JP2002144211A5 - - Google Patents
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- Publication number
- JP2002144211A5 JP2002144211A5 JP2000373530A JP2000373530A JP2002144211A5 JP 2002144211 A5 JP2002144211 A5 JP 2002144211A5 JP 2000373530 A JP2000373530 A JP 2000373530A JP 2000373530 A JP2000373530 A JP 2000373530A JP 2002144211 A5 JP2002144211 A5 JP 2002144211A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000373530A JP2002144211A (ja) | 2000-11-02 | 2000-11-02 | ワイヤソー加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000373530A JP2002144211A (ja) | 2000-11-02 | 2000-11-02 | ワイヤソー加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002144211A JP2002144211A (ja) | 2002-05-21 |
| JP2002144211A5 true JP2002144211A5 (ru) | 2005-11-04 |
Family
ID=18842899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000373530A Pending JP2002144211A (ja) | 2000-11-02 | 2000-11-02 | ワイヤソー加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002144211A (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010005718B4 (de) * | 2010-01-26 | 2011-09-22 | Schott Solar Ag | Drahtführungsrolle zur Verwendung in Drahtsägen |
| JP5752396B2 (ja) * | 2010-11-09 | 2015-07-22 | 株式会社安永 | ワイヤソー装置及びこれを用いたウエハの製造方法 |
| CN102079113B (zh) * | 2010-11-25 | 2014-03-12 | 保定天威英利新能源有限公司 | 解决硅锭破方质量问题的设备和方法 |
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2000
- 2000-11-02 JP JP2000373530A patent/JP2002144211A/ja active Pending