JP2002144230A - Polishing method and device and manufacturing method and device for magnetic head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve a problem wherein extremely small quantity and supply of slurry in a fixed quantity is difficult to be performed, a magnetic material is mixed into slurry, noise is caused by sticking the magnetic material to a manufactured MR element, an agitator has heat by an electromagnetic induction according to rotation of the agitator and frictional heat between the agitator and a bottom part within a glass bottle is generated. SOLUTION: In this polishing method, air is introduced from a tip of a syringe located on the upper side of a surface plate into the syringe by putting abrasive grain slurry or grinding oil in the syringe and making a base end side of the syringe into a negative pressure state, the based end side of the syringe is made into a normal pressure state after abrasive grain slurry or grinding oil within the syringe is agitated by the air bubbles and thereby a work is polished by spouting the abrasive grain slurry or grinding oil from the tip of the syringe to the surface plate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for supplying an abrasive slurry or the like to a work such as a wafer of a magnetic head or a semiconductor wafer, a method and an apparatus for polishing a work, and a method of manufacturing a magnetic head. And equipment.

[0002]

2. Description of the Related Art Conventionally, when supplying abrasive slurry to a surface plate of a polishing apparatus, for example, during polishing in the manufacture of a wafer for a magnetic head, the abrasive slurry contained in a glass bottle is stirred by a magnetic stirrer. The abrasive slurry was supplied to the platen by a tube pump, or the stirred abrasive slurry was sprayed to the platen by a nozzle using compressed air from a compressor.

[0003]

However, in any of the above-mentioned slurry supply methods, it is difficult to supply a small amount and quantitatively of the slurry, and the slurry is opaque including abrasive grains. Since the stirrer of the magnetic stirrer cannot be seen from the outside of the glass bottle, the stirrer is not replaced even though the resin forming the surface layer of the stirrer is considerably worn. As a result, the magnet inside the stirrer is exposed to the surface of the stirrer, and the magnetic material is mixed into the slurry. Adheres to the stirrer, causing noise, and as the stirrer rotates, the stirrer generates heat due to electromagnetic induction and generates frictional heat between the stirrer and the bottom of the glass bottle. Since for generating leads to increase in temperature of the slurry, which was a problem that since to accelerate the polishing rate becomes unstable factor in polishing of magnetic head wafer high accuracy is required.

Further, in the case of the slurry supply by the tube pump described above, since there is a distance from the magnetic stirrer to the supply position to the platen by the tube pipe, the abrasive grains in the slurry easily precipitate and separate in the tube on the way. Therefore, there is a case where sufficient polishing cannot be performed, and since the oil resistance of the silicon tube is low, when an oil-based slurry is used, cracks occur in the tube, and the slurry leaks and silicon is separated from the tube and mixed into the slurry, There was a problem that this would cause corrosion of the finally manufactured MR element and the like.

In addition, in the case of the above-described slurry spraying by the nozzle, since the mist slurry is scattered around the surface plate, there is a problem that the working environment is deteriorated and the worker's body is adversely affected.

[0006] Further, in any of the above-described slurry supply methods, despite the intermittent polishing of the wafer,
Since the slurry is continuously supplied, the slurry is wasted, so that when an expensive diamond slurry is used, there is a drawback that an increase in manufacturing cost due to the waste is unavoidable.

An object of the present invention is to provide a method and an apparatus for supplying abrasive slurry and the like, which can solve the above-mentioned various problems at once, and a method and an apparatus for polishing and manufacturing a magnetic head using the same. is there.

[0008]

According to the first aspect of the present invention, an abrasive slurry or a grinding oil is put into a syringe located above a surface plate, and the base end side of the syringe is placed in a negative pressure state. After introducing air into the syringe from the tip of the syringe and stirring the abrasive slurry or grinding oil in the syringe by the bubbles, the abrasive slurry in the syringe is brought into a positive pressure state at the base end side of the syringe. Alternatively, the present invention relates to a polishing method characterized in that a work is polished by injecting a grinding oil from a tip of a syringe to a surface plate.

According to a second aspect of the present invention, in the polishing method of the first aspect, the plurality of syringes are divided into two systems, left and right, and abrasive slurry is placed in one of the syringes,
Put the abrasive slurry or grinding oil into the syringe on the other side,
The supply of the abrasive slurry or the grinding oil is performed by sequence control, and the left or right syringe, the left and right syringes or the left and right syringes are alternately provided, and the stirring and injection of the abrasive slurry or the grinding oil in each syringe are predetermined. This is done only for time.

According to a third aspect of the present invention, there is provided one or a plurality of syringes which are provided above a surface plate and which hold an abrasive slurry or a grinding oil, and the base end of the syringe is brought into a negative pressure state using compressed air. At least one vacuum generator, which is introduced from the tip of the syringe with the operation of the vacuum generator,
At least one catch tank for storing abrasive slurry or grinding oil mixed in air exiting from the base end, and a pipe of compressed air is selectively sent to one of a vacuum generator and a syringe base end side And a polishing apparatus.

According to a fourth aspect of the present invention, an abrasive slurry or a grinding oil is charged into a syringe located above the surface plate.
By bringing the proximal end of the syringe into a negative pressure state, air is introduced into the syringe from the distal end of the syringe, and the abrasive slurry or grinding oil in the syringe is agitated by the air bubbles. A method of manufacturing a magnetic head, comprising: injecting abrasive slurry or a grinding oil in a syringe from a tip of a syringe to a surface plate to polish a work made of a magnetic material to a predetermined size by setting a positive pressure state. Things.

According to a fifth aspect of the present invention, in the method according to the fourth aspect, the plurality of syringes are divided into two systems, left and right, and the abrasive slurry is placed in one of the syringes and the other is injected into the other syringe. The slurry slurry or the grinding oil is put, and the supply of the abrasive slurry or the grinding oil is performed by sequence control, either the left or right syringe, the left and right syringes or the left and right syringes are alternately performed, and the abrasive slurry or the slurry in each syringe is supplied. The agitation and injection of the grinding oil are performed for a predetermined time.

According to a sixth aspect of the present invention, there is provided one or a plurality of syringes which are provided above a surface plate and which contain an abrasive slurry or a grinding oil, and the base end side of the syringe is brought into a negative pressure state using compressed air. At least one vacuum generator, which is introduced from the tip of the syringe with the operation of the vacuum generator,
At least one catch tank for storing abrasive slurry or grinding oil mixed in air exiting from the base end, and a pipe of compressed air is selectively sent to one of a vacuum generator and a syringe base end side The present invention relates to a magnetic head manufacturing apparatus as described above.

According to a seventh aspect of the present invention, air is introduced from the distal end of the syringe into the syringe by putting an abrasive slurry or a grinding oil into the syringe and setting the base end side of the syringe to a negative pressure state. After the abrasive slurry or the grinding oil in the syringe is agitated by the air bubbles, the abrasive slurry or the grinding oil in the syringe is injected from the tip of the syringe by setting the base end side of the syringe to a positive pressure state. And a method for supplying abrasive slurry or the like.

The present invention according to claim 8 is a method according to claim 7, wherein the plurality of syringes are divided into two systems, left and right, and abrasive slurry is charged into one of the syringes and the other is injected into the other syringe. The slurry slurry or the grinding oil is put, and the supply of the abrasive slurry or the grinding oil is performed by sequence control, either the left or right syringe, the left and right syringes or the left and right syringes are alternately performed, and the abrasive slurry or the slurry in each syringe is supplied. The agitation and injection of the grinding oil are performed for a predetermined time.

According to a ninth aspect of the present invention, there is provided one or more syringes for storing an abrasive slurry or a grinding oil, and at least one vacuum generator for using a compressed air to bring a proximal end of the syringe into a negative pressure state. At least one for storing abrasive slurry or grinding oil mixed in air introduced from the distal end of the syringe with the operation of the vacuum generator and exiting from the proximal end.
The present invention relates to a supply device for abrasive slurry or the like, which has two catch tanks, and is configured to selectively send compressed air piping to one of a vacuum generator and a syringe base end side.

The present invention according to claim 10 provides the above-mentioned claim 9.
The apparatus as described above, further comprising at least one vacuum generator and at least one regulator for the vacuum generator and one regulator for the syringe for adjusting the compressed air to be selectively sent to the proximal end side of the syringe.

The present invention according to claim 11 is the apparatus according to claim 9 or 10, further comprising an on-off valve for supplying and stopping compressed air.

[0019]

Next, an embodiment of the present invention will be described with reference to the drawings.

As shown in FIG. 1, a supply device for abrasive slurry or the like is divided into left and right systems L and R, and a pair of left syringes 1A containing abrasive slurry and a grinding oil are contained therein. A pair of right syringe 1B and syringe 1
Vacuum generator 2A that puts the base end side of A · 1B in a negative pressure state
2B, catch tanks 3A and 3B for storing abrasive slurry or grinding oil mixed in air introduced from the distal ends of the syringes 1A and 1B with the operation of the vacuum generators 2A and 2B and coming out of the base ends, and a compressor 5 Solenoid valves 6A and 6B for selectively sending compressed air from either one of the vacuum generators 2A and 2B and the proximal end of the syringes 1A and 1B,
Vacuum generator regulators 4A and 4B for adjusting the pressure of the compressed air supplied to the vacuum generators 2A and 2B, and syringe regulators 7A and 7B for adjusting the pressure of the compressed air supplied to the base end of the syringes 1A and 1B. And an on-off valve 8 for supplying and stopping compressed air from the compressor 5. In the drawings, 9A and 9B denote silencers of the vacuum generators 2A and 2B, 10A and 10B denote pressure gauges, and 11A and 11B denote filters.

In the left and right supply systems L and R, the solenoid valve 6
The vacuum generators 2A and 2B and their silencers 9A are provided between the pressure gauges A and 6B and the pressure gauges 10A and 10B.
9B, first paths 12A and 12B in which the vacuum generator regulators 4A and 4B and the filters 11A and 11B are provided, and second paths 13A and 13B in which the syringe regulators 7A and 7B are provided.

As shown in FIGS. 2 (a) and 2 (b), the syringes 1A and 1B have a substantially cylindrical main body 1a.
A cock 1b provided below the main body 1a as necessary, and a nozzle 14 attached below the cock 1b.
And a substantially disk-shaped cap 15 for closing the upper end opening of the main body 1a, and a cylindrical connector 16 attached to a central hole (not shown) of the cap 15.

As shown in FIG. 3, a liquid crystal touch panel 18, a main power switch 19, an operation / start / end switch 21 and a left / right supply switch are provided on the upper half of the front surface of the apparatus main body 17 of the apparatus for supplying abrasive slurry or the like. 22 and 23 are provided, and knobs 24A and 24 of the vacuum generator regulators 4A and 4B of the two left and right systems L and R described above are provided in the lower half thereof.
B, knob for syringe regulators 7A and 7B 25A
25B and pressure gauge 9A / 9B meter 26A /
26B and an operation switch 27 for the on-off valve 8 are provided,
A polyurethane hose 28 for connecting the device main body 17 and the syringes 1A and 1B is provided at the lowermost portion of the device main body 17.
Connection ports 30A and 30B are provided.

As shown in FIG. 4 and FIG.
7 is divided into an upper chamber 17a and a lower chamber 17b.
Is provided with a sequence control unit 31 and the lower chamber 17
In front of b, the regulator 4A
4B, syringe regulators 7A and 7B, pressure gauges 9A and 9B, and on-off valve 8 are arranged. In the center of lower chamber 17b, vacuum generators 2A and 2B and their silencers 9A and 9B, solenoid valves 6A and 6B, and filters are provided. 11A ・ 1
1B, a catch tank 3A, 3B is disposed at the rear of the lower chamber 17b, and a compressed air supply port 32 is provided at the rear.

Next, the case where the abrasive slurry and the cutting oil are supplied by using the above-described apparatus will be described. The abrasive slurry is put in advance into the two syringes 1A on the left side and ground into the two syringes 1B on the right side. With the oil filled, the main power switch 19 is turned on and the liquid crystal touch panel 18 is turned on.
, The recipes such as the operation mode, the injection time of the abrasive slurry and the grinding oil and the interval (standby) time are set.

The set recipe is executed by the sequence control unit 31. Here, the abrasive slurry put in the left syringe 1A and the grinding oil put in the right syringe 1B are alternately supplied. Settings (L
toR) will be described.

In the case of supplying abrasive slurry by the left syringe 1A, the closing of the right solenoid valve 6B stops the flow of the compressed air from the compressor 5 to the right system R, while the compressed air is supplied to the left solenoid valve 6A. Via the first route 1
When the air enters the vacuum generator 2A and is supplied to the vacuum generator 2A, the base end of the left syringe 1A is in a negative pressure state, and air is introduced from the nozzle 14 at the distal end of the left syringe 1A. As shown in a), the abrasive slurry in the syringe 1A is stirred. After a lapse of a predetermined time, the solenoid valve 6A is operated, and the compressed air from the compressor 5 enters the second path 13A instead of the first path 12A, and accordingly, the base end of the left syringe 1A is in a positive pressure state. As shown in FIG. 2B, the abrasive slurry is ejected from the nozzle 14 at the tip of the left syringe 1A.

When the grinding oil is supplied by the right syringe 1B, the inflow of the compressed air from the compressor 5 to the left system L is stopped by closing the left electromagnetic valve 6A, and the compressed air is supplied to the right electromagnetic valve 6B. When the compressed air is supplied to the vacuum generator 2B through the first path 12B, the base end side of the right syringe 1B is in a negative pressure state, and accordingly, air is introduced from the nozzle 14 at the tip of the right syringe 1B. Then, the grinding oil in the syringe 1B is stirred by the bubbles, as shown in FIG. After a lapse of a predetermined time, the solenoid valve 6B is operated, and the compressed air from the compressor 5 enters the second path 13B instead of the first path 12B, whereby the base end of the right syringe 1B is in a positive pressure state. As shown in FIG. 2B, the grinding oil is injected from the nozzle 14 at the tip of the right syringe 1B.

During the stirring of the abrasive slurry in the left syringe 1A and the stirring of the grinding oil in the right syringe 1B, the air is sucked by the vacuum generators 2A and 2B. Even if oils are mixed in, the above catch tanks 3A and 3B
, So that the vacuum generators 2A and 2B are not damaged. When the supply of the abrasive slurry and the grinding oil is finally completed, the switch 27 of the on-off valve 8 is turned to close the on-off valve 8, so that the nozzles 14 of the left and right syringes 1A and 1B can be closed. Is prevented from dropping.

An example of the sequence control relating to the supply of the abrasive slurry by the left syringe 1A and the supply of the grinding oil by the right syringe 1B will be described with reference to FIG.
As shown in (1), the repeat counter operates 36 in response to the start signal 35, and counts the number of repetitions of the supply of the abrasive slurry by the left syringe 1A and the supply of the grinding oil by the right syringe 1B. Next, the left total timer is operated 37 to measure the total time of the abrasive slurry supply time and the standby time by the left syringe 1A, which will be described later, and the left supply timer is operated 38, during which the left syringe 1A performs the polishing by the left syringe 1A. The supply 39 of the granular slurry is performed. Then, the left standby timer operates 41 at the same time as the type of the left supply timer is increased. During this time, the supply of the abrasive slurry by the left syringe 1A is temporarily stopped, and the left supply timer is operated again at the same time as the left standby timer times out. Then, the supply 39 of the abrasive slurry is performed by the left syringe 1A. Thereafter, the supply of the abrasive slurry 39 and its standby are repeated, and when the left total timer times out, the intermittent supply of the abrasive slurry by the left syringe 1A is temporarily stopped.

Then, the right total timer is activated 4
2. Measure the total time of the supply time and the standby time of the grinding oil by the right syringe 1B described later,
The right supply timer operates 43, during which the right syringe 1B
Supply 44 of the grinding fluid is performed. Then, at the same time as the type of the right supply timer is increased, the right standby timer is operated 45, during which the supply of the grinding fluid by the right syringe 1B is temporarily stopped, and at the same time that the right standby timer is up, the right supply timer is operated again 43 Then, the supply 44 of the grinding oil is performed by the right syringe 1B. Thereafter, the supply of the grinding oil 44 and the waiting thereof are repeated, and when the time of the right total timer expires, the counting by the repeat counter is performed, and the left total timer is operated 37 again to execute the left syringe described above. 1A
The supply 39 of the abrasive slurry and the standby thereof are performed a predetermined number of times.

When the repeat counter has counted up a predetermined number of repetitions of the above-described supply of the abrasive slurry by the left syringe 1A and the supply of the grinding oil by the right syringe 1B, the end signal 46 indicates that the left and right syringes 1A and 1A. The supply of the abrasive slurry and the grinding oil by 1B is completely finished 47.

In the present embodiment, the supply of the abrasive slurry by the left syringe 1A and the supply of the grinding oil by the right syringe 1B are performed alternately, but they are performed simultaneously (L +
R) Sometimes. Further, the supply (LorR) of only one of the left syringe 1A and the right syringe 1B may be used. In this case, the supply of the abrasive slurry or the grinding oil is performed by the left syringe 1A or the right syringe 1B based on the total timer on the left or right in FIG. Further, in the present embodiment, the abrasive slurry is put into the left syringe 1A and the grinding oil is put into the right syringe 1B. However, the abrasive slurry may be put into both syringes 1A and 1B.

In this embodiment, the left and right syringes 1
A and 1B are paired, but the present invention is not limited to this.
Any number of sets may be used according to the working conditions.
As shown in FIG. 3, left and right syringes 1A and 1B may be attached to a front wall 52 of a lapping machine 51, and the apparatus main body 17 is not limited to a vertically long form as viewed from the front as shown in FIG. , Of course, can take any form,
The supply device 54 may be horizontally long when viewed from the front as arranged on the front wall 52 of the lapping machine 51 in FIG.

As shown in FIG. 8, the device for mounting the syringes 1A and 1B on the front wall 52 of the lapping machine 51 is as follows.
A substantially L-shaped first bracket 55, a substantially V-shaped second bracket 56, and a holding member 5 for holding and holding the syringes 1A and 1B.
7, and the first bracket 55 is provided with two screws 59 in two long holes 58 formed in the vertical portion 55a.
Is inserted, and the front end thereof is inserted into the front wall 52 of the lapping machine 51.
Are fitted in the screw holes (not shown) formed in the holes. The second bracket 56 has ring portions 5 formed at both ends thereof.
A screw 61 (not shown) is formed by inserting a screw 61 into the horizontal portion 55a of the first bracket 55.
Is fitted. Also, the base 57a of the holding member 57
The holding member 57 is supported by the second bracket 56 by penetrating one end of the second bracket 56.

Next, a case where a magnetic head having a predetermined size is finally manufactured by polishing a work made of a magnetic material using each apparatus of this embodiment will be described. As shown in FIG. A supply device 54 for the abrasive slurry and the grinding oil is placed on the front wall 52 of the lapping machine 51.
Of the syringe 1A.
1B is attached, and the syringes 1A and 1B are positioned above the surface plate 62.

Then, after putting the diamond slurry into the left syringe 1A and the grinding oil into the right syringe 1B, the two syringes 1A and 1B and the supply device 54 are connected by the polyurethane hose 28. Thereafter, the diamond slurry and the grinding oil are alternately injected onto the surface plate 62 for a predetermined time by sequence control according to the flowchart of FIG. In this case, the workpiece is roughly polished by the supply of the diamond slurry, and then the finish polishing is performed by the supply of the grinding oil.

In the case of manufacturing the magnetic head, the expensive diamond slurry is intermittently supplied for a predetermined time, so that the manufacturing cost of the magnetic head can be reduced. Further, as described above, after the workpiece is first roughly polished, then the finish polishing is performed only with the grinding oil, so that a high-precision magnetic head can be efficiently manufactured. That is, according to the present embodiment, it is possible to obtain a high-precision magnetic head at low cost.

[0039]

The present invention basically employs a configuration in which the abrasive slurry is injected into the platen of the polishing apparatus after the abrasive slurry or the like in the syringe is bubble-stirred. In addition, there is no need to use a magnetic stirrer using a stirrer. Therefore, the problem of the generation of scrudge due to the friction of the stirrer, the problem of corrosion in the MR element and the like, and the problem of the temperature rise of the abrasive slurry are fundamentally solved.

In the present invention, as described above, since the abrasive slurry stirred in the syringe is directly injected from the syringe, the abrasive slurry is finally transferred to the platen as in a conventional tube pump. There is no inconvenience that the abrasive grains in the slurry precipitate in the tube on the way before being supplied and the polishing efficiency is reduced. Further, according to the present invention, there is no need to use a silicon tube as in the above-described conventional tube pump, so that various problems caused by the deterioration of the silicon tube can be solved at once.

In addition, as described above, since the abrasive slurry is injected from the syringe as described above, the working environment is deteriorated and the worker's health is deteriorated like spraying the abrasive slurry using a conventional nozzle. There is no danger of damaging them.

Further, according to the present invention, since the slurry can be supplied accurately and intermittently by using the above-mentioned syringe, waste due to continuous supply of the slurry is eliminated. In particular, when the diamond slurry is used, the cost is reduced. Can be expected to greatly reduce.

[Brief description of the drawings]

FIG. 1 is a piping diagram of an apparatus for supplying abrasive slurry or the like according to an embodiment of the present invention.

FIGS. 2A and 2B are front views of a syringe, wherein FIG. 2A shows an injection state of abrasive slurry and the like, and FIG. 2B shows a stirring state of abrasive slurry and the like.

FIG. 3 is a front view of an apparatus for supplying abrasive slurry or the like according to the embodiment of the present invention.

FIG. 4 is a horizontal sectional view showing the lower half of the supply device main body.

FIG. 5 is a vertical sectional view of a supply device main body.

FIG. 6 is a flowchart showing an example of sequence control relating to supply of abrasive slurry and the like by the left and right syringes.

FIG. 7 is a front view of a lapping machine provided with a supply device for abrasive slurry or the like according to the present invention.

FIG. 8 is a perspective view of a syringe mounting device.

[Explanation of symbols]

 1A ・ 1B: Syringe 2A ・ 2B: Vacuum generator 3A ・ 3B: Catch tank 4A ・ 4B: Regulator for vacuum generator 6A ・ 6B: Solenoid valve 7A ・ 7B: Regulator for syringe 8: Open / close valve

Claims (11)

[Claims] Claims 1. An abrasive slurry or a grinding oil is put into a syringe located above a surface plate, and the base end side of the syringe is placed in a negative pressure state, whereby air is introduced into the syringe from the tip of the syringe. After the abrasive slurry or the grinding oil in the syringe is stirred by the bubbles, the abrasive slurry or the grinding oil in the syringe is injected from the tip of the syringe to the surface plate by bringing the base end side of the syringe into a positive pressure state. A polishing method characterized in that a workpiece is polished by using a polishing method. 2. A plurality of syringes are divided into two systems, left and right, an abrasive slurry is put into one of the syringes, an abrasive slurry or a grinding oil is put into the other syringe, and an abrasive slurry or a grinding oil is supplied. By the sequence control
2. The polishing method according to claim 1, wherein the syringe on one of the left and right sides, the syringe on the left and right sides, or the syringe on the left and right sides is alternately performed, and the stirring and injection of the abrasive slurry or the grinding oil in each syringe are performed for a predetermined time. Method. 3. One or more syringes provided above the surface plate for containing an abrasive slurry or a grinding oil, and at least one vacuum generator for using a compressed air to make a proximal end of the syringe into a negative pressure state. And at least one catch tank for storing abrasive slurry or grinding oil mixed in air introduced from the distal end of the syringe with the operation of the vacuum generator and mixed in from the proximal end. A polishing apparatus adapted to be selectively sent to one of a vacuum generator and a syringe base end side. 4. An abrasive slurry or a grinding oil is put into a syringe located above a surface plate, and the base end side of the syringe is placed in a negative pressure state, whereby air is introduced into the syringe from the tip of the syringe. After the abrasive slurry or the grinding oil in the syringe is stirred by the bubbles, the abrasive slurry or the grinding oil in the syringe is injected from the tip of the syringe to the surface plate by bringing the base end side of the syringe into a positive pressure state. A method for manufacturing a magnetic head, comprising: polishing a work made of a magnetic material to a predetermined dimension by using a polishing method. 5. A plurality of syringes are divided into two systems, left and right, an abrasive slurry is put in a syringe on one side, an abrasive slurry or a grinding oil is put in a syringe on the other side, and an abrasive slurry or a grinding oil is supplied. By the sequence control
5. The manufacturing method according to claim 4, wherein the syringe on one of the right and left sides, the syringe on both the left and right sides, or the syringe on the left and right sides are alternately performed, and the stirring and injection of the abrasive slurry or the grinding oil in each syringe are performed for a predetermined time. Method. 6. One or more syringes provided above the surface plate for containing an abrasive slurry or a grinding oil, and at least one vacuum generator for using a compressed air to bring a proximal end of the syringe into a negative pressure state. And at least one catch tank for storing abrasive slurry or grinding oil mixed in air introduced from the distal end of the syringe with the operation of the vacuum generator and mixed in from the proximal end. An apparatus for manufacturing a magnetic head which is selectively fed to one of a vacuum generator and a syringe base end side. 7. An abrasive slurry or a grinding oil is put into the syringe, and the base end side of the syringe is brought into a negative pressure state, whereby air is introduced into the syringe from the distal end of the syringe, and the bubbles in the syringe are removed by the air bubbles. After stirring the grain slurry or the grinding oil, the base end of the syringe is brought into a positive pressure state, whereby the abrasive slurry or the grinding oil in the syringe is injected from the tip of the syringe. Supply method. 8. A plurality of syringes are divided into two systems, left and right, an abrasive slurry is placed in one of the syringes, an abrasive slurry or a grinding oil is placed in the other syringe, and the abrasive slurry or the grinding oil is supplied. By the sequence control
8. The abrasive according to claim 7, wherein the syringe on either one of the left and right sides, the syringe on both the left and right sides, or the syringe on the left and right sides is alternately performed, and the stirring and injection of the abrasive slurry or the grinding oil in each syringe are performed for a predetermined time. Supply method of granular slurry etc. 9. A method for operating the vacuum generator, comprising: one or more syringes for containing an abrasive slurry or a grinding oil, at least one vacuum generator for using a compressed air to create a negative pressure on the proximal end of the syringe, and operating the vacuum generator. At least one catch tank for storing abrasive slurry or grinding oil mixed with air introduced from the distal end of the syringe and coming out of the proximal end is provided, and a pipe for compressed air is provided with a vacuum generator and a syringe proximal end side. A supply device for abrasive slurry or the like that is selectively sent to either one of them. 10. The supply of abrasive slurry or the like according to claim 9, further comprising at least one vacuum generator and at least one regulator for a vacuum generator and a regulator for a syringe for adjusting compressed air selectively fed to a syringe base end side. apparatus. 11. The supply device according to claim 9, further comprising an on-off valve for supplying and stopping the compressed air.