JP2002070870A5 - - Google Patents

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Publication number
JP2002070870A5
JP2002070870A5 JP2000257550A JP2000257550A JP2002070870A5 JP 2002070870 A5 JP2002070870 A5 JP 2002070870A5 JP 2000257550 A JP2000257550 A JP 2000257550A JP 2000257550 A JP2000257550 A JP 2000257550A JP 2002070870 A5 JP2002070870 A5 JP 2002070870A5
Authority
JP
Japan
Prior art keywords
film
spindle device
shows
sectional drawing
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000257550A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002070870A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000257550A priority Critical patent/JP2002070870A/ja
Priority claimed from JP2000257550A external-priority patent/JP2002070870A/ja
Publication of JP2002070870A publication Critical patent/JP2002070870A/ja
Publication of JP2002070870A5 publication Critical patent/JP2002070870A5/ja
Pending legal-status Critical Current

Links

JP2000257550A 2000-08-28 2000-08-28 軸受装置 Pending JP2002070870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000257550A JP2002070870A (ja) 2000-08-28 2000-08-28 軸受装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000257550A JP2002070870A (ja) 2000-08-28 2000-08-28 軸受装置

Publications (2)

Publication Number Publication Date
JP2002070870A JP2002070870A (ja) 2002-03-08
JP2002070870A5 true JP2002070870A5 (enExample) 2007-07-12

Family

ID=18745992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000257550A Pending JP2002070870A (ja) 2000-08-28 2000-08-28 軸受装置

Country Status (1)

Country Link
JP (1) JP2002070870A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0612979D0 (en) 2006-06-30 2006-08-09 Renishaw Plc Gas bearing fabrication method
JP5064135B2 (ja) * 2007-08-07 2012-10-31 新日本製鐵株式会社 超音波衝撃処理装置用打撃ピンホルダー
GB2456344B (en) * 2008-01-14 2012-04-18 Upm Ltd Aerostatic bearing
JP5593842B2 (ja) * 2010-05-31 2014-09-24 日本精工株式会社 エアースライド装置
DE102013225398B4 (de) 2013-12-10 2017-05-11 Eagleburgmann Germany Gmbh & Co. Kg Lagerbauteil mit Diamantinnenbeschichtung
JP6869641B2 (ja) * 2016-03-28 2021-05-12 株式会社日立インダストリアルプロダクツ すべり軸受およびすべり軸受を備えた電動機
CN106979227B (zh) * 2017-05-17 2023-06-02 西安工业大学 多孔集成节流的整体式气体静压轴承
CN111720440A (zh) * 2019-03-22 2020-09-29 上海微电子装备（集团）股份有限公司 一种气浮垫结构

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