JP2002090127A5 - - Google Patents
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- JP2002090127A5 JP2002090127A5 JP2000283288A JP2000283288A JP2002090127A5 JP 2002090127 A5 JP2002090127 A5 JP 2002090127A5 JP 2000283288 A JP2000283288 A JP 2000283288A JP 2000283288 A JP2000283288 A JP 2000283288A JP 2002090127 A5 JP2002090127 A5 JP 2002090127A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000283288A JP4503804B2 (ja) | 2000-09-19 | 2000-09-19 | 三次元情報取得方法及び共焦点走査型顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000283288A JP4503804B2 (ja) | 2000-09-19 | 2000-09-19 | 三次元情報取得方法及び共焦点走査型顕微鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002090127A JP2002090127A (ja) | 2002-03-27 |
| JP2002090127A5 true JP2002090127A5 (enExample) | 2007-10-25 |
| JP4503804B2 JP4503804B2 (ja) | 2010-07-14 |
Family
ID=18767673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000283288A Expired - Fee Related JP4503804B2 (ja) | 2000-09-19 | 2000-09-19 | 三次元情報取得方法及び共焦点走査型顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4503804B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4844157B2 (ja) * | 2006-02-20 | 2011-12-28 | 株式会社ニコン | 走査型顕微鏡 |
| JP5094519B2 (ja) * | 2008-04-14 | 2012-12-12 | オリンパス株式会社 | 走査型レーザ顕微鏡 |
| JP5102107B2 (ja) * | 2008-05-23 | 2012-12-19 | オリンパス株式会社 | 顕微鏡装置 |
| CN105043297B (zh) * | 2015-09-15 | 2017-12-01 | 中南大学 | 一种无损、快速tsv结构侧壁形貌测量方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2928548B2 (ja) * | 1989-08-02 | 1999-08-03 | 株式会社日立製作所 | 立体形状検出方法及びその装置 |
| JPH0996512A (ja) * | 1995-09-29 | 1997-04-08 | Takaoka Electric Mfg Co Ltd | 立体形状計測装置 |
| JP2000074621A (ja) * | 1998-08-27 | 2000-03-14 | Murata Mfg Co Ltd | 変位測定方法 |
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2000
- 2000-09-19 JP JP2000283288A patent/JP4503804B2/ja not_active Expired - Fee Related