JP2002131921A5 - - Google Patents

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Publication number
JP2002131921A5
JP2002131921A5 JP2000319343A JP2000319343A JP2002131921A5 JP 2002131921 A5 JP2002131921 A5 JP 2002131921A5 JP 2000319343 A JP2000319343 A JP 2000319343A JP 2000319343 A JP2000319343 A JP 2000319343A JP 2002131921 A5 JP2002131921 A5 JP 2002131921A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000319343A
Other languages
Japanese (ja)
Other versions
JP4472151B2 (ja
JP2002131921A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000319343A priority Critical patent/JP4472151B2/ja
Priority claimed from JP2000319343A external-priority patent/JP4472151B2/ja
Publication of JP2002131921A publication Critical patent/JP2002131921A/ja
Publication of JP2002131921A5 publication Critical patent/JP2002131921A5/ja
Application granted granted Critical
Publication of JP4472151B2 publication Critical patent/JP4472151B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000319343A 2000-10-19 2000-10-19 照射光振分機構およびそれを備えた装置 Expired - Lifetime JP4472151B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000319343A JP4472151B2 (ja) 2000-10-19 2000-10-19 照射光振分機構およびそれを備えた装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000319343A JP4472151B2 (ja) 2000-10-19 2000-10-19 照射光振分機構およびそれを備えた装置

Publications (3)

Publication Number Publication Date
JP2002131921A JP2002131921A (ja) 2002-05-09
JP2002131921A5 true JP2002131921A5 (enExample) 2007-11-29
JP4472151B2 JP4472151B2 (ja) 2010-06-02

Family

ID=18797818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000319343A Expired - Lifetime JP4472151B2 (ja) 2000-10-19 2000-10-19 照射光振分機構およびそれを備えた装置

Country Status (1)

Country Link
JP (1) JP4472151B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4328320B2 (ja) * 2004-09-03 2009-09-09 サンエー技研株式会社 露光用光源

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