JP2002116171A5 - - Google Patents
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- Publication number
- JP2002116171A5 JP2002116171A5 JP2000304901A JP2000304901A JP2002116171A5 JP 2002116171 A5 JP2002116171 A5 JP 2002116171A5 JP 2000304901 A JP2000304901 A JP 2000304901A JP 2000304901 A JP2000304901 A JP 2000304901A JP 2002116171 A5 JP2002116171 A5 JP 2002116171A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000304901A JP4103027B2 (ja) | 2000-10-04 | 2000-10-04 | 薄膜ガスセンサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000304901A JP4103027B2 (ja) | 2000-10-04 | 2000-10-04 | 薄膜ガスセンサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002116171A JP2002116171A (ja) | 2002-04-19 |
JP2002116171A5 true JP2002116171A5 (nl) | 2005-12-22 |
JP4103027B2 JP4103027B2 (ja) | 2008-06-18 |
Family
ID=18785864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000304901A Expired - Lifetime JP4103027B2 (ja) | 2000-10-04 | 2000-10-04 | 薄膜ガスセンサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4103027B2 (nl) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4575581B2 (ja) * | 2000-11-24 | 2010-11-04 | 大阪瓦斯株式会社 | ガスセンサ |
GB0500393D0 (en) | 2005-01-10 | 2005-02-16 | Univ Warwick | Microheaters |
GB2464016B (en) * | 2005-03-15 | 2010-07-28 | Univ Warwick | Smart sensors |
JP2007271636A (ja) * | 2007-06-18 | 2007-10-18 | Osaka Gas Co Ltd | ガス検出装置及びガス検出方法 |
JP2009058389A (ja) * | 2007-08-31 | 2009-03-19 | New Cosmos Electric Corp | ガス検知素子 |
EP2762866B1 (en) * | 2013-01-31 | 2017-08-09 | Sensirion AG | CMOS gas sensor and method for manufacturing the same |
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2000
- 2000-10-04 JP JP2000304901A patent/JP4103027B2/ja not_active Expired - Lifetime