JP2002055711A - Production system and production method and producing facility design system and producing facility design method and producing facility manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform efficient management in a relativelys all-scaled factory by accurately simulating various processing in an actual production line. SOLUTION: This production system is composed of an actual production line 11 for actually manufacturing a product and a virtual production line 12 obtained by constructing the actually same function as the actual production line 11 in a computer, and various processing is simulated in the virtual production line 12 so that efficient management in the actual production 11 can be performed. In this production method, various information in the actual production line 11 is transferred to the virtual production line 12, and the optimal way of advancing a lot is calculated in the virtual production line 12 based on the transferred information, and work instruction data based on the result of the calculation are transferred to the actual production line 11, and the production is performed in the actual production line 11 based on the transferred work instruction data.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production system, a production method, a production equipment design system, a production equipment design method, and a production equipment production method for efficiently operating a factory.

[0002]

2. Description of the Related Art Usually, there are several to several tens of devices used in various processes in a typical semiconductor factory in the past, for the same application (eg, an etching device, a CVD device, etc.). Therefore, since many lots are processed in the same type of apparatus, there is a problem that it is difficult to grasp the flow of the lots. As a system to grasp the flow of a lot, there is a software called Manshin by Taishin. This involves inputting information on the equipment used, processing time, equipment group, etc. in each process of the product, flowing the lot on a computer, grasping the flow of the lot, optimizing the production line,
They are trying to do a production plan.

In order to optimize a production line and perform a production plan, various kinds of information such as lot progress information on an actual production line, information on the state of the apparatus, and product process information are input to a computer. Then, it is necessary to calculate a lot progress prediction using the various information as input data, and transfer the resulting information to the actual production line as a work instruction. However, in a large-scale production system that processes thousands of lots per month, that is, tens of thousands of wafers, the fact is that various processes are simplified and calculations are performed due to the limitation of computer processing capacity. Therefore, an accurate simulation is not always performed.

As a similar method, information of a production trial system and information of a virtual system are exchanged via shared information, and the results of simulation are used to manage the production or trial production process. A manufacturing management system has been proposed (Japanese Patent Laid-Open No. Hei 10-207506). However, although this method mainly incorporates device simulation, process simulation, circuit, shape, and logic simulation into the computer system,
There is a problem that a lot flow portion is not included, and the lot flow cannot be predicted.

FIG. 20 shows an example of a calculation result of the throughput and the construction period obtained by using the Manshim. In this figure, the horizontal axis is the number of lots in the production line (= Work in Process: W
IP), and the vertical axis indicates throughput (production volume per month) and construction period. From this figure, when the WIP is small, the throughput is almost proportional to the WIP, and the construction period is a constant value. In this state, lot waiting does not occur much. As WIP increases, the slope of the throughput gradually decreases, and eventually the throughput becomes a constant value. This throughput has been found to correspond to the processing power of the bottleneck device. In this region, it can be seen that the construction period increases in proportion to the WIP.

In order to increase the productivity of a production line, it is necessary to increase the throughput and shorten the construction period. In order to minimize the construction period, it is necessary to reduce the number of waiting lots. In this figure, it is necessary to bring the WIP near A. However, it is not practical because the throughput is too small. On the other hand, in order to maximize the throughput, it is sufficient to increase the WIP as shown in the vicinity of C in the figure, but the construction period becomes longer. Therefore, it is considered appropriate to operate near point B in the figure.

However, the production is caused by the maintenance or failure of the apparatus, the fluctuation of the arrival of the product at the bottleneck apparatus, and the like, as shown by the broken line in FIG. In order to prevent such a decrease in throughput, it is necessary to accurately predict the progress of the lot, perform a process that is optimal to increase the throughput and shorten the construction period. However, as described above, in a large-scale production system, various processes must be simplified and calculated due to the limitation of the processing capacity of a computer, and it is difficult to accurately predict the progress of a lot.

[0008] Several options may arise when processing a lot in an apparatus. For example, in a batch apparatus capable of simultaneously processing a plurality of lots, when one lot is a waiting lot, it is necessary to select whether to process the lot immediately or wait until another lot comes. Further, when a low-priority lot is a waiting lot in a certain apparatus, and a high-priority lot is expected to come after a certain time, the low-priority lot should be processed first or waited. It is necessary to select whether the lot with the higher priority should be processed first. In addition, a continuous process (for example, pretreatment →
When oxidation (or CVD) → post-processing, within 24 hours) is introduced, there is a problem as to when to start the processing.

[0009] The method of selecting the optimum one from the above plurality of options is considered to vary depending on the situation. However, in the above-mentioned Mansim, rules for selecting options are uniquely determined, and lot progress is calculated under the conditions. For this reason, when the above-mentioned options arise, such calculations are not possible in Manshim, which has been a major problem to be solved.

[0010]

As described above, conventionally, in order to optimize a semiconductor production line and perform a production plan, it is necessary to simulate various processes in an actual production line. Therefore, the actual situation is that various processes are simplified for calculation, and it has been difficult to perform an accurate simulation. For this reason, it was difficult to accurately predict the progress of the lot.
In addition, the method of selecting the optimum one from a plurality of options varies depending on the situation, and it has been difficult to select the optimum one by the conventional method.

The present invention has been made in consideration of the above circumstances, and has as its object to provide a production system, a production method, and a production facility for efficiently operating a relatively small factory. It is to provide a design system, a production equipment design method, and a production equipment production method.

[0012]

To solve the above problems, the embodiments of the present invention can provide the following configurations.

[0013] That is, another embodiment of the present invention relates to a production system for efficiently operating a relatively small factory, an actual production line for actually producing a product, and an actual production line. A virtual production line in which substantially the same function is built in a computer, means for transferring various information in the actual production line to the virtual production line, and an optimal means in the virtual production line based on the transferred information. It is characterized by comprising means for calculating a lot progressing method, and means for transferring work instruction data based on the calculation result to the actual production line.

Another embodiment of the present invention uses a virtual production line in which a product that actually manufactures a product and a virtual production line that has substantially the same function as the actual production line in a computer are used. A production method for enabling efficient operation in an actual production line by simulating on a production line, comprising: transferring various information in the actual production line to the virtual production line; and Calculating an optimal lot progression method on the virtual production line based on the information; transferring work instruction data based on the calculation result to the actual production line; and Starting production on an actual production line.

Here, preferred embodiments of the present invention include the following.

(1) The transfer of various information from the actual production line to the virtual production line, the calculation of the optimal lot progress in the virtual production line, and the transfer of the work instruction data from the virtual production line to the actual production line are performed in real time. To be repeated.

(2) The various information transferred to the virtual production line includes the order quantity of each production, the progress status of the lot, the status of the device (the operation status of the device, the performance status of the device, the defect occurrence status, the QC status, the device status). Time required for regular maintenance, time required for regular maintenance), worker status (worker's work status, work status), and product test results.

(3) When there are two or more options in a lot processing method or a processing order, a step of performing a lot progress prediction calculation for all or some of these options is performed. Inputting a determination condition for determining an optimal processing method or processing order, determining an optimal processing method or processing order based on the determination condition, and an optimum processing method or processing order To give a work instruction to the production line.

(4-1) The means or step for calculating the optimal lot progression method is to find a solution that has the shortest manufacturing period and the maximum production per month.

(4-2) The means or step for calculating the optimum lot progressing method is based on the priority given to the ordered product, and finds a solution in which the higher the priority, the shorter the manufacturing period is. Things.

(4-3) The means or step for calculating an optimum lot progressing method is a method of calculating a lot priority prediction using a lot progress prediction in a virtual production line when manufacturing a high priority product with priority. To control processing conditions such as the start time of processing of low-quality products.

(5) The test result of the product produced on the actual production line is transferred to the virtual production line, and the next input plan is determined by collating with the order quantity of the product.

(6) The actual production line is a semiconductor production line.

(7-1) When performing maintenance on the device,
Using the calculation of the expected lot progress of the virtual production line to preferentially process a lot that is not affected by the maintenance or has a small influence.

(7-2) An instruction to give priority to a product with a higher priority before a certain period of time before the periodic maintenance of the device is performed.

(7-3) A predetermined time before the regular maintenance of the apparatus is performed, on a computer screen or a similar method, the maintenance time, necessary personnel, replacement parts, or instructions for replenishment procedures for the next and subsequent maintenance. Is displayed.

(8-1) When a failure of a device is predicted, an instruction is given to process a product with a higher priority with priority.

(8-2) When a failure of the device is predicted, a method of dealing with the failure is displayed on a computer screen or in a similar manner.

(9) When it is found that the data of a lot that has passed a certain process has an abnormal value, an abnormal value may be output among lots that have passed the process by a virtual production line. To extract a lot and put the lot on standby.

(10) Selecting a rest time of the worker on the line so that the influence on the lot flow is minimized.

(11) When the product to be re-fed is changed, it is calculated in the virtual production system whether or not there is an excess or deficiency of the device due to a change in the device to be used and its use time. Modification of equipment to replace excess or deficiency, replacement of equipment, etc. should be obtained in the case of minimizing cost or minimizing the period, and displayed on a computer screen or a similar method.

(12) Use of a method of minimizing a space, a method of minimizing a conductor, a method of minimizing an operator, or a method of minimizing a utility when determining a layout of a device in a line. .

(13) When the number of products is expected to decrease due to the discarding of wafers or chips due to the occurrence of a large number of defects, etc., a new lot is given a higher priority and input and processing is performed, or a standby is performed halfway. To process a lot in a high priority order.

(14) Perform inventory management of the direct material or the intermediate material, and perform inventory management of the direct material or the intermediate material so as to minimize the inventory.

In the above embodiment of the present invention, the semiconductor factory
Especially, in order to operate a production line efficiently in a relatively small semiconductor factory (actual production line: mini-fab) of several thousand wafers or less per month, products (including prototypes) are virtually Virtual factory to manufacture (virtual production line)
Is provided. If the size of this mini-fab is calculated as 25 wafers in one lot, the number of lots is 50 lots or more.
500 lots can be processed. In addition, the number of the same type of processing apparatus is about one to several, and the whole factory processes about 10 to 1,000 apparatuses. Of course, such processing capacity and factory scale fluctuate due to multifunctionalization of the apparatus.

In such a mini-fab, lot progress information from an actual production line for actually manufacturing a product and information on the status of the apparatus are transferred to the virtual production line. Then, the lot progress prediction is calculated by using the information and the process information of the product in the virtual production line as input data. Information such as the optimum processing lot and order obtained as a result of the calculation is output and transferred as a work instruction to the actual production line. In the actual production line, work is performed based on the transferred work instructions. This enables efficient operation of the production line.

In the process of calculating a lot progress prediction using lot progress information, information on the status of the apparatus, and process information of a product as input data, some options may be generated when processing a lot in a certain apparatus. . For example,
In batch equipment that can process multiple lots simultaneously,
When one lot is a waiting lot, a selection may be made as to whether to process the lot immediately or wait until another lot comes. If another lot is expected to come soon, it may be better to wait for that lot, while if the lot is unlikely to come soon,
It is considered that it is better to process only one lot. Therefore, it is considered that the optimum processing method changes depending on the situation. Also, when a low-priority lot is a waiting lot in a certain apparatus and a high-priority lot is expected to come after a certain time, the low-priority lot should be processed first or waited. You need to make a choice.

In the embodiment of the present invention for such various options, calculation is performed for all or some of them. When there are a plurality of locations to be selected, lot progress is predicted for all combinations or some of the combinations. This operation is performed for the calculation target time specified by the input data.

In a large-scale semiconductor factory producing tens of thousands or more wafers per month, there are several to several tens of devices of the same type, and it is very difficult to calculate the combination described above. An enormous amount of calculation was required, and such calculation was practically difficult. On the other hand, in a semiconductor factory that produces thousands of wafers or less per month, the number of devices of the same type is at least one, and at least several, and devices that are likely to have multiple options, for example, charging multiple lots Equipment is less than 1/3 of the total,
Opportunities to make a choice are small compared to large semiconductor factories that process tens of thousands of wafers per month. Therefore, the number of combinations is reduced, and the time for which the lot progress is calculated can be extended.

Specifically, in a conventional large-scale factory, only a progress of, for example, 10 minutes can be calculated due to a limitation of a computer. On the other hand, in a mini-fab targeted by the embodiment of the present invention, the same computer is used. For example, one week's progress can be calculated, which makes it practical. Based on this lot progress forecast,
It is possible to determine the optimum processing method or the order of the processing in light of the judgment condition for determining the optimum processing method or the processing order that is input separately. This processing method is instructed to the production line. As a result, the lot flows efficiently, the work period is short, and the throughput can be increased. Therefore, the productivity of semiconductor wafer production is improved.

By utilizing such a method of manufacturing a semiconductor wafer, it is possible to perform high-priority processing of a high-priority product and efficient processing of a low-priority product within a possible range.
Further, it is possible to optimize the lot processing order when the maintenance method or the maintenance of the apparatus is being performed or is about to be performed.

[0042]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the illustrated embodiments.

(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
FIG. 1 is a block diagram illustrating an example of a semiconductor production system according to an embodiment.

In the actual factory 14 (actual production line) where semiconductor products (and prototypes) are actually produced, there are a group of production equipments, and the products flow through each actual production line in the actual factory 14. The lot progress status of each product is managed by a computer in the actual factory 14. For example, when an appropriate process is performed on a computer screen, it is possible to know in which device a certain lot is located, whether the lot is being processed, is in a waiting state, or is being transported. In addition to the lot progress data, the computer stores information on the state of the apparatus (operating or idling, under maintenance, under failure, scheduled maintenance, etc.).

Various kinds of information in the actual factory 14 are manually or automatically transferred to the virtual factory 13 (virtual production line) via a network as a data transmission medium 16. In the case of manual operation, a computer operator of the actual factory 14 inputs various information. In the case of automatic, various sensors detect various states of the real factory 14, and the detected data is transferred to the virtual factory 13. Here, various types of information on the actual production line 14 include the order quantity of each production, the progress status of the lot, the status of the device (the operation status of the device, the performance status of the device, the defect occurrence status, the QC status, and the regular maintenance of the device). Time, time required for regular maintenance), worker status (worker's work status, work status), product test results, and the like.

The virtual factory 13 has exactly the same functions as the real factory 14 constructed by a computer. More specifically, the virtual factory 13 has a lot progress of the real factory 14,
A status grasping program is provided for grasping the operating status of the actual factory 14 based on the status of the equipment, the situation of the workers, and numerical information for grasping the test results of the products. It has a function to derive the situation by simulation. Of course, means for deriving a simulation result based on various information is not limited to software, and predetermined hardware may be a component of the simulation result deriving means.

Due to the current performance of computers, it is impossible to virtually construct the same function in a large-scale semiconductor factory that produces tens of thousands or more wafers per month. Therefore, the present embodiment is intended for a relatively small semiconductor factory with a monthly production of several thousand wafers or less. In addition, if a large-scale semiconductor factory is divided into a plurality of small-scale semiconductor factories, the same function is built by a computer for each small-scale factory in a current computer system. It is possible.

In the virtual factory 13 of this embodiment, the process information of the product (information on what kind of processing is performed on a certain product in which device group and how long each takes) is stored in the computer. In addition, information on a group of devices existing in the actual production line or devices that are being considered for introduction into the production line is stored. And the actual factory 1
Information on the progress of the lot at a certain point transferred from the 4 side,
The simulation of the lot progress prediction within a certain time range is performed by using information on the state of the apparatus as input data.

The simulation result in the virtual factory 13 is transferred as a work instruction to the actual factory 14 via the network as the data transmission medium 15. For example, the operator is notified of the time at which the lot processing is to be completed in a certain apparatus, an instruction of the next lot to be input to the apparatus, and where to take the completed lot next, or to which transport apparatus. Is given. The transfer of various information of the virtual factory 13 from the real factory 14 and the virtual factory 13
Calculation of the optimal lot procedure and virtual factory 13
The transfer of the work instruction data from the factory to the actual factory 14 is repeatedly performed in real time. Examples of instruction contents under various conditions are shown in (1) to (9) described later.

The operation of the present semiconductor production system in which the virtual factory 13 specifically calculates the progress of a lot using the information transferred from the real factory 14 will be described. As shown in FIG. 2, the recipe information of the product, the apparatus information, the line status (lot progress status), and the determination condition of the optimal lot flow are input to the virtual factory 13. The virtual factory 13 calculates the lot progress based on these input data, for example,
Outputs the lot progress forecast result for one month. FIG. 3 (a)
4 (e), the product recipe information (FIG. 3)
(A)), device information (FIG. 3 (b)), line status (lot progress) (FIG. 3 (c)), optimal flow determination conditions (FIG. 4 (d)), one month Lot progress forecast (Fig. 4
The example of (e) is shown. FIG. 5 is a diagram schematically illustrating an example of a flow of a lot at a certain time.

In performing the above-described lot progress prediction calculation, there may be two or more options in various processing methods or processing orders. For example, in a batch apparatus that can process a plurality of lots simultaneously, if one lot is a waiting lot, whether the lot should be processed immediately,
Alternatively, a choice must be made as to whether to wait for another lot. This is shown in FIG. 6 as an example. FIG.
In the case of option 1 in FIG. Specifically, in the second step (Equipment B), this is an example of the lot progress when lot 1 is processed without waiting for the second lot 2. FIG. 7 shows an example of the lot progress when option 2 in FIG. 6 is selected. Specifically, FIG. 7 shows an example of the lot progress when the lot 1 is processed after waiting for the second lot 2 in the second step (Equipment B).

Comparing these FIGS. 5 and 7, the construction period for three processes of lot 1 is longer in FIG. 7 than in FIG. The construction period of lot 2 is shorter in FIG. Assuming that these three steps are all steps, at time 1, the output of FIG.
1 (lot), output = 0 (lot) in FIG. 7, at time 2, output = 1 (lot) in FIG. 5, output = 2 in FIG.
(Lot). For example, if the delivery date is time 1, the progress of FIG. 5 is desirable, and if the delivery date is time 2,
The progress of FIG. 7 is desirable.

When a low-priority lot is a waiting lot in a certain apparatus and it is expected that a high-priority lot will come after a certain time, whether the low-priority lot should be processed first. Or a choice of whether to wait.

FIG. 8 is a diagram in which these various options are written in a tree shape. In the present embodiment, for such various options, a lot progress prediction is calculated in all cases or in some cases. Then, a lot progress prediction calculation result is derived for each option. As a result, it is possible to calculate the lot progress prediction according to the selection method of various options. Then, as shown in FIG. 8, a method of progressing the lot considered to be optimal is selected from the results of the calculation of the lot progress prediction. At that time, as a method of extraction, for example, increase the overall throughput and select one that shortens the construction period, make a certain priority lot flow in a short construction period, or adopt a flow method that minimizes the cost Or it is possible. These criteria must be separately input by the operator to the virtual factory 13 from input means (not shown). That is, the operator refers to the lot progress prediction calculation result for each option displayed on the monitor screen connected to the virtual factory 13, sets the above-described lot progress extraction conditions, and determines the optimum lot progress extraction condition. Determine progress. Here, the virtual factory 13 is determined according to the priority conditions based on the amount obtained from the lot progress prediction calculation result, for example, the output amount in a certain period, the average construction period, the output amount of a high-priority production amount, the average construction period, and the like. Automatically select the best progress. Alternatively, the operator can manually select an optimal method from among several results of the progress prediction calculation output as a result.

It is not necessary to derive the lot progress prediction calculation result for all options, and the calculation result may be calculated only for the extraction condition previously set by the operator.

Next, the virtual factory 13 determines how to proceed with the lot considered to be optimal, and then transfers the result to the real factory 1.
Issue a work instruction to the 4 side. More specifically, as described above, the virtual factory 13 notifies the worker of the time at which the lot processing ends in the apparatus, for example, to the actual factory 14, and instructs the next lot to be put into the apparatus, Then, the actual factory 14 is instructed where the finished lot is to be taken next, or to which transport device it should be moved. Further, an instruction is given on how to select an option when various options occur (how to process). By starting production at the actual factory 14 according to this instruction, efficient operation of the actual factory 14 becomes possible.

As described above, according to this embodiment, the actual factory 14 that actually manufactures a product and the virtual factory 13 that has substantially the same function as the actual factory 14 in a computer are used. Virtual factory 13
By performing the simulation, efficient operation in the actual factory 14 becomes possible. Particularly, in a relatively small semiconductor factory with a monthly production of several thousand wafers or less, various processes in the real factory 14 can be accurately simulated by the virtual factory 13, so that the progress of the lot must be strictly predicted. And the efficiency of operation in small factories can be improved.

Next, examples of instruction contents under various conditions in this embodiment will be described.

(1) In an apparatus in the actual factory 14,
It is assumed that a lot with a high priority arrives after 15 minutes. This information is transferred to the virtual factory 13,
The virtual factory 13 performs a simulation of immediately starting the processing of the current lot and a simulation of not starting the processing of the current lot but waiting for a high-priority lot to arrive and starting the processing. From the results of both simulations, it was found that it was more appropriate to wait for the arrival of the lot with the higher priority. This result was transferred to the actual factory 14 side, and a work instruction was issued. As a result, it became possible to manufacture high-priority lots in a short construction period.

(2) When it is necessary to perform maintenance on a certain device in the real factory 14, a simulation in the virtual factory 13 optimizes a lot that is not affected by the maintenance or that preferentially processes a lot that is less affected by the maintenance. Lot expected progress results. By instructing the work, the actual factory 1 at the time of equipment maintenance
4 became possible to operate efficiently. Further, the maintenance can be performed efficiently by displaying the maintenance time, necessary personnel, replacement parts, or the replenishment procedure for the next and subsequent maintenances on a computer screen a predetermined time before the regular maintenance of the apparatus is performed. I was able to.

(3) When it is predicted that a device failure will occur, it is more appropriate to preferentially process products with higher priority by simulation in the virtual factory 13 in consideration of the failure prediction. was gotten. By giving an instruction based on the result, it becomes possible to manufacture a lot with a high priority without delay of the construction period. Further, by displaying the troubleshooting method on the computer screen or a method similar thereto, it is possible to smoothly deal with the failure and to prevent a decrease in throughput (a prolonged construction period).

(4) When it is found that the data of a lot that has passed a certain process has an abnormal value, a lot that has a possibility of giving an abnormal value among lots that have passed the process by the virtual factory 13 Was extracted. The lot was designated as a standby lot, and subsequent investigation revealed that it could not be a non-defective product. In this way, it is possible to minimize the effect of the process abnormality on the product.

(5) By simulation in the virtual factory 13, the optimum rest time of the worker was obtained. As a result, it was found that the processing in a certain step was completed after 10 minutes, and that no work was performed for 70 minutes thereafter, and it was found that it was appropriate to take a break during that time. Based on the result, the user was instructed to take a 60-minute break after the process. As a result, the worker was able to take a break without lowering the throughput (prolonging the construction period).

(6) When the product to be resold is changed, it is calculated in the virtual factory 13 whether the excess or deficiency of the device occurs due to the change of the device to be used or the use time thereof. As a result, it was found that excess or deficiency of the device occurred. Remodeling of the device or replacement of the device to eliminate the excess or deficiency was requested in the case of minimizing the cost or in the case of minimizing the period, and displayed on a computer screen or a similar method. Based on the results, an optimal device replacement procedure was determined and executed. As a result, the product can be changed smoothly.

(7) A method of minimizing space, a method of minimizing traffic lines, a method of minimizing the number of workers, and a method of minimizing utility when deciding a layout of an apparatus in an actual production line. In this way, the optimum layout was determined. As a result, it has been found that a certain layout can be obtained as an optimal solution when it is obtained by a method of minimizing a space and a method of minimizing a flow line, and the number of workers can be reduced and the utility can be reduced. By adopting this layout, productivity was improved.

(8) It is expected that the number of products will decrease due to the discarding of product wafers or chips, which is the reason for the large number of defects. In this case, a new lot is input and processed with a higher priority, or a lot on standby in the middle is processed with a higher priority. As a result, it was possible to prevent a significant decrease in the number of non-defective products.

(9) In the virtual factory 13, inventory management of the direct material and the intermediate material was performed. As a result, it was possible to reduce the stock of the direct material and the intermediate material.

(Modification) The present invention is not limited to the above embodiments. The virtual factory used in the present invention does not necessarily need to be capable of virtually constructing the same processing as the actual factory virtually, but may be any that can simulate the actual factory to some extent. Therefore, the present computer system can be applied to a larger semiconductor factory. The network is not necessarily limited to the Internet, but may be any network that can perform two-way data communication.

In the first embodiment, the semiconductor production system has been described as an example. However, the present invention is not limited to this. Applicable. Further, the present invention can be applied to an automobile or a chemical plant. The size of the system (a relatively small factory) to be used in the present invention is such that the computer used can perform the same number of calculations on the actual line, that is, the same size as the actual line. This is a range in which the processing can be virtually constructed, and if the processing capability of the computer increases in the future, it can be applied to a larger-scale system.

In the description of the present embodiment, the number of components per lot is assumed to be about 25, but the present invention is not limited to this. 1 lot = 1 sheet to any number.

As described in detail above, according to the present embodiment,
A virtual factory (virtual production line) that actually manufactures products and a virtual factory (virtual production line) that has substantially the same function as this factory built in a computer, The virtual factory calculates the optimal way to proceed with the lot based on the transferred information, and transfers the work instruction data based on the calculation result to the actual factory based on the transferred work instruction data. Since the production is performed in an actual factory, various processes in an actual production line can be accurately simulated, and efficient operation can be performed in a relatively small factory.

Further, in the present embodiment, when there are a plurality of options, by performing calculations on all or some of them, it becomes possible to select the most suitable one according to the situation. Excellent management can be performed.

(Second Embodiment) The present embodiment relates to a modification of the first embodiment.

In the first embodiment, for example, the optimum processing is performed according to the purpose of manufacturing a high-priority lot in a short construction period, the purpose of preferentially processing a lot that is not affected by maintenance or a lot that has little influence, and the like. Was explained. The present embodiment is a form in which an optimal process is obtained in order to achieve a purpose of performing a process in which power does not exceed a set value.

FIG. 9 shows a configuration of a virtual factory 13 capable of leveling power (or utility). FIG. 9 is different from FIG. 2 in that data of power / utility information and data of power / utility conditions of the apparatus are added as input data. FIGS. 10 and 11 show examples of power / utility profiles and power / utility condition data of each device. In the present embodiment, an example of a restriction on electric power will be described, and an example of a restriction on utility will be described in detail in a third embodiment.

Hereinafter, the production system of this embodiment will be described with reference to FIG.
This will be described with reference to FIGS. FIGS. 13A to 13C are diagrams for explaining a production system when power optimization is not performed, and FIGS. 13D to 13F are for explaining a production system for power optimization. FIG.

When designing a clean room, the rated value of the power used in each production device is estimated. FIG. 12 shows estimated values of these electric powers in the production system. FIG.
FIG. 3 is a diagram showing changes in electric power and temperature in an oxidation furnace.
In FIG. 12, the maximum value of the power is calculated, and a value obtained by adding a predetermined value to the maximum value is set as the rated value of the power. For example, the rated value is set to 60 kW.

The rated value of the power of the production apparatus obtained in this way is calculated for all the production apparatuses in the clean room, and the rated value of the power is added to estimate the set value of the entire power. Then, the production equipment such as wiring and piping that can withstand the set value of the whole electric power is designed.

For example, a diffusion furnace and RTA (Rapid Thermal An
In the case of a clean room using devices, power characteristics as shown in FIG. 12 are obtained for each device. FIG. 13A shows the power characteristics obtained for the diffusion furnace, and FIG. 13B shows the power characteristics obtained for the RTA apparatus. In this case, a total value of the power is calculated based on the power characteristics. FIG. 13C shows the calculated power characteristics. Figure 1
As shown in FIG. 3 (c), since the peaks of the power of both the diffusion furnace and the RTA device overlap, the peak of the total value of the power also increases, and therefore, it is necessary to set the power set value large.

The rated value of each production device is determined in consideration of a margin.
In an actual device, the value is as large as several times to several tens times the value actually used during operation. Also, each production device is not fully operational. Therefore, the total value (set value) of the electric power obtained by each production device tends to be larger than the value when the production line is operating. As described above, if the set value of the electric power is too large than the value actually used, there is a problem that production facilities such as wiring and piping become excessive, and the construction cost of the clean room becomes too high.

On the other hand, the start time of the RTA process by the RTA apparatus is delayed by 20 minutes (ΔT) from the start time of the diffusion furnace. That is, the power characteristics shown in FIG.
The power characteristics shown in (e) are superimposed. As a result, as shown in FIG. 13F, the peak of the total value of the power by the two devices becomes smaller than that in the case shown in FIG.

In the production system according to the present embodiment for optimizing the power, the lot is flowed so as not to exceed the set value of the entire power. Specifically, first, as shown in FIG. 14, a look-ahead calculation of a lot in a clean room is performed. When a lot is pre-read, for example, a diffusion furnace and RTA
(Rapid Thermal Annealing) Suppose that it turns out that an apparatus is used simultaneously. In this case, it is assumed that when each device is used at the same time, the set power value is expected to be exceeded. As shown at 231 in FIG. 14, it can be seen that the maximum value of the power exceeds the set value. Therefore, the start time of the RTA process by the RTA apparatus is delayed by 20 minutes from the start time of the diffusion furnace by a look-ahead calculation. That is, it is assumed that the maximum value of the power does not exceed the set value of the power as indicated by 232 in FIG.

In FIG. 14, the relationship between the time and the power by selecting the option 2 and the option 2a is indicated by 232. As shown by the characteristic curve 232 in FIG. 14, it can be seen that the maximum value of the electric power is suppressed below the set value. In the present invention, of the two types of possibilities, the method of flowing a lot whose power is leveled by shifting the power peaks of the two devices, that is, the option 2 and the option 2a are selected.

Thus, it is possible to perform the production that does not exceed the set value of the electric power. In addition, FIG.
In the case of (c), in order to perform the production under the condition that the electric power does not exceed the set value, it is necessary to increase the set value of the electric power. On the other hand, in the case of FIG. 13F in which the optimization is performed, the set value of the power can be reduced. According to the present embodiment, it is possible to derive a condition that does not exceed the set power value while keeping the set power value low.

In each actual production apparatus, a port in which several lots can be put on standby is arranged, a computer compares processes to be applied to each lot by pre-read calculation, automatically determines a processing order, and automatically determines a processing order. Lots can be loaded into production equipment from ports and processing can be started.
As a result, the operator of the production apparatus only needs to arrange the lots in the port, and labor can be saved. Or,
All may be automated using an automatic transport system.

This production system is a very effective method for processing a waiting lot, especially after maintenance of the apparatus. Of course, it can be applied even before the maintenance ends.

Alternatively, the operator may manually carry out the lot transfer, setting to the apparatus, starting the processing, and the like in accordance with a work instruction based on the look-ahead calculation of the computer.

This production system is applicable to both large-scale production lines and small-scale production lines, but is particularly effective for small-scale production lines. FIG.
FIG. 15A shows the power value of a large-scale production line, and FIG. 15B shows the power value of a small-scale production line. The thin solid line indicates the power value before leveling (conventional), the thick solid line indicates the power value after leveling (this application), the thin broken line indicates the conventional power set value, and the thick broken line indicates the power set value after leveling. As can be seen by comparing FIGS. 15A and 15B, the difference between the leveled power value and the power value before leveling is larger in the small-scale production line than in the large-scale production line.
That is, the leveling effect is large. This appears in the difference between the power set value before leveling and the power set value after leveling. That is, the difference between the power set value before leveling and the power set value after leveling is greater for a small-scale production line than for a large-scale production line. This means that the small-scale production line can significantly reduce the power set value by leveling.

As described above, the lot is flowed so as not to exceed the set value of the electric power, and the set value of the electric power is reduced, whereby the construction cost of the production equipment can be suppressed.

In the above description, the adjustment of two devices has been described as an example. However, when there are three or more devices, and when the power of the entire line is limited, it is possible to treat the same as above. it can.

There is also an advantage by applying to a certain group of devices in the line. Hereinafter, a specific description will be given. FIG.
Under the power condition described above, a limit of, for example, 500 kW is set as the power of the entire line, and further, in the lithography (Lithography) process apparatus group defined as group 1, the limit is set to 150 kW or less. Due to such restrictions for each group, the scale of wiring from the main power supply in the production line to the corresponding group of device groups can be reduced, and the line can be constructed at lower cost.

Although the time for shifting the processing is set to 20 minutes, for example, the time shift can be determined by the following method. FIG. 16 shows an example of a method for obtaining the shift amount of the start time. By shifting the start time,
It is assumed that the maximum value of the power becomes equal to the set value after 15 minutes, and that the maximum value of the power becomes 90% of the set value after 20 minutes. That is, it can be seen that the maximum value of the power does not exceed the set value when the shift amount is shifted by 15 minutes or more. Exceeding the value may cause a power outage, stop the line, cause a lot out, and cause serious damage. Therefore, in this example, the shift time is determined to be 20 minutes so that the maximum value is 90% or less of the set value. Of course, it is not limited to 90%. If the fluctuation of the electric power is large, the shift time may be set to 90% or less and the shift time may be set longer than 20 minutes. Conversely, if the fluctuation of the power is small, it is sufficient to set the shift time to 90% or more and the shift time to be shorter than 20 minutes.

The present invention is not limited to the above embodiment. Although the leveling of the electric power has been described as an example, the same leveling can be performed for utilities such as water (ultra pure water and cooling water), nitrogen gas, and special material gas. A detailed description will be given in the next embodiment.

(Third Embodiment) This embodiment is a modification of the first embodiment.

In the first embodiment, for example, the optimum processing is performed according to the purpose of manufacturing a high-priority lot in a short construction period, the purpose of preferentially processing a lot that is not affected by maintenance or a lot that is less affected by maintenance, and the like. Was explained. The present embodiment is a form in which an optimum process is obtained in order to achieve the purpose of performing a process in which the utility does not exceed the set value.

Hereinafter, the production system of this embodiment will be described with reference to FIG.
This will be described with reference to FIG. FIGS. 18A to 18C are diagrams for explaining a production system in which utility optimization is not performed, and FIGS. 18D to 18F illustrate a production system for optimizing power and utility. FIG. Hereinafter, as an example of the utility, an example of leveling ultrapure water used for cleaning which is a processing process of the production system will be described.

FIG. 17 is a diagram showing the change over time of the amount of ultrapure water used in a certain processing apparatus. According to the time change characteristic of FIG.
The first peak corresponds to a dilution process for adjusting the concentration of the drug solution. The second peak coming later than this first peak corresponds to the rinsing process.

For example, in the case of a clean room using a pre-processing device and a post-processing device, the time-dependent characteristics of the amount of ultrapure water used as shown in FIG. 17 are obtained for each device. When the time change characteristic obtained for the pretreatment device is shown in FIG. 18A and the time change characteristic obtained for the post-treatment device is shown in FIG. 18B, the total amount of the ultrapure water used is determined based on these time change characteristics. Calculate the value. FIG. 1 shows a time change characteristic of the calculated total value.
8 (c). As shown in FIG. 18C, since the peaks of the ultrapure water usage of both the pretreatment device and the post-treatment device overlap, the peak of the total value of the ultrapure water usage also increases, and accordingly, the ultrapure water consumption increases. It is necessary to increase the set value of water consumption.

On the other hand, the start time of the post-processing step by the post-processing device is delayed by 10 minutes (ΔT) from the start time of the pre-processing device. That is, the characteristics shown in FIG.
The characteristics shown in (e) are superimposed. As a result, FIG.
As shown in (f), the peak of the sum of the two ultrapure water usages is smaller than in the case shown in FIG. 18 (c).

In the production system for optimizing the utility, lots are flowed in a way that does not exceed the set value of the overall utility. Specifically, first, as shown in FIG. 19, a look-ahead calculation of a lot in a clean room is performed. Suppose that it is found that, for example, when the lot is pre-read, the pre-processing device and the post-processing device are used at the same time. In this case, it is assumed that when each device is used at the same time, the set utility value is expected to be exceeded. As shown at 281 in FIG. 19, it can be seen that the maximum value of the ultrapure water usage exceeds the set value. Therefore, the start time of the post-processing step by the post-processing device is delayed by 10 minutes from the start time of the pre-processing device by the pre-reading calculation. That is, as shown at 282 in FIG. 19, it is assumed that the maximum value of the ultrapure water usage does not exceed the set value.

In FIG. 19, reference numeral 282 shows the relationship between time and ultrapure water usage by selecting option 2 and option 2a. As can be seen from the characteristic curve 282, the maximum value of the amount of ultrapure water used is kept below the set value. In the present invention, of the two types of possibilities, the method of flowing a lot in which the utility is leveled by shifting the peak of the utility of the two apparatuses, that is, the option 2 and the option 2a are selected.

The time for starting the post-processing step by the post-processing device to be later than the starting time of the pre-processing device (here,
10 minutes) can be obtained by the same method as the method (FIG. 16) described in the second embodiment.

By using the above-mentioned method, it is possible to perform production that does not exceed the set value of the utility. In the case of FIG. 18C in which the utility is not optimized, the set value of the utility needs to be increased in order to perform the production under the condition that the utility does not exceed the set value. On the other hand, in the case of FIG. 18F where optimization is performed, the set value of the utility can be reduced. According to the present embodiment, it is possible to derive a condition that does not exceed the set value of the utility while keeping the set value of the utility low.

The present invention is not limited to the above embodiment. Although the present embodiment has been described using ultrapure water as an example of the utility, the same leveling can be performed for other utilities such as cooling water, nitrogen gas, and special material gas. As a result, since the scale of the production equipment can be reduced, the production cost of the clean room can be suppressed. further,
Similar leveling is possible for duct exhaust such as heat exhaust and housing exhaust. By performing such leveling of the exhaust amount, the exhaust pipe can be made smaller, and the power of the blower and the power of the local exhaust can be suppressed.

In particular, if the pipes for ultrapure water, cooling water, gas, etc. can be made small and can be bent using a tool or the like, welding or bonding work using a joint becomes unnecessary, and the pipe installation work becomes easy. There is a merit that can be done. As a result, the construction period for clean room construction, installation / removal of equipment, layout change, etc., is shortened.

Of course, by combining the second embodiment and the third embodiment, setting a lower set value for both the power and the utility, and flowing the lot so as not to exceed it,
The size of the equipment can be further reduced.

Further, in the second and third embodiments, the system for managing the progress of the optimum lot based on the predetermined set value of the power or the utility is used. You can also design. More specifically, FIGS. 13A to 13F and FIGS.
According to the method of reducing the peak of the power or the utility as shown in (f), the set value of the reduced power or the utility of each device is calculated. Then, the production equipment is designed based on the set value of the set electric power or utility. Thus, it is possible to design a small-scale production facility without waste.
Further, a method of constructing a production facility based on such a production facility design method is also included in the present invention.

In addition, various modifications can be made without departing from the spirit of the present invention.

[0109]

As described in detail above, according to the production system, production method, production equipment design system, production equipment design method and production equipment production method of the present invention, various processes in an actual production line can be accurately simulated. This allows efficient operation even in relatively small factories.

[Brief description of the drawings]

FIG. 1 is a block diagram for explaining a first embodiment of the present invention and showing an example of a semiconductor production system of the present invention.

FIG. 2 is a conceptual diagram of a lot progress calculation process using the semiconductor production system according to the embodiment.

FIG. 3 is an exemplary view showing input data and output data of a lot progress calculation process using the semiconductor production system according to the embodiment.

FIG. 4 is an exemplary view showing input data and output data of a lot progress calculation process using the semiconductor production system according to the embodiment.

FIG. 5 is an exemplary view showing a flow of a lot when processing is performed without waiting for the completion of processing of another lot at a certain point in time grasped by the virtual factory 13 according to the embodiment.

FIG. 6 is a view for explaining the first embodiment and showing an example of options that are generated when a lot progress is predicted.

FIG. 7 is an exemplary view showing the flow of a lot when processing is performed after waiting for the completion of processing of another lot at a certain time, which is grasped by the virtual factory 13 according to the embodiment.

FIG. 8 is a view for explaining the first embodiment and showing a procedure for selecting an optimum combination from a number of combinations of options generated during lot progress.

FIG. 9 is a diagram showing a configuration of a virtual factory that executes a lot look-ahead calculation process capable of leveling power.

FIG. 10 is a diagram showing a characteristic curve of power / utility of a device registered in a virtual factory 13 for leveling power.

FIG. 11 is a diagram showing an example of data of power / utility conditions of a device registered in a virtual factory 13 for leveling power.

FIG. 12 is a diagram illustrating a production system according to a second embodiment.

FIG. 13 is a diagram for comparing and explaining a production system when power leveling is performed and when it is not performed.

FIG. 14 is a diagram for explaining the production system according to the second embodiment, and is a diagram showing a procedure for selecting an optimal combination from a combination of various options generated when a lot progresses.

FIG. 15 is a diagram showing electric power of a large-scale production line and a small-scale production line.

FIG. 16 is an exemplary view showing a concept of a time shift according to the embodiment;

FIG. 17 is a diagram illustrating a production system according to a third embodiment.

FIG. 18 is a diagram for comparing and explaining a production system in a case where leveling of ultrapure water is performed and a case where leveling is not performed.

FIG. 19 is a diagram for explaining the production system according to the third embodiment, and is a diagram illustrating a procedure for selecting an optimal combination from a combination of various options generated when a lot progresses.

FIG. 20 is a diagram showing an example of a calculation result of a throughput and a process according to a conventional technique using Manshim.

[Explanation of symbols]

 11 client terminal 12 connection server 13 virtual factory 14 actual factory 15, 16 data transmission medium

Claims (24)

[Claims] 1. A virtual production line in which a computer has substantially the same function as an actual production line for actually manufacturing a product, a means for receiving various information on the actual production line on the virtual production line, Means for calculating an optimal lot advancement method in the virtual production line based on the received information; and means for transferring work instruction data based on the calculation result to the actual production line. Characteristic production system. 2. Receiving various types of information on the virtual production line, calculating an optimal lot progressing method on the virtual production line, and transferring work instruction data from the virtual production line to the real production line in real time. The production system according to claim 1, wherein the production system is repeatedly performed. 3. The various information transferred from the actual production line to the virtual production line is at least one of an order quantity of each production, a lot progress status, an equipment status, a worker status, and a product test result. The production system according to claim 1, comprising: 4. The means for calculating the optimum lot progressing method calculates a plurality of lot progress prediction calculation results for each lot progress condition, and calculates at least one of the plurality of progress prediction calculation results. The production system according to claim 1, wherein extraction is performed. 5. The means for calculating the optimal lot progressing method includes a means for displaying the plurality of calculated lot progress prediction calculation results and selecting at least one lot progress prediction calculation result. The production system according to claim 4, wherein 6. The method according to claim 4, wherein said means for calculating an optimum lot advancement method extracts from the plurality of progress prediction calculation results based on an extraction condition input by a user. Production system. 7. The production system according to claim 1, wherein said means for calculating an optimal lot progressing method finds a solution that has the shortest production period and maximizes the amount of production per month. 8. The means for calculating an optimal lot progressing method, wherein a solution is determined based on a priority assigned to an ordered product such that a product having a higher priority has a shorter production period. The production system according to claim 1, wherein: 9. The next input plan is transferred by transferring a test result of a product produced on the actual production line to the virtual production line and collating it with an order quantity of the product. Production system. 10. The production system according to claim 1, wherein the actual production line is a semiconductor production line. 11. The apparatus according to claim 11, further comprising: means for calculating at least one time dependency of the power and the utility of the virtual production line based on the transferred information, Based on the time dependence obtained by the means for calculating the time dependence,
2. The production system according to claim 1, wherein the lot progressing method is calculated based on a condition that does not exceed at least one of the power value and the utility value set in the production line. 3. 12. The production system according to claim 11, wherein the utilities are ultrapure water, cooling water, semiconductor material gas, semiconductor production gas, semiconductor production liquid, and semiconductor production solid. 13. A real production line for actually manufacturing a product. A virtual production line in which substantially the same functions are built in a computer is simulated on the virtual production line, thereby enabling efficient operation on the real production line. A step of receiving various kinds of information on the actual production line on the virtual production line, and a step of calculating an optimal lot progressing method on the virtual production line based on the received information. Transferring the work instruction data based on the result of the calculation to the actual production line. 14. The production method according to claim 13, further comprising a step of starting production on the actual production line based on the data of the work instruction. 15. Receiving various types of information from the actual production line to the virtual production line, calculating an optimal lot progression method in the virtual production line, and transmitting data of a work instruction from the virtual production line to the actual production line. 14. The method according to claim 13, wherein the transfer is repeatedly performed in real time.
Production method. 16. Various kinds of information received from the actual production line on the virtual production line include at least an order quantity of each production, a progress status of a lot, a status of equipment, a status of a worker, and a test result of a product. 14. The production method according to claim 13, comprising one. 17. The production method according to claim 13, wherein, as the step of calculating the optimal lot progressing method, a solution that has the shortest production period and maximizes the production amount per month is obtained. 18. The method according to claim 18, wherein, as the step of calculating the optimum lot progressing method, a solution is determined based on the priority assigned to the ordered product such that a product having a higher priority has a shorter production period. The production method according to claim 13, wherein 19. The method according to claim 13, wherein a test result of a product produced on the actual production line is transferred to the virtual production line, and the next input plan is determined by comparing the result with the order quantity of the product. The production method described. 20. The production method according to claim 13, wherein the actual production line is a semiconductor production line. 21. A virtual production line in which a computer has substantially the same function as an actual production line for actually manufacturing a product, means for transferring various information on the actual production line to the virtual production line, A means for calculating at least one time dependency of the power and the utility of the virtual production line based on the transferred information; and a production line based on the time dependency obtained by the means for calculating the time dependency. Means for setting at least one of a power value and a utility value to be used, and means for designing a production facility based on at least one of the set power value and the utility value. Characteristic production equipment design system. 22. The production facility, comprising: a production line wiring;
22. The production equipment design system according to claim 21, wherein the system is at least one of pipes of a production line. 23. A production equipment design method for designing production equipment by simulating a virtual production line constructed in a computer with substantially the same function as an actual production line that actually manufactures a product, Receiving various kinds of information on the production line on the virtual production line; calculating at least one time dependency of power and utility of the virtual production line based on the received information; Setting at least one of a power value and a utility value to be used in the production line based on the time dependency obtained by the means for calculating, based on at least one of the set power value and the utility value And a step of designing a production facility. 24. A production equipment manufacturing method for simulating substantially the same function as an actual production line for actually manufacturing a product on a virtual production line built in a computer, and manufacturing the production equipment based on the simulation result. Receiving various kinds of information on the actual production line on the virtual production line, and calculating at least one time dependency of power and utility of the virtual production line based on the transferred information. Setting at least one of a power value and a utility value used in the production line based on the time dependency obtained by the means for calculating the time dependency; and at least one of the set power value and the utility value. Manufacturing a production facility so as to satisfy one of them.