JP2002144211A5 - - Google Patents

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Publication number
JP2002144211A5
JP2002144211A5 JP2000373530A JP2000373530A JP2002144211A5 JP 2002144211 A5 JP2002144211 A5 JP 2002144211A5 JP 2000373530 A JP2000373530 A JP 2000373530A JP 2000373530 A JP2000373530 A JP 2000373530A JP 2002144211 A5 JP2002144211 A5 JP 2002144211A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000373530A
Other languages
Japanese (ja)
Other versions
JP2002144211A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000373530A priority Critical patent/JP2002144211A/ja
Priority claimed from JP2000373530A external-priority patent/JP2002144211A/ja
Publication of JP2002144211A publication Critical patent/JP2002144211A/ja
Publication of JP2002144211A5 publication Critical patent/JP2002144211A5/ja
Pending legal-status Critical Current

Links

JP2000373530A 2000-11-02 2000-11-02 ワイヤソー加工装置 Pending JP2002144211A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000373530A JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000373530A JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Publications (2)

Publication Number Publication Date
JP2002144211A JP2002144211A (ja) 2002-05-21
JP2002144211A5 true JP2002144211A5 (cg-RX-API-DMAC7.html) 2005-11-04

Family

ID=18842899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000373530A Pending JP2002144211A (ja) 2000-11-02 2000-11-02 ワイヤソー加工装置

Country Status (1)

Country Link
JP (1) JP2002144211A (cg-RX-API-DMAC7.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010005718B4 (de) * 2010-01-26 2011-09-22 Schott Solar Ag Drahtführungsrolle zur Verwendung in Drahtsägen
JP5752396B2 (ja) * 2010-11-09 2015-07-22 株式会社安永 ワイヤソー装置及びこれを用いたウエハの製造方法
CN102079113B (zh) * 2010-11-25 2014-03-12 保定天威英利新能源有限公司 解决硅锭破方质量问题的设备和方法
EP3943265A1 (de) 2020-07-21 2022-01-26 Siltronic AG Verfahren und vorrichtung zum gleichzeitigen abtrennen einer vielzahl von scheiben von einem werkstück

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