JP2002099323A - System and method for remotely diagnosing semiconductor production facility - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a system and a method for remote diagnosis by which both requests of the protection of the secrecy of information in the remote diagnosis of facilities and the prevention of the increase of economical loss are harmonized. SOLUTION: In the remote diagnosis system for semiconductor production facilities for diagnosing a semiconductor production facilities 10, a user connects the semiconductor production facilities 10 to a diagnosing unit 70 provided by a specified third person through communication networks (30, 40, 50 and 60). The diagnosing unit 70 is provided with at least one diagnosis program (90, 100 or 110) for performing diagnosing processing of the semiconductor production facilities and a control part for starting the diagnosis program corresponding to access from a terminal 20 of the specified user to whom an access right is imparted. The right to utilize the diagnosing unit for pay is imparted to the user, who transmits data requested from the diagnosing unit to the diagnosing unit in the case of diagnosis and receives the diagnosed result from the diagnosing unit.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a remote diagnosis system and method for equipment, and more particularly to a remote diagnosis system suitable for a case where a person who manufactures the equipment and a user of the equipment are different, such as a semiconductor manufacturing apparatus. The present invention relates to a diagnostic device and a diagnostic method. Here, the facility refers to not only a production facility such as a semiconductor manufacturing apparatus, but also a facility in which various devices or components such as a large medical system are combined.

[0002]

2. Description of the Related Art Recently, a device having a remote diagnosis function using the Internet or the like has been proposed. This remote diagnostic function is for transferring various data set at a terminal station to a remote diagnostic apparatus installed at a center station of a service company, for example, as described in JP-A-10-40200. The center station starts remote diagnosis based on the data received from the terminal station, and returns new data in which a setting error of the terminal device has been corrected to the user side.

Further, the system disclosed in Japanese Patent Application Laid-Open No. 10-40200 enables operations such as initial setting, failure diagnosis, and data update of a device connected to a terminal on a computer network or a device incorporating the terminal. As a technique, it is a method of performing a failure diagnosis of a device connected to the Internet or a device incorporating the terminal, wherein the device transmits status data to the terminal, and the terminal transfers the received status data to a server on the Internet. Then, the server is configured to diagnose the device based on the received status data and transmit a diagnosis result to the terminal.

[0004] In such a remote diagnostic system, if there is no protection against access from outside, there is a possibility that the airtight secret matter of the provider of the remote diagnostic function or the user may be inadvertently leaked. Can be

In order to provide a remote diagnosis system for a communication device capable of effectively protecting a remote diagnosis, Japanese Patent Application Laid-Open No. 9-149188 discloses a remote diagnosis system having a center station and a terminal station. In addition to creating data based on the ID number set in the above, and providing a data creation means for sending the created data to the terminal station, the ID number is set in the terminal station, and the set ID number is There is disclosed an apparatus provided with an ID number setting means for sending to a center station, a data analysis means for analyzing received data, and a diagnosis control means for judging whether or not remote diagnosis is possible.

[0006] Further, there is also known a system in which a connection device is laid on a LAN line, an IP (Internet Protocol) address is assigned to each device, and a system including an information processing device and a diagnostic device is constructed on a network. ing. In this case, since the information processing device and the maintenance diagnosis device are connected in parallel to the LAN line, it is possible to access the information processing device from a device other than the maintenance diagnosis device, and the security measures for the user are incomplete. As a solution, Japanese Patent Application Laid-Open
No. 149188 discloses a remote maintenance diagnosis method.
A maintenance diagnostic device connected to the information processing device and monitoring the operation status of the system includes an autonomous (autonomous) network function such as a network connection function and a monitoring / analysis function, and connects the information processing device to a network. There is disclosed an apparatus which is performed via a maintenance diagnosis device, thereby improving security and reducing costs at the time of laying a system.

[0007]

With the sophistication and sophistication of technology, large-scale equipment such as a semiconductor manufacturing line in which various semiconductor manufacturing apparatuses are combined in accordance with a process for manufacturing a semiconductor is provided by one company. It is becoming difficult to manufacture and manage all of them. Therefore, in order to increase the diagnostic accuracy of such large equipment and to take prompt action,
It is necessary to collect various information from a plurality of companies, such as a company involved in manufacturing the equipment, a user and a company involved in maintenance.

[0008] On the other hand, providing such information has many restrictions since it may cause leakage of corporate secrets.
However, as recently as production and management facilities have been consolidated and become larger, for example, when a semiconductor manufacturing line breaks down and production is hindered, if the cause investigation is delayed, The economic loss due to is also enormous.

Also, in order to avoid the failure of equipment such as production and management to hinder production, the possibility of equipment failure can be predicted to some extent in advance, and if measures can be taken in advance, it will be a great economic problem. Avoids any financial loss.

[0010] On the other hand, it takes time to collect and create data that is a standard for diagnosis of a semiconductor manufacturing apparatus. For example, the life of a pressure gauge (or the determination of when calibration is required) is not uniquely determined, but varies depending on the use situation and environment. Therefore, it may be difficult for a semiconductor manufacturing equipment manufacturer to provide a diagnosis program that can quickly and accurately perform equipment diagnosis from the beginning. In some cases, an improved diagnostic program can be provided.

Further, a plasma impedance monitor (P
IM), optical analysis (OES), and advanced analysis results, such as statistical analysis, can be used. Until now, the user's engineers have been mainly involved in detecting process fluctuations and adjusting machine differences. Considered very useful for work done. That is, these data are data indicating the state of the semiconductor manufacturing apparatus, but are not often used for diagnosis of the conventional semiconductor manufacturing apparatus, and are data which is highly necessary for the user. Therefore, it is considered that if the user can perform analysis including these advanced data, efficient diagnosis can be performed. In this case, the user may be required to bear a part of the development cost of the advanced diagnostic software.

It is an object of the present invention to provide a remote diagnostic system and a diagnostic method that balance requirements of keeping information confidential and preventing an increase in economic loss at the time of remote diagnosis of equipment.

Another object of the present invention is to enable a user to make a highly reliable diagnosis using advanced analysis data and to reduce the economic burden on the developer of the diagnostic software to some extent. It is to provide a diagnostic system and a diagnostic method.

[0014]

A feature of the present invention is that a user connects a semiconductor manufacturing apparatus to a diagnostic apparatus provided by a specific third party via a communication network, and diagnoses the semiconductor manufacturing apparatus. A remote diagnostic system for a semiconductor manufacturing apparatus for performing the diagnostic processing, wherein the diagnostic apparatus performs at least one diagnostic program for performing a diagnostic process on the semiconductor manufacturing apparatus and an access from a terminal of a specific user to which access authority is given. A control unit that activates the diagnostic program, and from a terminal of a user who has been granted the right to use the diagnostic device by the specific third party for a fee, data requested by the diagnostic device at the time of diagnosis Is transmitted to the diagnostic device, and the terminal receives a diagnostic result from the diagnostic device.

Another feature of the present invention is a semiconductor manufacturing apparatus for connecting a semiconductor manufacturing apparatus to a diagnostic apparatus provided by a specific third party via a communication network and performing a diagnosis on the semiconductor manufacturing apparatus. Remote diagnostic system, wherein the diagnostic apparatus includes a plurality of diagnostic programs for performing a diagnostic process of the semiconductor manufacturing apparatus, and a control unit that starts the diagnostic program by a specific user who has been granted access right for a fee. And a guide unit for disclosing information on the diagnostic program.

Another feature of the present invention is that a semiconductor manufacturing apparatus and a terminal for performing a diagnosis are connected to a diagnostic apparatus provided by a specific third party via a communication network, and a diagnosis of the semiconductor manufacturing apparatus is performed. Remote diagnosis method for a semiconductor manufacturing apparatus, wherein a diagnosis program of the diagnosis apparatus is started by an access of a specific user who is given a right to use the diagnosis apparatus for a fee and is given an access right. Is required from the diagnostic program to the user side, and the diagnosis is performed by obtaining the user's answer to the request.

The following can be considered as a form of the paid diagnosis system. 1) A specific third party (a maker of semiconductor manufacturing equipment) gives users of semiconductor manufacturing equipment the right to use diagnostic equipment (including Heart II, software) for a fee. The user diagnoses the semiconductor manufacturing device using the diagnostic device. 2) In the above item 1), the diagnosis device is installed in a specific third party, and diagnoses by accessing from a user's in-house terminal using a communication network. 3) In the above 1), the diagnostic device is installed (rented) in the user's office and accessed and diagnosed through the user's intranet (MES or the like).

According to the present invention, it is possible to provide a remote diagnosis system that balances requirements of keeping information confidential at the time of remote diagnosis of equipment and preventing an increase in economic loss. Further, according to the present invention, a remote diagnostic system and a remote diagnostic system that enable a user to perform highly reliable diagnosis by using advanced analysis data and reduce the economic burden of a developer of diagnostic software to some extent. A diagnostic method can be provided.

[0019]

Embodiments of the present invention will be described below in detail. Hereinafter, embodiments of the present invention will be described in detail. FIG. 1 is a block diagram showing a configuration of a remote diagnosis system in which the present invention is applied to diagnosis of a semiconductor manufacturing apparatus. This system has multiple users (company B to company N)
Accesses a terminal, that is, a semiconductor manufacturing apparatus control server 20 of each user, via a communication network, for example, the Internet 50, to a diagnostic program (diagnostic apparatus) 70 provided by a specific third party, Company A, and each user himself The manufacturing apparatus 10 (10BA to 10BN,-,-,
10NA to 10NN).

It should be noted that here, the company A is in charge of the semiconductor device 10
Contracts with the manufacturer of the semiconductor device 10 or the company A for maintenance of the semiconductor device 10 (maintenance contract).
A service company or its affiliates. The user who performs the diagnosis may be not only a direct user of the semiconductor manufacturing apparatus, but also a service company that contracts with this user to undertake maintenance (maintenance contract).

A user who uses the semiconductor device 10 performs a remote diagnosis as needed on a part or the whole of the semiconductor manufacturing device 10 by a diagnosis program (diagnosis device) provided by Company A, periodically and when a diagnosis is required. .

In this remote diagnostic system, the semiconductor manufacturing apparatus 10 (10BA to 10BN,-,-, 10NA) of a user (company B to company N) to be diagnosed or updated.
To 10NN) are connected to the semiconductor manufacturing equipment control server 20 (20B to 20N) of each user. The terminal for performing the diagnosis, that is, the server 20 is connected to the intranet 30 (30B to 30N) of each user and further connected to the Internet server 40 (40B).
-40N) and the firewall system 42 (42
B to 42N) to the Internet 50. The Internet 50 is connected to a company network including a firewall system 62 of Company A and an Internet server 60 (and an intranet). A diagnostic device 70 having a diagnostic program for semiconductor manufacturing equipment is connected to this in-house network.
The diagnostic device 70 is provided with a storage device, that is, a data recording device 72 that records data relating to diagnosis of the semiconductor manufacturing device of each user.

A general telephone line, a dedicated communication line, a communication line using an optical cable, and the like are used as a network connecting the semiconductor manufacturing device, each server, the Internet, and the diagnostic device. In addition, the user (B ~
It goes without saying that, for communication between N) and the device maker A, an IP address, a specific ID number ゛, etc. are assigned to each device in advance. In addition, a connection password for accessing specific confidential information during a diagnosis process or the like is appropriately given between the parties.

Each of the servers 20 and 40 is constituted by a computer, and an operation unit such as a keyboard and a mouse and a display are connected as input / output means. The server 20 has browsing software (WWW browser) for accessing the Internet 50 and connecting to the server 60 of the company A. Each of the semiconductor manufacturing apparatuses 10 (10BA to 10NN) also includes a personal computer, and an operation unit such as a keyboard and a mouse as an input / output unit and a display are connected.

Each computer such as the servers 20 and 40 is provided with an interface for connecting to an external device, and communication of data and commands between the microcomputer in each computer and the external device is performed by: This is done through this interface. further,
A communication interface is provided, and modulates and transmits data and commands created by the microcomputer, and receives and demodulates data and commands transmitted via a telephone line or the like.

In FIG. 1, a terminal for performing a diagnosis is provided in the server 20, and as a communication network for each user, all the semiconductor manufacturing apparatuses 10 are connected to the diagnostic apparatus via the semiconductor manufacturing apparatus control server 20 for each user. 70, but the server 20 is omitted, and a terminal for performing a diagnosis is provided for each semiconductor manufacturing apparatus 10.
Alternatively, the configuration may be such that the terminal is operated to access the diagnostic device 70 by operating the terminal.

When the user's semiconductor manufacturing apparatus 10 is in one of the following states, for example, the diagnosis apparatus 70 diagnoses the semiconductor manufacturing apparatus 10 based on the user's own judgment or when the user receives the advice of the company A. Used to do. (1) When performing periodic failure diagnosis, (2) When a phenomenon that seems to be abnormal occurs, (3) When an obvious failure occurs, diagnosis by the semiconductor manufacturing apparatus 70 based on access from each user. The result is stored in the data recording device 72 of the diagnostic device 70 of the company A, and the semiconductor manufacturing device 10
Is analyzed and analyzed as information on the change over time. This information is used for the next diagnosis. However, items belonging to the confidential information of the user, such as the specific film type of the semiconductor product, can be erased without saving in the data recording device 72 of Company A at the discretion of each user.

It should be noted that whether or not to make a diagnosis is determined by the user, and that the individual semiconductor manufacturing apparatuses 10A to 10N can access the diagnostic apparatus 70 of Company A. In this case, the diagnostic device 70 is connected to the diagnostic device 70 via the Internet 50 through the server 20 of each company. A program for this is installed in the microcomputers of the semiconductor manufacturing apparatuses 10A to 10N.

FIG. 2 is a diagram showing a configuration example of the diagnostic device 70 and the data recording device 72 in the system of FIG.
The diagnostic device 70 is configured by, for example, a personal computer, and an input / output unit 71 is connected to an operation unit such as a keyboard and a mouse, and a display.

The access management program 73B and the external connection interface 73A are interfaces for connecting the company A network 73 to the outside.
A password is required to access Company A's network. In addition, a security system is provided for each device connected to the company A company network.

The company A's network 73 has an external connection interface 7 for connecting to an external device.
3A, an access management program 73B, and a communication interface 73C are connected. The diagnostic device 70 is connected to the network 73.

Further, the microcomputer 74 inside the diagnostic device 70 has a CPU 75 and a storage means 76. The data of each apparatus (including the normal state) is stored in the data recording apparatus of Company A, and is used for analyzing the diagnosis results, for example, comparing the data with the normal state to determine the presence or absence of an abnormality. The access management program 73B confirms the access authority using a password or the like when each user accesses the diagnostic apparatus 70, and when an authorized authorized user accesses, the user uses a predetermined program or data. To be able to

Also, by accessing the Internet 50,
It has browsing software (WWW browser) 77 for connecting to the server 40 and a guide unit 78 for displaying the latest version of the diagnostic program and information of each diagnostic software.
Each user can freely view these displays and information.

Storage means 76 (and data recording device 72)
Include various diagnostic programs 81 to 11 for remote diagnosis.
3 and a related database are stored. The control program 80 activates the diagnostic device 81 when an authorized user accesses it, and performs a diagnostic process according to the user's request. 81A is a backup device of the diagnostic device. Reference numeral 82 denotes a storage device of diagnostic software for a user in which a program usable by a user is stored, 83 denotes a control program of a device to be diagnosed, that is, a semiconductor manufacturing device, and 84 denotes a device for automatically saving a diagnosis result. Reference numeral 85 denotes a diagnostic database, and reference numeral 86 denotes a device for accessing a service section in order to obtain parts stock information and the like. Reference numeral 87 denotes an apparatus for accessing a service company for instructions on maintenance nonce.

Reference numeral 90 denotes a periodic diagnostic processing device (program) for performing periodic diagnostic processing of the semiconductor manufacturing apparatus; 91, a data analyzing device thereof; 92, a primary data storage device for diagnostic results; and 93, a database for the data analyzing device. It is.

Reference numeral 100 denotes an abnormal mode diagnosis processing device (program) for performing a diagnosis process temporarily when there is an abnormality in the semiconductor manufacturing apparatus; 101, a data analysis device; 102, a primary storage device for diagnosis results; It is a database for devices.

Reference numeral 110 denotes a diagnostic processing device (program) for performing a diagnostic process temporarily when a faulty portion of the semiconductor manufacturing device is known to some extent, 111 denotes its data analyzing device, 1
Reference numeral 12 denotes a primary storage device for the diagnosis results, and reference numeral 113 denotes a database for a data analysis device.

As the diagnostic processing apparatus (program), in addition to the above three types of programs, for example, individual software is prepared for each model of the semiconductor manufacturing apparatus, or a specific apparatus constituting the semiconductor manufacturing apparatus, for example, Wafer transfer devices, those that diagnose specific parts such as only vacuum processing chambers, those that target the entire production line including a large number of semiconductor manufacturing equipment, those that focus on the processing steps in the process, etc. You only have to prepare according to your needs.

A diagnostic primary data storage area for each contracted user is provided in the diagnostic device 70. Access to this part is not allowed from Company A. That is, it is assumed that only the user to be diagnosed can access the primary storage devices 92, 102, and 112 of the diagnostic results, and that the company A cannot access the primary storage devices based on a confidentiality contract or the like. Since the diagnostic device 70 is software of company A, it is possible to cancel the access prohibition condition, but this is a confidentiality contract. However, the diagnosis result regarding the normal or abnormal state of the device is automatically saved. Items belonging to the user's confidential information, such as product film types and specific recipes, can be deleted without being stored in the company A data recording device at the discretion of each user. Note that the data stored in the primary storage device is automatically deleted when the diagnostic processing is completed according to an instruction from the user. However, if the user determines that it is necessary to save the details of the diagnosis result, the diagnosis result can be saved in a storage device (not shown) attached to the user's device at the user's discretion before the end of the diagnosis.

Company B, a user, provides software and data that can be browsed and used in the diagnostic device 70, that is, the latest version of the diagnostic program displayed on the guide section 78, information on each diagnostic software, Diagnostic software stored in the diagnostic software storage device 82, diagnosis 1 for each user
Using the data in the next data storage area, the diagnostic processing can be freely performed on the device of the company B. It should be noted that access to information in areas other than the above in the diagnostic device 70 includes confidential information of company A and other users, so that access by company B is prohibited. Therefore, although the diagnostic software can be used freely, it is not possible to change the diagnostic software or access the program of the software itself, and such actions are prohibited by contract or the like.

As described above, a record when the diagnosis is performed on the device of the company B can be stored in the database of the maintenance nonce information of the diagnosis device 70 of the company A (primary storage device dedicated to the company B). This record can also include production information belonging to company B's confidential matter. In other words, of the data used for the diagnosis by the company B, the confidential data and the data determined by the company B can be deleted from the diagnosis result information of the company A by the judgment of the company B, but the detailed result of the diagnosis is It can be stored in the storage device of the diagnostic device 70 of Company A as a database of company devices. Company B manages this information.

According to the present invention, it is possible to harmonize both requirements for keeping information confidential at the time of remote diagnosis of equipment and preventing an increase in economical loss.

When Company A is composed of both a service company and a device maker, the same data is stored and managed in both data recording devices, so that maintenance and troubleshooting can be promptly performed. In addition, the service company undertakes maintenance and diagnostic work, arranges parts and carries out other necessary items. Conversely, the device maker receives it and instructs the service company on the content of the measure.

Company A's diagnostic program 70 (80-11
3) is upgraded as necessary, and is provided to the user by means 78 for displaying the latest version of the diagnostic program, information on each diagnostic software, or information on a newly provided diagnostic program. Diagnosis is possible. This is based on the new information obtained by the company A or the service company through the diagnosis, inspection, maintenance, etc. of the semiconductor manufacturing equipment of each user, in order to return the result of improving the diagnostic program 70 and improving the function to the user. Is what you do.

For example, a diagnosis result of each user who uses the diagnosis program 70 of the company A is stored in the data recording device of the company A, and is analyzed and analyzed as information on the change over time of the device. This information is used for the next diagnosis.
For example, the life of a pressure gauge (or the determination of when calibration is required) is not uniquely determined, but varies depending on the use situation and environment. When this information is analyzed and analyzed as information of the results used under various circumstances under each user without being limited to a specific user, a highly accurate diagnosis can be made by comparing with the diagnostic information. It becomes possible. There is also a version upgrade of the diagnostic program 76 accompanying the improvement of the semiconductor manufacturing apparatus itself and the functional upgrade.

If the diagnostic program 76 is attached to each company's equipment individually, it is difficult to provide a detailed version upgrade service to each company. Becomes possible.

When the present system is applied and a diagnostic device is attached to each device, version-up information is provided from the diagnostic device of Company A, and each user downloads the latest diagnostic program via the Internet to its own semiconductor manufacturing device. And install it on the server.

According to the present invention, it is possible to provide an environment in which a diagnostic program with improved functions and quality can be provided to a user even after the equipment is delivered to the user.

The diagnostic device 70 is connected to the computer 12 of the diagnosis support section of the company A via the company A network.
0 is connected. This computer 120 has a CP
U121, buffer memory, control database 12
2. It has output means including an input means and a display unit,
The operator responds to inquiries and responses from the user at the time of diagnosis by the diagnostic device 70, and instructs the service section or service company based on the diagnosis result,
This is the section to contact.

Further, in the diagnosis correspondence section, the state of the apparatus, for example, a change with time of the pressure gauge is analyzed by utilizing information which does not belong to the user in the diagnosis result of each user stored in the data recording apparatus. ,To analyze. This information is subjected to program improvement and database update processing so as to be used for the next diagnosis. By analyzing and analyzing a large amount of information used under a plurality of users and under various circumstances, it is possible to provide a diagnostic program updated to a highly accurate version in a shorter time.

The section corresponding to company A diagnosis is based on the premise that diagnosis such as data acquisition and analysis is performed completely automatically. However, a specialist may also make a diagnosis at the request of the user. In particular, it is effective in abnormality diagnosis and failure diagnosis. At that time, the expert accesses the diagnostic device through the network within the company A, thereby improving the diagnostic accuracy and enabling quick response and determination. Conventional diagnostic devices have generally been based on the assumption of fully automatic and unmanned operation. However, by using the entrained operation, the diagnostic processing capability is further improved. FIG. 3 shows the diagnostic database 85.
2 shows a detailed configuration example. Reference numeral 850 denotes a customer device management system, reference numeral 851 denotes a diagnosis result database, and reference numeral 855 denotes a device information database. The diagnosis result database 851
It records a diagnosis result, a failure history, a part replacement history, and the like, and stores data separately for each of the users B, C,-, and N. The device information database 855 includes:
It records the type of each semiconductor manufacturing equipment, product specifications, performance inspection results, information on used parts, etc.
-And N are stored separately.

FIG. 4 is a diagram showing a configuration example of the semiconductor manufacturing equipment control server 20 provided with a terminal for performing a diagnosis. Here, the server 20B of the company B will be described as an example of the user. The semiconductor manufacturing apparatus control server 20 is configured by, for example, a microcomputer having a CPU and a buffer memory, and an input / output unit 21 is connected to an operation unit such as a keyboard and a mouse, and a display. Further, an external connection interface 22 for connecting to an external device and a communication interface 23 are provided. Further, the storage means provided in the internal microcomputer 24 stores browsing software (WWW browser) 25 for accessing the Internet 50 via the server 40 and connecting to the server 60. The password for connecting to the diagnostic device 70 is
It is determined in advance by a contract between companies A and B. Further, a control program 26 necessary for controlling the semiconductor manufacturing apparatus 10 (10A to 10N) to manufacture a semiconductor is stored. Further, a control program or a recipe for performing a diagnosis in accordance with an instruction from Company A is stored. This program is stored in the server 20 in advance.
May be installed from the server of Company A as needed. The control program 26 also includes a diagnosis device operation program (recipe) 27.

Further, there are provided a control database 28 including various information, a database 29 recording common items for diagnosis, diagnosis results and maintenance nonce information, a database of security-related information, and the like. The device operation record (log data) required for diagnosis is a database 2 that records common items for diagnosis and maintenance nonce information.
9 is stored. As described above, the function of a terminal for performing a diagnosis may be provided not in the server 20 but in each of the semiconductor manufacturing apparatuses 10 or a higher-level server.

Next, the semiconductor manufacturing apparatus 1 to be diagnosed is
FIG. 5 shows a control configuration example of 0 (10A to 10N). In this embodiment, it is assumed that there are four semiconductor manufacturing apparatuses (however, only three are shown in the figure). Reference numeral 212 denotes a central control unit that controls the entire semiconductor manufacturing apparatus (or manufacturing line), and is, for example, a CPU. Reference numeral 213 denotes a display unit for displaying the operation state, the setting contents of the operation conditions, and the start / instruction to start the operation, and is, for example, a CRT. Reference numeral 214 denotes an input unit, which is, for example, a key port for setting operation conditions, inputting an operation start instruction, inputting process processing conditions, and inputting operations for maintenance and maintenance nonce. 202-1-20
Reference numeral 2-4 denotes a processing apparatus for performing wafer processing. The processing apparatus may be any processing apparatus that performs wafer processing, such as etching, post-processing, film formation, sputtering, CVD, and water treatment.

Reference numeral 215 denotes an apparatus control means for judging an operation information signal state indicating that the operation of the process processors 202-1 to 202-4 is valid / invalid, and during the automatic operation, the process controllers 202-1 to 202-4. Even if any one of the units 202-4 becomes inoperable, the processing procedure is stored in which the process is not used and the operation is continued using another process. For example, a ROM. A processing order information storage unit 216 stores a processing order of wafers in the vacuum processing apparatus, and is, for example, a RAM. The processing order of this wafer is
Before the operation is started, data input by the operator using the display means 213 and the input means 214 is stored.
Reference numeral 217 denotes an operation information signal storage unit, for example, a RAM that stores an operation information signal indicating that the operation of the process processors 202-1 to 202-4 is valid / invalid.

Reference numerals 201-1 to 201-4 denote operation information signal generating means, and the processing devices 202-1 to 202-
4 generates an operation information signal indicating that the operation is valid / invalid. In this embodiment, the operation information signal generating means is provided in the process processing apparatus, but may be provided anywhere. As a means for generating the driving information signal, any of the following can be used. 1) A signal for shutting off the power supply of the processing device 2) An operation switching signal (for example, a changeover switch) for setting validity / invalidity of use of the processing device 3) An operation control signal indicating validity / invalidity of use of the processing device Next, FIG. 6 shows the process information of the process processing device 202-1 of FIG.
The example of the vacuum processing apparatus employ | adopted as -202-4 is shown. In FIG. 6, reference numeral 201 denotes a transfer processing apparatus for transferring a wafer, which processes wafers in a load lock chamber in accordance with a wafer transfer schedule.
-4. Further, the wafer that has been processed by the processing apparatus is transferred to the next processing apparatus, and the wafer that has been completely processed is transferred to the unload lock chamber. Reference numeral 203 denotes a load lock chamber,
6 is a chamber for loading a wafer into the transfer processing apparatus, 204 is an unload lock chamber and is a chamber for transferring a wafer from the vacuum processing chamber to the atmospheric transfer apparatus 206, and 205 is installed in the transfer processing apparatus to transfer the wafer. Vacuum robot to perform, 206
Reference numeral 207 denotes an atmosphere transfer device for transferring a cassette containing wafers, and 207 denotes a cassette containing wafers to be processed, which is a cassette containing product wafers or a cassette containing cleaning wafers. The atmospheric transfer device 206 unloads the wafer in the cassette on the atmospheric transfer device from the cassette, loads the wafer into the load lock chamber 203, and returns the wafer in the unload lock chamber 204 to the original cassette.

The vacuum processing apparatus to be diagnosed according to the present invention is not limited to the apparatus shown in FIG. 6, but may be another type of apparatus, for example, the apparatus shown in FIG. Such a device may be used.

FIG. 7 shows an excerpt of lot management data as an example of primary data used for diagnosis of a semiconductor manufacturing apparatus.
The lot history data is, for example, a record in which the processing status is recorded after the semiconductor manufacturing equipment of Company B processes the product. Usually, the monitor amount corresponding to the recipe item is recorded. For example, if the gas flow rate is 100 ml
This is information that the flow rate monitor was 101 ml / min against the / min setting. The term “recipe” refers to record information describing target conditions of a product.

The lot history data shown in FIG.
123, cassette number 2 and start time 2000/9
/ 10, 10:15:36. In addition, lot name, process name, operator name, recipe No. , The process processing ratio, the number of input sheets, and the like. Also,
No. of the wafer processed in the etching chamber 1 And step No. , Gas flow rate, plasma source power, processing pressure,
Data such as the opening degree of the pressure regulating valve is shown. Although the data in FIG. 7 is data for cassette No. 2 of lot No. 123, similar lot history data is monitored and accumulated for another cassette or lot. In addition,
The items in FIG. 7 are merely examples, and it goes without saying that items other than those shown are monitored as needed.

Next, the processing flow in the case where the user diagnoses the semiconductor manufacturing equipment using the diagnostic equipment of the equipment maker will be described with reference to FIG. The diagnosis includes a regular diagnosis mode performed as a periodic diagnosis, and an irregular diagnosis performed when an error occurs, that is, a device abnormality mode and a device failure mode.

First, the periodic diagnosis mode will be described with reference to FIG. In the periodic diagnosis mode, a periodic diagnosis process of the semiconductor manufacturing apparatus is performed by the periodic diagnosis processing device 90 stored in the diagnostic device 70.

In the periodic diagnosis, the user (B-
N) accesses the server of the device manufacturer A and requests a diagnostic device, so that the program in the periodic diagnostic mode is started (900 to 904). Users do not have direct access to the diagnostic system program itself. When the periodic diagnostic mode is activated, the diagnostic device requests the user for primary diagnostic data (906). User sends request data via server and Internet
(908, 910), and the data is transferred to the diagnostic device 7.
0 is stored in the periodic diagnosis database 93. The answer data includes production log data as shown in FIG.

The periodic diagnosis processing device 90 performs the analysis of the periodic diagnosis based on the request data. This includes comparison with a reference value (normal value) based on past data (912, 914). For example, the pressure fluctuation can be found by comparing the processing pressure Pa of the vacuum processing chamber with a reference value (normal value) based on past data. FIG. 9 is a graph showing the processing pressure Pa and the opening degree of the pressure regulating valve shown in FIG. 7 by organizing lot history data for a large number of processing wafers. Is within a predetermined range, for example, within a range of 5%, the device is diagnosed as normal.

The data shown in FIG. 9 is analyzed and analyzed as information on the change over time of the semiconductor manufacturing equipment. This information is used for the next diagnosis. For example, the life of a pressure gauge (or the determination of when calibration is required) is not uniquely determined, but varies depending on the use situation and environment. When this information is analyzed and analyzed as information of the results used under various circumstances under each user without being limited to a specific user, a highly accurate diagnosis can be made by comparing with the diagnostic information. It becomes possible.

FIG. 10 shows the relationship between the opening of the pressure regulating valve and the processing pressure Pa under normal conditions. Many data are distributed around the processing pressure of 2 Pa, and in this case, the opening degree of the pressure regulating valve is distributed at 51 to 56%. However, if you look closely, the processing pressure is distributed around 1.95 Pa, and the pressure control valve opening is 52 to 53%. If 2 Pa is the set value and 5% is within the allowable range, 1.9 to 2.1 Pa is allowable, so
Data that is considered normal, but may show some signs of anomalies.

Incidentally, even if the cause of the case where the analysis data exceeds the allowable value is inferred, it is difficult to make an accurate determination only with the data as shown in FIG. For example, when a deposition film is formed on the inner wall of the device and gradually becomes thicker,
The number of gas molecules released from the deposition film increases in accordance with this thickness, and pressure control is performed not only by the gas flow supplied as the etching gas but also by the gas from the inner wall of the apparatus. Since the two gases have different compositions, the pressures resulting from the dissociation and decomposition by the plasma are all different from those of the etching gas. Therefore, even if the function of the constant pressure control is normal, there may be a mode in which the pressure indication value does not change and the pressure regulating valve opening degree changes. Also, if the pressure changes despite the same pressure regulating valve opening,
If the measurement pressure itself is changing, if the temperature of the gas being measured is changing, or if the pressure gauge is abnormal, or the temperature of the part where the pressure gauge is installed fluctuates,
Or it may be electromagnetic noise from the plasma. Alternatively, the pressure regulating valve may indicate an abnormality. As another possibility, the pressure regulating valve changes the conductance of gas molecules by adjusting the opening of the valve and controls the effective pumping speed of the vacuum pump, but the conductance of gas molecules is reduced. Depends on the mass and temperature of the Therefore, if the composition of the plasma changes, the conductance also changes. There is a possibility of change due to this. Therefore, it is not possible to know the true cause of the pressure change or the change of the pressure regulating valve by simply examining the phenomenon that the pressure is changing, and it is not possible to take appropriate measures. In order to judge this accurately, it is necessary to change the characteristics of the plasma, correlate with other data, compare with past data, and analyze. For this analysis, comparison with previously analyzed data is effective, and it is also effective to make use of various statistical analysis means. Furthermore, the relationship between the flow rate and pressure using an inert gas such as argon without generating plasma, the relationship between the opening of the pressure control valve, the temperature of the processing chamber wall, and the temperature of the pressure gauge, etc., was measured again, and the It is also effective to determine the presence or absence of an abnormality. In this case, it is necessary to operate the device specially to acquire data,
The steps from the request for additional data 926 to the diagnostic operation and the data acquisition 934 shown in FIG.

The item of FIG. 7 includes the just-etch time. This time is used for the etching end point judging device (installed in the processing chambers 202-1 to 202-4 of FIG. 6, but not shown).
Is the etching time measured by When the etching time gradually changes in response to the processing time (plasma discharge time) after the apparatus is opened to the atmosphere and cleaned, the fluctuation of the etching time is periodically diagnosed to periodically clean the apparatus. It is also possible to judge. Further, it is possible to determine the timing of the plasma cleaning, perform the plasma cleaning, and return the inside of the apparatus to the initial state. Since plasma cleaning is not performed frequently but based on the results of periodic diagnosis, the time that hinders the operation of the apparatus can be minimized, and as a result, the operation rate of the apparatus can be improved and stable operation can be achieved. Become. Furthermore, when a sudden change is indicated, it is assumed that some abnormality has occurred, so diagnosis is performed in an abnormality diagnosis mode described later. Furthermore, by analyzing the correlation between the variation of the etching time and the side wall temperature of the apparatus and other parameters, if the causal relationship between various parameters becomes clear, the active time control of those parameters enables the variation of the etching time. Can be made to be a device control system with a constant value. This may not be a diagnostic system,
By applying and developing the diagnostic system of the present invention, the performance of the device can be stabilized.

Regarding the plasma, the input power of the source power and the data of the reflection shown in FIG. 7 and the judgment as to whether or not the tuning is normal are made by determining the position of the stub tuner (STB1, STB1).
STB2, STB3) or a change in wafer bias voltage Vpp. In addition, a device equipped with a dedicated plasma monitor or the like allows more accurate changes to be grasped.

The diagnostic result is sent to the user as a periodic diagnostic result (916, 918), and the diagnostic analysis data and the result are stored in the user's storage device (920). The diagnosis result is stored in the storage device 85 of the device manufacturer A as customer device management data (922), and is communicated to the service section (or the service company A2) as necessary (924).

The user can delete the diagnostic data (such as the user's production information used for the analysis). Alternatively, data reading can be protected. The device maker A has a system that cannot read customer device management data without the permission of the user. The diagnosis cannot be deleted. The data recording device of company A remains as customer device management data, that is, service information for (company B to company N). This data can be used for parts life (maintenance time), inventory management, etc. The part belonging to the user's confidential information includes, for example, the lot name (a simple symbol does not matter, but a product name may be used), a process name, etc., and the number of processed wafers (products). Related to production information.). Although not shown in FIG. 7, items such as a film type, a film thickness, a product name, and the like are also included. Furthermore, etching recipes (gas names, flow rates, pressures,
Specific data such as time. ).

Further, although it cannot be said that the data is obtained by monitoring the apparatus, when data relating to the etching result is centrally managed, the data is included in the confidential information. For example, there are correlations regarding the quality of semiconductor products including processes of other semiconductor manufacturing apparatuses, etching shapes, data relating to electrical characteristics of semiconductor products, status of defects (yield), and the like. Judging whether the device is normal or not and whether the data variation is within the allowable range is extremely difficult for the user, considering that ultimately the product should be determined based on whether the product is normal or not. This is important data. Conversely, it is data directly related to production information and also information that should be kept confidential. Therefore, if the user decides to use such information as confidential data, only the permissible value of the data obtained from the device will be disclosed to the device manufacturer A, but the reason and grounds for determining the range of the permissible value (yield, etc.) There is no need to disclose until. Also,
The data stored in the device maker A is, for example, FIGS. 9 and 10 obtained by totaling and analyzing lot history data as shown in FIG. These data are stored in the user device name (Serial N
o. ) And stored on a date or an appropriately defined name. If the film type and the etching recipe are necessary for data management, they may be managed by appropriately defined names instead of specific names.

If the data for the diagnostic analysis is insufficient, the diagnostic device requests the user for additional data (926). In order to obtain data for diagnosis,
When the device needs to be operated, the user is inquired about whether to perform the operation for diagnosis (928 to 928).
30). This is, for example, a method of answering some questions prepared in advance (inquiry as to whether there is no problem in safety and whether there is no problem in driving).

Then, the recipe of the apparatus operation for acquiring the diagnostic data is displayed on the user side, and the user activates the semiconductor manufacturing apparatus to be diagnosed (930). If the semiconductor manufacturing apparatus cannot be started, the reason is clarified (932), and the reason is recorded in the customer equipment management database 851 (922), and the service section (or the service company A2) is notified as necessary (922). 92
4). In other words, when the device cannot be operated, a reply is given as to why the device cannot be operated. For example, a list of reasons appears,
Check it. Company A can arrange for a failed part based on the diagnosis result. For example, replacement of consumables may be sufficient. If a repair or a failed part is required, contact the service representative of Company B to arrange.

The semiconductor manufacturing apparatus is operated according to the recipe,
If the diagnostic data has been obtained, the result is sent to the diagnostic device as additional data (934). In the first diagnosis, the periodic diagnosis mode is started in this embodiment, and the data is stored in the periodic diagnosis database 851 of the diagnostic device. The diagnostic device performs an analysis based on the additional data (936, 938). This includes comparison with past data (normal values). The diagnosis result (940) is sent to the user as a periodic diagnosis result and displayed (94).
2) The diagnostic analysis data and the result are stored in the storage device on the user side (944). The diagnosis result is stored in the storage device of the device manufacturer A as customer device management data, and is communicated to a service section (or a service company A2) as necessary.

Next, the diagnosis device inquires of the user whether or not to end the diagnosis based on the diagnosis result (946).

On the user side, the diagnosis cannot be terminated (satisfactory results cannot be obtained only by the results of the periodic diagnosis).
Either erasing the analysis data and ending the diagnosis (diagnosis could be diagnosed only by periodic diagnosis) or ending the diagnosis without erasing the analysis data (soldering that the diagnostic data did not contain confidential matters) A determination is made (948). When ending the diagnosis by erasing the analysis data, the diagnostic device erases the analysis data, obtains the user's consent (confirms the erasure of the analysis data), and ends the periodic diagnosis (950 to 956). ).

The connection with the diagnostic device is free of charge. Alternatively, there is a case where a fee is charged based on a periodic diagnosis, a failure diagnosis, or the like, but details are determined by a maintenance contract or the like. Dispatch of service personnel and procurement of parts when an abnormality is found and dealt with are necessary, but the cost burden related to them may be determined in advance by a maintenance contract or the like.

At the time of periodic diagnosis, comparison and analysis with past data can be performed, so that not only determination of normality and abnormality but also the latest data does not hinder the operation of the apparatus, but the limit of the normal value, in other words, the boundary area It is determined that it is in the vicinity and is a slight abnormality, and it is desirable to take some measure in advance, and the user can be notified. As a result, it is possible to predict in advance the possibility of equipment failure to some extent, and to take measures early to avoid a large economic loss.

In the embodiment of the present invention, the diagnostic device is connected to the server of company A. However, the diagnostic device may be installed in the control server of company B so that the semiconductor manufacturing devices in company B can be viewed collectively. . Alternatively, it may be installed in advance in each semiconductor manufacturing apparatus. In this case, the programs are separately installed by the diagnostic function. However, if the user wants to use the latest version of the diagnostic program that is newer than the pre-installed one, it is necessary to access and download the company A server.
For existing data used for data analysis, comprehensive analysis including data from other companies' devices is desirable.
When a diagnostic device is installed and used in a semiconductor manufacturing device of a company, it becomes difficult to use comprehensive data selected from devices of other companies. In particular, in the case of diagnosing while contacting the expert of Company A, it is more efficient and the analysis accuracy is higher if the diagnostic device is provided by Company A. Therefore, it is desirable to provide a system for transmitting necessary data to Company A for diagnosis.

As apparent from the above description, the main functions of the remote diagnostic system according to the embodiment of the present invention are as follows.
It is as follows. (1) Users (company B to company N) can freely access. (2) A contract for a password for connection to this system can be made in advance. (3) The user cannot access the diagnostic system program, but can delete the diagnostic data (such as the user's production information used for analysis). Alternatively, data reading can be protected. (The system cannot be read without the permission of the user.) (4) The diagnostic results cannot be deleted. The information is left as service information for the company A (company B to company N) in the data recording device of company A. This data can be used for parts life (maintenance time), inventory management, etc. (5) Diagnosis is semi-automatic, and since necessary data is requested from the diagnostic device to the user terminal, the system responds to the request. (6) Response data includes production log data. (7) If it is necessary to operate the device to obtain data for diagnosis, there is an inquiry as to whether the operation for diagnosis may be performed. Answer it (Is it safe?
In addition, inquire whether there is no problem in driving). (8) If the device cannot be operated, answer why it cannot be operated. (A list of reasons will be displayed and checked.) (9) After seeing (or even before) the diagnosis result, you can contact the service personnel of A company or the parts supplier. Call request, repair request, regular maintenance request, urgent call etc. (10) A failed part can be arranged according to the diagnosis result. (Simply replace consumables. Repairs and failed parts will be arranged after contacting the service personnel of Company B.) (11) Connection to the diagnostic equipment is free. Alternatively, it is charged for periodic diagnosis and failure diagnosis. (12) The diagnostic device is connected to the company A server. Alternatively, it is installed on the control server of the company B, and the devices in the company B are collectively viewed. Alternatively, pre-installed on each device.
(Divided according to the diagnosis function.) Next, the device abnormality mode processed by the abnormality mode diagnosis processing device 100 will be described with reference to FIG. When the device is abnormal, the user (B to N) accesses the server of the device manufacturer A and requests the diagnostic device, and the program in the device abnormal mode is started (1000 to 10).
04). When the device abnormality diagnosis mode is activated, the diagnostic device requests the user for diagnostic primary data (100
6). Note that the diagnosis primary data also includes information such as a device abnormality history message. The user transfers the requested data to the device manufacturer A via the server and the Internet (1008 to 1010), and the data is stored in the periodic diagnosis database of the diagnostic device. The diagnostic device performs a periodic diagnosis analysis based on the request data (1012 to 1).
014). The diagnostic result is sent to the user as a periodic diagnostic result (1016, 1018), and the diagnostic analysis data and the result are stored in the user's storage device (1020).
The diagnosis result is stored in the storage device 85 of the device manufacturer A as customer device management data (102
2) If necessary, the service section (or service company A2) is notified (1024). In addition, since the diagnosis is performed because an abnormality is recognized, it may be difficult to make an accurate determination only with a normal periodic diagnosis.

If the data for diagnosis is insufficient, the diagnostic device requests the user for diagnostic data (1026). In order to acquire diagnostic data, a device operation recipe for acquiring diagnostic data is presented (1028), and an inquiry is made to the user as to whether the device can be started (1030).

When the semiconductor manufacturing apparatus cannot be started,
The reason is clarified (1032, 1034), and the service person is contacted (1036), and if necessary, the service section (or service company A2) is contacted (1028). Further, the following inquiry and instruction are performed (1040). For example, if the vacuum pump cannot be started, the device cannot be started.If the vacuum pump is of a water-cooled type, if the cooling water is flowing, the flow rate is appropriate, and the water temperature is acceptable. Inquiry about whether it is within the range, what other interlocks are, etc., and analyze and judge,
Make instructions.

The semiconductor manufacturing apparatus is operated according to the recipe,
If the diagnostic data can be obtained (1042), the result is sent to the diagnostic device as additional data (104).
4). The data is stored in a periodic diagnostic database of the diagnostic device. The diagnostic device performs an analysis based on the diagnostic data (1046). This includes comparison with past data (normal values). The diagnosis result (1048) is sent to the user together with the countermeasure content and displayed (105).
0), the diagnostic analysis data and the result are stored in the storage device on the user side (1052). The diagnosis results are stored as customer device management data in the storage device of the device manufacturer A, and are communicated to the service section (or service company A2) as needed (1022, 102).
4).

The user selects a countermeasure content based on the diagnosis result (1054), and if necessary, contacts a service person (1056, 1038) to make the next inquiry and instruction (1058). These communications are performed via the Internet, but if you want to contact the service representative directly, it is also possible to connect to the service representative or make a telephone call via the Internet. Finally, an inquiry is made to the user before the end of the diagnosis as to whether analysis data can be deleted (1060). The user determines whether the diagnosis cannot be completed, the analysis data is erased to terminate the diagnosis, and the analysis is terminated without erasing the analysis data (1062). When ending the diagnosis after erasing the analysis data, the diagnostic device erases the analysis data, obtains the user's consent (confirms the erasure of the analysis data), and ends the diagnosis (1064-1).
068).

Next, referring to FIG. 12, when the fault location of the semiconductor manufacturing device is known to some extent, the fault diagnosis processing device 110
The following describes the failure diagnosis mode that is processed by the. If the device is out of order, the user (B to N)
By accessing the server of the company and requesting the diagnostic device, the program in the failure diagnosis mode is started (1100).
１1104). When the failure diagnosis mode is activated, the diagnosis device inquires the user of the failure location (110).
6). The user selects a failure location from the failure location classification table, transfers the requested data to the device manufacturer A via the server and the Internet (1108 to 1110), and the data is stored in the periodic diagnosis database of the diagnostic device. The diagnostic device displays the countermeasure contents with reference to the data of the fault location and the past history (1116), and the user selects a countermeasure from the countermeasure classification table (1120). The diagnostic device contacts the service person (1122) and makes the next inquiry and instruction (1124). Based on this, the data of the failure content and the countermeasure content are sent to the service section (or service company A2) (1126). In response to this, the service section (or service company A2) performs necessary measures and implements a failure diagnosis mode (1128-
38). The user selects a countermeasure from the failure countermeasure classification table,
It is stored (1134, 36). The diagnostic device activates the failure diagnostic mode as required after receiving confirmation from the user (1140, 42). When ending the diagnosis, the diagnostic device deletes the analysis data, obtains the user's consent,
The failure diagnosis is terminated (1144-1148).

In the embodiment shown in FIG. 13, the diagnostic equipment of Company A is installed in both the equipment manufacturer A1 and the service company A2 (or a plurality of service companies) contracted with the equipment manufacturer.

In a sales contract between each user and a device maker (or a sales company (not shown)), it is determined whether the diagnostic contract is to be the device maker A1 or the service company A2. Subsequent connections are the same as in the above embodiment.

It is assumed that the servers of the companies A1 and A2 can freely exchange information on the diagnostic data in principle. Rather, the results of each analysis are stored as a common database. The diagnostic program uses the same latest version. The analysis database is also the latest version.

The embodiment shown in FIG. 14 is an example in which a primary diagnostic data storage area is provided in a server or a semiconductor manufacturing apparatus of each user. Access to this part is not allowed from Company A. There is no need to worry about access from Company A. Users can freely use the data as it is stored. Except for the data that may be disclosed in the diagnosis results,
Transfer of confidential data to Company A must be prohibited. This is a confidentiality agreement. In this case, it is desirable to install the diagnostic software on the user side to perform the diagnosis, but it is possible to do so even if it is not. As a result, it is possible for each user to harmonize both requirements of keeping information confidential at the time of remote diagnosis and preventing an increase in economic loss.

Next, another embodiment of the present invention will be described. The following embodiment is a system that is charged when a user connects to a diagnostic device. By paying for the system, the economic burden of developing and providing more advanced software for diagnostic software developers can be reduced to some extent. Conversely, the user will be able to make a more reliable diagnosis using the more advanced analysis data.

The following can be considered as a form of the paid system. 1) Company A (apparatus maker) gives company B (user) the right to use the diagnostic device (including Heart II and software) for a fee. Company B diagnoses the semiconductor manufacturing equipment using the diagnostic equipment. 2) In the above 1), the diagnostic device is installed in the company A, and is accessed and diagnosed from the company B using the communication network. 3) In the above 1), the diagnostic device is installed (rented) in the company B and accessed and diagnosed through the company B's intranet (MES or the like).

In the diagnostic system of the embodiment shown in FIG.
The diagnostic device 70 is provided with a plurality of levels such as diagnostic levels 1 to N, and the company B obtains the permission of the company A, pays the necessary fee, and can perform a higher level diagnosis. System. Further, in this diagnostic system, the highest level of diagnosis may include analysis and consulting by the specialized staff of Company A. Further, when the company B performs a higher level diagnosis with the permission of the company A, the input and output data at the previous level may be automatically disclosed to the company A. Conversely, the lowest level is
The service may be provided free of charge, and services such as periodic diagnosis of simple items may be provided to the user.

Furthermore, as in the diagnostic system of the embodiment shown in FIG. 16, each user (B
, C and D) are stored in the diagnostic device 70 as a database.
It is also possible to configure so that the data space of each company can be accessed with the approval of each of the companies D and D. Further, in this diagnostic system, when the company B discloses the data base of the company B to the company A, the usage fee of the diagnostic device may be reduced according to the degree of the disclosure.

Further, as in the diagnostic system of the embodiment shown in FIG. 17, standard operating conditions of the semiconductor manufacturing apparatus 10 are determined, and data bases 88 and 89 under the operating conditions are created in advance. When diagnosing the condition of the semiconductor manufacturing device 10 delivered to the device manufacturer, the target semiconductor manufacturing device is operated under the standard conditions, and the operation data is automatically or manually input to the diagnostic device 70 by an engineer of the device manufacturer. The state of the apparatus may be diagnosed by taking in and comparing it with the data space by the diagnostic program 80.

Further, the operating data base under the above-mentioned standard conditions is not limited to the supplier of the device 10, that is, the data base created in advance by the company A prior to shipment from the factory and based on the results, and a contract for the use of the diagnostic device 70 is established. After the operation, the data of the user's device is taken in or the device 10 is delivered to the user, and then, when the device is started up, the user's original data space is used. You may make it so that it does not leak.

The past service data for Company B by Company A or another maintenance service company is input to the database of Company B of the diagnostic device and used for diagnosis. However, this data space is not included in the lowest level of the diagnostic level in FIG. 15, and the company A may provide it to the company B based on the request of the company B. FIG. 18 shows a processing flow of the system shown in FIGS. 15 to 17 which is charged when the user connects to the diagnostic apparatus.

First, the contractor of the diagnosis accesses the diagnosis software 70. The diagnostic software determines the contract level and activates the diagnostic software (1800 to 1802).

First, the diagnostic software requests the contractor to fetch data in a standard state (1804).
The user operates the manufacturing apparatus under standard conditions and sends data to the diagnostic software (1806). In this operation, it is possible to automatically start the manufacturing apparatus and obtain data automatically with the permission of the user from the diagnostic software. Diagnostic software 70
Then, it is determined whether the data is initial data or data taken for comparative diagnosis (1810), and the data is stored in a database (1808). If the acquired data is data for comparative diagnosis, the data is compared with data in a database to make a diagnosis, and the result is transmitted to the user (1).
812-1820). The user sees the result and moves to the next measure.

If the user needs a further level of diagnosis, the user is charged further according to the level, and diagnostic software of that level is started (1822). At that level, if further request for additional data is required, it is requested from the user, and the request is taken in for diagnosis (1).
824-1828).

FIG. 19 shows a specific example of the diagnostic method. Here, an example is shown, which is generally considered to be included in the diagnosis content at the initial level. First, the data is analyzed in a standard state, the data is stored in a database (1900 to 1906), and normal processing is performed (1908). The apparatus is analyzed and diagnosed based on the standard data (1910 to 1926). If the user needs a further level of diagnosis, the user is further charged according to the level, and diagnostic software of that level is started (1928 to 1930). At this level, if further request for additional data is required, the request is made to the user, and the request is taken and diagnosed (1824-182).
8).

Further, in FIG. 20, the level 2 diagnosis (200
0-2010), level 3 diagnosis (2012-2016)
5 illustrates an example of a transition to a higher level diagnosis such as.

FIG. 21 shows an example in which the manufacturing apparatus is operated using such a diagnosis. First, data under standard conditions is once obtained (2100 to 2102), stored in the diagnostic device 70, and then enters normal production by the semiconductor manufacturing device 10 (2104 to 2108). In normal production, in addition to the daily QC work (2110), which is performed almost daily, after a certain number of sheets are processed, a wet cleaning is performed to remove a deposited film and the like deposited in the reaction vessel, or a disassembly cleaning called a complete cleaning. Is performed (2112).

If the diagnosis of the present invention is performed as a part of daily QC work, it is possible to accurately manage the state of the apparatus. Currently, foreign matter QC or the like uses a dummy wafer for that purpose, and it takes time to obtain a result by using an inspection apparatus.

On the other hand, even if only the apparatus diagnosis method of the present invention is used, the information on the deposited film on the wall surface which causes foreign matter can be determined without disassembling the apparatus, so that online diagnosis can be performed. It is possible to more accurately grasp the device state in a shorter time.

Also, depending on the process, it is conceivable that the operation under the standard conditions during the normal wafer processing as in the diagnosis of the present apparatus may affect the subsequent processes. In such a case, it may be necessary to perform an operation such as aging before the actual process after the diagnosis is performed. In this case, the diagnosis interval may be extended to three days and one week so as not to affect the throughput. It should be noted that after the wet cleaning, a device diagnosis should always be performed. This makes it possible to accurately determine whether or not the device has returned to the initial state.

The case where the manufacturing apparatus is diagnosed by the method described above. The result is all yours. However, it is necessary to prevent the user from diverting the data. Therefore, all data sent from the diagnostic device to the user should be protected. Therefore,
It is desirable that all data be provided with an ID and be constructed so that copyright can be claimed by a digital watermark or the like.

As described above, an example in which the present invention is applied to a semiconductor manufacturing apparatus has been described, but the present invention is not limited to this. For example, a production facility such as a chemical plant or an automotive production line, where a different company than the user of the facility is involved in the production and the user has a unique trade secret regarding the use of the facility. Can be widely applied to diagnosis.

[0108]

According to the present invention, data requested by the diagnostic device at the time of diagnosis is transmitted to the diagnostic device from a terminal of a user who has been granted a right to use the diagnostic device by a specific third party for a fee. By providing a remote diagnostic system for a semiconductor manufacturing apparatus that transmits and receives a diagnostic result from the diagnostic apparatus at the terminal, it is possible to harmonize both requirements of confidentiality of information at the time of remote diagnosis of equipment and prevention of an increase in economical loss. Thus, a remote diagnosis system and a diagnosis method can be provided. In addition, the present invention provides a remote diagnosis system and a diagnosis method that enable a user to perform highly reliable diagnosis by using advanced analysis data and that can reduce the economic burden on a developer of the diagnosis software to some extent. Can be.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a configuration of a remote diagnosis system in which the present invention is applied to a semiconductor manufacturing apparatus.

FIG. 2 is a diagram illustrating a configuration example of a diagnostic device in the system of FIG. 1;

FIG. 3 is a diagram showing a configuration example of a diagnostic database in the diagnostic device of FIG. 2;

4 is a diagram illustrating a configuration example of a semiconductor manufacturing apparatus control server in the system of FIG. 1;

FIG. 5 is a diagram illustrating an example of a control configuration of a semiconductor manufacturing apparatus in the system of FIG. 1;

FIG. 6 is a diagram illustrating an example of a vacuum processing apparatus adopted as the process processing apparatus of FIG. 5;

FIG. 7 is a diagram showing an example of lot management data as primary diagnostic data of a semiconductor manufacturing apparatus.

FIG. 8 is a view for explaining a processing flow when diagnosing a semiconductor manufacturing apparatus in a periodic diagnosis mode.

FIG. 9 is a graph of data of the processing pressure Pa and the opening degree of the pressure regulating valve shown in FIG. 7;

FIG. 10 is a diagram showing the relationship between the opening of the pressure regulating valve and the processing pressure Pa in a normal state.

FIG. 11 is a diagram illustrating a processing flow when a diagnosis of a semiconductor manufacturing apparatus is performed in an abnormal mode.

FIG. 12 is a diagram illustrating a processing flow when a diagnosis of a semiconductor manufacturing apparatus is performed in a failure diagnosis mode.

FIG. 13 is a block diagram showing another embodiment of a remote diagnosis system in which the present invention is applied to a semiconductor manufacturing apparatus.

FIG. 14 is a block diagram showing another embodiment of a remote diagnosis system in which the present invention is applied to a semiconductor manufacturing apparatus.

FIG. 15 is a block diagram showing another embodiment of a diagnostic device in a remote diagnostic system in which the present invention is applied to a semiconductor manufacturing device.

FIG. 16 is a block diagram showing another embodiment of a diagnostic device in a remote diagnostic system in which the present invention is applied to a semiconductor manufacturing device.

FIG. 17 is a block diagram showing another embodiment of a diagnostic device in a remote diagnostic system in which the present invention is applied to a semiconductor manufacturing device.

18 is a diagram showing a processing flow of the system of FIGS. 15 to 17 in FIG. 18;

19 is a diagram showing details of a part of the flow shown in FIG. 18 which is generally included in the initial level of diagnostic content.

20 is a diagram showing an example of a shift to a higher-level diagnosis in the flow shown in FIG. 18;

FIG. 21 is a diagram illustrating an example of operating a manufacturing apparatus using the diagnostic apparatuses of FIGS. 15 to 17;

[Explanation of symbols]

10 (10A to 10N): semiconductor manufacturing apparatus, 20: semiconductor manufacturing apparatus control server, 25: browsing software (WWW browser), 26: control program, 27: diagnostic apparatus operation program (recipe), 28: control Database 29, a database recording common items for diagnosis, diagnosis results and maintenance nonce information, 30 intranet in the company, 40 internet server, 50 internet, 60 internet server, 70 diagnostic device, 72 data recording device 73A: external connection interface; 73B: access management program; 73C: communication interface; 78: guide unit;
80: control program, 82: storage device for user diagnostic software, 83: control program for semiconductor manufacturing equipment,
85: diagnosis database, 90: periodic diagnosis processing device,
Reference numeral 91: Primary data storage device for diagnosis results, 92: Primary data storage device for diagnosis results, 93: Database for data analysis device, 100: Abnormal mode diagnosis processing device, 102:
Primary storage device of diagnosis result, 110 ... Fault diagnosis processing device,
212 central control means, 213 display means, 202-1
202-4: Process processing, 850: Customer device management system, 851: Diagnosis result database, 855: Device information database

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Hideyuki Yamamoto 794, Higashi-Toyoi, Katsumatsu-shi, Yamaguchi Prefecture F-term in Kasado Works, Hitachi, Ltd. AA01 AA05 DD03 DD07 EE06

Claims (12)

[Claims] 1. A remote diagnostic system for a semiconductor manufacturing apparatus, wherein a user connects the semiconductor manufacturing apparatus to a diagnostic apparatus provided by a specific third party via a communication network, and diagnoses the semiconductor manufacturing apparatus. The diagnostic apparatus includes: at least one diagnostic program that performs a diagnostic process on the semiconductor manufacturing apparatus; and a control unit that activates the diagnostic program by an access from a terminal of a specific user to which access authority is assigned. From a terminal of a user who has been granted the right to use the diagnostic device by the specific third party for a fee, transmits data requested by the diagnostic device to the diagnostic device at the time of diagnosis, Receiving a diagnosis result from the diagnostic apparatus. 2. A semiconductor manufacturing apparatus is connected to a diagnostic apparatus provided by a specific third party via a communication network.
A remote diagnostic system for a semiconductor manufacturing apparatus for performing a diagnosis on the semiconductor manufacturing apparatus, wherein the diagnostic apparatus is provided with a plurality of diagnostic programs for performing a diagnostic process on the semiconductor manufacturing apparatus and an access right for a fee. A remote diagnostic system for a semiconductor manufacturing apparatus, comprising: a control unit that starts the diagnostic program upon access of a specific user; and a guide unit that discloses information on the diagnostic program. 3. The diagnostic device according to claim 2, wherein the diagnostic device is configured so that the specific third party cannot refer to data input or output to the diagnostic device without permission of the user. A remote diagnosis system for a semiconductor manufacturing apparatus, characterized in that: 4. The diagnostic apparatus according to claim 2, wherein the diagnostic device is configured such that the third party cannot refer to the input information without the permission of the user, but can refer to the output data. Remote diagnosis system for semiconductor manufacturing equipment. 5. The diagnostic device according to claim 1, wherein the diagnostic device has a plurality of levels of diagnoses, and the user obtains necessary information with the permission of a third party who is a provider of the diagnostic device. A remote diagnosis system for a semiconductor manufacturing apparatus, which is configured to perform a higher-level diagnosis by paying a price. 6. A remote diagnosis system for a semiconductor manufacturing apparatus according to claim 5, wherein the highest level of diagnosis includes analysis and consulting by said third-party expert staff. 7. The diagnostic device according to claim 6, wherein, when the user performs a higher level diagnosis with the permission of the third party, the user automatically inputs and outputs data at a previous level. A remote diagnosis system for a semiconductor manufacturing apparatus, which is configured to be disclosed to a third party. 8. The diagnostic apparatus according to claim 5, wherein the input and output data of each user are stored as a database in the diagnostic apparatus at each of the diagnostic levels, and the third party is authorized by each of the users. A remote diagnostic system for a semiconductor manufacturing apparatus, wherein the remote diagnostic system is configured to be able to access a database of each company after obtaining the information. 9. The diagnostic device according to claim 5, wherein, when the user discloses his / her own database to the third party, the use fee of the diagnostic device is reduced according to the degree of the disclosure. A remote diagnosis system for a semiconductor manufacturing apparatus. 10. The method according to claim 1, wherein
The diagnostic apparatus determines in advance the standard operating conditions of the semiconductor manufacturing apparatus, holds a database created in advance under the operating conditions, and diagnoses the state of the semiconductor manufacturing apparatus delivered to the user. A semiconductor characterized in that the target semiconductor manufacturing apparatus is operated at the same time, and the operation data is automatically or fetched into the diagnostic apparatus by user input, and the state of the semiconductor manufacturing apparatus is diagnosed by comparing with the database. Remote diagnostic system for manufacturing equipment. 11. The operation database under the standard condition according to claim 10, wherein the third party as a provider of the semiconductor manufacturing apparatus and the diagnostic apparatus is operated before shipping the semiconductor manufacturing apparatus. In addition to the database created based on, after making a contract for the use of the diagnostic device, after taking in the data of the semiconductor manufacturing device of the user or delivering the semiconductor manufacturing device to the user,
A remote diagnostic system for a semiconductor manufacturing apparatus, characterized in that a database created and stored at the time of start-up prevents leakage of user's risk information to the provider of the diagnostic apparatus. 12. A semiconductor manufacturing apparatus and a terminal for performing a diagnosis are connected to a diagnosis apparatus provided by a specific third party via a communication network, and the semiconductor manufacturing apparatus performs a diagnosis on the semiconductor manufacturing apparatus. A remote diagnostic method, which is provided with a right to use the diagnostic device for a fee, and by an access of a specific user who is granted access right,
A remote diagnosis method for a semiconductor manufacturing apparatus, wherein a diagnosis program of the diagnosis apparatus is started, data required for the diagnosis is requested to the user side from the diagnosis program, and a diagnosis is performed by obtaining a response from the user side to the request. .