JP2002144211A5 - - Google Patents

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Publication number
JP2002144211A5
JP2002144211A5 JP2000373530A JP2000373530A JP2002144211A5 JP 2002144211 A5 JP2002144211 A5 JP 2002144211A5 JP 2000373530 A JP2000373530 A JP 2000373530A JP 2000373530 A JP2000373530 A JP 2000373530A JP 2002144211 A5 JP2002144211 A5 JP 2002144211A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000373530A
Other languages
Japanese (ja)
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JP2002144211A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000373530A priority Critical patent/JP2002144211A/ja
Priority claimed from JP2000373530A external-priority patent/JP2002144211A/ja
Publication of JP2002144211A publication Critical patent/JP2002144211A/ja
Publication of JP2002144211A5 publication Critical patent/JP2002144211A5/ja
Pending legal-status Critical Current

Links

JP2000373530A 2000-11-02 2000-11-02 ワイヤソー加工装置 Pending JP2002144211A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000373530A JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000373530A JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Publications (2)

Publication Number Publication Date
JP2002144211A JP2002144211A (ja) 2002-05-21
JP2002144211A5 true JP2002144211A5 (enrdf_load_stackoverflow) 2005-11-04

Family

ID=18842899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000373530A Pending JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Country Status (1)

Country Link
JP (1) JP2002144211A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010005718B4 (de) * 2010-01-26 2011-09-22 Schott Solar Ag Drahtführungsrolle zur Verwendung in Drahtsägen
JP5752396B2 (ja) * 2010-11-09 2015-07-22 株式会社安永 ワイヤソー装置及びこれを用いたウエハの製造方法
CN102079113B (zh) * 2010-11-25 2014-03-12 保定天威英利新能源有限公司 解决硅锭破方质量问题的设备和方法
EP3943265A1 (de) * 2020-07-21 2022-01-26 Siltronic AG Verfahren und vorrichtung zum gleichzeitigen abtrennen einer vielzahl von scheiben von einem werkstück

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