JP2002090987A5 - - Google Patents
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- Publication number
- JP2002090987A5 JP2002090987A5 JP2001209543A JP2001209543A JP2002090987A5 JP 2002090987 A5 JP2002090987 A5 JP 2002090987A5 JP 2001209543 A JP2001209543 A JP 2001209543A JP 2001209543 A JP2001209543 A JP 2001209543A JP 2002090987 A5 JP2002090987 A5 JP 2002090987A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001209543A JP4226808B2 (ja) | 2000-07-12 | 2001-07-10 | ポジ型レジスト組成物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000-211642 | 2000-07-12 | ||
| JP2000211642 | 2000-07-12 | ||
| JP2001209543A JP4226808B2 (ja) | 2000-07-12 | 2001-07-10 | ポジ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002090987A JP2002090987A (ja) | 2002-03-27 |
| JP2002090987A5 true JP2002090987A5 (enExample) | 2006-01-19 |
| JP4226808B2 JP4226808B2 (ja) | 2009-02-18 |
Family
ID=26595896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001209543A Expired - Fee Related JP4226808B2 (ja) | 2000-07-12 | 2001-07-10 | ポジ型レジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4226808B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004004561A (ja) * | 2002-02-19 | 2004-01-08 | Sumitomo Chem Co Ltd | ポジ型レジスト組成物 |
| JP4606392B2 (ja) * | 2002-04-01 | 2011-01-05 | ダイセル化学工業株式会社 | フォトレジスト用高分子化合物の製造法 |
| KR100979871B1 (ko) | 2002-04-01 | 2010-09-02 | 다이셀 가가꾸 고교 가부시끼가이샤 | ＡｒＦ 엑시머 레이저 레지스트용 중합체 용액의 제조 방법 |
| KR100962452B1 (ko) * | 2002-09-12 | 2010-06-14 | 스미또모 가가꾸 가부시끼가이샤 | 화학증폭형 레지스트 조성물 |
| CN102781911B (zh) | 2010-02-24 | 2015-07-22 | 巴斯夫欧洲公司 | 潜酸及其用途 |
| CN107207456B (zh) | 2015-02-02 | 2021-05-04 | 巴斯夫欧洲公司 | 潜酸及其用途 |
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2001
- 2001-07-10 JP JP2001209543A patent/JP4226808B2/ja not_active Expired - Fee Related