JP2002131921A5 - - Google Patents
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- Publication number
- JP2002131921A5 JP2002131921A5 JP2000319343A JP2000319343A JP2002131921A5 JP 2002131921 A5 JP2002131921 A5 JP 2002131921A5 JP 2000319343 A JP2000319343 A JP 2000319343A JP 2000319343 A JP2000319343 A JP 2000319343A JP 2002131921 A5 JP2002131921 A5 JP 2002131921A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000319343A JP4472151B2 (ja) | 2000-10-19 | 2000-10-19 | 照射光振分機構およびそれを備えた装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000319343A JP4472151B2 (ja) | 2000-10-19 | 2000-10-19 | 照射光振分機構およびそれを備えた装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002131921A JP2002131921A (ja) | 2002-05-09 |
| JP2002131921A5 true JP2002131921A5 (un) | 2007-11-29 |
| JP4472151B2 JP4472151B2 (ja) | 2010-06-02 |
Family
ID=18797818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000319343A Expired - Lifetime JP4472151B2 (ja) | 2000-10-19 | 2000-10-19 | 照射光振分機構およびそれを備えた装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4472151B2 (un) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4328320B2 (ja) * | 2004-09-03 | 2009-09-09 | サンエー技研株式会社 | 露光用光源 |
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2000
- 2000-10-19 JP JP2000319343A patent/JP4472151B2/ja not_active Expired - Lifetime