JP2002057196A5 - - Google Patents

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Publication number
JP2002057196A5
JP2002057196A5 JP2000238654A JP2000238654A JP2002057196A5 JP 2002057196 A5 JP2002057196 A5 JP 2002057196A5 JP 2000238654 A JP2000238654 A JP 2000238654A JP 2000238654 A JP2000238654 A JP 2000238654A JP 2002057196 A5 JP2002057196 A5 JP 2002057196A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000238654A
Other languages
Japanese (ja)
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JP2002057196A (ja
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Publication date
Application filed filed Critical
Priority to JP2000238654A priority Critical patent/JP2002057196A/ja
Priority claimed from JP2000238654A external-priority patent/JP2002057196A/ja
Publication of JP2002057196A publication Critical patent/JP2002057196A/ja
Publication of JP2002057196A5 publication Critical patent/JP2002057196A5/ja
Pending legal-status Critical Current

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JP2000238654A 2000-08-07 2000-08-07 プローブ方法及びプローブ装置 Pending JP2002057196A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000238654A JP2002057196A (ja) 2000-08-07 2000-08-07 プローブ方法及びプローブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000238654A JP2002057196A (ja) 2000-08-07 2000-08-07 プローブ方法及びプローブ装置

Publications (2)

Publication Number Publication Date
JP2002057196A JP2002057196A (ja) 2002-02-22
JP2002057196A5 true JP2002057196A5 (de) 2007-09-20

Family

ID=18730324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000238654A Pending JP2002057196A (ja) 2000-08-07 2000-08-07 プローブ方法及びプローブ装置

Country Status (1)

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JP (1) JP2002057196A (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7262575B2 (en) * 2004-12-01 2007-08-28 Bio-Rad Laboratories, Inc. Method and apparatus for precise positioning of an object with linear stepper motors
JP5120017B2 (ja) * 2007-05-15 2013-01-16 東京エレクトロン株式会社 プローブ装置
JP2009147320A (ja) * 2007-11-21 2009-07-02 Horiba Ltd 検査装置
JP5317330B2 (ja) * 2008-09-02 2013-10-16 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
JP5384170B2 (ja) 2009-03-31 2014-01-08 東京エレクトロン株式会社 コンタクトパラメータの設定方法、コンタクトパラメータの設定用プログラム及びコンタクトパラメータの設定用プログラムが記録された記録媒体
CN113030691B (zh) * 2019-12-24 2022-07-19 芯恩(青岛)集成电路有限公司 芯片电性测试探针头对位方法、系统、存储介质及终端
CN113086238A (zh) * 2021-03-29 2021-07-09 中国航空制造技术研究院 一种基于基准孔孔位测量的自动制孔孔位在线修正方法
CN114441555A (zh) * 2022-01-14 2022-05-06 上海世禹精密机械有限公司 自动化焊球阵列封装植球检测系统
CN115090917B (zh) * 2022-08-25 2023-01-10 成都飞机工业(集团)有限责任公司 一种制孔方法、装置、存储介质及设备
CN115902327B (zh) * 2023-02-23 2023-05-26 长春光华微电子设备工程中心有限公司 一种探针台定位补偿的标定方法和探针台

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