JP2002131332A - Contact probe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make a contact pin able to abut on an accurate position at an accurate contact pressure. SOLUTION: The contact pin 30 is attached via an elastic body 2 to a body 1 whose movement is controlled. The elastic body 2 comprises a plurality of flexible members 2a and a plurality of buckling flexible members 2b. The flexible members 2a each have a pressure receiving surface perpendicular to the pressing direction and arranged in tiers in the pressing direction. The buckling flexible members 2b are provided along the pressing direction at positions different from each other for one side and the other side of each flexible member 2a and connect neighboring flexible members.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contact probe device which is pressed at a predetermined pressure along the surface of an object to be measured and is used for measuring electric characteristics and the like.

[0002]

2. Description of the Related Art In a contact probe device used for measuring electric characteristics, it is necessary to bring a contact pin thereof into contact with a surface of an object to be measured at a predetermined pressure. Conventionally, this contact pin is attached to a moving body to which the contact pin is attached and which is held so as to be able to reciprocate along a guide provided on the main body.
It has been pressed in the projecting direction of the contact pin by an elastic body such as a coil spring. For this reason, the frictional force generated on the contact surface between the probe guide and the moving body largely acts on the reciprocation of the contact pin, and there has been a problem that the contact pressure of the contact pin on the measured object cannot be accurately and constantly maintained. .

Further, the coil spring is very weak against diagonal and lateral forces that are not parallel to the center axis direction of the contact pin, and is easily bent by such a force, so that the contact pin is in an advancing / retracting state and the actual contact state. There is a problem that an error easily occurs with the pressure. For this reason, especially when the surface of the measured object is greatly inclined with respect to the center axis of the contact pin, the error between the detected value of the contact pressure of the contact pin and the actual contact pressure is significantly increased. There was a problem.

When the coil spring bends due to a force intersecting its central axis, a frictional force is applied to the contact pin and the guide, so that the contact pressure is not constant. In addition, since the projecting direction is wrong, the position of the main body to which the contact pin is attached must be finely adjusted while observing the actual contact position of the tip of the contact pin, which is troublesome. Also, when a coil spring is used, as described above, the frictional force between the pin and the guide and the numerical value of the contact pressure determined based on the advancing / retracting position of the contact pin and the compression state of the coil spring are generated. Therefore, there is a possibility that a large error may occur between the contact pressure and the contact pressure, so that there is a problem that an accurate contact pressure cannot be detected.

[0005]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to provide a contact pin with respect to an object to be measured irrespective of a tilt direction of a measurement surface of the object to be measured. An object of the present invention is to detect an accurate contact pressure, to make the contact pin contact with a contact pressure within a predetermined range, and to prevent the direction of the contact pin from being changed.

[0006]

The object of the present invention is to dispose contact pins at a plurality of flexible members arranged in a plurality of stages in the pressing direction and at different positions on the front and back of each flexible member along the pressing direction. This is achieved by attaching to a body whose movement is controlled through an elastic body provided and a buckling flexure member connecting adjacent flexure members.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is an explanatory view showing a main configuration of a first embodiment of a contact probe device according to the present invention. FIG. 2 is a perspective view showing a second embodiment of the contact probe device according to the present invention.
Is a perspective view showing the configuration of the elastic body and the contact pins shown in FIG. 2, FIG. 4 is a front view of the elastic body shown in FIG. 3, FIG. 5 is a cross-sectional view taken along the line AA in FIG. 2 is a perspective view showing an example of another contact pin that can be used in the contact probe device shown in FIG. 2, FIG. 7 is a perspective view showing an example of another contact pin that can be used in the contact probe device shown in FIG. FIG. 8 is a perspective view showing an example of another contact pin that can be used in the contact probe device shown in FIG. 2, and FIG. 9 is a graph showing the relationship between contact pressure and stroke by a conventional contact probe using a coil spring. 10 is a graph showing the relationship between the contact pressure and the stroke by the contact probe according to the present invention, and FIG. 11 is the relationship between the contact pressure and the stroke by the contact probe according to the present invention. A digitized graphs.

First, FIG. 1 will be described. In the figure, 60
Is a contact pin, 61 is a chuck, and 62 is a measured object. The contact pin 60 is a flexible pin, and is detachably attached to the chuck 61. The chuck 61 is held so as to be able to control the θ drive so that the mounted contact pin 60 can be brought into contact with the surface of the measured object 62 at a required angle θ, and is also held so as to be able to advance and retreat in the Z-axis direction. The measured object 61 is held so as to be controllable in the XY axis directions by NC control. In this embodiment, when the chuck 61 is moved toward the measured object 62 at a predetermined angle θ and the tip of the contact pin 61 is pressed against the surface of the measured object 62, the contact pin 60 is bent and the tip is fixed. The pressure comes into contact with the surface of the measured object 62.

Next, FIGS. 2 to 5 will be described.
In the figure, 1 is a main body, 2 is an elastic body, 20 is a connect pin holder, 30 is a contact pin, 4 is a connector, and 5 is a holding arm. The main body 1 has a cylindrical shape, and is vertically held by a holding arm 5 that is NC-driven in three axial directions. Body 1
The elastic body 2 is attached to the lower end of the body. This elastic body 2
Has a pressure receiving surface that is perpendicular to the pressing direction, that is, has a horizontal pressure-receiving surface, and a plurality of disk-shaped bending members 2a arranged in a plurality of layers in the pressing direction and a buckling connecting the adjacent bending members 2a. And a bending member 2b. The buckling bending member 2b
As shown in FIGS. 4 and 5, the diametrical direction in which the pair of buckling bending members 2 b provided on the front and back of one bending member 2 a are provided at each end on one diameter of the bending member 2 a, They cross at right angles.

When a pressure in a direction perpendicular to the pressure receiving surface, that is, a pressure in the compression direction of the elastic member 2 is applied to the elastic member 2, the flexible member 2a is bent to compress the elastic member 2, and the elastic member 2 is pressed against the pressure receiving surface. Buckling bending member 2b
This prevents the elastic body 2 from bending due to the buckling stress. One end of the elastic body 2 is connected to the main body 1, and a connect pin holder 20 to which a contact pin 30 can be detachably attached is provided at the other end.
The connect pin holder 20 has a cylindrical wall portion having a plurality of cutouts in a longitudinal direction capable of holding the contact pin 30 therein, and an inner peripheral surface of the wall portion described later. There is a ridge that cuts into the groove 30a of the contact pin 30. The contact pin 30 is provided with a conical tip on one end face of a cylindrical body having a groove 30a in the circumferential direction of the outer surface of the cylinder.

The contact pin 30, the connect pin holder 20, the elastic body 2 and the main body 1
At least a part thereof is made of a conductive material so that a conductive path leading from the leading end of the main body 1 to the upper end of the main body 1 can be formed. In addition, as a contact pin, depending on its use,
Various shapes can be used. Specifically, FIG.
Or those shown in FIG. The cable connection portion 4 has a cable 4a connected to the outside, is detachably attached to the upper end of the main body 1, and connects the cable 4a to a conductive path exposed at the upper end of the main body 1 at the time of attachment. is there. The cable 4a extending from the cable connection section 4 is connected to a resistance measuring device or a control device of an NC driving device (not shown).

When the electrical characteristics of the object to be measured are measured using this embodiment, an NC drive device (not shown) is used to hold the contact pin 30 at a required position on the object to which the power is connected. 5 is moved and the contact pin 30 is lowered toward a predetermined position of the measured object.
When the tip of the contact pin 30 comes into contact with the surface of the object to be measured, a current flows through the cable 4a of the cable connection portion 4. Therefore, a signal indicating that power has been supplied to the detection device that detects the compression state of the elastic body. The height of the holding arm 5 when the detection device outputs a signal indicating energization is set as a reference height, and the holding arm 5 is lowered in the direction of the measured object by a predetermined distance from the reference height. Is detected by the detecting device, a control signal for stopping the lowering of the holding arm 5 is output from the detecting device, the lowering of the holding arm 5 is stopped, and the resistance is measured.

The elastic body 2 is compressed by the lowering of the predetermined distance, and the tip of the contact pin 30 comes into contact with the measured object with a pressure corresponding to the lowering distance. At this time, since the friction which hinders the compression does not occur with the compression of the elastic body 2, the contact pressure is always constant if the compression amount is the same. In the above-described embodiment, the respective flexible members of the elastic body may not be the same, and by changing their strength, the number, the shape, the strength, the material, and the like, a wider range of contact pressure can be obtained. The contact pin can be brought into contact with the measured object.

The operation of the contact probe device according to the present invention will be described below in comparison with a conventional device using a coil spring. The coil spring is easily bent by a force oblique and perpendicular to the compression direction. If this amount of deflection is S,

(Equation 1) Where n = 10, d = 0.04 mmφ, G = 7.8 × 10 ¹⁰ Pa, R
= 0.4mmφ, when a force of 0.1g acts in the direction perpendicular to the pressing direction of the coil spring, the amount of deflection S = 0.13mm
It can be seen that the coil spring is easily distorted by a small force. Therefore, in the case of a contact probe device using a coil spring as an elastic body, a guide for guiding a contact pin is required.

The elastic body used in the contact probe device according to the present invention has a bending deflection amount of Δl.

(Equation 2) Becomes E = 20.1 × 10 ¹⁰ Pa, t = 0.02 mm, W = 0.04 mm, Y
When a measured load of 1 g is applied at = 0.8 mm, the bending deflection amount is only 0.03 mm, and the pressing direction of the contact pin can be determined very accurately without disturbing the pressing direction of the contact pin.

If a pressure that does not deform even when a load perpendicular to the pressing direction is applied is P ₁ ,

(Equation 3) Becomes It can be seen that the elastic body with t ₁ = 0.02 mm, W ₁ = 0.04 mm, and l = 2 mm can withstand a load of 4.5 g. [Equation 1] and [Equation 3] reveal the amount of distortion due to the load in the direction perpendicular to the pressing direction, and [Equation 2] allows the movable amount under the measured load to be obtained.

From these equations, the elastic body used in the present invention can stably determine the pushing direction of the contact pin even when a lateral force acts on the spring operation.

FIG. 9 shows a relationship between a contact pressure and a stroke by a conventional contact probe using a coil spring. According to this figure, it becomes clear that the contact pressure gradually increases in proportion to the stroke when the stroke exceeds a certain stroke, but the contact pressure rapidly changes with a small change in the stroke below the certain stroke. This indicates that when a coil spring is used, a weak contact pressure cannot be stably obtained.

Next, the relationship between the contact pressure and the stroke by the contact probe according to the present invention is shown in FIG. According to this figure, the bending member of the elastic body is bent by the bending action until the stroke reaches the point a, and when the stroke advances to the point a, the bending member is fully bent. Until the stroke reaches the point a, the contact pressure gradually increases with the increase of the stroke. Therefore, by adjusting the stroke, the contact pin can be brought into contact with the object to be measured with a required minute contact pressure. Can be.

Next, the characteristics when digitized are shown in FIG.
Shown in This shows a state where buckling and bending can be arbitrarily selected.
When measuring in an inert gas atmosphere, use a connector
Supply gas and spray it around the connect pin.
To do. Probes and pins are precious metal
Locked or alloys of precious metals Pt, Au, Ir, Pd, etc.
Is used as an elastic body, and the position can be determined more accurately.
Therefore, it is also possible to measure the state of wear of the tip and the thickness of the product, etc.
You can do it.

There is an effect that even a gang having a large number of contact probes can be easily assembled.
Furthermore, according to the present invention, the length including the probe pins can be shortened as compared with the conventional pin contact type measurement method, so that the inductance can be reduced, so that the effect can be effectively used even at high frequencies. There is. In the future, it can be used effectively for higher frequencies in measuring devices and the like.

The present invention is not limited to the above-described embodiment. For example, the elastic body may be attached to the main body or the contact pins may be attached by any means. A device for monitoring the length of the elastic body may be provided to grasp the compression state of the elastic body, and the data may be used for the movement control of the contact probe. Also, by moving the contact probe or the object to be measured, controlling the contact pins to always contact the object to be measured with a contact pressure within a predetermined range, so that the contact pins scan the surface of the object to be measured, The surface shape of the body may be detected.

[0023]

Since the present invention is configured as described above,
According to the present invention, the contact pin can be brought into contact with an accurate position at an accurate contact pressure.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a main configuration of a first embodiment of a contact probe device according to the present invention.

FIG. 2 is a perspective view showing one embodiment of a contact probe device according to the present invention.

FIG. 3 is a perspective view illustrating a configuration of an elastic body and a contact pin illustrated in FIG. 2;

FIG. 4 is a front view of the elastic body shown in FIG. 3;

FIG. 5 is a sectional view taken along the line AA shown in FIG. 4;

FIG. 6 is a perspective view showing an example of another contact pin that can be used in the contact probe device shown in FIG.

FIG. 7 is a perspective view showing an example of another contact pin that can be used in the contact probe device shown in FIG.

FIG. 8 is a perspective view showing an example of another contact pin that can be used in the contact probe device shown in FIG.

FIG. 9 is a graph showing a relationship between a contact pressure and a stroke by a conventional contact probe using a coil spring.

FIG. 10 is a graph showing a relationship between a contact pressure and a stroke by a contact probe according to the present invention.

FIG. 11 is a digitized graph of a relationship between a contact pressure and a stroke by a contact probe according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Main body 2 Elastic body 2a Flexure member 2b Buckling flexure member 20 Connect pin holder 30 Contact pin 31 Contact pin 32 Contact pin 33 Contact pin 4 Cable connector 4a Cable 5 Holding arm 60 Contact pin 61 Chuck 62 Measurement object

Claims (4)

[Claims] A contact pin is chucked, and a measurement pressure in a bending direction of a probe and a measurement pressure in a vertical direction are applied to a measurement object (62) via a support body that is controlled to move in X, Y, and Z axes directions with respect to a measurement object (62). When controlling the measurement angle θ and using an elastic body that can be measured by bringing the contact pin (60) into contact with the measured body (62) at a regular contact pressure so that no other force acts on the contact pressure when measuring. Contact probe equipment. 2. The contact probe device according to claim 1, wherein an elastic body obtained by arbitrarily combining a bending bending member and a buckling bending member is used. 3. A contact body (1), contact pins (30, 31, 32, 33) coaxial with the body (1) and protruding from the body (1) and held in a predetermined range so as to be able to advance and retreat. Pins (30, 31, 32, 33) into the body (1)
An elastic body (2) that presses in a direction protruding from the sensor and a detection device that detects a compressed state of the elastic body (2), and the movement of the elastic body (2) is controlled so as to maintain a compressed state within a predetermined range. In the contact probe device, the elastic body (2) has a pressure receiving surface perpendicular to the pressing direction, and a plurality of bending bending members (2) arranged in a plurality of layers in the pressing direction.
a) and buckling bending members (2b) provided at different positions on the front and back of each bending bending member (2a) along the pressing direction, and the adjacent bending members (2a) are buckling bending members (2b). ) Is connected to the main body (1), and the other end is connected to contact pins (30, 31, 32, 3).
3. The contact probe device according to claim 1, wherein 3) is connected. 4. A contact pin (30, 31, 32, 3)
The contact probe according to claim 1, wherein NC movement control is performed along the surface of the measured object relative to the measured object while 3) is brought into contact with the surface of the measured object at a predetermined contact pressure. apparatus.