JP2002144205A - Polishing device and manufacturing method for optical member - Google Patents

Polishing device and manufacturing method for optical member

Info

Publication number
JP2002144205A
JP2002144205A JP2000346417A JP2000346417A JP2002144205A JP 2002144205 A JP2002144205 A JP 2002144205A JP 2000346417 A JP2000346417 A JP 2000346417A JP 2000346417 A JP2000346417 A JP 2000346417A JP 2002144205 A JP2002144205 A JP 2002144205A
Authority
JP
Japan
Prior art keywords
polishing
lens
dish
plate
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000346417A
Other languages
Japanese (ja)
Inventor
Yasuo Miura
庸雄 三浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2000346417A priority Critical patent/JP2002144205A/en
Publication of JP2002144205A publication Critical patent/JP2002144205A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a polishing device with excellent polishing efficiency. SOLUTION: An object to be polished holding device 4 has an H type cross section. A first lens 3 and a second lens 5 are held on an object to be polished mounting part 4a and an object to be polished mounting part 4b on both sides, respectively. The surface of the first lens 3 is brought into contact with a polishing part of a first polishing plate 1. In a second polishing plate 6, a polishing surface is brought into contact with the surface of the second lens 5. A holding part 8 is provided on an opposite side (upper part) of the polishing surface of the second polishing plate 6 and a screw part formed at a tip part of pin 10 is fitted into a screw joint part 9 formed on the upper end face of the holding part 8. When the first grinding plate 1 is rotated in this state, the pin 10 is oscillated. Each relative motion occurs between the polishing part of the first grinding plate 1 and the lens 3 and the polishing part of the second polishing plate 6 and the lens 5, respectively. Polishing of the lens 3 and polishing of the lens 5 are simultaneously performed.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、被研磨物(レンズ
等)を研磨するときに用いる研磨装置、およびこの研磨
装置を用いた光学部材の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus used for polishing an object to be polished (such as a lens) and a method for manufacturing an optical member using the polishing apparatus.

【0002】[0002]

【従来の技術】レンズ等の光学部材の製造には、その表
面の研磨工程が不可欠である。例えば、レンズを製造す
る場合、まず始めにカーブジェネレータと呼ばれる切削
装置により、その表面が所定の曲率を持つように加工す
る。この状態では表面の粗さが非常に粗いので、その
後、ダイヤモンドラッピングと呼ばれる研磨工程によ
り、その表面を研磨して平滑なものとしている。
2. Description of the Related Art In the manufacture of optical members such as lenses, a polishing step of the surface is indispensable. For example, when manufacturing a lens, first, a cutting device called a curve generator is used to process the surface so as to have a predetermined curvature. In this state, the surface is very rough, and the surface is thereafter polished by a polishing process called diamond lapping to make it smooth.

【0003】図2にこのような研磨装置の1例を示す。
研磨すべき被研磨物であるレンズ14の曲率に合わせた
曲率を有する研磨皿11の曲面部には、ダイヤモンドペ
レット等の研磨材12が固着されている。レンズ14は
レンズホルダ13に、松脂等の後で剥離することが可能
な接着剤等を用いて接着されている。
FIG. 2 shows an example of such a polishing apparatus.
An abrasive 12 such as a diamond pellet is fixed to a curved surface of a polishing plate 11 having a curvature corresponding to the curvature of a lens 14 to be polished. The lens 14 is adhered to the lens holder 13 using an adhesive or the like that can be peeled off after rosin.

【0004】レンズホルダ13には、その中心部に保持
部13aが設けらており、保持部13aの上端平面部に
は、半球状の凹部である球面軸受部13bが設けられて
いる。この球面軸受部13bには、先端に球状部を有す
るかんざしピン15が嵌りこんでいる。なお、図2は、
中心軸を通る縦断面図であり、各部材は、研磨材12を
除いて中心軸に対して回転対称となっている。
[0004] The lens holder 13 is provided with a holding portion 13a at a central portion thereof, and a spherical bearing portion 13b, which is a hemispherical concave portion, is provided on a flat upper end portion of the holding portion 13a. A hairpin 15 having a spherical portion at the tip is fitted into the spherical bearing portion 13b. In addition, FIG.
FIG. 4 is a longitudinal sectional view passing through a central axis, and each member is rotationally symmetric with respect to the central axis except for an abrasive 12.

【0005】図2に示すような状態で、研磨皿11を中
心軸の周りに回転させると同時に、かんざしピン15を
揺動させる。すると、研磨皿11の研磨材12とレンズ
14の間に相対運動が発生して研磨が行われる。この
間、かんざしピン15を下方に押し付けることにより、
研磨材12とレンズ14間に圧力が加えられる。
In the state shown in FIG. 2, the polishing plate 11 is rotated around the central axis, and at the same time, the pin 15 is swung. Then, relative movement occurs between the polishing material 12 of the polishing plate 11 and the lens 14, and polishing is performed. During this time, by pressing the pin 15 downward,
Pressure is applied between the abrasive 12 and the lens 14.

【0006】[0006]

【発明が解決しようとする課題】一般にレンズ等の光学
部材を研磨する場合には、その両面の研磨が必要であ
る。図2に示すような従来の研磨装置による研磨では、
片面の研磨しかできないため、両面を加工するのに2回
の研磨工程を要していた。また、研磨には粗研磨と精密
研磨が必要であるが、従来の研磨装置ではその一方しか
できないため、2回の研磨工程が必要であった。そのた
め、研磨工程に長時間を要するという問題点があった。
Generally, when polishing an optical member such as a lens, it is necessary to polish both surfaces thereof. In polishing by a conventional polishing apparatus as shown in FIG. 2,
Since only one side can be polished, two polishing steps were required to process both sides. Polishing requires rough polishing and precision polishing, but a conventional polishing apparatus can perform only one of them, so that two polishing steps are required. Therefore, there is a problem that a long time is required for the polishing process.

【0007】本発明はこのような事情に鑑みてなされた
もので、研磨効率の良い研磨装置、及びそれを使用した
光学部材の製造方法を提供することを課題とする。
The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a polishing apparatus having high polishing efficiency and a method for manufacturing an optical member using the same.

【0008】[0008]

【課題を解決するための手段】前記課題を解決するため
の第1の手段は、回転軸の周りに回転する第1の研磨皿
と、両面にそれぞれ被研磨物を保持可能な被研磨物保持
装置と、揺動装置により揺動される第2の研磨皿とを有
してなることを特徴とする研磨装置(請求項1)であ
る。
A first means for solving the above problems is a first polishing dish which rotates around a rotation axis, and a polishing object holding member capable of holding a polishing object on both surfaces. A polishing apparatus (claim 1), comprising: an apparatus; and a second polishing plate that is rocked by a rocking device.

【0009】本手段においては、まず、被研磨物保持装
置の両面に、それぞれ被研磨物を固定する。そして、最
下部に位置し、研磨面を上方に向けられた第1の研磨皿
の研磨面に、一方の被研磨物の表面を接触させる。そし
て、上側を向いた他方の被研磨物の表面に、下側を向い
た第2の研磨皿の研磨面を接触させる。第2の研磨皿
は、空気等の圧力源により加圧状態となり、第1の研磨
皿との間に、2つの被研磨物と被研磨材保持装置を挟み
込む。
In this means, first, the objects to be polished are fixed to both surfaces of the device for holding the object to be polished. Then, the surface of one of the objects to be polished is brought into contact with the polishing surface of the first polishing dish, which is located at the lowermost position and whose polishing surface is directed upward. Then, the polishing surface of the second polishing plate facing downward is brought into contact with the surface of the other polishing object facing upward. The second polishing plate is pressurized by a pressure source such as air, and sandwiches the two objects to be polished and the material to be polished between the first polishing plate and the first polishing plate.

【0010】この状態で、第1の研磨皿を回転させると
共に、第2の研磨皿に揺動運動と回転運動を与える。通
常は、第2の研磨皿に与えられる回転運動は、第1の研
磨皿の回転運動が被研磨材保持装置に伝達されることに
より与えられるが、第2の研磨皿自身を強制回転させる
ような機構を設けてもよい。すると、第1の研磨皿とそ
れに当接する被研磨物の間、及び第2の研磨皿とそれに
当接する研磨材の間で相対運動が発生し、2つの被研磨
物が同時に研磨される。
In this state, the first polishing dish is rotated, and the second polishing dish is given a swinging motion and a rotating motion. Normally, the rotational motion given to the second polishing dish is given by transmitting the rotational motion of the first polishing dish to the workpiece holding device, but the second polishing dish is forced to rotate itself. A suitable mechanism may be provided. Then, relative movement occurs between the first polishing dish and the polishing object that comes into contact therewith, and between the second polishing dish and the polishing material that comes into contact therewith, and the two polishing objects are polished simultaneously.

【0011】このように、本手段によれば、2つの被研
磨物を同時に研磨することができるので、研磨時間を従
来の半分に短縮することができ、研磨効率を大幅に良く
することができる。もちろん、下側の研磨皿に揺動運動
を与え、上側の研磨皿を回転させるようにしてもよい。
As described above, according to the present means, since two objects to be polished can be polished simultaneously, the polishing time can be reduced to half of the conventional one and the polishing efficiency can be greatly improved. . Of course, a swinging motion may be given to the lower polishing dish, and the upper polishing dish may be rotated.

【0012】前記課題を解決するための第2の手段は、
前記第1の手段であって、前記第1の研磨皿が精密研磨
用研磨皿であり、前記第2の研磨皿が粗研磨用研磨皿で
あることを特徴とするもの(請求項2)である。
A second means for solving the above-mentioned problem is as follows.
The first means, wherein the first polishing dish is a polishing dish for precision polishing, and the second polishing dish is a polishing dish for coarse polishing (claim 2). is there.

【0013】前記第1の手段においては、第1の研磨皿
が直接回転されている関係上、第1の研磨皿と被研磨物
の相対運動の方が、第2の研磨皿と被研磨物の相対運動
よりも速度が速くなる。本手段においては、この性質を
利用して、相対運動速度が速い第1の研磨皿を精密研磨
用、相対運動速度が遅い第2の研磨皿を粗研磨用に用い
ているので、ほぼ同じ時間で両方の研磨を実施すること
が可能となり、作業効率が良くなる。
In the first means, since the first polishing dish is directly rotated, the relative movement between the first polishing dish and the object to be polished is larger than that between the second polishing dish and the object to be polished. Speed is faster than the relative motion of In this means, by utilizing this property, the first polishing plate having a high relative movement speed is used for precision polishing, and the second polishing plate having a low relative movement speed is used for rough polishing. It is possible to carry out both types of polishing, and work efficiency is improved.

【0014】前記課題を解決するための第3の手段は、
前記第2の手段であって、第1の研磨皿が、第2の研磨
皿で粗研磨された被研磨物の精密研磨を行うものである
ことを特徴とするもの(請求項4)である。
A third means for solving the above-mentioned problem is as follows.
The second means, wherein the first polishing dish is for performing precision polishing of a workpiece roughly polished by the second polishing dish (Claim 4). .

【0015】本手段においては、研磨が終わった後、精
密研磨が終わった被研磨物を取り外して、その代わりに
粗研磨を行う被研磨物を取り付ける。そして、被研磨物
保持装置を反転させて第1の研磨皿と第2の研磨皿の間
に挟み込むようにする。これを繰り返すことにより、一
つの被研磨物の粗研磨と精密研磨を効率良く行うことが
可能となる。
In this means, after the polishing is finished, the object to be polished is removed, and the object to be polished is attached instead. Then, the object-to-be-polished holding device is inverted so as to be sandwiched between the first polishing dish and the second polishing dish. By repeating this, it is possible to efficiently perform rough polishing and precision polishing of one object to be polished.

【0016】前記課題を解決するための第4の手段は、
前記第1の手段から第3の手段のいずれかを用いて表面
を研磨する工程を有してなることを特徴とする光学部材
の製造方法(請求項3)である。
A fourth means for solving the above-mentioned problem is as follows.
A method of manufacturing an optical member, comprising a step of polishing a surface using any one of the first to third means.

【0017】本手段は、表面の研磨に前記第1の手段か
ら第3の手段のいずれかを用いている他は従来の光学部
材の製造方法と同じである。本手段によれば、効率良く
光学部材の製造を行うことができるので、製作時間が短
く、製造原価の安価な光学部材を製造することができ
る。
This means is the same as the conventional method for manufacturing an optical member except that any one of the first to third means is used for polishing the surface. According to this means, since the optical member can be manufactured efficiently, an optical member having a short manufacturing time and a low manufacturing cost can be manufactured.

【0018】[0018]

【発明の実施の形態】以下、本発明の実施の形態の例
を、図を用いて説明する。図1は、本発明の実施の形態
の1例である研磨装置の概要を示す図である。図1にお
いて、1は第1の研磨皿、2は研磨材(ペレット)、3
は第1のレンズ、4は被研磨物保持装置であるワーク保
持継手、4a、4bはワーク貼付皿、5は第2のレン
ズ、6は第2の研磨皿、7は研磨材(ペレット)、8は
保持部、9はネジ継ぎ手部、10はかんざしピンであ
る。図1は、中心軸を含む断面図であり、研磨材2、7
を除く全ての要素は、中心軸に対して回転対称な形状を
有している。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing an outline of a polishing apparatus as an example of an embodiment of the present invention. In FIG. 1, 1 is a first polishing dish, 2 is an abrasive (pellet), 3
Is a first lens, 4 is a work holding joint which is an object holding device, 4a and 4b are work sticking dishes, 5 is a second lens, 6 is a second polishing dish, 7 is an abrasive (pellet), 8 is a holding part, 9 is a screw joint part, and 10 is a pin. FIG. 1 is a cross-sectional view including a central axis, and abrasives 2 and 7 are shown.
All the elements except for have a shape rotationally symmetric with respect to the central axis.

【0019】第1の研磨皿1は最下部に設置され、ダイ
ヤモンドペレット等の研磨材2が取り付けられた研磨面
を上方に向けて配置されている。第1の研磨皿1は、そ
の中心軸の周りに回転されるようになっている。ワーク
保持継手4は断面がH型をしており、その一部である両
側のワーク貼付皿4aには第1のレンズ3が、4bには
第2のレンズ5が、それぞれ松脂等の、後に取り剥がし
が可能な接着剤により接着されて保持されている。第1
のレンズ3の表面は、第1の研磨皿1の研磨部(研磨材
が設けられた面)に接触するようにされている。
The first polishing dish 1 is installed at the lowermost position, and is arranged with the polishing surface to which the polishing material 2 such as diamond pellets is attached facing upward. The first polishing dish 1 is adapted to be rotated about its central axis. The work holding joint 4 has an H-shaped cross section, and the first lens 3 and the second lens 5 are respectively provided on both sides of the work sticking dishes 4a and 4b, which are part of the H-shaped cross section. It is adhered and held by a peelable adhesive. First
The surface of the lens 3 is brought into contact with a polishing portion (a surface provided with an abrasive) of the first polishing dish 1.

【0020】第2の研磨皿6は、ダイヤモンドペレット
等の研磨材7が取り付けられた研磨面を下方に向けて配
置され、研磨面が第2のレンズ5の表面に接触するよう
にされている。第2の研磨皿6の研磨部と反対側(図に
おける上部)には保持部8が設けられ、その上端面に形
成されたネジ継ぎ手部9に、かんざしピン10の先端部
がねじ込まれている。かんざしピンは、研磨皿6、保持
部8と共に回転が可能となっている。
The second polishing dish 6 is disposed with the polishing surface on which the abrasive 7 such as diamond pellets is attached facing downward, so that the polishing surface contacts the surface of the second lens 5. . A holding portion 8 is provided on the opposite side (upper part in the figure) of the second polishing plate 6 from the polishing portion, and a tip end of a pin 10 is screwed into a screw joint portion 9 formed on an upper end surface thereof. . The pin is rotatable together with the polishing plate 6 and the holding portion 8.

【0021】この状態で第1の研磨皿1を回転させると
共に、かんざしピン10を揺動させる。すると、第1の
研磨皿1の研磨部とレンズ3の間、及び第2の研磨皿6
の研磨部とレンズ5の間にそれぞれ相対運動が起こり、
レンズ3の研磨とレンズ5の研磨が同時に行われる。
In this state, the first polishing dish 1 is rotated and the pin 10 is swung. Then, the distance between the polishing section of the first polishing dish 1 and the lens 3 and the second polishing dish 6
Relative movement occurs between the polishing part of the lens and the lens 5,
Polishing of the lens 3 and polishing of the lens 5 are performed simultaneously.

【0022】この実施の形態において、第2の研磨皿6
を粗研磨用とし、第1の研磨皿1を精密研磨用とて用
い、第2の研磨皿6で粗研磨したレンズを、第1の研磨
皿1で精密研磨するようにすることが特に好ましい。こ
のようにすれば、研磨が終了した後に、レンズ3を取り
外し、これから粗研磨を行うレンズを代わりに取り付け
て、ワーク保持継手4の上下を逆転させ、レンズ5を第
1の研磨皿1の研磨部に当接させて研磨を行う。これを
繰り返すことにより、効率良く、レンズの粗研磨と精密
研磨を行うことができる。
In this embodiment, the second polishing dish 6
It is particularly preferable that the first polishing dish 1 is used for precision polishing, and the lens roughly polished by the second polishing dish 6 is precision polished by the first polishing dish 1. . In this way, after the polishing is completed, the lens 3 is removed, a lens for performing rough polishing is attached instead, the work holding joint 4 is turned upside down, and the lens 5 is polished on the first polishing plate 1. Polishing is performed by abutting the portion. By repeating this, rough polishing and precision polishing of the lens can be performed efficiently.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施の形態の1例である研磨装置の概
要を示す図である。
FIG. 1 is a diagram showing an outline of a polishing apparatus as an example of an embodiment of the present invention.

【図2】従来の研磨装置の1例を示す概要図である。FIG. 2 is a schematic view showing an example of a conventional polishing apparatus.

【符号の説明】[Explanation of symbols]

1…第1の研磨皿 2…研磨材(ペレット) 3…第1のレンズ 4…ワーク保持継手 4a、4b…ワーク貼付皿 5…第2のレンズ 6…第2の研磨皿 7…研磨材(ペレット) 8…保持部 9…ネジ継ぎ手部 10…かんざしピン DESCRIPTION OF SYMBOLS 1 ... 1st grinding plate 2 ... Abrasive material (pellet) 3 ... 1st lens 4 ... Work holding joint 4a, 4b ... Work attaching plate 5 ... 2nd lens 6 ... 2nd grinding plate 7 ... Abrasive material ( Pellet) 8 ... Holding part 9 ... Screw joint part 10 ... Kanzashi pin

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 回転軸の周りに回転する第1の研磨皿
と、両面にそれぞれ被研磨物を保持可能な被研磨物保持
装置と、揺動装置により揺動される第2の研磨皿とを有
してなることを特徴とする研磨装置。
A first polishing plate that rotates around a rotation axis, a polishing object holding device that can hold a polishing object on both surfaces, and a second polishing plate that is rocked by a rocking device. A polishing apparatus comprising:
【請求項2】 請求項1に記載の研磨装置であって、前
記第1の研磨皿が精密研磨用研磨皿であり、前記第2の
研磨皿が粗研磨用研磨皿であることを特徴とする研磨装
置。
2. The polishing apparatus according to claim 1, wherein said first polishing dish is a precision polishing polishing dish, and said second polishing dish is a coarse polishing polishing dish. Polishing equipment.
【請求項3】 請求項2に記載の研磨装置であって、第
1の研磨皿が、第2の研磨皿で粗研磨された被研磨物の
精密研磨を行うものであることを特徴とする研磨装置。
3. The polishing apparatus according to claim 2, wherein the first polishing dish performs precision polishing of a workpiece roughly polished by the second polishing dish. Polishing equipment.
【請求項4】 請求項1から請求項3のうちいずれか1
項に記載の研磨装置を用いて表面を研磨する工程を有し
てなることを特徴とする光学部材の製造方法。
4. One of claims 1 to 3
13. A method for producing an optical member, comprising a step of polishing a surface by using the polishing apparatus according to any one of the above items.
JP2000346417A 2000-11-14 2000-11-14 Polishing device and manufacturing method for optical member Pending JP2002144205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104551923A (en) * 2013-10-12 2015-04-29 江苏格林视通光学有限公司 Conversion joint device for optical polishing equipment
CN108857780A (en) * 2018-06-21 2018-11-23 明光康诚伟业机电设备有限公司 A kind of grinding device for mobile phone camera glass
CN113458909A (en) * 2021-06-08 2021-10-01 大连理工大学 Optical lens double-side polishing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104551923A (en) * 2013-10-12 2015-04-29 江苏格林视通光学有限公司 Conversion joint device for optical polishing equipment
CN108857780A (en) * 2018-06-21 2018-11-23 明光康诚伟业机电设备有限公司 A kind of grinding device for mobile phone camera glass
CN113458909A (en) * 2021-06-08 2021-10-01 大连理工大学 Optical lens double-side polishing method
CN113458909B (en) * 2021-06-08 2022-06-07 大连理工大学 Optical lens double-side polishing method

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