JP2002137168A - Super abrasive tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a super abrasive tool capable of preventing the occurrence of a strain in substrate during cutting and further improving cutting precision by preventing the damage of the substrate due to chips produced during cutting. SOLUTION: A super abrasive cutting wheel 1 serving as a super abrasive tool comprises a donut disc-form base plate 2; and a supper abrasive layer 3 formed at the outer peripheral part of the base plate 2. The base plate 2 is formed of a hard material consisting of a binder phase containing one or more kinds of elements selected from a group consisting of iron, cobalt, nickel, and chrome, a first hard dispersion phase containing tungsten carbide, and a second hard dispersion phase containing nitride and/or carbonitride of one or more kinds of elements selected from a group consisting of elements belonging to a periodic table 4a, 5a, and 6a groups.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to a superabrasive tool, and more particularly to a superabrasive tool used for cutting or grooving optical glass, ceramics, quartz, magnetic materials, semiconductor materials, and the like. It relates to an abrasive cutting tool.

[0002]

2. Description of the Related Art Diamond or cubic boron nitride (CB)
N) and other super-abrasive tools using super-abrasives are used to process difficult-to-cut materials,
Widely used for high efficiency and high precision processing of various materials. In particular, when a new ceramic material, magnetic material, or the like is processed into fine parts, a cutting superabrasive tool is used.

As one type of cutting superabrasive tool, a superabrasive cutting wheel is used for cutting or grooving magnetic materials, semiconductor materials, optical glasses, ceramics, and the like. When a groove is formed in a ferrite block serving as a core of a magnetic head, or when a prism is cut and separated from a material of optical glass, the outer diameter is 50 mm to 300 m.
m, a superabrasive cutting wheel having a blade portion with a thickness of 0.1 mm to 4.0 mm is used. The substrate material of conventional superabrasive cutting wheels is mainly steel, for example tempered carbon tool steel, alloy tool steel, high speed tool steel, and the like. The superabrasive layer forming the blade is fixed to the outer peripheral portion of the substrate with a binder.

[0004] Superabrasive cutting wheels are rarely used with a single blade. In particular, in a mass production line of electronic components, optical components, and the like, a wheel combining a plurality of superabrasive cutting wheels, generally called a multi-set wheel is used. By incorporating a plurality of superabrasive cutting wheels for cutting or superabrasive cutting wheels for grooving into a wheel flange of a slicing machine, a large number of cutting or grooving processes are performed at the same time. Also, by incorporating two or more types of super-abrasive wheels having different cutting edges into a wheel flange, a large number of cutting processes and grooving processes can be performed simultaneously.

[0005] When a magnetic material, optical glass, a semiconductor material, etc. are processed with a superabrasive cutting wheel to produce minute parts,
High efficiency and high precision processing is required. In particular, demands on processing accuracy are severe. When using a multi-set wheel as described above, in order to cope with high-precision machining, it is necessary to set the single-pitch accuracy, the accumulated pitch accuracy, and the grooving width accuracy of the multi-set wheel to within several microns. .

[0006]

However, when machining with high efficiency, it is necessary to rotate and feed the superabrasive cutting wheel at a high speed. At this time, since the superabrasive layer formed on the outer peripheral portion of the superabrasive cutting wheel comes into contact with the workpiece at a high speed, a large stress, so-called grinding stress, is generated on the substrate of the superabrasive cutting wheel. As a result, distortion such as bending or undulation is generated in the substrate of the superabrasive cutting wheel during cutting. When the distortion of the substrate becomes large, the superabrasive cutting wheel rotates meanderingly, so that required accuracy such as right-angle accuracy, width accuracy, and plane accuracy of a cut surface or a groove of a workpiece cannot be satisfied. If a greater stress is applied to the substrate of the superabrasive cutting wheel, a greater strain is generated in the substrate. As a result, large chipping may occur at the corners of the workpiece, resulting in a problem of lowering the production yield.

In order to solve the above problems, W
I such as C, TiC, MoC, NbC, TaC, Cr ₃ C ₂
The carbide powder of a metal belonging to the group Va, Va, VIa is
e, Co, Ni, Mo, Cu, Pb, Sn or an alloy obtained by sintering using an alloy thereof, among which WC-Co, WC-TiC-Co, WC-TiC
Japanese Patent Application Laid-Open No. 9-174441 discloses a diamond grindstone peripheral blade using a substrate made of a -TaC-Co-based cemented carbide,
It has been proposed in Japanese Patent Application Laid-Open No. 1-164563. When the diamond grindstone outer peripheral blade is used, even if a large stress is generated in the substrate during the cutting process, the resulting distortion is small, so that the workpiece such as a magnetic material can be cut with relatively high accuracy. .

[0008] However, WC-C
When a cemented carbide such as an o-based alloy is used, there is a problem in that cutting accuracy is deteriorated because the substrate is heated by chips generated during the cutting process.

When cutting a block-shaped material into a large number of pieces, it is general to cut the material at once with a deep cutting depth in order to improve the processing efficiency. In particular, in this case, there is a problem that a large amount of chips accumulate between the substrate of the cutting blade and the work material, and the cutting surface heats the surface of the substrate, thereby deteriorating the cutting accuracy.

Further, in the above case, when the cutting blade is made thinner to improve the material yield, there is a problem that the cutting accuracy is deteriorated because the substrate strength of the cutting blade becomes insufficient.

Accordingly, an object of the present invention is to provide mechanical strength and rigidity capable of preventing distortion such as bending and undulation during cutting, and to use cutting powder such as work material generated during cutting. An object of the present invention is to provide a superabrasive tool provided with a substrate capable of avoiding damage to the substrate and further improving cutting accuracy.

[0012]

A superabrasive tool according to the present invention is a superabrasive tool comprising a disk-shaped substrate and an abrasive layer formed on the outer periphery of the substrate. The substrate is made of a hard material including a first hard dispersed phase, a second hard dispersed phase, and a binder phase, and the first hard dispersed phase is made of tungsten carbide (W).
C), and the second hard dispersed phase comprises a nitride and / or carbonitride of one or more elements selected from the group consisting of elements belonging to groups 4a, 5a and 6a of the periodic table, and Is iron (Fe), cobalt (Co), nickel (Ni)
And at least one element selected from the group consisting of chromium (Cr) (claim 1).

In the superabrasive tool according to the present invention, the hard material constituting the substrate is smaller than the conventional WC-Co-based hard alloy in that the cutting material (such as superabrasive grains and (Including grinding fluid) can be prevented from damaging the substrate, that is, heat generation of the substrate due to cutting chips can be suppressed.
Cutting accuracy can be improved.

Further, the hard material constituting the substrate of the superabrasive tool of the present invention has mechanical strength, rigidity and hardness comparable to those of conventional WC-Co based hard alloys. Distortion such as bending or undulation of the substrate can be effectively prevented.

Preferably, the superabrasive tool of the present invention contains 1% by mass to 10% by mass of the second hard dispersed phase and 5% by mass to 30% by mass of the binder phase.

In the superabrasive tool of the present invention, the hard material preferably has a Young's modulus of 3.9 × 10 ¹¹ Pa or more.

Preferably, the outer diameter of the substrate is 50 mm or more.
The thickness is not more than 00 mm and the thickness is not less than 0.1 mm and not more than 4.0 mm (claim 4).

Preferably, the abrasive layer contains diamond abrasive, cubic boron nitride abrasive, or a mixture thereof.

Preferably, the abrasive layer combines the abrasive with the abrasive in one form selected from the group consisting of a resin bond, a metal bond, a vitrified bond, an electrodeposition bond, and a composite form of these. (Claim 6).

[0020] The superabrasive tool of the present invention is preferably a cutting wheel.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION In one preferred embodiment of the superabrasive tool of the present invention, a hard material constituting a substrate comprises a first hard dispersed phase containing tungsten carbide,
a, a second hard dispersed phase containing a nitride and / or a carbonitride of at least one element selected from the group consisting of elements belonging to groups a, 5a and 6a; The amount is 1% by mass or more and 10% by mass or less. Examples of the nitride include titanium nitride (TiN), zirconium nitride (ZrN), hafnium nitride (HfN), vanadium nitride (VN), niobium nitride (NbN), and tantalum nitride (T
aN), chromium nitride (CrN) and the like. Also,
As the above carbonitride, titanium carbonitride (Ti (C
N)), titanium tungsten carbonitride ((TiW) (C
N)), titanium tantalum carbonitride ((TiTa) (C
N)), titanium zirconium carbonitride ((TiZr) (C
N)), titanium tungsten tantalum tantalum ((TiW
Ta) (CN)) and the like.

When the content of the second hard dispersed phase is less than 1% by mass, the cutting accuracy deteriorates because the surface of the substrate is heated by cutting powder of a work material or the like during cutting. On the other hand, when the content of the second hard dispersed phase exceeds 10% by mass, generation of nitrogen gas during sintering in the substrate manufacturing process increases, so that the substrate as a sintered body has many alloy nests, And the Young's modulus decrease.

Further, as one preferred embodiment of the superabrasive tool of the present invention, the hard material constituting the substrate contains a binder phase in an amount of 5% by mass or more and 30% by mass or less. When the content of the bonding layer is less than 5% by mass, the mechanical strength of the substrate is reduced,
If it exceeds 0% by mass, the hardness and the Young's modulus of the substrate decrease.

The above binder phase contains any of iron, cobalt, nickel and chromium. Most preferably, cobalt, nickel and chromium are used as the binder phase. The content of the binder phase in the hard material is more preferably 6% by mass or more and 20% by mass or less. Especially chrome,
It is included in the binder phase to prevent coarsening of the crystal grains of the binder phase and to improve corrosion resistance. The chromium content is 0.
It is preferably from 1% by mass to 5% by mass.

WC-Co system, WC-TiC-Co system, W
When a substrate made of a C-TiC-TaC-Co-based cemented carbide is used, since the Young's modulus is higher than that of a steel substrate, distortion such as bending or undulation of the substrate is effectively prevented during cutting. Therefore, improvement in cutting accuracy can be expected. However, there is a problem in that the cutting accuracy is deteriorated because the surface of the substrate is heated by cutting powder such as a work material during cutting. The substrate material of the present invention includes, in addition to the first hard dispersed phase containing tungsten carbide (WC), one or more elements selected from the group consisting of elements belonging to groups 4a, 5a and 6a of the periodic table. Since the second hard dispersed phase containing nitride and / or carbonitride is present, heat generation of the substrate due to cutting chips during cutting can be suppressed, so that compared to the case where a substrate made of a cemented carbide is used. In addition, the cutting accuracy can be further improved.

Optical glass, ceramics, quartz, magnetic material
Cutting or grooving of materials, semiconductor materials, etc.
The substrate of the superabrasive cutting wheel has considerable rigidity
Required. The required rigidity of the board
3.9 × 10 in Young's modulus ¹¹Pa (40000kgf
/ Mm^Two). Super abrasive tool of the present invention
, A first hard dispersed phase containing tungsten carbide
And elements belonging to groups 4a, 5a and 6a of the periodic table
And / or nitrides of one or more elements selected from the group consisting of
Or the composition of the second hard dispersed phase containing carbonitride
As a result, 4.9 × 10¹¹Pa (50,000 kgf /
mm^TwoTo obtain a substrate having a Young's modulus greater than
It is easy. Therefore, the superabrasive tool of the present invention
The substrate has a rigidity comparable to that of WC-Co cemented carbide.
Obtainable.

As one type of the superabrasive tool of the present invention, the superabrasive cutting wheel is used for precise cutting and grooving. In this case, a plurality of superabrasive cutting wheels are often used by attaching them to a grinder. For this reason, the outer diameter of the substrate of the superabrasive cutting wheel is limited to 300 mm or less, and the thickness is limited to 4 mm or less. The most frequently used substrate has an outer diameter of 100 mm to 250 mm and a thickness of 0.2 mm to 3.0 mm.
It is in the range of 0 mm.

The abrasive layer of the superabrasive tool of the present invention comprises a superabrasive containing diamond abrasive, cubic boron nitride abrasive, or a mixed abrasive thereof, and a binder for bonding the superabrasive. Including. As the binder, any one of a resin bond, a metal bond, a vitrified bond, and an electrodeposition bond, or a composite form of these is used. The resin bond contains a thermosetting resin as a main component. Metal bond is
The main component is an alloy containing copper, tin, iron, cobalt or nickel. The vitrified bond is mainly composed of an inorganic material such as glass. Electrodeposited bonds mainly contain a metal deposited by electroplating or chemical plating. Since the bonding property between the hard material constituting the substrate of the superabrasive tool of the present invention and the above-mentioned bonding material is good, there is no restriction on the bonding form.

FIGS. 1 to 3 are a perspective view, a sectional view and a schematic partial sectional view of a superabrasive cutting wheel as one type of the superabrasive tool of the present invention. Referring to these figures, superabrasive cutting wheel 1 has a doughnut-shaped disk 2
And a superabrasive layer 3 formed on an outer peripheral portion of the substrate 2. As shown in FIG. 3, the substrate 2 has a thickness t ₀ (0.1 to
4.0 mm) and a diameter D ₀ (50-300 mm). Superabrasive layer 3 has a protruding length X radially outward from substrate 2 and a thickness t ₁ . An overall diameter of superabrasive cutting wheel 1 is D _1. In the superabrasive cutting wheel 1 of the present invention, the substrate 2 is made of a first material containing tungsten carbide.
And a second hard dispersed phase containing a nitride and / or carbonitride of at least one element selected from the group consisting of elements belonging to groups 4a, 5a and 6a of the periodic table. It is made of a hard material containing as a phase.

[0030]

EXAMPLE (Production of substrate material) Tungsten carbide (W
C) powder, titanium nitride (TiN) powder, zirconium nitride (ZrN) powder, niobium nitride (NbN) powder, tantalum nitride (TaN) powder, titanium tungsten carbonitride ((TiW) (CN)) powder, titanium tantalum carbonitride ((TiTa) (CN)) powder, titanium zirconium carbonitride ((TiZr) (CN)) powder, titanium tungsten tantalum carbonitride ((TiWTa) (CN)) powder, cobalt (Co) powder, nickel (Ni) powder , Chromium (Cr) powder was prepared, mixed in an organic solvent for 10 hours using an attritor at a content ratio (% by mass) shown in Table 1 below, and pulverized. 1-8 were obtained. After the obtained mixed powder was dried, a molded product was obtained by press molding. By sintering these compacts in a vacuum at a temperature of 1390 to 1400 ° C., a sintered body No. 1 to 8 were produced.

[0031]

[Table 1]

(Example 1) 1 was machined into a disk having a donut-shaped hole having an outer diameter D ₀ of 144 mm, an inner diameter of 40 mm, and a thickness t ₀ of 0.5 mm, thereby producing a whetstone substrate 2 (FIG. 3). The Young's modulus of this substrate was 4.9 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a resin bond method using a resin as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, a substrate 2 made of the above-described hard material is set in a disk-shaped grinding wheel-shaped mold, and a thermosetting phenol resin is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 150 μm (particle size♯10
The powder mixed with the resin (thermosetting phenol resin) was mixed with the artificial diamond abrasive grain of 0) at a volume ratio of 18.8%, and formed into a grindstone shape by pressing. Thereafter, the temperature is set to 180 ° C. while the molded body is set in the mold.
For 2 hours, and after cooling, the blade thickness was set to 0.
After finishing to 6 mm, a superabrasive cutting wheel 1 was manufactured as a superabrasive tool.

Using the above-mentioned superabrasive cutting wheel, a cutting test was carried out under the following conditions using a ferrite magnet as a workpiece.

Twenty superabrasive cutting wheels were assembled into a multi-piece at intervals of 3.0 mm, and the ferrite magnet was cut at a rotation speed of 4000 rpm and a cutting speed of 10 mm / min.
The cutting area of the ferrite magnet is 40 mm wide and 2 mm high.
It was 0 mm. After the start of cutting, the thickness of the ferrite magnet cut by 15 superabrasive cutting wheels every 20 times was measured with a micrometer at a total of five points, one at the center and four at the corners. The difference between the maximum value and the minimum value of the points was defined as parallelism, that is, cutting accuracy. The average value of the cutting precision was 0.025 mm (25 μm).

As a comparative example, the same cutting test was performed using a superabrasive cutting wheel having the same size and the same specifications as above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.03 mm (30 μm), and a better cutting accuracy than the above example could not be obtained.

(Example 2) 2 an outer diameter D ₀ is 194 mm, an inner diameter of 50.8 mm, a thickness t ₀ is 0.9m
A grindstone substrate 2 was fabricated by machining a m-shaped donut-shaped disc. The Young's modulus of this substrate was 5.0 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a resin bond method using a resin as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, the substrate 2 made of the above-described hard material is set in a disk-shaped grindstone-shaped mold, and a thermosetting phenol resin is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 91 μm (particle size♯170 )
Was mixed with a resin (thermosetting phenol resin) so that the volume ratio of the artificial diamond abrasive grains was 18.8% by volume, and formed into a grindstone shape by pressing. Thereafter, the molded body was heated and cured at a temperature of 180 ° C. for 2 hours while being set in a mold.
mm, and a superabrasive cutting wheel 1 was manufactured as a superabrasive tool.

Using the above-mentioned superabrasive grain cutting wheel, a cutting test was performed under the following conditions using a ferrite-based magnet as a workpiece.

Twenty superabrasive cutting wheels were assembled into a multi-piece at an interval of 3.0 mm, and a ferrite magnet was cut at a rotation speed of 4000 rpm and a cutting speed of 10 mm / min.
The cutting area of the ferrite magnet is 40 mm wide and 2 mm high.
It was 0 mm. After the start of cutting, the thickness of the ferrite magnet cut by 15 superabrasive cutting wheels every 20 times was measured with a micrometer at a total of five points, one at the center and four at the corners. The difference between the maximum value and the minimum value of the points was defined as parallelism, that is, cutting accuracy. The average value of the cutting precision was 0.05 mm (50 μm).

As a comparative example, the same cutting test was carried out using a superabrasive cutting wheel having the same size and the same specifications as above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.08 mm (80 μm), and a better cutting accuracy than in the above example could not be obtained.

(Example 3) 3 has an outer diameter D ₀ of 244 mm, an inner diameter of 50.8 mm, and a thickness t ₀ of 1.0 m
A grindstone substrate 2 was fabricated by machining a m-shaped donut-shaped disc. The Young's modulus of this substrate was 4.9 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a resin bond method using a resin as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, a substrate 2 made of the above-described hard material is set in a disk-shaped grinding wheel-shaped mold, and a thermosetting phenol resin is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 150 μm (particle size♯10
The powder mixed with the resin (thermosetting phenol resin) was mixed with the artificial diamond abrasive grain of 0) at a volume ratio of 18.8%, and formed into a grindstone shape by pressing. Thereafter, the temperature is set to 180 ° C. while the molded body is set in the mold.
For 2 hours, and after cooling, the blade thickness was 1.
After finishing to 2 mm, a superabrasive cutting wheel 1 was manufactured as a superabrasive tool.

Using the above-mentioned super-abrasive cutting wheel, a cutting test was performed under the following conditions using a ferrite-based magnet as a workpiece.

[0045] Ten superabrasive cutting wheels are assembled into a multi-piece at intervals of 4 mm, and the number of rotations is 4000 rpm and the cutting speed is 10
The ferrite magnet was cut at a rate of mm / min. Cutting area of ferrite magnet is 60mm wide and 20m high
m. After the start of the cutting, the thickness of the ferrite magnet cut by the ten superabrasive cutting wheels every 20 times was measured at a total of 5 points at the center and 4 corners with a micrometer. The difference between the maximum value and the minimum value of the points was defined as parallelism, that is, cutting accuracy. The average value of the cutting accuracy is 0.
07 mm (70 μm).

As a comparative example, the same cutting test was performed using a superabrasive cutting wheel having the same size and the same specifications as above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.1 mm (100 μm), and a better cutting accuracy than the above example could not be obtained.

(Example 4) 4 was machined into a disk having a donut-shaped hole having an outer diameter D ₀ of 94 mm, an inner diameter of 30 mm, and a thickness t ₀ of 0.4 mm, thereby producing a whetstone substrate 2 (FIG. 3). The Young's modulus of this substrate was 5.2 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a resin bond method using a resin as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, the substrate 2 made of the above-described hard material is set in a disk-shaped grindstone-shaped mold, and a thermosetting phenol resin is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 76 μm (particle size♯200 )
Was mixed with a resin (thermosetting phenol resin) so that the volume ratio of the artificial diamond abrasive grains was 25% by volume, and formed into a grindstone shape by pressing. Thereafter, the molded body is heated and cured at a temperature of 180 ° C. for 2 hours while being set in a mold, and after cooling, finish processing is performed to a blade thickness of 0.5 mm with a lapping machine.
Was made.

Using the above-mentioned super-abrasive cutting wheel, a cutting test was performed under the following conditions using a ferrite-based magnet as a workpiece.

Twenty super-abrasive cutting wheels were assembled into a multi-piece at an interval of 2 mm, and the number of rotations was 6000 rpm and the cutting speed was 7 m.
The ferrite magnet was cut at m / min. Cutting area of ferrite magnet is 60mm wide and 10mm high
Met. After the start of cutting, the thickness of the ferrite-based magnet cut by 20 superabrasive cutting wheels every 20 times was measured with a micrometer at a total of five points, one at the center and four at the corners. The difference between the maximum value and the minimum value of the points was defined as parallelism, that is, cutting accuracy. The average value of cutting accuracy is 0.0
It was 2 mm (20 μm).

As a comparative example, the same cutting test was performed using a superabrasive cutting wheel having the same size and the same specifications as described above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.025 mm (25 μm), and a better cutting accuracy than the above example could not be obtained.

(Example 5) 5 was machined into a disk having a donut-shaped hole having an outer diameter D ₀ of 119 mm, an inner diameter of 60 mm, and a thickness t ₀ of 0.5 mm, thereby producing a whetstone substrate 2 (FIG. 3). The Young's modulus of this substrate was 4.9 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a resin bonding method using a resin as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, a substrate 2 made of the above-described hard material is set in a disk-shaped grinding wheel-shaped mold, and a thermosetting phenol resin is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 150 μm (particle size♯10
The powder mixed with the resin (thermosetting phenol resin) was mixed with the artificial diamond abrasive grain of 0) at a volume ratio of 18.8%, and formed into a grindstone shape by pressing. Thereafter, the temperature is set to 180 ° C. while the molded body is set in the mold.
For 2 hours, and after cooling, the blade thickness was set to 0.
After finishing to 7 mm, a superabrasive cutting wheel 1 was manufactured as a superabrasive tool.

Using the above-mentioned superabrasive cutting wheel, Nd
A cutting test was performed under the following conditions using a Fe-B-based rare earth sintered magnet as a workpiece.

Fifteen superabrasive cutting wheels were assembled in multiples at 2.7 mm intervals, and Nd-Fe-B rare earth sintered magnets were cut at a rotation speed of 4000 rpm and a cutting speed of 10 mm / min. The cut region of the Nd-Fe-B-based rare earth sintered magnet was 40 mm in width and 20 mm in height. After the cutting was started, the thickness of the rare earth magnet cut by 15 superabrasive cutting wheels every 20 times was measured at a central part and a corner at a total of five points, and the thickness was measured with a micrometer. The difference between the maximum value and the minimum value was determined as the parallelism, that is, the cutting accuracy. The average value of the cutting accuracy was 0.035 mm (35 μm).

As a comparative example, the same cutting test was performed using a superabrasive cutting wheel having the same size and the same specifications as above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.05 mm (50 μm), and a better cutting accuracy than the above example could not be obtained.

(Example 6) 6 was machined into a disk having a donut-shaped hole having an outer diameter D ₀ of 109 mm, an inner diameter of 40 mm, and a thickness t ₀ of 0.6 mm, thereby producing a whetstone substrate 2 (FIG. 3). The Young's modulus of this substrate was 5.1 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a metal bond method using metal powder as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, the substrate 2 made of the above-described hard material is set in a disk grindstone-shaped mold, and a bronze-based metal bond is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 150 μm (particle size♯10
A powder obtained by mixing the artificial diamond abrasive grains of 0) with a bronze-based metal bond in a volume ratio of 25% was filled and formed into a grindstone shape by a hot press method. After cooling, the lapping machine was finished to a blade thickness of 0.8 mm to produce a superabrasive cutting wheel 1 as a superabrasive tool.

Using the above superabrasive cutting wheel, Nd
A cutting test was performed under the following conditions using a Fe-B-based rare earth sintered magnet as a workpiece.

[0060] Ten superabrasive cutting wheels are assembled into a multi-piece at an interval of 3 mm, and the rotation speed is 4000 rpm and the cutting speed is 7 m.
The Nd-Fe-B-based rare earth sintered magnet was cut at m / min. The cut area of the Nd-Fe-B-based rare earth sintered magnet was 60 mm in width and 20 mm in height. After cutting starts,
The thickness of five points in total, one at the center and four at the corners, of the rare earth magnet cut by the ten superabrasive cutting wheels each time the number of cuts was 20 was measured with a micrometer. The difference from the minimum value was defined as the parallelism, that is, the cutting accuracy. The average value of the cutting accuracy was 0.035 mm (35 μm).

As a comparative example, the same cutting processing test was performed using a superabrasive cutting wheel having the same size and the same specifications as described above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.05 mm (50 μm), and a better cutting accuracy than the above example could not be obtained.

(Example 7) 7 was machined into a disk having a donut-shaped hole having an outer diameter D ₀ of 129 mm, an inner diameter of 50 mm, and a thickness t ₀ of 0.7 mm, thereby producing a whetstone substrate 2 (FIG. 3). The Young's modulus of this substrate was 5.3 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a metal bond method using metal powder as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, the substrate 2 made of the above-described hard material is set in a disk grindstone-shaped mold, and a bronze-based metal bond is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 150 μm (particle size♯10
A powder obtained by mixing the artificial diamond abrasive grains of 0) with a bronze-based metal bond in a volume ratio of 25% was filled and formed into a grindstone shape by a hot press method. After cooling, the lapping machine was finished to a blade thickness of 0.8 mm to produce a superabrasive cutting wheel 1 as a superabrasive tool.

Using the above super-abrasive cutting wheel, Nd
A cutting test was performed under the following conditions using a Fe-B-based rare earth sintered magnet as a workpiece.

[0065] Ten superabrasive cutting wheels are assembled in a multi-piece at an interval of 3 mm, and the rotation speed is 4000 rpm and the cutting speed is 10
The Nd-Fe-B-based rare earth sintered magnet was cut at a rate of mm / min. The cut area of the Nd-Fe-B-based rare earth sintered magnet was 60 mm in width and 20 mm in height. After the start of cutting, one point at the center and four corners of the rare earth magnet cut by 10 superabrasive cutting wheels each for every 20 cuts.
The thickness of a total of five points was measured with a micrometer, and the difference between the maximum value and the minimum value of the five points was defined as parallelism, that is, cutting accuracy. The average value of the cutting accuracy was 0.03 mm (30 μm).

As a comparative example, the same cutting processing test was performed using a superabrasive cutting wheel having the same size and the same specifications as above using a substrate made of a WC-Co cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.04 mm (40 μm), and a better cutting accuracy than the above example could not be obtained.

(Embodiment 8) 8 was machined into a disk having a donut-shaped hole having an outer diameter D ₀ of 94 mm, an inner diameter of 40 mm, and a thickness t ₀ of 0.4 mm, thereby producing a whetstone substrate 2 (FIG. 3). The Young's modulus of this substrate was 5.1 × 10 ¹¹ Pa.

Diamond abrasive grains were fixed to the outer peripheral portion of the substrate 2 by a resin bonding method using a resin as a binder to form a superabrasive grain layer 3 (FIG. 3). Specifically, a substrate 2 made of the above-described hard material is set in a disk-shaped grinding wheel-shaped mold, and a thermosetting phenol resin is used as a binder on the outer peripheral portion of the substrate 2 to have an average particle size of 150 μm (particle size♯10
A powder obtained by mixing the artificial diamond abrasive grains of 0) with a resin (thermosetting phenol resin) so as to have a volume ratio of 25% was filled and formed into a grindstone shape by pressing. Thereafter, the molded body was heated and cured at a temperature of 180 ° C. for 2 hours while being set in a mold. After cooling, the blade thickness was 0.5 mm on a lapping machine.
mm, and a superabrasive cutting wheel 1 was manufactured as a superabrasive tool.

Using the above-mentioned super-abrasive cutting wheel, a cutting test was carried out under the following conditions using alumina-based ceramic as a workpiece.

Ten super-abrasive cutting wheels were assembled into a multi-piece at an interval of 3 mm, and the rotation speed was 6000 rpm and the cutting speed was 10
The alumina-based ceramic was cut at a rate of mm / min. Cutting area of alumina ceramics is 50m wide
m and height were 5 mm. After start of cutting
The thickness of alumina ceramics cut with 10 superabrasive cutting wheels each time was measured at a central point and a corner at a total of 5 points with a micrometer, and the maximum and minimum values of the 5 points were measured. Is defined as the parallelism, that is, the cutting accuracy. The average value of the cutting accuracy was 0.03 mm (30 μm).

As a comparative example, the same cutting processing test was performed using a superabrasive cutting wheel having the same size and the same specifications as described above using a substrate made of a WC-Co-based cemented carbide.
The cutting accuracy was measured. The average value of the measured cutting accuracy is
It was 0.05 mm (50 μm), and a better cutting accuracy than the above example could not be obtained.

The embodiments and examples disclosed above are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the embodiments and examples, and is intended to include all modifications and variations within the scope and meaning equivalent to the terms of the claims. Should.

[0073]

The substrate of the superabrasive tool of the present invention can have mechanical strength and rigidity capable of preventing distortion such as bending and undulation during cutting, and can be generated during cutting. Damage to the substrate due to cutting powder of the work material or the like can be avoided. For this reason, the conventional W
The cutting accuracy can be further improved as compared with a superabrasive tool using a C-Co cemented carbide as a substrate material.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of a superabrasive cutting wheel as one type of a superabrasive tool according to the present invention.

FIG. 2 is a cross-sectional view of the superabrasive cutting wheel shown in FIG.

FIG. 3 is a schematic partial sectional view of the superabrasive cutting wheel shown in FIG. 1;

[Explanation of symbols]

 1 superabrasive cutting wheel, 2 substrates, 3 superabrasive layers

Continued on the front page (72) Inventor Nobuyuki Kitagawa 1-1-1 Kunyokita, Itami-shi, Itami-shi, Hyogo Sumitomo Electric Industries, Ltd. Itami Works (72) Inventor Haruo Inoue 1816 Kuroishi, Kawakita, Takino-cho, Kato-gun, Hyogo Prefecture No. 174 F-term in Allied Materials Harima Manufacturing Co., Ltd. 3C063 AA02 AB03 BA02 BB02 BC03 BG01 BG07 CC19 EE31 FF08 FF11 FF23

Claims (7)

[Claims] 1. A superabrasive tool comprising: a disc-shaped substrate; and an abrasive layer formed on an outer peripheral portion of the substrate, wherein the substrate comprises a first hard dispersed phase and a second hard dispersed phase. A group consisting of a hard material including a hard dispersed phase and a binder phase, wherein the first hard dispersed phase includes tungsten carbide, and the second hard dispersed phase includes elements belonging to groups 4a, 5a, and 6a of the periodic table. A nitride and / or carbonitride of one or more elements selected from the group consisting of iron,
A superabrasive tool comprising at least one element selected from the group consisting of cobalt, nickel and chromium. 2. The method according to claim 1, wherein the second hard dispersed phase is 1% by mass or more.
The superabrasive tool according to claim 1, wherein the superabrasive tool contains 0% by mass or less and the binder phase in a range of 5% by mass or more and 30% by mass or less. 3. The Young's modulus of the hard material is 3.9 × 1.
The superabrasive tool according to claim 1 or 2, which is at least 0 ¹¹ Pa. 4. An outer diameter of the substrate is 50 mm or more and 300 m or more.
m or less, and the thickness is 0.1 mm or more and 4.0 mm or less.
The superabrasive tool according to any one of claims 1 to 3. 5. The superabrasive tool according to claim 1, wherein the abrasive layer includes diamond abrasive, cubic boron nitride abrasive, or a mixed abrasive thereof. . 6. The abrasive grain layer, comprising: an abrasive grain, a resin bond,
2. A bonding material for bonding the abrasive grains in one form selected from the group consisting of a metal bond, a vitrified bond, an electrodeposition bond, and a composite bonding form thereof.
The superabrasive tool according to any one of claims 1 to 5. 7. The superabrasive tool according to claim 1, wherein the superabrasive tool is a cutting wheel.