which a partition 108 is further formed. Then, a phosphor layer 109 is applied to the side surface of the partition wall 108.

A discharge gas 110 (for example, a mixed gas of Ne—Xe) is provided between the front substrate 100 and the rear substrate 101 at 500 Torr to 600 Torr (66.5 kPa to 7 Torr).
(9.8 kPa). By discharging the discharge gas 110 between the display electrodes 102 and 103 to generate ultraviolet rays and irradiating the ultraviolet rays to the phosphor layer 109, image display including color display can be performed.

For example, the partition 108 is a partition for forming a minute discharge space for each color (R, G, B) of an individual pixel to form a discharge cell. Erroneous discharge and erroneous display can be prevented. The size of the partition 108 is
Typically, in a 40-inch NTSC panel, the partition pitch is 360 μm per color, and the width of the partition top is 50 to 50 μm.
100 μm, and the height of the partition wall is 100 to 150 μm.

[0005] As a conventional method of forming a partition wall, a generally used method is to form a photosensitive film layer on the coated partition wall material after applying a partition wall material to the front surface of a rear substrate, and to perform a photographic method. After a predetermined pattern is formed, an unnecessary portion of the partition wall material is removed by sandblasting, and the photosensitive film layer is peeled off to form a partition wall.

[0006]

However, in the sandblasting method, particularly when removing unnecessary portions of the partition wall material at the time of sandblasting, the abrasive particles collide with the address electrodes and the dielectric layer, so that the address electrodes and the dielectric layer are removed. There is a problem that the surface of the layer is damaged, the substrate is charged due to the collision or friction of the abrasive particles with the substrate, the address electrode and the dielectric layer are damaged, and the sandblast property is deteriorated. are doing.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to realize a plasma display device capable of forming high-quality and high-precision partition walls to enable high-quality display. I do.

[0008]

Means for Solving the Problems In order to solve this problem, the invention according to claim 1 of the present invention is an apparatus for manufacturing a plasma display device in which a partition is formed by a sandblast method, wherein sandblasting is performed. An electrode protection cover having conductivity is provided at least above the extraction electrode portion at the end of the partition wall forming substrate in the sand blast processing chamber, so that the sandblasting abrasive does not collide with the extraction electrode portion. Therefore, it has the effect of protecting the electrode surface and protecting the electrode and the dielectric layer by preventing charging of the electrode.

According to a second aspect of the present invention, the electrode protection cover includes a shield for preventing the abrasive from coming into contact with the substrate, and the electrode protection cover and the extraction electrode portion have the same potential. The electrode protection cover prevents the sand blasting abrasive from colliding with and entering the extraction electrode portion, and has the function of eliminating charges slightly charged on the electrode by the electrode protection cover contacting the electrode. .

[0010] The invention according to claim 3 is characterized by comprising a mechanism for inflowing air from between the electrode protection cover and the substrate in the direction of the sand blasting surface, and comprises a sand blasting abrasive. Has a function of completely preventing collision and intrusion into the extraction electrode portion by air to prevent charging.

The invention according to claim 4 is characterized in that the electrode protection cover is provided with an air inflow port facing the direction of the substrate at the tip, and the electrode protection cover is provided with a sandblasting abrasive to the electrode portion. Has the effect of completely blocking the collision and ingress of air by air to prevent charging.

Further, the electrode protection cover is grounded and made of a material containing at least one of a rubber material, a resin material, and a metal material.

According to a seventh aspect of the present invention, there is provided a method of manufacturing a plasma display device in which a partition is formed by a sandblast method, wherein a conductive electrode is provided above a lead electrode portion at an end of a partition forming substrate. It is characterized in that the substrate is transported and sandblasted on a plate-shaped setter for the purpose of transporting the substrate with a protective cover, and the electrode surface is protected because the sandblasting abrasive does not collide with the extraction electrode part. In addition, it has the effect of preventing charging of the electrode and protecting the electrode and the dielectric layer.

According to an eighth aspect of the present invention, the protective cover is of a clip type, and the substrate is transported on a setter that is in contact with the substrate via a conductive substrate contact portion that contacts the extraction electrode. The electrode protection cover prevents the collision and intrusion of the sandblasting abrasive into the extraction electrode part by the electrode protection cover, and removes the charge slightly charged on the electrode by the electrode protection cover contacting the electrode. It has the effect of doing.

Further, the substrate contact portion is made of a material containing at least one of a rubber material, a resin material, and a metal material, and has a buffering property that does not damage the extraction electrode when the substrate is installed. I do.

According to a tenth aspect of the present invention, the protective cover is carried on a setter having a grid-like or mesh-like protective cover support at the end of the setter, and the substrate is conveyed and sandblasted. The electrode protection cover prevents the sandblasting abrasive from colliding with the extraction electrode, and the sandblasting abrasive reflected from the processing surface and the removed partition wall material are placed between the setter and the lower surface of the electrode protection cover. It has the effect of preventing stagnation.

Further, according to an eleventh aspect of the present invention, the substrate is transported and sandblasted on a setter having a mechanism for flowing air between the substrate and the protective cover from outside the protective cover support. The electrode protection cover prevents the collision of the sandblasting abrasive with the extraction electrode portion, and the sandblasting abrasive reflected from the processing surface and the removed partition wall material,
This has the effect of preventing entry between the setter and the lower surface of the electrode protection cover.

Further, the setter is grounded during transportation, the protective cover is made of a material containing at least one of a rubber material, a resin material and a metal material, and the setter has at least a protective cover portion. The portion except the portion and the portion except immediately below the substrate are in a mesh shape or a lattice shape, and the sandblasting abrasive does not stay on the setter during sandblasting.

A plasma display device using the manufacturing apparatus according to any one of claims 1 to 6 and the manufacturing method according to any one of claims 7-14.

According to the present invention having the above-described features, it is possible to prevent the substrate from being charged and to reduce the damage to the address electrodes and the dielectric, and to further improve the blast rate and stabilize the rib shape. Is done.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment of the Invention) FIG.
FIG. 1 is a partial cross-sectional perspective view showing a main configuration of an AC surface discharge type plasma display panel (hereinafter, referred to as a PDP) according to an embodiment. In the drawing, the z direction corresponds to the thickness direction of the PDP, and the xy plane corresponds to a plane parallel to the PDP surface. As shown in the figure, the present PDP includes a front plate 201 and a back plate 211 arranged with their main surfaces facing each other.

Front plate glass 2 serving as a substrate of front plate 201
02, a plurality of pairs of transparent electrodes 203 are arranged on one side thereof with the x direction as a longitudinal direction. Further, the transparent electrode 203
A bus electrode 204, which is sufficiently narrower than the transparent electrode 203 and has excellent conductivity, is laminated on the substrate. This transparent electrode 20
3 and the display electrode 207 in which the bus electrode 204 is subjected to surface discharge
Works as The front glass 202 on which the display electrodes 207 are disposed has a dielectric layer 2 over the entire glass surface.
05, and the dielectric layer 205 is coated with a protective film 206.

Back plate glass 2 serving as a substrate of back plate 211
12, a plurality of address electrodes 213 are arranged on one side in a stripe shape with the y direction as a longitudinal direction, and a dielectric layer 214 is formed on the back plate glass 21 on which the address electrodes 213 are arranged.
2 is coated over the entire surface. This dielectric layer 214
On the upper side, a partition wall 215 is provided in accordance with the interval between the adjacent address electrodes 213. A phosphor layer 216 corresponding to one of RGB is formed on the surface of the adjacent partition wall 215 and the dielectric layer 214 therebetween.

The front plate 201 and the rear plate 211 having such a configuration are arranged so that the address electrodes 213 and the display electrodes 207 face each other so that the longitudinal directions thereof are orthogonal to each other. The peripheral part is adhered and sealed with sealing glass. And the double-sided plates 201, 211
During this time, a discharge gas (filled gas) composed of a rare gas component such as He, Xe, Ne, etc.
It is sealed at a pressure of about 6.5 to 79.8 kPa). Accordingly, the space formed between the adjacent partition walls 215 becomes the discharge space 217, and the pair of adjacent display electrodes 2 is formed.
The area where 07 and one address electrode 213 intersect with the discharge space 218 interposed therebetween is a cell for image display.

At the time of driving the PDP, in each cell, an address electrode 213 and a display electrode 207, and a pair of display electrodes 2
07 generate short-wavelength ultraviolet rays (wavelength of about 14).
7 nm), the phosphor layer 216 emits light, and an image is displayed.

The main feature of the PDP manufacturing method of the present invention is at least the formation of the partition wall 215.

Next, a method of manufacturing the present PDP will be specifically described.

(Preparation Method of PDP) (1. Preparation of Front Plate 201) On a surface of a front plate glass 202 made of soda glass having a thickness of about 2.8 mm, ITO was formed.
A transparent electrode 203 having a thickness of about 3000 angstroms is formed in parallel with a conductive material such as (Indium Tin Oxide) or SnO ₂ . Further, the transparent electrode 203
A bus electrode 204 composed of three layers of silver or chromium-copper-chromium is laminated on this to form a display electrode 207. Known methods such as a screen printing method and a photolithography method can be applied to these electrodes.

Next, a lead-based glass paste is coated over the entire surface of the front plate glass 202 on which the display electrodes 207 have been formed, and baked to form a dielectric layer 2 having a thickness of about 20 to 30 μm.
05 is formed. Then, a protective film 206 made of magnesium oxide (MgO) having a thickness of about 1 μm is formed on the surface of the dielectric layer 205 by a vapor deposition method, CVD, or the like.

Thus, the front plate 201 is completed.

(2. Manufacture of back plate 211) Thickness of about 2.8
A conductor material containing silver as a main component is applied in a stripe pattern at regular intervals on the surface of a back plate glass 212 made of soda glass having a thickness of about 5 to 1 mm by screen printing.
An address electrode 213 of 0 μm is formed.

Subsequently, a lead-based glass paste is coated and baked over the entire surface of the rear glass plate 212 on which the address electrodes 213 are formed, thereby forming a dielectric layer 214 having a thickness of about 20 to 30 μm. The process of forming the partition 215 from here includes the features of the manufacturing method of the present invention. The process of forming the partition will be described later. After the partition walls 215 are formed, a phosphor layer 216 is formed from a phosphor material corresponding to the color (R, G, B) of each pixel by a printing method, a line jet method, or the like, thereby completing the back plate.

Here, the partition forming step is (a) the first step:
(B) second step: photosensitive coating film pattern forming step, (c) third step: blasting step,
(D) Fourth step: a step of peeling off the photosensitive coating film, and (e) Fifth step: a step of baking the partition wall will be sequentially described. FIG.
(A), (b), (c), (d), and (e) are the first step, the second step, the third step, the fourth step, and the fifth step, respectively, as viewed from the cross-sectional direction of the partition wall. It is a panel sectional view,
FIG. 4 is a cross-sectional view illustrating a third step: blasting step in FIG.

((A) First Step: Partition Film Application Forming Step)
The polymer resin ethyl cellulose is mixed with an organic solvent in which α-terpineol and EP acetate diethylene glycol mono-n-butyl ether (hereinafter, referred to as BCA) are mixed at a weight ratio of 50:50 to prepare a vehicle. This vehicle and the same lead-based glass as the dielectric layer 302 (PbO.B ₂
O ₃ · SiO ₂ · CaO) powder, a filler powder (aggregate) composed of alumina and a pigment powder composed of titanium oxide (TiO ₂ ) are mixed at a weight ratio of 80:10:10 to prepare a paste for forming partition walls. I do. This paste is applied to the dielectric layer 30
A barrier film 304 is formed on the substrate 2 through a coating and drying process using a die coating method or a printing method to a uniform thickness of about 150 μm in the substrate surface. In the drawing, reference numeral 300 denotes a rear plate glass, and 301 denotes an address electrode.

(B) Second Step: Photosensitive Coating Film Pattern Forming Step A photosensitive coating film 305 is formed on the substrate 303 on which the partition film has been formed as described above. In the present embodiment, a photosensitive dry film resist (hereinafter, referred to as DFR) is used as the photosensitive coating film 305 to form a 50 μm thick D
The FR is laminated. Next, exposure is performed by irradiating with ultraviolet light (UV light) using a photomask having a partition pattern having a predetermined width and pitch. The exposure amount is optimized according to the pattern width and pitch of the photomask. Next, development is performed using a developing solution of a 1% aqueous sodium carbonate solution, and washing is performed immediately after development. After exposure and development, a predetermined pattern of stripes (grooves) 306 is formed in the DFR. Typically, the size of the groove 306 is such that the upper opening width is 80 μm and the pitch is 360 μm.

(C) Third Step: Blasting Step After forming the pattern of the groove 306, sand blasting is performed from above the substrate 303.
Sandblasting abrasive (eg glass bead material) from 7
308 is sprayed onto the substrate 303 under the conditions of an Air flow rate of 1500 NL / min and an abrasive supply amount of 1500 g / min to blast the partition film 304 exposed in the groove 306. Note that typically, the blasting is performed until all the partition film 304 in the groove 306 is removed by blasting.
(Grooves) are formed. The sand blasting apparatus at this time is such that the formed substrate is transported by the transport roller 404, and the blast nozzle 405 is moved along the moving direction 408 shown in FIG. Blasting is performed by moving. Further, an electrode protection cover 407 made of a conductive rubber material is provided above the lead electrode portion at the end of the formed substrate and is grounded. Since the sand blasting abrasive 406 does not directly collide with the electrode portion by the electrode protection cover 407, the extraction electrode portion and the dielectric layer are not damaged, and the electrode is not charged by the charged sand blasting abrasive. Blasting is possible. In the figure, reference numeral 401 denotes a rear glass substrate;
2 indicates an address electrode, and 403 indicates a partition film.

(D) Fourth Step: Stripping Step of Photosensitive Coating Film After forming the groove 309, the substrate 303 is immersed in a stripping solution, for example, a 5% aqueous sodium hydroxide solution, to thereby form the photosensitive coating film 3.
05 is peeled off. Thereby, the partition 310 having a predetermined shape is formed.
Is formed.

(E) Fifth Step: Baking Step of Partition Wall After peeling and removing of the photosensitive coating film 305 is completed, the partition wall is baked by using a baking furnace profiled so that the peak temperature becomes about 550 ° C. 310 is fired to form a final shape partition wall 311.

In this manner, damage to the substrate due to abrasive particles during sandblasting is reduced.
The partition wall can be formed by a manufacturing method in which the blast property is improved, such as the improvement of the blast rate and the stabilization of the rib shape.

In the present embodiment, the front glass and the rear glass need not be soda glass having a thickness of about 2.8 mm, and are not limited to the present embodiment. Further, the transparent electrode need not have a thickness of about 3000 Å, and in another example, the transparent electrode may not be provided, and the present invention is not limited to this embodiment. Also,
The bus electrodes need not be three layers of silver or chromium-copper-chromium, and are not limited to this embodiment. In addition, the dielectric layer is not limited to the present embodiment because the thickness of the dielectric layer does not have to be about 20 to 30 μm by baking with a lead-based glass paste. Further, the protective layer may not be made of magnesium oxide having a thickness of about 1 μm and may not be formed by a vapor deposition method or a CVD method, and is not limited to this embodiment. The address electrode may not be formed by screen printing, silver may not be a main component, and may have a thickness of 5 to 10 μm.
m is not necessary and is not limited to the present embodiment. Further, the phosphor layer may not be formed by the printing method and the line jet method, and is not limited to the present embodiment. Further, the vehicle forming the partition wall material does not have to be a mixture of the polymer resin ethyl cellulose and an organic solvent in which α-terpineol and EP acetate diethylene glycol mono-n-butyl ether are mixed at a weight ratio of 50:50. It is not limited to the form. The partition wall material is a lead-based glass (PbO.B ₂ O _3.
A filler powder (aggregate) composed of SiO ₂ .CaO) powder, alumina, and a pigment powder composed of titanium oxide (TiO ₂ ) may not be mixed with a vehicle in a weight ratio of 80:10:10. It is not limited to the embodiment. Further, the method of applying the partition wall material may not be the die coating method or the printing method, and may not be through the application and drying processes, and is not limited to the present embodiment. Further, the thickness of the partition wall film does not have to be 150 μm, and is not limited to this embodiment. Further, the photosensitive skin covering film need not be formed by the lamination method and has a thickness of 50 μm, and is not limited to the present embodiment. Further, the developing solution may not be a 1% aqueous solution of sodium carbonate, and is not limited to the present embodiment.
The size of the groove is such that the upper opening width is 80 μm and the pitch is 36.
The thickness may not be 0 μm and is not limited to the present embodiment. The sandblasting conditions were as follows: Air flow rate 1500 NL / min, abrasive supply amount 1500 g / mi.
It does not have to be n and is not limited to the present embodiment. The electrode protection cover is preferably made of a conductive rubber material and grounded, but is not limited to this embodiment. Further, the stripping solution for the photosensitive skin covering film may not be a 5% aqueous solution of sodium hydroxide, and is not limited to the present embodiment. Further, the firing need not be performed in a firing furnace profiled so that the peak temperature becomes about 550 ° C., and is not limited to this embodiment.

(Embodiment 2 of the Invention)
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blasting method is the same as that of the first embodiment. In this case, the sand blasting apparatus has an abrasive protection shield installed on the electrode protection cover and is in contact with the substrate. At this time, the grounded electrode protection cover and the abrasive prevention shield have the same potential, so that the address electrodes, which were slightly charged by the abrasive that could not be prevented by the electrode protection cover during sandblasting, were simultaneously discharged. ing. FIG. 5 shows an example of the shape of the abrasive prevention shield. Reference numeral 501 in FIG. 5A denotes a brush-shaped shield that prevents the sandblast abrasive from entering without causing damage due to contact with the extraction electrode.
Reference numeral 502 in FIG. 5B denotes a sheet-shaped shield, which has the same effect as the brush-shaped shield. 5 in FIG.
Reference numeral 3 denotes a roll-shaped shield. A roll is attached to the tip of the electrode protection cover in a section where the abrasive flies, and has the same effect as the brush-shaped and sheet-shaped shields. Are performed simultaneously.

In the present embodiment, the abrasive-preventing shield need not be in the form of a brush, a sheet or a roll, and is not limited to the embodiment of the present invention.

(Third Embodiment of the Invention)
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blasting method is the same as that of the first embodiment, but the sand blasting device at this time blows air from between the electrode protection cover and the substrate toward the sand blasting surface as shown in FIG. Inflow air inlet 6
01 is provided below the electrode protection cover in a section where the sandblasting abrasive is flying, and the sandblasting abrasive and the partitioning wall which were not completely prevented by the electrode protection cover and reflected after processing the partition wall film. Air is used to prevent the cuttings of the film from entering the extraction electrode portion and causing electrification.

(Fourth Embodiment of the Invention)
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blasting method is the same as that of the first embodiment, but the sand blasting apparatus at this time uses a slit through which air flows from the tip of the electrode protection cover toward the extraction electrode portion as shown in FIG. Inlet 701 is provided, and at least the width of the slit includes a section where the sandblasting abrasive flies. This air prevents the sandblasting abrasive and the cutting debris of the partition film reflected after processing the sandblasting abrasive and the partition wall film that could not be completely prevented by the electrode protection cover from entering the extraction electrode portion and causing charging. ing.

In the present embodiment, the air inlet does not have to be a slit, and is not limited to the present embodiment. Further, the width of the slit does not need to include a section where the sandblasting abrasive flies, and is not limited to the present embodiment.

(Embodiment 5) In this embodiment,
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blast processing apparatus is the same as that of the first embodiment except for the electrode protection cover, but the sand blast processing method at this time is such that the portion of the formed substrate other than immediately below the substrate has a mesh or grid shape. Is transported by transport rollers 804 on a setter 807, and a sandblast abrasive 80 is fed from a blast nozzle 805 during transport.
The blast nozzle 805 moves along the moving direction 810 shown in FIG. Further, an electrode protection cover 808 made of a conductive rubber material is placed on the setter 807 by a protection cover supporter 809 above the lead-out electrode portion at the end of the formed substrate, and is transported by the transport roller 804 in contact with the setter 807. Grounded. Since the sand blasting abrasive 806 does not directly collide with the electrode portion by the electrode protection cover 808, the extraction electrode portion and the dielectric layer are not damaged, and the electrode is not charged by the charged sand blasting abrasive. Blasting is possible. Further, even if the sandblasting abrasive and the cutting debris reflected after processing the sandblasting abrasive and the partition wall film that could not be completely prevented by the electrode protection cover enter the extraction electrode portion, the mesh-like or grid-like portion The sandblasting abrasive does not stagnate on the setter. In the figure, reference numeral 801 denotes a rear glass substrate;
02 denotes an address electrode, and 803 denotes a partition film.

In the present embodiment, it is desirable that the portion of the setter other than immediately below the substrate has a mesh shape or a lattice shape, but the present invention is not limited to this embodiment. Also, it is desirable to be grounded,
It is not limited to the present embodiment.

(Sixth Embodiment of the Invention)
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blasting apparatus is the same as that of the first embodiment except for the electrode protection cover, but the sand blasting method at this time is such that the electrode protection cover of the fifth embodiment of the invention is provided by the protection cover support. Instead of being set on the setter, as shown in FIG.
1 is set on the setter by a clip 902, and the contact of the end of the substrate with the lead electrode portion is made by a substrate contact portion made of a conductive rubber material. At this time, since the substrate contact portion completely protects the extraction electrode portion, collision of the sandblasting abrasive and damage due to the collision do not occur. The setter is grounded via a substrate transport roller.

In this embodiment, the substrate contact portion is preferably made of a conductive rubber material, but is not limited to this embodiment. Further, the setter is desirably grounded via the substrate transport roller, but is not limited to this embodiment.

(Seventh Embodiment of the Invention)
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blasting apparatus is the same as that of the first embodiment except for the electrode protection cover, but the sand blasting method at this time is the same as that of the fifth embodiment except for the protective cover support. . At this time, the protective cover supporting portion is in a grid shape 1001 as shown in FIG.
Alternatively, as shown in FIG.
2. Even if the sandblasting abrasive and the cutting debris reflected after processing the sandblasting abrasive and the partition wall film that could not be completely prevented by the electrode protection cover enter the extraction electrode portion, the mesh-like or grid-like shape The sandblasting abrasive does not stay on the setter because it can escape from the portion.

(Eighth Embodiment of the Invention)
Since the features of the invention are included in the blasting step in the first embodiment of the invention, and the other steps are the same as those in the first embodiment of the invention, only the blasting step will be described.

The blasting apparatus is the same as that of the first embodiment except for the electrode protection cover, but the sand blasting method at this time is the same as that of the fifth embodiment except for the protective cover support. . At this time, the protective cover supporting portion has a lattice shape as shown in FIG.
1 or an air inlet 1102 in a mesh shape as shown in FIG.
The sandblasting abrasive that could not be prevented by the electrode protection cover and the sandblasting abrasive reflected after processing the partition wall film and the cutting chips of the partition wall film can be prevented from entering the extraction electrode portion by air. There is no stagnation on the setter.

In this embodiment, since the protective cover supporting portion is in a lattice or mesh shape, a mechanism for inflowing air from outside is sufficient even if there is no air inflow port. It is not something to be done.

[0060]

As described above, according to the present invention, a conductive material is formed on an electrode against the collision of abrasive particles and the charging of the substrate due to friction when forming a partition in a gas discharge panel. By providing this, it is possible to reduce and stabilize damage to the electrodes and the dielectric layer formed on the substrate, and it is possible to form high-quality, high-precision partition walls at a high yield, so that low cost and high quality can be achieved. Thus, it is possible to realize a gas discharge panel capable of performing various displays.

[Brief description of the drawings]

FIG. 1 is a diagram schematically showing a configuration of a plasma display panel.

FIG. 2 is a partial cross-sectional perspective view showing a main configuration of an AC surface discharge type plasma display panel.

FIGS. 3A to 3E are cross-sectional views illustrating each step of a partition wall forming process according to an embodiment of the present invention.

FIG. 4 is a view schematically showing a sandblasting apparatus according to the embodiment of the present invention.

FIG. 5 is a view schematically showing a part of a sandblasting apparatus according to the embodiment of the present invention.

FIG. 6 is a view schematically showing a part of a sandblasting apparatus according to an embodiment of the present invention.

FIG. 7 is a view schematically showing a part of a sandblasting apparatus according to the embodiment of the present invention.

FIG. 8 is a view schematically showing a sand blasting step in the embodiment of the present invention.

FIG. 9 is a view schematically showing a part of a sandblasting step in the embodiment of the present invention.

FIG. 10 is a view schematically showing a part of a sandblasting step in the embodiment of the present invention.

FIG. 11 is a view schematically showing a part of a sandblasting step in the embodiment of the present invention.

[Explanation of symbols]

REFERENCE SIGNS LIST 100 Front substrate 101 Rear substrate 102, 103 Display electrode 104 Dielectric layer 105 Dielectric protection layer 106 Address electrode 107 Dielectric layer 108 Partition 109 Phosphor layer 110 Discharge gas 201 Front plate 202 Front plate glass 203 Transparent electrode 204 Bus electrode 205 Dielectric Body layer 206 Protective film 207 Display electrode 211 Back plate 212 Back plate glass 213 Address electrode 214 Dielectric layer 215 Partition 216 Phosphor layer 217 Discharge space 300 Back plate glass 301 Address electrode 302 Dielectric layer 303 Substrate 304 Partition film 305 Photosensitive coating Film 306 Open groove portion 307 Blast nozzle 308 Sandblast abrasive 309 Open groove portion 310 Partition wall after processing 311 Partition wall after burning 401 Back plate glass substrate 402 Address electrode 403 Partition film 404 Substrate transport Roller 405 Blast nozzle 406 Sandblast abrasive 407 Electrode protection cover 408 Blast nozzle moving direction 501 Brush-like abrasive intrusion prevention shield 502 Sheet-like abrasive intrusion prevention shield 503 Roll-like abrasive intrusion prevention shield 601 Air Inflow port 701 Electrode protection cover with built-in air inlet 801 Back plate glass substrate 802 Address electrode 803 Partition film 804 Substrate transport roller 805 Blast nozzle 806 Sand blasting abrasive 807 Setter 808 Electrode protection cover 809 Protective cover support 810 Moving direction of blast nozzle 901 Electrode protection cover 902 Clip 903 Substrate contact part 1001 Lattice-shaped protection cover support 1002 Mesh-shaped protection cover support 1101 Lattice with air inlet Protective cover support portion of the protective cover support portion 1102 shaped mesh having an air inlet

Continuing from the front page (72) Inventor Sadao Uemura 1006 Kazuma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. 5C027 AA09 5C040 FA01 GB03 GB14 GF19 JA17 MA07 MA23 5C058 AA11 AB01 BB25

Claims (16)

[Claims] An apparatus for manufacturing a plasma display device in which a partition is formed by a sand blast method, wherein a conductive material is formed at least above a lead electrode portion at an end of a partition forming substrate in a sand blast processing chamber for performing a sand blast process. An apparatus for manufacturing a plasma display device, comprising: an electrode protection cover. 2. The electrode protection cover according to claim 1, wherein the electrode protection cover includes a shield for preventing an abrasive from coming into contact with a substrate, and the electrode protection cover and the extraction electrode portion have the same potential. Manufacturing apparatus for plasma display devices. 3. The apparatus according to claim 1, further comprising a mechanism for introducing air from between the electrode protection cover and the substrate toward a sandblasting surface. 4. The apparatus according to claim 1, wherein the electrode protection cover has an air inlet facing the substrate at a tip thereof. 5. The apparatus according to claim 1, wherein said electrode protection cover is grounded. 6. The plasma display according to claim 1, wherein said electrode protection cover is made of a material containing at least one of a rubber material, a resin material, and a metal material. Display device manufacturing equipment. 7. A method of manufacturing a plasma display device in which a partition is formed by a sandblast method, and a method for transporting a substrate having a conductive electrode protection cover above a lead electrode portion at an end of a partition forming substrate. A method of manufacturing a plasma display device, comprising: carrying a substrate on a flat plate-shaped setter and performing sandblasting. 8. The method according to claim 1, wherein the protective cover is a clip type, and the substrate is carried on a setter that is in contact with the substrate via a conductive substrate contact portion that is in contact with the lead electrode, and is sandblasted. A method for manufacturing the plasma display device according to claim 7. 9. The substrate contact portion is made of a material including at least one of a rubber material, a resin material, and a metal material, and has a buffering property that does not damage the extraction electrode when the substrate is installed. The method for manufacturing a plasma display device according to claim 8. 10. The method according to claim 7, wherein the protective cover is subjected to sandblasting by carrying the substrate on a setter having a protective cover supporting portion having a lattice or mesh shape provided at the end of the setter. A method for manufacturing a plasma display device. 11. The substrate is transported and sandblasted on a setter provided with a mechanism for flowing air between the substrate and the protective cover from outside the protective cover support. Of manufacturing a plasma display device. 12. The method according to claim 7, wherein the setter is grounded during transportation. 13. The protective cover according to claim 7, wherein the protective cover is made of a material containing at least one of a rubber material, a resin material, and a metal material. Of manufacturing a plasma display device. 14. The setter, wherein at least a portion except a protective cover portion and a portion except immediately below a substrate are in a mesh shape or a lattice shape, and a sandblasting abrasive does not stay on the setter during sandblasting. Item 12. The method for manufacturing a plasma display device according to any one of Items 7, 8, 10, and 11. 15. A plasma display device using the apparatus for manufacturing a plasma display device according to claim 1. 16. A plasma display device using the method for manufacturing a plasma display device according to claim 7. Description: