JP2002083769A5 - - Google Patents
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- JP2002083769A5 JP2002083769A5 JP2000269298A JP2000269298A JP2002083769A5 JP 2002083769 A5 JP2002083769 A5 JP 2002083769A5 JP 2000269298 A JP2000269298 A JP 2000269298A JP 2000269298 A JP2000269298 A JP 2000269298A JP 2002083769 A5 JP2002083769 A5 JP 2002083769A5
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- JP
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Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000269298A JP2002083769A (ja) | 2000-09-05 | 2000-09-05 | 半導体薄膜及び半導体薄膜の製造方法 |
US09/946,898 US6746942B2 (en) | 2000-09-05 | 2001-09-05 | Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device |
KR1020010054334A KR100862542B1 (ko) | 2000-09-05 | 2001-09-05 | 반도체 박막, 반도체 박막의 제조 방법, 및 단결정 반도체박막의 제조 장치, 및 단결정 박막의 제조 방법, 단결정박막 기판, 반도체 장치 |
CN01145068A CN1354495A (zh) | 2000-09-05 | 2001-09-05 | 半导体薄膜及其生产方法和设备、及生产单晶薄膜的方法 |
US10/828,882 US7365358B2 (en) | 2000-09-05 | 2004-04-21 | Semiconductor thin film and method of fabricating semiconductor thin film, apparatus for fabricating single crystal semiconductor thin film, and method of fabricating single crystal thin film, single crystal thin film substrate, and semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000269298A JP2002083769A (ja) | 2000-09-05 | 2000-09-05 | 半導体薄膜及び半導体薄膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2002083769A JP2002083769A (ja) | 2002-03-22 |
JP2002083769A5 true JP2002083769A5 (ja) | 2007-03-15 |
Family
ID=18755934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000269298A Pending JP2002083769A (ja) | 2000-09-05 | 2000-09-05 | 半導体薄膜及び半導体薄膜の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2002083769A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004079812A (ja) * | 2002-08-19 | 2004-03-11 | National Institute For Materials Science | 非熱的結晶回復法および微細加工方法 |
JP5005881B2 (ja) * | 2004-05-13 | 2012-08-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
TW200703667A (en) | 2005-07-05 | 2007-01-16 | Adv Lcd Tech Dev Ct Co Ltd | Thin-film transistor, method for manufacturing thin-film transistor, and display using thin-film transistors |
JP5788855B2 (ja) * | 2012-11-20 | 2015-10-07 | 株式会社日本製鋼所 | レーザ処理方法およびレーザ処理装置 |
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- 2000-09-05 JP JP2000269298A patent/JP2002083769A/ja active Pending