JP2002116171A5 - - Google Patents

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Publication number
JP2002116171A5
JP2002116171A5 JP2000304901A JP2000304901A JP2002116171A5 JP 2002116171 A5 JP2002116171 A5 JP 2002116171A5 JP 2000304901 A JP2000304901 A JP 2000304901A JP 2000304901 A JP2000304901 A JP 2000304901A JP 2002116171 A5 JP2002116171 A5 JP 2002116171A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000304901A
Other languages
Japanese (ja)
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JP2002116171A (ja
JP4103027B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000304901A priority Critical patent/JP4103027B2/ja
Priority claimed from JP2000304901A external-priority patent/JP4103027B2/ja
Publication of JP2002116171A publication Critical patent/JP2002116171A/ja
Publication of JP2002116171A5 publication Critical patent/JP2002116171A5/ja
Application granted granted Critical
Publication of JP4103027B2 publication Critical patent/JP4103027B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000304901A 2000-10-04 2000-10-04 薄膜ガスセンサ Expired - Lifetime JP4103027B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000304901A JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000304901A JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Publications (3)

Publication Number Publication Date
JP2002116171A JP2002116171A (ja) 2002-04-19
JP2002116171A5 true JP2002116171A5 (cg-RX-API-DMAC7.html) 2005-12-22
JP4103027B2 JP4103027B2 (ja) 2008-06-18

Family

ID=18785864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000304901A Expired - Lifetime JP4103027B2 (ja) 2000-10-04 2000-10-04 薄膜ガスセンサ

Country Status (1)

Country Link
JP (1) JP4103027B2 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4575581B2 (ja) * 2000-11-24 2010-11-04 大阪瓦斯株式会社 ガスセンサ
GB0500393D0 (en) 2005-01-10 2005-02-16 Univ Warwick Microheaters
GB2464016B (en) * 2005-03-15 2010-07-28 Univ Warwick Smart sensors
JP2007271636A (ja) * 2007-06-18 2007-10-18 Osaka Gas Co Ltd ガス検出装置及びガス検出方法
JP2009058389A (ja) * 2007-08-31 2009-03-19 New Cosmos Electric Corp ガス検知素子
EP2762866B1 (en) * 2013-01-31 2017-08-09 Sensirion AG CMOS gas sensor and method for manufacturing the same

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