JP2002116171A5 - - Google Patents

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Publication number
JP2002116171A5
JP2002116171A5 JP2000304901A JP2000304901A JP2002116171A5 JP 2002116171 A5 JP2002116171 A5 JP 2002116171A5 JP 2000304901 A JP2000304901 A JP 2000304901A JP 2000304901 A JP2000304901 A JP 2000304901A JP 2002116171 A5 JP2002116171 A5 JP 2002116171A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000304901A
Other languages
Japanese (ja)
Other versions
JP4103027B2 (ja
JP2002116171A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000304901A priority Critical patent/JP4103027B2/ja
Priority claimed from JP2000304901A external-priority patent/JP4103027B2/ja
Publication of JP2002116171A publication Critical patent/JP2002116171A/ja
Publication of JP2002116171A5 publication Critical patent/JP2002116171A5/ja
Application granted granted Critical
Publication of JP4103027B2 publication Critical patent/JP4103027B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000304901A 2000-10-04 2000-10-04 薄膜ガスセンサ Expired - Lifetime JP4103027B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000304901A JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000304901A JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Publications (3)

Publication Number Publication Date
JP2002116171A JP2002116171A (ja) 2002-04-19
JP2002116171A5 true JP2002116171A5 (cg-RX-API-DMAC7.html) 2005-12-22
JP4103027B2 JP4103027B2 (ja) 2008-06-18

Family

ID=18785864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000304901A Expired - Lifetime JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Country Status (1)

Country Link
JP (1) JP4103027B2 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4575581B2 (ja) * 2000-11-24 2010-11-04 大阪瓦斯株式会社 ガスセンサ
GB0500393D0 (en) * 2005-01-10 2005-02-16 Univ Warwick Microheaters
GB2464016B (en) * 2005-03-15 2010-07-28 Univ Warwick Smart sensors
JP2007271636A (ja) * 2007-06-18 2007-10-18 Osaka Gas Co Ltd ガス検出装置及びガス検出方法
JP2009058389A (ja) * 2007-08-31 2009-03-19 New Cosmos Electric Corp ガス検知素子
EP2762866B1 (en) * 2013-01-31 2017-08-09 Sensirion AG CMOS gas sensor and method for manufacturing the same

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