JP2002100529A - Ceramic laminated electronic component and method of manufacturing the same - Google Patents

Ceramic laminated electronic component and method of manufacturing the same

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Publication number
JP2002100529A
JP2002100529A JP2000287338A JP2000287338A JP2002100529A JP 2002100529 A JP2002100529 A JP 2002100529A JP 2000287338 A JP2000287338 A JP 2000287338A JP 2000287338 A JP2000287338 A JP 2000287338A JP 2002100529 A JP2002100529 A JP 2002100529A
Authority
JP
Japan
Prior art keywords
electronic component
group
ceramic
electrode
exposed electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000287338A
Other languages
Japanese (ja)
Other versions
JP4556312B2 (en
Inventor
Masato Nomiya
正人 野宮
Masahito Uto
雅人 宇藤
Shintaro Karaki
信太郎 唐木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2000287338A priority Critical patent/JP4556312B2/en
Publication of JP2002100529A publication Critical patent/JP2002100529A/en
Application granted granted Critical
Publication of JP4556312B2 publication Critical patent/JP4556312B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a ceramic laminated electronic component having no disadvantage due to defective plating or the like and a method of manufacturing the same. SOLUTION: In the ceramic laminated electronic component and method of manufacturing the same, an exposed electrode is coated with an organic film.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明はセラミック積層電子
部品およびその製造方法に関し、特に、露出電極を備え
るセラミック積層電子部品およびその製造方法に関す
る。
The present invention relates to a multilayer ceramic electronic component and a method of manufacturing the same, and more particularly, to a multilayer ceramic electronic component having an exposed electrode and a method of manufacturing the same.

【0002】[0002]

【従来の技術】従来、焼成電極を酸化などによる劣化要
因から保護し、はんだ等との良好な接合性を維持するた
めに、電極表面にめっきなどによる金属被膜を形成して
いた。しかし、近年、電子部品についても小型化、高機
能化への要求が大きく、電子部品自体の露出電極が緻密
かつ繊細になってきているため、金属めっきでは被覆率
の低下や短絡などの問題が発生しやすい状況にある。
2. Description of the Related Art Conventionally, in order to protect a fired electrode from deterioration factors due to oxidation or the like, and to maintain good bonding with solder or the like, a metal film by plating or the like has been formed on the electrode surface. However, in recent years, there has been a great demand for smaller and more sophisticated electronic components, and the exposed electrodes of the electronic components themselves have become denser and more delicate. The situation is likely to occur.

【0003】めっきの主たるものには、電解、無電解に
かかわらず、Ni/Au,Ni/Sn,Ni/はんだな
どがある。Cu電極をNi/Auめっきで被覆した例に
ついて述べると、以下のような特徴がある。 Cu電極がむき出しのままでは、酸化などによる電極
の劣化が起こり、はんだ濡れ性が悪化する。 Auは酸化防止膜となり、はんだ濡れ性も良好である
が、めっき後の組立工程中の加熱によって、AuがCu
電極中に拡散してしまう性質がある。 NiをCu電極/Au間に挟みこむことにより、Au
のCu電極中への拡散を防止する効果がある。 NiにAuに対する拡散防止効果を発揮させるために
は、Niの膜厚は3μm程度以上必要である。 Ni単体では、はんだに対する濡れ性が良くないた
め、表面にAuめっきが必要となる。
[0003] Principal types of plating include Ni / Au, Ni / Sn, and Ni / solder, regardless of whether they are electrolytic or non-electrolytic. An example in which a Cu electrode is covered with Ni / Au plating has the following features. If the Cu electrode is left unexposed, deterioration of the electrode due to oxidation or the like occurs, and the solder wettability deteriorates. Au serves as an antioxidant film and has good solder wettability. However, due to heating during the assembly process after plating, Au becomes Cu
It has the property of diffusing into the electrode. By sandwiching Ni between the Cu electrode and Au, Au
Has the effect of preventing the diffusion of Cu into the Cu electrode. In order for Ni to exhibit the effect of preventing diffusion of Au, the film thickness of Ni needs to be about 3 μm or more. Since Ni alone has poor wettability to solder, Au plating is required on the surface.

【0004】従来、無電解Ni/Auめっきプロセスな
どでは、露出電極に触媒付与を行い、この触媒をNiと
置換することで露出電極表面にのみNiを析出させてい
た。また、Auはその後、NiとAuとの置換を行うこ
とで析出させていた。
Conventionally, in an electroless Ni / Au plating process or the like, a catalyst is applied to the exposed electrode, and the catalyst is replaced with Ni to deposit Ni only on the exposed electrode surface. Au was then precipitated by substituting Ni for Au.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、このプ
ロセスには以下に列記する不都合があった。 無電解めっきの場合には、触媒の付着不良および置換
不良により、めっき不良が発生する。 析出しためっき金属の結晶性のばらつきや異物付着に
より、析出膜に変色不良が発生する。 電極の印刷むらや、ダイシングなどによる電極の削り
カスが基板表面に存在していると、めっきの異常析出の
原因となる。また、Niめっきなどは、そのストッパ効
果を有効に働かせるためには、膜厚が3μm程度以上必
要であるため、印刷ムラや削りカスなどが密着している
ところにめっきを析出させてしまうと、微細な粉の間が
めっきによって接合されて、ショートパスの原因とな
る。 めっきによって析出する金属は等方的に成長するた
め、ラインスペースが縮小された場合には、隣接するラ
イン間をめっきが跨いでしまい、ショートパスを形成し
てしまう。 めっきによって電極上に金属被膜を析出させると、金
属被膜の電極表面に対する残留応力などの影響により、
電極接合強度が低下する。 めっき析出中の副生成物やめっき液自体が膜中に取り
込まれ、均一なめっき膜の析出が妨げられている。 重金属を析出させる工法であるため、周辺環境に対し
て悪影響の及ぶおそれがある。
However, this process has the following disadvantages. In the case of electroless plating, poor plating occurs due to poor adhesion and replacement of the catalyst. Discoloration failure occurs in the deposited film due to variations in the crystallinity of the deposited plating metal and adhesion of foreign matter. Uneven printing of the electrode or shavings of the electrode due to dicing or the like on the substrate surface cause abnormal deposition of plating. In addition, Ni plating or the like requires a film thickness of about 3 μm or more in order to make the stopper effect work effectively. The fine powder is joined by plating, which causes a short path. Since the metal deposited by plating grows isotropically, if the line space is reduced, the plating straddles adjacent lines, forming a short path. When a metal film is deposited on the electrode by plating, the effect of the metal film on the electrode surface, such as residual stress,
The electrode bonding strength decreases. By-products during plating deposition and the plating solution itself are taken into the film, which prevents uniform plating film deposition. Since the method is a method of precipitating heavy metals, there is a possibility that the surrounding environment may be adversely affected.

【0006】それゆえに、本発明の主たる目的は、上記
不都合の生じないセラミック積層電子部品およびその製
造方法を提供することである。
SUMMARY OF THE INVENTION Therefore, a main object of the present invention is to provide a ceramic laminated electronic component free from the above-mentioned disadvantages and a method of manufacturing the same.

【0007】[0007]

【課題を解決するための手段】本発明は、露出電極を有
機被膜で被覆したことを特徴とする、セラミック積層電
子部品である。また、本発明は、露出電極表面に存在す
る酸化物を溶解除去した後、該露出電極表面に有機被膜
を形成するステップを含む、セラミック積層電子部品の
製造方法である。本発明において、有機被膜は防錆効果
を有することが好ましい。また、本発明において、有機
被膜は絶縁性であることが好ましい。さらに、本発明に
おいて、有機被膜は、イミダゾール、ベンズイミダゾー
ル、ベンゾトリアゾール、トリルトリアゾールをはじめ
とするアゾール化合物およびそれらの誘導体(メチル基
やエチル基などのアルキル基、カルボキシル基、アミノ
基、ヒドロキシル基などを前記アゾール化合物中のベン
ゼン環に結合させた化合物群)を成分に含むものが好ま
しい。また、本発明において、露出電極は焼成金属を主
成分とすることが好ましい。さらに、本発明において、
露出電極はCu、Ag、Ni、Sn、Feの少なくとも
一つを成分に含むことが好ましい。また、本発明におい
て、セラミック積層電子部品の表面に露出している全て
の電極が露出電極であることが好ましい。
SUMMARY OF THE INVENTION The present invention is a multilayer ceramic electronic component characterized in that the exposed electrode is covered with an organic film. Further, the present invention is a method for manufacturing a ceramic laminated electronic component, comprising a step of dissolving and removing an oxide present on a surface of an exposed electrode, and then forming an organic film on the surface of the exposed electrode. In the present invention, the organic coating preferably has a rust-preventive effect. In the present invention, the organic coating is preferably insulating. Further, in the present invention, the organic film is formed of an azole compound such as imidazole, benzimidazole, benzotriazole, tolyltriazole and derivatives thereof (alkyl group such as methyl group and ethyl group, carboxyl group, amino group, hydroxyl group, etc. Is preferred as a component of the azole compound. Further, in the present invention, it is preferable that the exposed electrode contains a baked metal as a main component. Further, in the present invention,
The exposed electrode preferably contains at least one of Cu, Ag, Ni, Sn, and Fe as a component. Further, in the present invention, it is preferable that all electrodes exposed on the surface of the ceramic multilayer electronic component are exposed electrodes.

【0008】本発明の上述の目的,その他の目的,特徴
および利点は、図面を参照して行う以下の発明の実施の
形態の詳細な説明から一層明らかとなろう。
The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments of the present invention with reference to the accompanying drawings.

【0009】[0009]

【発明の実施の形態】まず、外部に露出した電極を備え
るセラミック積層電子部品を用意する。露出電極は、た
とえばCu、Ag、Ni、Sn、Feの少なくとも一つ
を成分に含む焼成金属で形成される。次に、露出電極表
面を、塩化第二胴、塩化第二鉄、亜硫酸塩類、アルカリ
エッチャント、過流酸アンモニウム、過流酸ナトリウ
ム、あるいは硫酸と過酸化水素水の混合液などの水溶液
エッチング剤によってエッチングする。エッチング液を
露出電極表面に塗布するためには、セラミック基板をエ
ッチング液に浸してもよく、エッチング液を噴霧または
ロールコータによって塗布しても良い。このエッチング
により、電極表面の酸化物層や有機汚染物を除去するこ
とができる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a ceramic laminated electronic component having electrodes exposed to the outside is prepared. The exposed electrode is formed of, for example, a fired metal containing at least one of Cu, Ag, Ni, Sn, and Fe as a component. Next, the exposed electrode surface is treated with an aqueous solution etchant such as a ferric chloride, ferric chloride, sulfites, alkali etchant, ammonium peroxylate, sodium peroxylate, or a mixture of sulfuric acid and hydrogen peroxide. Etch. In order to apply the etchant to the exposed electrode surface, the ceramic substrate may be dipped in the etchant, or the etchant may be applied by spraying or a roll coater. By this etching, an oxide layer and organic contaminants on the electrode surface can be removed.

【0010】エッチング処理を行った直後、未乾燥状態
で40℃〜70℃程度に加熱されたイオン交換水で5秒
〜60秒間洗浄した後、常温のイオン交換水で洗浄を行
うのが好ましいが、工程の簡略化のため、エッチング後
すぐに常温のイオン交換水で洗浄を行ってもよい。イオ
ン交換水は蒸留水でも良く、また他の比較的溶解物の少
ない水でも良い。また、加熱されたイオン交換水による
洗浄工程は、電極表面を酸化させることを目的としてい
るため、洗浄効果としては劣るが、温風や温められた水
蒸気、温められたアルコール類によって処理してもよ
い。
Immediately after performing the etching treatment, it is preferable to wash in an undried state with ion-exchanged water heated to about 40 ° C. to 70 ° C. for 5 seconds to 60 seconds, and then to wash with ion-exchanged water at room temperature. In order to simplify the process, washing may be performed immediately after etching with ion-exchanged water at normal temperature. The ion-exchanged water may be distilled water or other water having relatively little dissolved matter. In addition, the cleaning step using heated ion-exchanged water is intended to oxidize the electrode surface, and thus has a poor cleaning effect. However, even if the cleaning step is performed using warm air, heated steam, or heated alcohols. Good.

【0011】電極表面に残ったエッチング剤および洗浄
液が次工程に持ち込されるのを防ぐため、水切り、乾燥
を行う。エッチング液が次工程の有機被膜溶液に持ち込
まれると溶液が分解反応を示し、安定な有機被膜が形成
されなくなるからである。この工程は、冷風乾燥、温風
乾燥、さらに吸水性材料で脱水しても良いが、露点温度
の低い気体で水切りを行った後、熱乾燥を行うのが効果
的である。
Draining and drying are performed to prevent the etchant and cleaning solution remaining on the electrode surface from being carried into the next step. This is because when the etchant is brought into the organic film solution in the next step, the solution shows a decomposition reaction and a stable organic film cannot be formed. In this step, cold-air drying, hot-air drying, and dehydration with a water-absorbing material may be used. However, it is effective to perform water drying after removing water with a gas having a low dew point.

【0012】有機被膜の溶液に電極を浸漬させ、電極表
面に有機被膜を析出させる。必要であれば、浸漬中に電
極の揺動や液の攪拌などを行う。有機被膜の析出方法は
浸漬法に限らず、スプレーなどによる溶液の噴霧やロー
ルコータによって塗布してもよい。有機被膜を形成する
ための溶液は、イミダゾール、ベンズイミダゾール、ベ
ンゾトリアゾール、トリルトリアゾールをはじめとする
アゾール化合物およびそれらの誘導体(メチル基やエチ
ル基などのアルキル基、カルボキシル基、アミノ基、ヒ
ドロキシル基などを前記アゾール化合物中のベンゼン環
に結合させた化合物群)を成分に含むものが用いられ
る。
An electrode is immersed in a solution of an organic coating to deposit an organic coating on the surface of the electrode. If necessary, the electrode is rocked or the liquid is stirred during immersion. The method of depositing the organic film is not limited to the dipping method, and the organic film may be applied by spraying a solution by spraying or by a roll coater. Solutions for forming an organic film include azole compounds such as imidazole, benzimidazole, benzotriazole, and tolyltriazole and derivatives thereof (alkyl groups such as methyl group and ethyl group, carboxyl group, amino group, hydroxyl group, etc. Is used as a component of the azole compound.

【0013】塗布後は再度イオン交換水などの洗浄液に
より洗浄し乾燥する。この工程は、冷風乾燥、温風乾
燥、吸水性材料で脱水しても良いが、露天温度の低い気
体で水切りを行うのが良い。その後、熱乾燥を行うこと
は、有機被膜が安定化されるため効果的である。
After the application, it is washed again with a washing liquid such as ion-exchanged water and dried. In this step, cold-air drying, hot-air drying, and dehydration with a water-absorbing material may be performed, but it is preferable to drain the water with a gas having a low outdoor temperature. After that, heat drying is effective because the organic coating is stabilized.

【0014】[0014]

【実施例1】図1(A)は実施例1で用いたセラミック
積層電子部品の試験片の正面図であり、図1(B)はそ
の底面図である。図1において、a1=0.35±0.
20mm、a2=0.50±0.10mm、h1=0.
70±0.20mm、b1=0.35±0.20mmで
ある。
Embodiment 1 FIG. 1A is a front view of a test piece of a ceramic laminated electronic component used in Embodiment 1, and FIG. 1B is a bottom view thereof. In FIG. 1, a1 = 0.35 ± 0.
20 mm, a2 = 0.50 ± 0.10 mm, h1 = 0.
70 ± 0.20 mm and b1 = 0.35 ± 0.20 mm.

【0015】図1に示す形状の銅電極を有するセラミッ
ク積層電子部品の試験片を、4倍に希釈した四国化成工
業株式会社製TH−1に30秒間浸漬してエッチングし
た。その後、55℃に加熱したイオン交換水にて10秒
間洗浄した。次に、25℃のイオン交換水にて30秒間
洗浄し、洗浄機にて入念に洗浄を行った後、ドライエア
にて水切りを行い、100℃のエアオーブン中にて30
秒間熱乾燥を行った。次に、40℃に加熱した四国化成
工業株式会社製タフエース(登録商標)F2に揺動を行
いながら5分間浸漬して露出電極を有機被膜で被覆し
た。この有機被膜は絶縁性および防錆性を有するもので
ある。次に、25℃のイオン交換水にて30秒間洗浄し
た後、洗浄機にて入念に洗浄を行い、ドライエアにて水
切りし、100℃のエアオーブン中にて30秒間熱乾燥
を行った。
A test piece of a ceramic laminated electronic component having a copper electrode having the shape shown in FIG. 1 was immersed in TH-1 manufactured by Shikoku Chemicals Co., Ltd. diluted 4 times for 30 seconds and etched. Thereafter, the substrate was washed with ion-exchanged water heated to 55 ° C. for 10 seconds. Next, the substrate is washed with ion exchanged water at 25 ° C. for 30 seconds, washed thoroughly with a washing machine, drained with dry air, and dried in an air oven at 100 ° C. for 30 seconds.
Heat drying was performed for 2 seconds. Next, the exposed electrode was covered with an organic film by immersing in Tough Ace (registered trademark) F2 manufactured by Shikoku Chemicals Co., Ltd. heated to 40 ° C. for 5 minutes while rocking. This organic coating has insulating properties and rust prevention properties. Next, the substrate was washed with ion exchanged water at 25 ° C. for 30 seconds, washed thoroughly with a washing machine, drained with dry air, and thermally dried in an air oven at 100 ° C. for 30 seconds.

【0016】このようにして得た試験片について、JI
S規格に従い、はんだ小球法によるはんだ濡れ性の測定
を行った。測定方法は次の通りである。上記試験片10
個を用意して、各試験片の電極にフラックスを塗布した
後、試験片電極が垂直方向と45℃の角度を保つように
しながら、表面が清浄で輝いている235℃の加熱され
た溶融小球はんだ(60重量%錫/40重量%鉛共晶は
んだ)に0.4mm/secの速度で0.1mmの深さ
浸漬した。電極と小球はんだが接触してから5秒後に引
き上げた後、10倍の顕微鏡によりはんだの濡れを確認
し、はんだが電極表面を99%以上覆っているものを良
品とした(対応規格:国際規格 IEC68−2−54
−(1985)、日本工業規格 JIS C0053
(1990),電子機械工業会規格 EIAJ ET−
7401(1996))。この測定結果を表1に示す。
The test piece thus obtained was subjected to JI
According to the S standard, the solder wettability was measured by the solder ball method. The measuring method is as follows. The above test piece 10
After preparing a piece and applying flux to the electrode of each test piece, while maintaining the angle of the test piece electrode at 45 ° with the vertical direction, the surface of the melt was heated at 235 ° C with a clean and shiny surface. The ball was immersed in ball solder (60% by weight tin / 40% by weight lead eutectic solder) at a rate of 0.4 mm / sec to a depth of 0.1 mm. After 5 seconds after the contact between the electrode and the small ball solder, it was lifted up, and the solder wettability was confirmed with a 10 × microscope, and the solder covering 99% or more of the electrode surface was regarded as good (corresponding standard: International Standard IEC68-2-54
− (1985), Japanese Industrial Standard JIS C0053
(1990), Electronic Equipment Manufacturers Association Standard EIAJ ET-
7401 (1996)). Table 1 shows the measurement results.

【0017】また、比較例1として、図1に示す形状の
試験片の露出電極上に、無電解めっきにより、Ni:5
μm/Au:0.4μmの金属被膜を設け、実施例1と
同様に試験した結果を、表1に合わせて示す。また、比
較例2として、図1に示す形状の焼成後まったく未処理
の試験片を準備し、実施例1と同様に試験した結果を、
表1に合わせて示す。
As Comparative Example 1, Ni: 5 was formed on the exposed electrode of the test piece having the shape shown in FIG.
μm / Au: A metal coating having a thickness of 0.4 μm was provided, and the results of a test performed in the same manner as in Example 1 are shown in Table 1. Further, as Comparative Example 2, a completely untreated test piece having the shape shown in FIG.
The results are shown in Table 1.

【0018】[0018]

【表1】 [Table 1]

【0019】表1の結果より、本実施例は、金属めっき
処理を行った比較例1と同等のはんだ濡れ性を有するこ
とがわかる。また、焼成後の処理を行っていない比較例
2では、まったくはんだ濡れ性を示さないことから、本
実施例による有機被膜がはんだ濡れ性に対して効果的に
作用していることがわかる。
From the results shown in Table 1, it can be seen that this example has the same solder wettability as Comparative Example 1 which has been subjected to metal plating. Further, in Comparative Example 2 in which the treatment after firing was not performed, no solder wettability was exhibited, indicating that the organic coating according to the present example effectively acts on solder wettability.

【0020】[0020]

【実施例2】図2は実施例2で用いたセラミック積層電
子部品の試験片を示す底面図である。このセラミック積
層電子部品は、0.7mm角の正方形の銅電極を1.2
7mmピッチで底面の4方の辺に沿って複数配列したも
のである。この試験片を、4倍に希釈した四国化成工業
株式会社製TH−1に30秒間浸漬してエッチングし
た。その後、55℃に加熱したイオン交換水にて10秒
間洗浄した。次に、25℃のイオン交換水にて30秒間
洗浄し、洗浄機にて入念に洗浄を行った。その後、ドラ
イエアにて水切りを行い、100℃のエアオーブン中に
て30秒間熱乾燥を行った。次に、40℃に加熱した四
国化成工業株式会社製タフエース(登録商標)F2に、
揺動を行いながら5分間浸漬することにより、露出電極
を有機被膜で被覆した。次に、25℃のイオン交換水に
て30秒間洗浄した後、洗浄機にて入念に洗浄を行い、
ドライエアにて水切りし、100℃のエアオーブン中に
て30秒間熱乾燥を行った。その後、高温リフロー炉
(ピーク温度:260℃、250℃以上:40秒間)を
2回通過させた。
Second Embodiment FIG. 2 is a bottom view showing a test piece of a ceramic laminated electronic component used in a second embodiment. This ceramic laminated electronic component has a square copper electrode of 0.7 mm
A plurality is arranged at a pitch of 7 mm along four sides of the bottom surface. This test piece was immersed in TH-1 manufactured by Shikoku Chemical Industry Co., Ltd. diluted 4 times for 30 seconds and etched. Thereafter, the substrate was washed with ion-exchanged water heated to 55 ° C. for 10 seconds. Next, the substrate was washed with ion-exchanged water at 25 ° C. for 30 seconds, and thoroughly washed with a washing machine. Thereafter, draining was performed with dry air, and heat drying was performed in an air oven at 100 ° C. for 30 seconds. Next, to Tough Ace (registered trademark) F2 manufactured by Shikoku Chemicals Co., Ltd.
The exposed electrode was covered with an organic film by immersing for 5 minutes while rocking. Next, after washing with ion exchanged water at 25 ° C. for 30 seconds, the washing was thoroughly performed with a washing machine.
Drained with dry air, and heat-dried in an air oven at 100 ° C. for 30 seconds. Then, it passed twice through a high-temperature reflow furnace (peak temperature: 260 ° C., 250 ° C. or more: 40 seconds).

【0021】このようにして得た試験片について、JI
S規格に従い、はんだ小球法によるはんだ濡れ性の測定
を行った。測定方法は次の通りである。上記試験片10
個を用意して、各試験片の電極にフラックスを塗布した
後、試験対象電極を垂直にしながら、表面が清浄で輝い
ている235℃の加熱された溶融小球はんだ(60重量
%錫/40重量%鉛共晶はんだ)に25±5mm/se
cの速度で試験片の下端側の10個の試験対象電極を浸
漬した。電極と小球はんだが接触してから2±0.5秒
後に引き上げた後、10倍の顕微鏡によりはんだの濡れ
を確認し、はんだが電極表面を95%以上覆っているも
のを良品とした(対応規格:国際規格IEC 68−2
−20−(1979)、日本工業規格 JIS C00
50(1985))。この測定結果を表2に示す。
The test piece thus obtained was subjected to JI
According to the S standard, the solder wettability was measured by the solder ball method. The measuring method is as follows. The above test piece 10
After preparing flux pieces and applying flux to the electrodes of each test piece, the molten test piece solder was heated at 235 ° C. (60% by weight tin / 40 wt. (Weight% lead eutectic solder)
The ten test target electrodes on the lower end side of the test piece were immersed at the speed of c. After raising the electrode 2 ± 0.5 seconds after the contact between the electrode and the small ball solder, the wettability of the solder was confirmed by a microscope of 10 ×, and the solder covered with 95% or more of the electrode surface was regarded as a good product ( Corresponding standard: International standard IEC 68-2
-20- (1979), Japanese Industrial Standard JIS C00
50 (1985)). Table 2 shows the measurement results.

【0022】また、比較例3として、実施例2における
55℃に加熱したイオン交換水による洗浄を行わず、T
H−1によるエッチング後25℃のイオン交換水で洗浄
を行ったものについて、実施例2と同様に試験した結果
を表2に合わせて示す。なお、表2においてNG数と
は、電極100個(試験片10個)中のNG電極の個数
を示す。
Further, as Comparative Example 3, the washing with ion-exchanged water heated to 55 ° C. in Example 2 was not performed.
Table 2 shows the results of a test performed in the same manner as in Example 2 for the case of cleaning with ion-exchanged water at 25 ° C. after etching with H-1. The number of NGs in Table 2 indicates the number of NG electrodes in 100 electrodes (10 test pieces).

【0023】[0023]

【表2】 [Table 2]

【0024】セラミック積層電子部品の露出電極は、ペ
ースト粒などに起因する凹凸が大きく、通常の処理工程
では均一に有機被膜を形成することは困難である。その
ため、リフローなどによる熱履歴が加わると、均一に有
機被膜が形成されていない電極表面が劣化し、はんだ濡
れ性が悪化する。しかし、エッチングによって清浄な電
極表面を形成した直後に、加熱したイオン交換水による
洗浄を行うことで、電極表面に薄く均一な酸化被膜を形
成することができる。また、アゾール系の化合物は、金
属の1価イオン成分と結合する性質をもっているため、
純粋な金属状態のものよりも酸化した金属成分のほうが
化合物の付着確率が高くなる。よって、エッチング後の
露出電極に対し加熱したイオン交換水による洗浄を行う
ことにより、凹凸の大きな電極表面においても有機被膜
の形成確率を高めることができる。これらの理由によ
り、エッチング直後の露出電極に対し加熱したイオン交
換水による洗浄を行った実施例2は、加熱したイオン交
換水による洗浄を行わなかった比較例3に比べて、リフ
ロー後のはんだ濡れ性を格段に向上させることが可能で
ある。
The exposed electrode of the ceramic laminated electronic component has large irregularities due to paste particles and the like, and it is difficult to form an organic film uniformly in a normal processing step. Therefore, when a heat history due to reflow or the like is added, the electrode surface on which the organic film is not uniformly formed deteriorates, and the solder wettability deteriorates. However, immediately after forming a clean electrode surface by etching, a thin and uniform oxide film can be formed on the electrode surface by performing washing with heated ion-exchanged water. In addition, since azole compounds have the property of binding to monovalent ion components of metals,
The oxidized metal component has a higher attachment probability of the compound than the pure metal state. Therefore, by performing cleaning with heated ion-exchanged water on the exposed electrode after etching, the probability of forming an organic film can be increased even on an electrode surface having large irregularities. For these reasons, in Example 2 in which the exposed electrode immediately after etching was washed with heated ion-exchanged water, the solder wetness after reflow was smaller in Comparative Example 3 than in Comparative Example 3 in which the exposed electrode was not washed with heated ion-exchanged water. It is possible to significantly improve the performance.

【0025】[0025]

【発明の効果】本発明に係る有機被膜によれば、以下の
効果を得ることができる。 金属被膜と同等の電極保護効果を得ながら、異常変色
やショートパスの発生の低減が可能となる。 触媒との置換反応によって析出するものではないの
で、触媒の付着不良、触媒との反応不良などによる析出
不良の問題が生じない。 サブミクロンオーダーの膜厚で電極保護効果が達成で
きる。 有機被膜自体が絶縁性なので、被膜を原因とした隣接
電極間のショートバスが生じない 有機被膜は電極接合強度を低下させるような応力を電
極に働かせない。 有機被膜は電極表面への吸着によって析出するので、
無電解めっきのような副生成物は発生しない。そのた
め、膜中への異物取り込みが少ない。 有機被膜によれば透明な被膜を形成することが可能で
あり、透明な被膜によれば保護膜形成工程による電極の
色調変化が起こらない。 有機被膜の主要構成元素はC、N、Hなので、重金属
を用いるめっきプロセスに比べて周辺環境への悪影響が
少ない。
According to the organic coating of the present invention, the following effects can be obtained. It is possible to reduce the occurrence of abnormal discoloration and short paths while obtaining an electrode protection effect equivalent to that of a metal film. Since it is not deposited by a substitution reaction with a catalyst, there is no problem of poor deposition due to poor adhesion of the catalyst, poor reaction with the catalyst, and the like. An electrode protection effect can be achieved with a film thickness on the order of submicrons. Since the organic coating itself is insulative, a short bath between adjacent electrodes due to the coating does not occur. The organic coating does not exert a stress on the electrodes to lower the electrode bonding strength. Since the organic film is deposited by adsorption on the electrode surface,
No by-products such as electroless plating are generated. Therefore, the amount of foreign matter taken into the film is small. According to the organic film, it is possible to form a transparent film, and according to the transparent film, the color tone of the electrode does not change due to the protective film forming step. Since the main constituent elements of the organic film are C, N, and H, they have less adverse effects on the surrounding environment than the plating process using heavy metals.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(A)は実施例1で用いたセラミック積層電子
部品の試験片の正面図であり、(B)はその底面図であ
る。
FIG. 1A is a front view of a test piece of a ceramic laminated electronic component used in Example 1, and FIG. 1B is a bottom view thereof.

【図2】実施例2で用いたセラミック積層電子部品の試
験片を示す底面図である。
FIG. 2 is a bottom view showing a test piece of the ceramic laminated electronic component used in Example 2.

【符号の説明】[Explanation of symbols]

10 セラミック積層電子部品 12 露出電極 DESCRIPTION OF SYMBOLS 10 Ceramic laminated electronic component 12 Exposed electrode

───────────────────────────────────────────────────── フロントページの続き (72)発明者 唐木 信太郎 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 Fターム(参考) 5E001 AA00 AB03 AC00 AD00 AE00 AF02 AH01 AH07 AJ03 AJ04 5E082 AA01 AB03 BC19 FF05 FG06 FG26 FG54 GG10 GG11 GG26 GG28 HH26 HH44 HH51  ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Shintaro Karaki 2-26-10 Tenjin, Nagaokakyo-shi, Kyoto F-term in Murata Manufacturing Co., Ltd. (Reference) 5E001 AA00 AB03 AC00 AD00 AE00 AF02 AH01 AH07 AJ03 AJ04 5E082 AA01 AB03 BC19 FF05 FG06 FG26 FG54 GG10 GG11 GG26 GG28 HH26 HH44 HH51

Claims (12)

【特許請求の範囲】[Claims] 【請求項1】 露出電極を有機被膜で被覆したことを特
徴とする、セラミック積層電子部品。
1. A ceramic laminated electronic component, wherein an exposed electrode is covered with an organic film.
【請求項2】 前記有機被膜は防錆効果を有する、請求
項1に記載のセラミック積層電子部品。
2. The multilayer ceramic electronic component according to claim 1, wherein the organic coating has a rust-preventive effect.
【請求項3】 前記有機被膜は絶縁性である、請求項1
または請求項2に記載のセラミック積層電子部品。
3. The organic coating according to claim 1, wherein said organic coating is insulating.
Or the ceramic laminated electronic component according to claim 2.
【請求項4】 前記有機被膜は、イミダゾール、ベンズ
イミダゾール、ベンゾトリアゾール、トリルトリアゾー
ルをはじめとするアゾール化合物およびそれらの誘導体
(メチル基やエチル基などのアルキル基、カルボキシル
基、アミノ基、ヒドロキシル基などを前記アゾール化合
物中のベンゼン環に結合させた化合物群)を成分に含
む、請求項1ないし請求項3のいずれかに記載のセラミ
ック積層電子部品。
4. The organic film is formed of an azole compound such as imidazole, benzimidazole, benzotriazole, tolyltriazole and derivatives thereof (such as an alkyl group such as a methyl group or an ethyl group, a carboxyl group, an amino group, a hydroxyl group, etc.). The ceramic laminated electronic component according to any one of claims 1 to 3, wherein the component comprises a compound group in which is bonded to a benzene ring in the azole compound.
【請求項5】 前記露出電極は焼成金属を主成分とす
る、請求項1ないし請求項4のいずれかに記載のセラミ
ック積層電子部品。
5. The multilayer ceramic electronic component according to claim 1, wherein the exposed electrode has a fired metal as a main component.
【請求項6】 前記露出電極はCu、Ag、Ni、S
n、Feの少なくとも一つを成分に含む、請求項1ない
し請求項5のいずれかに記載のセラミック積層電子部
品。
6. The exposed electrode is made of Cu, Ag, Ni, S
The multilayer ceramic electronic component according to claim 1, wherein at least one of n and Fe is contained as a component.
【請求項7】 露出電極表面に存在する酸化物を溶解除
去した後、該露出電極表面に有機被膜を形成するステッ
プを含む、セラミック積層電子部品の製造方法。
7. A method for manufacturing a ceramic multilayer electronic component, comprising a step of dissolving and removing an oxide present on a surface of an exposed electrode, and then forming an organic film on the surface of the exposed electrode.
【請求項8】 前記有機被膜は防錆効果を有する、請求
項7に記載のセラミック積層電子部品の製造方法。
8. The method according to claim 7, wherein the organic coating has a rust-preventing effect.
【請求項9】 前記有機被膜は絶縁性である、請求項7
または請求項8に記載のセラミック積層電子部品の製造
方法。
9. The organic coating according to claim 7, wherein the organic coating is insulating.
A method for manufacturing a ceramic multilayer electronic component according to claim 8.
【請求項10】 前記有機被膜は、イミダゾール、ベン
ズイミダゾール、ベンゾトリアゾール、トリルトリアゾ
ールをはじめとするアゾール化合物およびそれらの誘導
体(メチル基やエチル基などのアルキル基、カルボキシ
ル基、アミノ基、ヒドロキシル基などを前記アゾール化
合物中のベンゼン環に結合させた化合物群)を成分に含
む、請求項7ないし請求項9のいずれかに記載のセラミ
ック積層電子部品の製造方法。
10. The organic film is formed of an azole compound such as imidazole, benzimidazole, benzotriazole, tolyltriazole and derivatives thereof (such as an alkyl group such as a methyl group or an ethyl group, a carboxyl group, an amino group, a hydroxyl group, etc.). 10. The method for producing a ceramic laminated electronic component according to claim 7, wherein the component comprises a compound group in which is bonded to a benzene ring in the azole compound.
【請求項11】 前記露出電極は焼成金属を主成分とす
る、請求項7ないし請求項10のいずれかに記載のセラ
ミック積層電子部品の製造方法。
11. The method for manufacturing a ceramic multilayer electronic component according to claim 7, wherein said exposed electrode mainly comprises a fired metal.
【請求項12】 前記露出電極はCu、Ag、Ni、S
n、Feの少なくとも一つを成分に含む、請求項7ない
し請求項11のいずれかに記載のセラミック積層電子部
品の製造方法。
12. The method according to claim 11, wherein the exposed electrodes are Cu, Ag, Ni, S
The method for producing a ceramic multilayer electronic component according to claim 7, wherein at least one of n and Fe is contained in a component.
JP2000287338A 2000-09-21 2000-09-21 Ceramic multilayer electronic component and manufacturing method thereof Expired - Lifetime JP4556312B2 (en)

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