JP2002090127A5 - - Google Patents

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Publication number
JP2002090127A5
JP2002090127A5 JP2000283288A JP2000283288A JP2002090127A5 JP 2002090127 A5 JP2002090127 A5 JP 2002090127A5 JP 2000283288 A JP2000283288 A JP 2000283288A JP 2000283288 A JP2000283288 A JP 2000283288A JP 2002090127 A5 JP2002090127 A5 JP 2002090127A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2000283288A
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Japanese (ja)
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JP4503804B2 (ja
JP2002090127A (ja
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Priority to JP2000283288A priority Critical patent/JP4503804B2/ja
Priority claimed from JP2000283288A external-priority patent/JP4503804B2/ja
Publication of JP2002090127A publication Critical patent/JP2002090127A/ja
Publication of JP2002090127A5 publication Critical patent/JP2002090127A5/ja
Application granted granted Critical
Publication of JP4503804B2 publication Critical patent/JP4503804B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000283288A 2000-09-19 2000-09-19 三次元情報取得方法及び共焦点走査型顕微鏡 Expired - Fee Related JP4503804B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000283288A JP4503804B2 (ja) 2000-09-19 2000-09-19 三次元情報取得方法及び共焦点走査型顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000283288A JP4503804B2 (ja) 2000-09-19 2000-09-19 三次元情報取得方法及び共焦点走査型顕微鏡

Publications (3)

Publication Number Publication Date
JP2002090127A JP2002090127A (ja) 2002-03-27
JP2002090127A5 true JP2002090127A5 (cg-RX-API-DMAC10.html) 2007-10-25
JP4503804B2 JP4503804B2 (ja) 2010-07-14

Family

ID=18767673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000283288A Expired - Fee Related JP4503804B2 (ja) 2000-09-19 2000-09-19 三次元情報取得方法及び共焦点走査型顕微鏡

Country Status (1)

Country Link
JP (1) JP4503804B2 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4844157B2 (ja) * 2006-02-20 2011-12-28 株式会社ニコン 走査型顕微鏡
JP5094519B2 (ja) * 2008-04-14 2012-12-12 オリンパス株式会社 走査型レーザ顕微鏡
JP5102107B2 (ja) * 2008-05-23 2012-12-19 オリンパス株式会社 顕微鏡装置
CN105043297B (zh) * 2015-09-15 2017-12-01 中南大学 一种无损、快速tsv结构侧壁形貌测量方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928548B2 (ja) * 1989-08-02 1999-08-03 株式会社日立製作所 立体形状検出方法及びその装置
JPH0996512A (ja) * 1995-09-29 1997-04-08 Takaoka Electric Mfg Co Ltd 立体形状計測装置
JP2000074621A (ja) * 1998-08-27 2000-03-14 Murata Mfg Co Ltd 変位測定方法

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