JP2002149241A - Positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a positioning device which can position a translatory table with high precision even if a turntable has slight dynamic unbalance. SOLUTION: This device has repetitive compensators 122a, 122b, and 122c which compensate cyclic vibrations to the translatory table 109, a rotating speed decision unit 108 which decides the stability of the rotating speed of the turntable 101, a switch 123 which switches correction control signals by the repetitive compensators 122a, 122b, and 122c, and a means (composed of a feedback control system including linear motors 128a, 128b, 128c, and 128d, position detectors 118a, 118b, 118c, and 118d, subtractors 121a, 121b, and 121c, etc.), which controls the positioning of the translatory table 109 by outputting the correction control signals by the repetitive compensators 122a, 122b, and 122c by controlling the switch 123 through the rotating speed decision unit 108.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning control device for positioning a linear motion table having a rotary table used in a machine tool or the like with high accuracy.

[0002]

2. Description of the Related Art Conventionally, positioning control of a linear motion table equipped with a rotary table used in a machine tool or the like is performed with high accuracy by detecting the position of the linear motion table and performing feedback control based on the signal. Had gone. However, in such a method, when the rotary table is rotated, the force due to the weight imbalance of the rotary table acts on the linear motion table, and as a result, there is a problem that the positioning accuracy is deteriorated. In order to solve this problem, the variation of the force acting on the linear motion table due to the rotation of the rotary table, that is, the dynamic imbalance of the rotary table is corrected by adding a weight to the rotary table or the like. .

[0003]

However, in the method of correcting the weight imbalance of the rotary table described in the prior art, it is necessary to completely eliminate the imbalance amount.
The measuring instrument for measuring the amount of unbalance must be highly accurate.

Further, several times of routine work are required to realize an additional weight for correcting the weight fluctuation of the rotary table with high accuracy. At that time, there was a problem that the operation was extremely time-consuming because the rotation of the rotary table was repeatedly stopped.

[0005] Therefore, in practice, the device is used with a certain amount of imbalance. In a state where the unbalance amount remains, a force proportional to the unbalance amount acts as a disturbance on the linear motion table, thereby deteriorating the positioning accuracy of the linear motion table.

As another correction method, there is an auto-balance method in which a weight to be corrected is added, or the position of the weight having the same effect is automatically moved in the radial direction. However, in order to perform the correction by the auto balance method, the measurement of the unbalance and the correction of the unbalance must be performed with high accuracy. For this reason, the measurement and correction method must have the same resolution and accuracy as the positioning accuracy of the linear motion table, and there is a problem that the cost of the apparatus is high.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a positioning device capable of positioning a linear motion table with high accuracy even if the rotary table has a slight dynamic imbalance. Aim.

[0008]

Means and Action for Solving the Problems The present inventors have
As a result of conducting a trial and error study to achieve the above object, the inventors have found that the above object can be achieved by the following means, and have completed the present invention.

That is, in order to achieve the above object, a positioning device according to the present invention is directed to a positioning device including a rotary table and a linear motion table on which the rotary table is mounted. A repetition compensator for compensating (including disturbance), a rotation speed determiner for determining the stability of the rotation speed of the turntable, a switch for switching a correction control signal by the repetition compensator, and the rotation speed determiner Means for controlling the switching unit to output a correction control signal by the repetitive compensator to control the positioning of the linear motion table.

In the present invention, the positioning device includes:
It is preferable that an origin sensor for detecting a reference position of the rotary table is further provided, and a correction control signal is output in synchronization with an output signal of the origin sensor for controlling the positioning of the translation table.

Further, the positioning device includes a speed detecting means for detecting a rotation speed of the rotary table, a first driving means for applying a torque to the rotary table, and a speed signal detected by the speed detecting means as feedback. Rotation speed control means for controlling the rotation speed of the rotary table to a predetermined rotation speed, position detection means for detecting the position of the translation table, and second drive means for applying thrust to the translation table. It is preferable that the means for controlling the positioning of the translation table controls the positioning of the translation table by feeding back a position signal detected by the position detection means. The positioning device includes a cylinder that supports the weight of the linear motion table and the rotary table, a pressure detection unit that detects a pressure in the cylinder, and a gravity that feeds back the pressure detected by the pressure detection unit to the cylinder. And a balance mechanism for generating a force opposite to the above and assisting the thrust of the second drive means.

In the positioning device, the translation table includes a plurality of driving means and a plurality of measurement means, and the position, pitching direction and yawing of the translation table are determined from signals measured by the plurality of measurement means. The means for generating three feedback signals of rotation in the direction and controlling the positioning of the translation table is constituted by three feedback control systems for controlling the position of the translation table and the rotation in the pitching and yawing directions. , Said 3
It is preferable that the repetition compensator is provided in each of the two feedback control systems.

Further, the repetition compensator includes at least a band limiting filter, storage means for storing a position deviation calculated from the command position and the detected position feedback signal for one rotation of the turntable, and a dynamic characteristic compensator. Wherein the repetition compensator is constituted by a data group of correction control signals created from position deviation data when the turntable previously measured is rotated at a predetermined constant speed. Preferably, the output is output in synchronization with the rotation angle of the turntable.

With the above arrangement, the repetitive compensator provided in the position control system of the linear motion table can correct a periodic disturbance. However, if the disturbance has no periodicity, it cannot correct the disturbance. In addition, the accuracy may be deteriorated.
When the turntable is rotating at a constant speed, the dynamic imbalance has a periodicity synchronized with the rotation speed, so that the correction by the repetitive compensator works effectively. Conversely, in the acceleration / deceleration state when the rotation of the rotary table is stopped, the periodicity of the dynamic imbalance cannot be secured, so that the correction effect by the repetitive compensator cannot be expected.

Therefore, in order to effectively use the correction effect of the repetition compensator, the stability of the rotation speed of the turntable is determined, and the correction signal of the repetition compensator is output only when the turntable is rotating at a constant speed. By adding to the positioning control system, the linear motion table can be positioned with high accuracy.

[0016]

Next, an embodiment of the present invention will be described in detail with reference to the drawings. [First Embodiment] FIG. 1 is a block diagram showing a configuration of a linear motion table positioning control device equipped with a rotary table according to a preferred embodiment of the present invention. FIG.
1 is a configuration diagram of a linear motion table equipped with a rotary table according to a preferred embodiment of the present invention. The rotary table and the linear motion table having the configuration shown in FIG. 2 are controlled by a control device having a configuration shown in FIG. 1 and FIG.

In the coordinates shown in FIG. 2, the Z direction indicates the direction of gravity. In FIG. 2, 101 is a turntable, 10
Reference numeral 9 denotes a linear motion table which moves in the Z direction in the coordinates of FIG. 2, 210a and 210b denote columns fixing guides of the linear motion table 109, and 211 denotes left and right columns 210.
a, a connecting member for connecting 210b, 212a, 212b
Is a guide in the X-Y direction of the linear motion table 109. The linear motion table 109 is guided by a static pressure fluid bearing (not shown) provided on the linear motion table 109 so that the linear motion table 109 is coordinated with the X-Y coordinate system. Supported in the direction.
213a-213a ', 213b-213b', 213
c-213c ', 213d-213d' (213c ',
213d 'is not shown) is a connecting plate for fixing the linear motor to the columns 210a, 210b, 214a, 214b, 2
Reference numerals 14c and 214d denote stators of linear motors for applying thrust to the linear motion table 109, 215a, 215b, and 215
c and 215d (215c and 215d are not shown) are linear motor movers, 216a, 216b, 216c and 21
Reference numeral 6d denotes a length measuring mirror (216c, 216) of a laser length measuring device for detecting the displacement of the translation table 109 in the Z direction with high accuracy.
d is not shown), 217a, 217b, 217c, 217
d is a balance cylinder for supporting the weight of the translation table 109 and the mounted rotary table 101. The linear motion table 109 is supported in the Z direction (gravity direction) by four balance cylinders 217a to 217d 217a to 217d.
a-214d and linear motor movers 215a-215
It moves in the Z direction by the thrust of four linear motors constituted by d. The amount of movement is measured by the length measuring mirrors 216a to 216.
It is detected by a laser length measuring device measuring d.
The rotary table 101 is incorporated in the linear motion table 109 and rotates in an XZ axis plane with the Y axis direction as a rotation axis.

FIG. 1 shows the rotary table 101 shown in FIG.
FIG. 2 is a block diagram showing a configuration of a control device that controls a linear motion table 109 equipped with a. As a configuration of the control device, a control system for controlling the rotary table 101 and a linear motion table 10
9 is divided into a control system for controlling the control system 9. Further, the control system of the linear motion table 109 is composed of two control systems, a pressure control system for controlling fluid pressure in the cylinder for weight compensation and a position control system for positioning control. The cylinder pressure control system and the position control system of the linear motion table 109 have three control loops. The linear motion table 109 having the configuration shown in FIG. 2 is composed of four cylinders and four linear motors (a plurality of driving means). Using a laser length measuring instrument (a plurality of measuring means)
Are controlled in the Z-axis direction on the coordinate axes and the rotational attitude in two directions around the X-axis and the Y-axis.

In FIG. 1, 101 is a rotary table, 1
03 is a rotation speed setting device for setting the rotation speed of the turntable 101; 104 is a subtractor for calculating the rotation speed error of the turntable 101; 105 is a PID adjuster for adjusting a control system for controlling the rotation speed of the turntable 101. , A driving device for driving a motor that applies torque to the rotary table 101, a motor 107 (a first driving device),
02 is a speed detector (speed detecting means) for detecting the rotation speed of the turntable 101; 108 is a rotation speed determiner for determining whether the rotation speed is stable based on the speed deviation of the turntable calculated by the subtractor 104 , 109 are linear motion tables to be controlled.

Reference numeral 120 denotes a position setting device for setting the position of the linear motion table 109; 121a, 121b, and 121c, subtracters for calculating position deviation; and 122a, 122b, and 122c.
Is a repetition compensator for generating a correction control signal for correcting a periodic position deviation, and 123 is a repetition compensator 122
This is a switch for switching whether or not to use the correction control signals calculated in a to 122c in the control system (position control system) of the linear motion table 109, and is controlled by the rotation speed determiner 108. 124a, 124b and 124c are the position deviation signals calculated by the subtracters 121a to 121c,
An adder for adding a correction control signal calculated by the repetitive compensators 122a to 122c to generate a position control signal, and 125a, 125b, and 125c are adders 124a to 124c.
A position control compensator typified by a PID compensator for adjusting the position control system of the linear motion stage 109 by processing the position control signal calculated by 124c. Distributor for generating a thrust command to the motor, 127a, 127b, 127c,
127d is a linear motor driving device that amplifies the thrust command and generates a driving signal for the linear motor, 128a, 128b,
Reference numerals 128c and 128d denote linear motors (second driving means) for applying a thrust to the translation stage 109. Also, 11
8a, 118b, 118c and 118d are linear motion tables 1
A position detector typified by a laser length measuring device or the like that measures the position in the Z direction 09 (in the case of the present embodiment, a laser measuring device that measures the displacement of the measuring mirrors 216a to 216d in FIG. 2). Long detector) 119 is a position detector 118
This is a coordinate converter that calculates displacements of control axes (position in the Z direction and rotation around the X axis and around the Y axis) for position control from the position signals detected by a to 118d.

Reference numeral 131 denotes a pressure setting device for setting the fluid control pressure in the cylinder in order to support the weight of the translation table 109 and the mounted rotary table 101 in the cylinder, and 132a, 132b, and 132c denote pressure deviations. Subtractors for calculation, 133a, 133b, 133c are pressure control compensators represented by PID compensators for processing the calculated pressure deviation signal and adjusting the pressure control system, and 134.
Are pressure distributors 135a, 135b, 1 that convert the adjusted pressure control signals into fluid control signals to be supplied to the cylinders.
35c and 135d are control valve driving devices for amplifying the fluid control signal and generating a signal for driving the control valve, and 136a and 136.
b, 136c, 136d are fluid control valves for controlling the flow rate of the fluid supplied to each cylinder, 137a, 137b, 13
Reference numerals 7c and 137d denote fluid cylinders for generating thrust for supporting the weight of the moving table, 138a, 138b, and 138.
c and 138d are thrust constants determined by the structure of the fluid cylinder. 129a, 129b, 129c, 1
29d is a pressure detector (pressure detecting means) for detecting the fluid pressure in the cylinder, and 130 is a coordinate converter for converting the detected fluid pressure signal in the cylinder into a pressure feedback signal of the pressure control shaft.

In FIG. 1, positioning control of the translation stage 109 is performed by using four linear motors 128a to 128d in the Z direction (positioning direction) in FIG. 2, rotation around the X axis, and rotation around the Y axis. Is controlling the rotation.
The control is detected by the position detectors 118a to 118d in FIG. 1, and the coordinate converter 119 outputs a position signal Z in the Z-axis direction, a signal Wx in the rotation direction around the X-axis, and a signal in the rotation direction around the Y-axis. Based on the position signal converted to Wy,
Control commands CZ, CW set by position setting device 120
This is performed by a feedback system that controls the linear motion table 109 at x, CWy (command position).

The signal Z fed back by the coordinate converter 119 is obtained by subtracting the position deviation from CZ, which is the target position (command) of the linear motion table 109 in the Z direction, from the subtractor 12.
Calculated by 1a, 4 to eliminate the position deviation
The linear motors 128a to 128d are driven. The feedback system in the Z direction is stabilized by the position control compensator 125a. Similarly, Wx in the rotation direction around the X axis and W in the rotation direction around the Y axis are fed back.
y is the target command C set by the position setting device 120
The difference between Wx and CWy is calculated by the subtracters 121b and 121c, and the four linear motors 128a to 128d are driven so as to eliminate the respective differences. Then, the respective feedback systems are connected to the position control compensators 125b and 125.
It is stabilized by c. A thrust command is generated by the thrust distributor 126 from the signals output from the three feedback systems, and signals for driving the four linear motors are generated by the linear motor driving devices 127a to 127d. However, if it is attempted to position the moving table 109 that moves in the direction of gravity (Z-axis direction) using only such a positioning control system, a linear motor having a large thrust is required, and the size of the apparatus increases. Therefore, in general, a table that moves in the direction of gravity is provided with a balance mechanism that supports the weight of the table, so that the thrust of the linear motor can be reduced.

Also in this embodiment, four cylinders 217a to 217d are provided as shown in FIG.
7a to 217d to control the fluid pressure in the linear motor 128a
１２８128d (FIG. 1). Further, in this pressure control system, the thrust generated by the cylinders 137a to 137d is controlled by the control shown in FIG. 1 in the same direction as the control axis of the positioning control system described above (the Z-axis direction, the rotation direction around the X-axis, and the rotation around the Y-axis). Direction).

In the cylinders 137a to 137d,
Since the thrust is proportional to the fluid pressure in each of the cylinders 137a to 137d, controlling the pressure of the fluid controls the thrust to the linear motion table 109. Therefore, as described above, three control systems for controlling the thrust in the Z-axis direction, the thrust in the rotation direction around the X-axis, and the thrust in the rotation direction around the Y-axis are used as control systems for the fluid pressures of the cylinders 137a to 137d, respectively. Is composed. That is, the pressure detector 1
Each cylinder 137 detected by 29a-129d
a to 137d fluid pressure signals Pz1, Pz2, Pz
3, Pz4 are converted into pressure values Pz, Pwx, Pwy corresponding to the thrust of the control axis by the coordinate converter 130, and the fluid pressure of the cylinders 137a to 137d is controlled based on this signal. Each set value CPz, CPwx, CP
wy is detected by the pressure detectors 129a to 129d, and deviations from the signals Pz, Pwx, and Pwy converted by the coordinate converter 130 are calculated by the subtracters 132a to 132c. In the three pressure control systems, the four fluid control valves 136a to 136d are driven to control the fluid pressure in each of the cylinders 137a to 137d so that the deviation becomes zero. In order to stabilize this feedback system, the pressure control compensator 13
3a to 133c are used. As described above, the positioning of the linear motion table is controlled by the positioning control feedback system and the cylinder fluid pressure control feedback system.

On the other hand, in the rotary table 101 mounted on the linear motion table 109, the speed signal Vs detected by the speed detector 102 is fed back to the rotation speed of the rotary table 101, and the command set by the rotation speed setting device 103 is provided. It is controlled to rotate at the rotation speed CVs. The difference between the speed signal Vs detected by the speed detector 102 and the command rotation speed CVs set by the rotation speed setting device 103 is calculated by the subtractor 104, and the motor 106 is driven by the driving device 106 so that the difference becomes zero. 107 is driven. This feedback system is stabilized by the speed control compensator 105.

However, the linear motion table 1
09 is in a state where the positioning control is performed.
When 1 is rotated, if there is a weight imbalance on the rotary table 101, a force proportional to the imbalance amount acts on the linear motion table 109. This force causes disturbance (vibration or the like) of the linear motion table 109,
, The positioning accuracy is deteriorated.

Usually, in order to eliminate this disturbance, the amount of imbalance due to the rotation of the rotary table 101 is corrected. However, in order to increase the positioning accuracy of the device, the accuracy of correction of imbalance must be improved. For that purpose, a high-precision dynamic balance measuring device is required, and at the same time, a great deal of labor (long time) is required. I have to spend.

Therefore, in this embodiment, the repetition compensators 122a to 122c are provided in the positioning control system of the linear motion table 109 to compensate for the accuracy deterioration caused by the imbalance during the rotation of the rotary table 101.

The rotation speed of the turntable 101 is controlled to be constant by the above-described rotation speed control system. Therefore, disturbance caused by rotation of the rotary table 101 that causes deterioration of the accuracy of the linear motion table 109 is periodic. As a result, the error component of the accuracy deterioration is also calculated as a periodic deviation (ez: Z-axis direction, ewx: rotation direction around the X-axis, ewy: rotation direction around the Y-axis) as shown in FIG.
Appears in the calculation results of a to 121c. Here, FIG. 5 is a diagram illustrating an operation state of the positioning device according to a preferred embodiment of the present invention. In order to correct the deviation, the repetition compensators 122a to 122c use the turntable 101
And outputs a correction signal calculated based on the deviation one cycle before in synchronization with the rotation cycle. The correction signals are added to adders 124a to 124a to
At 124c, a control signal (correction control signal) is created by adding to the current deviation signal, and the linear motion table 1 is
09 is controlled.

In the Z direction, a control signal is generated by adding the deviation signal calculated by the subtractor 121a and the correction signal calculated from the deviation one cycle before by the repetition compensator 122a by the adder 124a. I have. Similarly, for the rotation direction about the X axis, a correction signal calculated by the repetition compensator 122b is added by the adder 124b to generate a control signal, and for the rotation direction about the Y axis, the repetition compensator 12b is used.
The correction signal calculated in 2c is added by the adder 124c to generate a control signal.

Since the above-mentioned correction signal is calculated from the deviation signal one cycle before in synchronization with the rotation cycle, the effect is obtained when the deviation has periodicity. By performing the correction, the accuracy may be degraded. The correction in the present embodiment is for the accuracy deterioration caused by the rotation of the turntable 101. Since the rotation speed of the turntable 101 is controlled, periodicity is ensured in a steady state, and the correction works effectively. However, at the time of acceleration / deceleration due to the stoppage of the rotation of the turntable 101, this periodicity is not ensured. Therefore, it is better to invalidate the correction. Therefore, the stability of the rotation speed of the turntable 101 is determined by the rotation speed determiner 108, and the repetition compensator 122a
The switch 123 is operated (controlled) so as to make the correction signals of .about.122c effective for the positioning control system.

The unbalance of the rotary table 101 affects not only the moving direction but also the pitching direction and the yawing direction of the translation table 109. As in the present embodiment, by controlling not only the movement direction (Z-axis direction) of the linear motion table 109 but also the rotation directions of pitching (around the X-axis) and yawing (around the Y-axis), higher accuracy is achieved. Positioning accuracy can be achieved.

The above-described repetition compensators 122a to 122
An example of c is a repetition compensator having a configuration as shown in FIG. Here, FIG. 4 is a diagram showing a configuration of the repetition compensator in the positioning device according to a preferred embodiment of the present invention. In FIG. 4, reference numeral 401 denotes an adder;
2 is a band limiting filter, and 403 is a delay element that stores data and outputs a delay element one cycle later (a storage unit that stores a position deviation calculated from a command position and a detected position feedback signal for one rotation of the rotation table). ), 4
Reference numeral 04 denotes a dynamic characteristic compensator for compensating a phase delay, a gain, and the like of a control target. This repetition compensator adds, at an adder 401, the data at the time of sampling one cycle (L) before, which is output from the delay element 403, to the deviation signal e every predetermined sampling period T, and performs processing of the band limiting filter 402. Then, the data is stored in the delay element 403. Delay element 4
Numeral 03 has n (= L / T) memories and can store one cycle (L) of each sampled data, and outputs the oldest data at each sampling. I have. The output of the delay element 403 is compensated by the dynamic characteristic compensator 404 for the phase delay and gain reduction of the control target, and is output as a correction signal d. A control signal is generated from the correction signal d and the deviation signal e. When the deviation at the time of sampling one cycle before is a large value, a large correction signal is added to the current deviation, the control signal changes greatly, and the position deviation is corrected so as to be small.

[Second Embodiment] FIG. 3 is a block diagram showing the configuration of a linear motion table positioning control device equipped with a rotary table according to a second embodiment. Here, in FIG. 3, the same reference numerals as those in FIG. 1 indicate the same components as those in FIG. In FIG. 3, as a difference from the embodiment of FIG. 1, the repetition compensators 122 a to 122 c calculate the deviation from position deviation data (deviation signal) obtained when the previously measured rotary table rotates at a predetermined constant speed. It is composed of a data group of correction control signals to be corrected. In the iterative compensator composed of the data group, the correction control signal must be output in synchronization with the rotation angle of the turntable. Therefore, in FIG. 3, an origin sensor 139 for detecting a reference position is provided on the rotary table 101, and the repetitive compensators 122a to 122e are synchronized with an output signal of the origin sensor 139.
122c, the switch 123 outputs a correction control signal. Position control signals processed by the position feedback system of the translation table 109 and the repetition compensators 122a to 122
The correction signals output from 2c are added to adders 124a to 124a.
By the control signal obtained by adding at 4c,
Positioning control of the linear motion table 109 is performed with high accuracy.

[0036]

As described above, according to the positioning device of the present invention, accuracy deterioration due to periodic disturbance due to dynamic imbalance of the mounted rotary table is suppressed, and even when the rotary table is rotated, the linear motion table is rotated. Can be positioned with high accuracy. In addition, there is no need to correct the dynamic balance of the rotary table with high precision, so that the working time can be reduced, and / or the cost of the apparatus can be reduced by eliminating the need for a high-precision auto-balancing device.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a linear motion table positioning control device equipped with a rotary table according to a preferred embodiment of the present invention.

FIG. 2 is a configuration diagram of a linear motion table equipped with a rotary table according to a preferred embodiment of the present invention.

FIG. 3 is a block diagram showing a configuration of a linear motion table positioning control device equipped with a rotary table according to a second embodiment.

FIG. 4 is a diagram showing a configuration of a repetition compensator in the positioning device according to a preferred embodiment of the present invention.

FIG. 5 is a diagram illustrating an operation state of the positioning device according to a preferred embodiment of the present invention.

[Explanation of symbols]

101: rotary table, 102: speed detector, 103:
Rotation speed setting device, 104: subtractor, 105: speed control compensator, 106: motor driving device, 107: motor, 10
8: Rotation speed determiner, 109: Linear motion table, 1118
a, 118b, 118c, 118d: position detector, 11
9: coordinate converter, 120: position setting device, 121a, 12
1b, 121c: subtractor, 122a, 122b, 122
c: repetition compensator, 123: switch, 124a,
124b, 124c: adder, 125a, 125b, 1
25c: position control compensator, 126: thrust distributor, 127
a, 127b, 127c, 127d: linear motor driving device, 128a, 128b, 128c, 128d: linear motor, 129a, 129b, 129c, 129d:
Pressure detector, 130: coordinate converter, 131: pressure setter, 132a, 132b, 132c: subtractor, 133
a, 133b, 133c: pressure control compensator, 134: pressure distributor, 135a, 135b, 135c, 135d:
Control valve drive device, 136a, 136b, 136c, 13
6d: fluid control valve, 137a, 137b, 137c, 1
37d: cylinder, 138a, 138b, 138c, 1
38d: thrust constant, 139: origin sensor, 210a, 2
10b: column, 211: connecting member, 212a, 212
b: Guide, 213a-213a ', 213b-213
b ', 213c-213c', 213d-213d ':
Connecting plate, 214a, 214b, 214c, 214d: stator of linear motor, 215a, 215b, 215c,
215d: mover of linear motor, 216a, 216
b, 216c, 216d: Mirror for length measurement, 217a, 2
17b, 217c, 217d: balance cylinder, 40
1: adder, 402: band limiting filter, 403: delay element, 404: dynamic characteristic compensator.

Continued on the front page F term (reference) 3C001 KA06 KA07 KB10 SB06 TA01 TB01 TB05 TB06 TB08 TC09 TD01 3C048 EE07 EE08 5H303 AA01 BB02 BB08 BB12 BB14 CC01 DD04 DD06 EE03 EE07 FF06 GG13 HH02 HH07 KK01 KK04 KK02 KK02 KK02

Claims (7)

[Claims] 1. A positioning device comprising: a rotary table; and a linear motion table on which the rotary table is mounted, wherein: a repetition compensator for compensating for periodic vibration with respect to the linear motion table; A rotation speed determiner for determining stability, a switch for switching a correction control signal by the repetition compensator, and a rotation control unit for outputting a correction control signal for the repetition compensator by controlling the switch. Means for controlling the positioning of the linear motion table by using the positioning device. 2. The positioning device further includes an origin sensor for detecting a reference position of the rotary table, and outputs a correction control signal in synchronization with an output signal of the origin sensor to control the positioning of the translation table. The positioning device according to claim 1, wherein the positioning is performed. 3. The positioning device according to claim 1, further comprising: a speed detecting means for detecting a rotation speed of the rotary table; a first driving means for applying torque to the rotary table; and a speed signal detected by the speed detecting means. Rotation speed control means for controlling the rotation speed of the rotary table to a predetermined rotation speed, position detection means for detecting the position of the translation table, and second drive means for applying thrust to the translation table. 3. The apparatus according to claim 1, wherein the means for controlling the positioning of the translation table feeds back a position signal detected by the position detection means to control the positioning of the translation table. Positioning device. 4. The positioning device includes: a cylinder that supports the weight of the translation table and the rotary table; pressure detection means for detecting pressure in the cylinder; and feedback of the pressure detected by the pressure detection means. The positioning device according to any one of claims 1 to 3, further comprising: a balance mechanism configured to generate a force opposite to gravity in the cylinder to assist the thrust of the second drive unit. 5. The positioning device, wherein the translation table includes a plurality of driving units and a plurality of measurement units, and a position, a pitching direction, and a yawing of the translation table based on signals measured by the plurality of measurement units. The means for generating three feedback signals of rotation in the direction and controlling the positioning of the translation table is constituted by three feedback control systems for controlling the position of the translation table and the rotation in the pitching and yawing directions. The positioning device according to any one of claims 1 to 4, wherein the repetition compensator is provided in each of the three feedback control systems. 6. The repetition compensator includes a band limiting filter, storage means for storing a position deviation calculated from a command position and a detected position feedback signal for one rotation of the turntable, and a dynamic characteristic compensator. The positioning device according to any one of claims 1 to 5, comprising: 7. The repetition compensator is composed of a data group of correction control signals generated from position deviation data when the turntable previously measured at a predetermined constant speed is rotated, and outputs the correction control signal. The positioning device according to any one of claims 2 to 6, wherein is output in synchronization with a rotation angle of the rotary table.